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Sprache
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Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Automated detection and classification of printing sub-resolution assist features using machine learning algorithms [10147-23]
British Library Conference Proceedings | 2017 -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
A system approach for closed-loop assessment of neuro-visual function based on convolutional neural network analysis of EEG signals
British Library Conference Proceedings | 2020| -
Permeable diffractive optical elements for real-time sensing of running fluids
British Library Conference Proceedings | 2023| -
Stokes polarimeter using vector diffractive optical elements
British Library Conference Proceedings | 2023| -
Innovation of detecting optimized intensity of light via three-dimensional material rendering
British Library Conference Proceedings | 2021| -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Research of UV radiometer based on fiber spectroradiometer
British Library Conference Proceedings | 2021| -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Processing and characterization of monodisperse phosphine-free CdSe colloidal quantum dots [9170-58]
British Library Conference Proceedings | 2014| -
Improvements of the PLD (Pulsed Laser Deposition) method for fabricating photocathodes in ICMOS (Intensified CMOS) sensors
British Library Conference Proceedings | 2019| -
Methods of signal averaging for a multimode fiber interferometer: an experimental study
British Library Conference Proceedings | 2019| -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Reducing uncertainty of standard reference ring measurement up to 50 nm by means of non-contact method
British Library Conference Proceedings | 2019| -
Fiber-optic sensor for detecting electric current pulses
British Library Conference Proceedings | 2019| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Reflectance biosensor platform using residual-layer-free nanoimprint lithography
British Library Conference Proceedings | 2023| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Simulation of a film of random particulate medium containing aggregates of metal nanospheres [9170-22]
British Library Conference Proceedings | 2014| -
Perimetric monitoring: A comparison of a classical seismic sensor and fiber-optic interferometric sensor
British Library Conference Proceedings | 2019| -
Optical readout of acoustic responses of an external-cavity diode laser
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
An ultra-broadband frequency response fiber vibration sensor based on single-mode-few-mode fiber coupler
British Library Conference Proceedings | 2021| -
Pore size assessment of nanoporous alumina using absorption of laser light
British Library Conference Proceedings | 2021| -
Nanometer-scale cavities for mid-infrared light based on graphene plasmons
British Library Conference Proceedings | 2021| -
Automated atrial flutter detection using photoplethysmography
British Library Conference Proceedings | 2023| -
Improvement of image characteristics of intraoral and panoramic radiographs by utilizing OCT as a control method
British Library Conference Proceedings | 2023| -
Effects of different wetting layers on the growth of smooth ultra-thin silver thin films [9170-20]
British Library Conference Proceedings | 2014| -
Bending fiber sensor based on capillary hollow-core fiber
British Library Conference Proceedings | 2023|
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