Electrical Test Structures for the Characterisation of Optical Proximity Correction (Englisch)
- Neue Suche nach: Tsiamis, Andreas
- Neue Suche nach: Smith, Stewart
- Neue Suche nach: McCallum, Martin
- Neue Suche nach: Hourd, Andrew C.
- Neue Suche nach: Stevenson, J. Tom M.
- Neue Suche nach: Waltona, Anthony J.
- Neue Suche nach: Tsiamis, Andreas
- Neue Suche nach: Smith, Stewart
- Neue Suche nach: McCallum, Martin
- Neue Suche nach: Hourd, Andrew C.
- Neue Suche nach: Stevenson, J. Tom M.
- Neue Suche nach: Waltona, Anthony J.
In:
EMLC 2007
;
9
;
2007
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ISBN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:Electrical Test Structures for the Characterisation of Optical Proximity Correction
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Beteiligte:Tsiamis, Andreas ( Autor:in ) / Smith, Stewart ( Autor:in ) / McCallum, Martin ( Autor:in ) / Hourd, Andrew C. ( Autor:in ) / Stevenson, J. Tom M. ( Autor:in ) / Waltona, Anthony J. ( Autor:in )
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Kongress:EMLC 2007 - 23rd European Mask and Lithography Conference ; 2007 ; Grenoble, France
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Erschienen in:EMLC 2007 ; 9
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Verlag:
- Neue Suche nach: VDE VERLAG GMBH
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Erscheinungsdatum:01.01.2007
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Format / Umfang:9 pages
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
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