Particle filters for remaining useful life estimation of abatement equipment used in semiconductor manufacturing (Englisch)
- Neue Suche nach: Butler, Shane
- Neue Suche nach: Ringwood, John
- Neue Suche nach: Butler, Shane
- Neue Suche nach: Ringwood, John
In:
SysTol, Conference on Control and Fault-Tolerant Systems, 2010
;
436-441
;
2010
-
ISBN:
- Aufsatz (Konferenz) / Datenträger
-
Titel:Particle filters for remaining useful life estimation of abatement equipment used in semiconductor manufacturing
-
Beteiligte:Butler, Shane ( Autor:in ) / Ringwood, John ( Autor:in )
-
Erschienen in:
-
Verlag:
-
Erscheinungsdatum:2010
-
Format / Umfang:6 Seiten, 7 Bilder, 11 Quellen
-
ISBN:
-
Medientyp:Aufsatz (Konferenz)
-
Format:Datenträger
-
Sprache:Englisch
-
Schlagwörter:
-
Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
Systemic risks management in complex process plants: challenges, opportunities, and emerging trendsVenkatasubramanian, V. et al. | 2010
- 5
-
A message from the general chair| 2010
- 11
-
Observer based fault diagnosis in thrusters of autonomous underwater vehicleShumsky, Alexey / Zhirabok, Alexey / Hajiyev, Chingiz et al. | 2010
- 12
-
Technical program| 2010
- 17
-
Model-based decentralized embedded diagnosis inside vehicles: Application to smart distance keeping functionNasri, Othman / Shraim, Hassan / Dague, Philippe / Heron, Olivier / Cartron, Mickael et al. | 2010
- 24
-
Fault tolerance enhancement using autonomy adaptation for autonomous mobile robotsDurand, B. / Godary-Dejean, K. / Lapierre, L. / Passama, R. / Crestani, D. et al. | 2010
- 30
-
SMAC-FDI: New active fault detection and isolation scheme with high computational efficiencyDucard, Guillaume / Geering, Hans P. et al. | 2010
- 38
-
Application of an integral sliding mode FTC for a large transport aircraftHamayun, Mirza Tariq / Edwards, Christopher / Alwi, Halim et al. | 2010
- 44
-
On sensor faults estimation using sliding mode observersFilasova, Ana / Krokavec, Dusan et al. | 2010
- 50
-
Second-order sliding mode based output-feedback control of an engine air path actuator in presence of uncertaintiesAhmed, F.S. / Laghrouche, S. / El Bagdouri, M. et al. | 2010
- 57
-
Reliable online water quality monitoring as basis for fault tolerant controlEdthofer, F. / Broeke, J. van den / Lettl, W. / Ettl, J. / Weingartner, A. et al. | 2010
- 88
-
Fault-tolerant control design using a virtual sensor for LPV systemsMontes de Oca, Saul / Puig, Vincenc et al. | 2010
- 100
-
An LPV pole-placement approach to friction compensation as an FTC problemChen, Lejun / Patton, Ron / Klinkhieo, Supat et al. | 2010
- 119
-
Fault diagnosis for nonlinear aircraft based on control-induced redundancyMarzat, Julien / Piet-Lahanier, Helene / Damongeot, Frederic / Walter, Eric et al. | 2010
- 125
-
FDI for a Mars orbiting satellite based on a sliding mode observer schemeAlwi, H. / Edwards, C. / Marcos, A. et al. | 2010
- 137
-
Fault detection and isolation for redundant aircraft sensorsBerdjag, Denis / Zolghadri, Ali / Cieslak, Jerome / Goupil, Philippe et al. | 2010
- 155
-
Robust stability and stabilization of linear switched systems with dwell timeAllerhand, Liron I. / Shaked, Uri et al. | 2010
- 185
-
Determination of fault propagation by time delay estimation using k nearest neighbour imputationStockmann, Markus / Haber, Robert et al. | 2010
- 197
-
FDI of process faults based on PCA and cluster analysisZanoli, S.M. / Astolfi, G. / Barboni, L. et al. | 2010
- 209
-
Switching strategy for sensor fault tolerant vector control of doubly fed induction machinesRomero, Monica E. / Seron, Maria M. et al. | 2010
- 215
-
Redundant graph to improve fault diagnosis in a gas turbineVerde, C. / Sanchez-Parra, Marino et al. | 2010
- 221
-
Fuel quality soft-sensor for control strategy improvement of the Biopower 5 CHP plantKortela, Jukka / Jämsä-Jounela, Sirkka-Liisa et al. | 2010
- 227
-
Fast algebraic fault diagnosis for the electrolytic filter capacitor of buck converterBourgeot, Jean-Matthieu et al. | 2010
- 233
-
Concept of an advanced monitoring, control and diagnosis system for positive displacement pumpsKleinmann, Stefan / Koscielny, Jan M. / Koller-Hodac, Agathe / Paczynski, Andreas / Stetter, Ralf et al. | 2010
