Erscheinungsjahr
Fach
Format
Lizenz
Sprache
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Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Faint spatial object classifier construction based on data mining technology [10141-50]
British Library Conference Proceedings | 2016 -
Research on informational operation application of tactical loitering platform [10141-55]
British Library Conference Proceedings | 2016 -
Proportional navigation law design of plane-symmetrical vehicle with terminal attack angle constraint for over target flight [10141-63]
British Library Conference Proceedings | 2016 -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Investigation of 3D photoresist profile effect in self-aligned patterning through virtual fabrication [10147-15]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
On-product overlay improvement with an enhanced alignment system [10147-41]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
The pattern-matching based OPC approach for preemptively fixing the weak points [10147-53]
British Library Conference Proceedings | 2017 -
Hetero-substituted derivative of PtPFPP for intracellular O2 sensing of mammalian cells
British Library Conference Proceedings | 2023| -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Semi-analytical computation method for propagation loss of hollow-core anti-resonant fiber
British Library Conference Proceedings | 2023| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Optochemical sensor-based systems for the analysis of cell metabolism and bioenergetics: an overview
British Library Conference Proceedings | 2023| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Gaussian total variation blind restoration of ground-based space object imagery [10141-18]
British Library Conference Proceedings | 2016 -
High-speed sampling strategy for photoacoustic tomography using ROMP compressed sensing algorithm
British Library Conference Proceedings | 2021| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Elimination of temperature cross-sensitivity for polymer FBG-based humidity sensor by gamma radiation treatment
British Library Conference Proceedings | 2023| -
Nucleolin protein-mediated specific detection of circulating cancer cells by U-bent optical fiber sensor
British Library Conference Proceedings | 2023| -
Modelling and fabrication of novel SERS sensor chips for chemical and biological sensing applications
British Library Conference Proceedings | 2019| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
Location and wayfinding services through visible light in crowded buildings
British Library Conference Proceedings | 2021| -
Contour-based model calibration to a minimum number of patterns
British Library Conference Proceedings | 2021| -
Analysis of the shaft behaviour in aircraft engines using tip clearance data and custom designed laser sensors
British Library Conference Proceedings | 2021| -
Qualification of small alignment mark by on-product overlay performance
British Library Conference Proceedings | 2021| -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021|
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