A Fundamental Investigation on Ultrasonic Assisted Fixed Abrasive CMP (UF-CMP) of Silicon Wafer (Englisch)
Nationallizenz
- Neue Suche nach: Wu, Yong Bo
- Neue Suche nach: Wang, Li Jun
In:
Advanced Materials Research
;
983
;
208-213
;
2014
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:A Fundamental Investigation on Ultrasonic Assisted Fixed Abrasive CMP (UF-CMP) of Silicon Wafer
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Beteiligte:
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Erschienen in:Advanced Materials Research ; 983 ; 208-213
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Verlag:
- Neue Suche nach: Trans Tech Publications
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Erscheinungsort:Stafa-Zurich, Switzerland
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Erscheinungsdatum:30.06.2014
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Format / Umfang:6 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 983
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