- 239
-
Fault tolerant control of a quadrotor UAV using sliding mode controlSharifi, Farid / Mirzaei, Mostafa / Gordon, Brandon W. / Zhang, Youmin et al. | 2010
- 269
-
Fault diagnosis and fault-tolerant control for a nonlinear electro-hydraulic systemChen, Liang / Liu, Steven et al. | 2010
- 275
-
Nonlinear H(infinite) control design of structural systems: An experimental study under faultsPujol, Gisela / Acho, Leonardo et al. | 2010
- 281
-
Disturbance observer based control for nonlinear MAGLEV suspension systemYang, Jun / Zolotas, Argyrios / Chen, Wen-Hua / Michail, Konstantinos / li, Shihua et al. | 2010
- 287
-
Modeling and passivity-based control of the Pierburg mechatronic actuatorKebairi, A. / Cai, S. / Becherif, M. / El Bagdouri, M. et al. | 2010
- 299
-
Fuzzy Logic and Observer based fault detection for a mechatronic actuatorCai, Shichao / Kebairi, Athmane / Becherif, Mohamed / Wack, Maxime et al. | 2010
- 311
-
Design and implementation of fuzzy logic controllers for helicopter elevation and azimuth controlsVelagic, Jasmin / Osmic, Nedim et al. | 2010
- 359
-
Multi-criteria based approach for fault tolerant actuator selectionRouissi, F. / Hoblos, G. et al. | 2010
- 371
-
Design of feedback linearization control and reconfigurable control allocation with application to a quadrotor UAVZhou, Qing-li / Zhang, Youmin / Rabbath, Camille-Alain / Theilliol, Didier et al. | 2010
- 398
-
Diagnosability verification with parallel LTL-X model checking based on Petri net unfoldingsMadalinski, Agnes / Khomenko, Victor et al. | 2010
- 404
-
Industrial oil producing stations: Modeling and analysis using Petri nets and intelligent schemesAl-Hajri, Eid M. / Rossiter, J.A. et al. | 2010
- 418
-
An optimal maintenance planning according to production rate satisfying random demandZied, Hajej / Sofiene, Dellagi / Nidhal, Rezg et al. | 2010
- 430
-
Condition prognosis of mechanical drives based on nonlinear dynamical modelsGasperin, Matej / Juricic, Dani / Boskoski, Pavle et al. | 2010
- 436
-
Particle filters for remaining useful life estimation of abatement equipment used in semiconductor manufacturingButler, Shane / Ringwood, John et al. | 2010
- 505
-
Automatic tuning via Kriging-based optimization of methods for fault detection and isolationMarzat, Julien / Walter, Eric / Piet-Lahanier, Helene / Damongeot, Frederic et al. | 2010
- 517
-
Energy based fault detection for dissipative systemsChen, W. / Ding, S.X. / Khan, A.Q. / Abid, M. et al. | 2010
- 522
-
Fault diagnosis in a plug-and-play contextAllahham, Adib / Ploix, Stephane / Yassine, Abed Alrahim / Giap, Quang Huy et al. | 2010
- 528
-
A self-conditioned implementation of switching controllers for smooth transition in multimode systemsYame, Joseph J. / Qiao, Hanping / Kinnaert, Michel et al. | 2010
- 534
-
A two phase MPC and its application to a grinding processZakharov, Alexey / Boriouchkine, Alexandre / Jämsä-Jounela, Sirkka-Liisa et al. | 2010
- 540
-
Non-adaptive nonlinear controller using modified generalized velocity components for manipulatorsHerman, Przemyslaw et al. | 2010
- 552
-
A new fault tolerant control system based on adaptive unscented Kalman filter and fuzzy decision making approachSalahshoor, Karim / Mirzaee, Amin et al. | 2010
- 558
-
A variable geometric state filtering for stochastic linear systems subject to intermittent unknown inputsKeller, Jean-Yves / Sauter, Dominique et al. | 2010
- 594
-
A new structure for fault-tolerant internal model controlHilsch, Michael / Lunze, Jan / Nitsche, Rainer et al. | 2010
- 612
-
Mode recognition of hybrid dynamical systems with nonlinear modes using Takagi-Sugeno modelsZouari, T / Pekpe, K M / Cocquempot, V / Ksouri, M et al. | 2010
- 618
-
Takagi-Sugeno fuzzy control of a synchronous machineOuaaline, Najat / Elalami, Noureddine et al. | 2010
- 624
-
On the choice of performance assessment criteria and their impact on the overall system performance - The refrigeration system case studyGreen, Torben / Izadi-Zamanabadi, Roozbeh / Niemann, Henrik et al. | 2010
- 636
