Design of Pulse Magnetron Sputtering Deposition Control System Based on Multifunction Controller (Englisch)
Nationallizenz
- Neue Suche nach: Liang, Yan
- Neue Suche nach: Qin, Yu
- Neue Suche nach: Wang, Min Xue
- Neue Suche nach: Zhu, Chang Chun
In:
Applied Mechanics and Materials
;
441
;
788-791
;
2013
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Design of Pulse Magnetron Sputtering Deposition Control System Based on Multifunction Controller
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Beteiligte:
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Erschienen in:Applied Mechanics and Materials ; 441 ; 788-791
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Verlag:
- Neue Suche nach: Trans Tech Publications
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Erscheinungsort:Stafa-Zurich, Switzerland
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Erscheinungsdatum:04.12.2013
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Format / Umfang:4 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 441
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