High Topography Polyimide CMP Process (Englisch)
Nationallizenz
- Neue Suche nach: Mao, Ying Jun
- Neue Suche nach: Chen, Gim Guan
- Neue Suche nach: Murthy, Ramana
- Neue Suche nach: Tan, Swee Kiat Eugene
In:
Advanced Materials Research
;
254
;
107-110
;
2011
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:High Topography Polyimide CMP Process
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Beteiligte:
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Erschienen in:Advanced Materials Research ; 254 ; 107-110
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Verlag:
- Neue Suche nach: Trans Tech Publications
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Erscheinungsort:Stafa-Zurich, Switzerland
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Erscheinungsdatum:31.05.2011
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Format / Umfang:4 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 254
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Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors| 2011
- -2
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Preface| 2011
- 5
-
Thick-Film Deposition of High-Viscous Liquid Photopolymer| 2011
- 9
-
Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application| 2011
- 13
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Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever| 2011
- 17
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Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure| 2011
- 21
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Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force| 2011
- 25
-
A Static Micromixer Inspired from Fractal-Like Natural Flow Systems| 2011
- 29
-
AlN Actuator for Tunable RFMEMS Capacitor| 2011
- 34
-
GEMS: A MEMS-Based Way for the Innervation of Materials| 2011
- 38
-
On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems| 2011
- 42
-
Design Consideration of Membrane Structure for Thermal Actuated Micropump| 2011
- 46
-
Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator| 2011
- 50
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Fabrication of a Peltier Device Based on InSb and SbTe Thin Films| 2011
- 54
-
Gapfill Study of Polyimides for MEMS Applications| 2011
- 58
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A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film Transistor| 2011
- 62
-
Wireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications| 2011
- 66
-
Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator| 2011
- 70
-
FBAR Resonators with Sufficient High Q for RF Filter Implementation| 2011
- 74
-
Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators| 2011
- 78
-
Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis| 2011
- 82
-
Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement| 2011
- 86
-
Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator| 2011
- 90
-
Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications| 2011
- 94
-
Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants| 2011
- 99
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Tagging for Capsule Endoscopy Localization| 2011
- 103
-
The Negative π/2 Phase Shift of Total Reflect Light| 2011
- 107
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High Topography Polyimide CMP Process| 2011
- 111
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Hydridosilane Modification of Metals: An Exploratory Study| 2011
- 115
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Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor| 2011
- 120
-
Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid Film| 2011
- 124
-
A New Peltier Device with a Coaxial Thermocouple| 2011
- 128
-
A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device| 2011
- 132
-
Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography| 2011
- 136
-
Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches| 2011
- 140
-
Double-Step Plasma Etching for SiO2 Microcantilever Release| 2011
- 144
-
Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators| 2011
- 148
-
Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide| 2011
- 152
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Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS Devices| 2011
- 155
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Oscillating Micromixers on a Compact Disc| 2011
- 159
-
Robust Sequential Flow Controls on the Centrifugal Platform| 2011
- 163
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Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide Films| 2011
- 167
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Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin Films| 2011
- 171
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Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique| 2011
- 175
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Simulation Study of Side-by-Side Spiral Coil Design for Micromagnetometer| 2011
- 179
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Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc| 2011
- 183
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Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device| 2011
- 187
-
Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering| 2011
- 191
-
On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded Chips| 2011
- 195
-
A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab| 2011
- 199
-
A New Robust Four Degree-of-Freedom Gyroscope Design| 2011
- 203
-
Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes| 2011
- 207
-
Investigation of Rhabdomyosarcoma Cell Electrofusion| 2011
- 211
-
Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps| 2011
- 215
-
Micro-Bubble Generation Using Continuous-Wave Laser| 2011
- 219
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Photocatalytic Microreactor Using Monochromatic Visible Light| 2011