-
Observer for LPV singular systems applied to a binary distillation columnAguilera, A. / Adam, M. / Astorga, C. / Theilliol, D. / Ponsart, J.C. et al. | 2010
- 642
-
Temporal monitoring of plans in Command and Control (C2): application to combat search and rescueAllouche, Mohamad K. et al. | 2010
- 648
-
Decision making for autonomous vehicles in the presence of uncertain informationJozefczyk, Jerzy / Hojda, Maciej et al. | 2010
- 654
-
BSD-BDT classification technique: Application to rolling elements bearingBarakat, M. / Lefebvre, D. / Khalil, M. / Mustapha, O. / Druaux, F. et al. | 2010
- 666
-
Expert system for fault detection and isolation of coal-shortage in thermal power plantsTodorovic, Veljko M. / Tadic, Predrag R. / Djurovic, Zeljko M. et al. | 2010
- 672
-
Input shaping and strain gauge feedback vibration control of an elastic robotic armMalzahn, J. / Ruderman, M. / Phung, A.S. / Hoffmann, F. / Bertram, T. et al. | 2010
- 678
-
A service based approach to decentralized diagnosis and fault tolerant controlNyberg, Mattias / Svärd, Carl et al. | 2010
- 684
-
An optimum sensor selection design framework applied to an electro-magnetic suspension systemMichail, Konstantinos / Zolotas, Argyrios / Goodall, Roger et al. | 2010
- 720
-
State estimation and fault detection of uncertain systems based on an interval approachMarx, B. / Maquin, D. / Ragot, J. et al. | 2010
- 759
-
DTFC versus MPC for induction motor control reconfiguration after inverter faultsNacusse, Matias A. / Romero, Monica / Haimovich, Hernan / Seron, Maria M. et al. | 2010
- 765
-
Application of the LISS Lyapunov-Krasovskii small-gain theorem to autonomously controlled production networks with time-delaysDashkovskiy, Sergey / Hamid Reza Karimi / Kosmykov, Michael / Mironchenko, Andrii / Naujok, Larsq et al. | 2010
- 771
-
An LMI approach to quantized H(infinite) control of uncertain linear systems with network-induced delaysHamid Reza Karimi / Luo, Ningsu / Zapateiro, Mauricio et al. | 2010
- 777
-
Fault detection in base-isolation systems via a restoring force observerVidal, Yolanda / Acho, Leonardo / Pozo, Francesc / Rodellar, Jose et al. | 2010
- 789
-
Robust synchronization and fault detection of uncertain master-slave systems with mixed time-varying delays and nonlinear perturbationsKarimi, Hamid Reza / Luo, Ningsu et al. | 2010
- 795
-
Modelling of networked systems for remote diagnosisSchlage, Thorsten / Lunze, Jan et al. | 2010
- 801
-
Fault tolerant control based on parametric estimation applied to Diesel engineBelaidi, Ahmed Amine / Chafouk, Houcine / Langlois, Nicolas et al. | 2010
- 807
-
LPV design of fault-tolerant control for road vehiclesGaspar, Peter / Szabo, Zoltan / Bokor, Jozsef et al. | 2010
- 813
-
Robust adaptive fault detection using global state information and application to mobile working machinesGerland, Patrick / Groß, Dominic / Schulte, Horst / Kroll, Andreas et al. | 2010
- 819
-
Robust LPV model-based sensor fault diagnosis and estimation for a PEM fuel cell systemLira, S. de / Puig, V. / Quevedo, J. et al. | 2010
- 825
-
Model based Fault detection and isolation of PEM Fuel CellYang, Quan / Aitouche, Abdel / Belkacem Ould Bouamama et al. | 2010
- 831
-
Enhanced parity equation method for sensor fault detection in electrical drivesBerriri, Hanen / Slama-Belkhodja, Slama et al. | 2010
- 849
-
Active damage detection and localization applied to a composite structure using piezoceramic patchesHajrya, R. / Verge, M. / Mechal, N. et al. | 2010
- 855
-
Fault tolerant control in high building structuresLarbah, Eshag / Patton, Ron J. et al. | 2010
- 867
-
On-line scheduling and fault detection in NCS with communication constraints in Drone applicationHashemi, Hossein / Sauter, Dominique / Aberkane, Samir et al. | 2010
- 873
-
Service diagnosis utilizing the dependencies between the system structure and the operating pointsUngermann, Michael / Lunze, Jan / Schwarzmann, Dieter et al. | 2010
- 910
-
Remote control of stepper motor via web serverVelagic, Jasmin / Osmic, Nedim / Silajdzic, Semir / Terzimehic, Tarik / Vejnberger, Vedran et al. | 2010
- c1
-
[Front cover]| 2010