Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
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Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Automatic parameter setting for lens aberration control during product lot exposure
British Library Conference Proceedings | 2019| -
Metrology and deep learning integrated solution to drive OPC model accuracy improvement
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Motion of optically bound particles in tractor beam [10712-27]
British Library Conference Proceedings | 2018 -
Generation of high-energy geometric structured beams by off-axis pumped Nd:YAG/Cr^4^+:YAG lasers with degenerate resonators [10712-22]
British Library Conference Proceedings | 2018 -
Mask-aligner Talbot lithography using a 193nm CW light source [10587-33]
British Library Conference Proceedings | 2018 -
Inverse lithography OPC correction with multiple patterning and etch awareness [10587-25]
British Library Conference Proceedings | 2018 -
Slope-sensitive optical probe for freeform optics metrology [8884-85]
British Library Conference Proceedings | 2013| -
Compositional-tailoring of optical properties in IR transparent chalcogenide glasses for precision glass molding [8884-39]
British Library Conference Proceedings | 2013| -
A simple procedure to include a free-form measurement capability to standard coordinate measurement machines [8884-35]
British Library Conference Proceedings | 2013| -
Getting the most out of your cerium oxide glass polishing slurry: reducing risk and improving performance with plasma produced particles [8884-16]
British Library Conference Proceedings | 2013| -
Effects of varying machine stiffness and contact area in UltraForm Finishing [8884-2]
British Library Conference Proceedings | 2013| -
Cost effective fabrication method for large sapphire sensor windows [8884-1]
British Library Conference Proceedings | 2013| -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Interaction of N-FK5 and L-BAL35 optical glass with various carbide and other precision glass mold tooling [8884-90]
British Library Conference Proceedings | 2013|
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