Vacuum pump designs to meet process requirements (Englisch)
- Neue Suche nach: DeJule, R.
- Neue Suche nach: DeJule, R.
In:
Semiconductor International
;
19
, 11
;
125-132
;
1996
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Vacuum pump designs to meet process requirements
-
Weitere Titelangaben:Prozeßgerechte Konstruktion und Ausführung von Vakuumpumpen
-
Beteiligte:DeJule, R. ( Autor:in )
-
Erschienen in:Semiconductor International ; 19, 11 ; 125-132
-
Verlag:
-
Erscheinungsdatum:1996
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Format / Umfang:5 Seiten, 5 Bilder, 1 Tabelle
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ISSN:
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Coden:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 19, Ausgabe 11
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