Erscheinungsjahr
Fach
- ‹ Alle Fächer
- Maschinenbau, Energietechnik (22.171)
- Physik (9.902)
- Elektrotechnik (3.125)
- Informatik (1.307)
- Erziehungswissenschaften (601)
- Verkehrstechnik, Verkehrswesen (284)
- Werkstoffkunde (189)
- Chemische und Umwelttechnik (186)
- Technik (156)
- Medizintechnik (87)
- Medizin (40)
- Chemie (13)
- Bautechnik (6)
- Mathematik (1)
Format
Sprache
Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
-
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Automatic parameter setting for lens aberration control during product lot exposure
British Library Conference Proceedings | 2019| -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018 -
Experimental study on SPDT machining of Gallium Phosphide [8884-92]
British Library Conference Proceedings | 2013| -
4D phase profile measurements using a single-shot phase shifting technique [8884-77]
British Library Conference Proceedings | 2013| -
Off-axis mirror fabrication from spherical surfaces under mechanical stress [8884-72]
British Library Conference Proceedings | 2013| -
Effect of polishing plane vibration on large-size optical workpieces in continuous polishing [8884-60]
British Library Conference Proceedings | 2013| -
Precision interferometric measurements of refractive index of polymers in air and liquid [8884-53]
British Library Conference Proceedings | 2013| -
Rapid design of LED optical elements with two free-form surfaces generating uniformly illuminated rectangular area [8884-48]
British Library Conference Proceedings | 2013| -
Comparison of contact and non-contact asphere surface metrology devices [8884-26]
British Library Conference Proceedings | 2013| -
Deterministic polishing process for aspheric lenses in a production environment [8884-13]
British Library Conference Proceedings | 2013| -
NASA funding opportunities for optical fabrication and testing technology development (Plenary Paper) [8884-501]
British Library Conference Proceedings | 2013| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Generation of high-energy geometric structured beams by off-axis pumped Nd:YAG/Cr^4^+:YAG lasers with degenerate resonators [10712-22]
British Library Conference Proceedings | 2018 -
Mask-aligner Talbot lithography using a 193nm CW light source [10587-33]
British Library Conference Proceedings | 2018 -
Inverse lithography OPC correction with multiple patterning and etch awareness [10587-25]
British Library Conference Proceedings | 2018 -
Model based cell-array OPC development for productivity improvement in memory device fabrication [10587-21]
British Library Conference Proceedings | 2018 -
Interaction of N-FK5 and L-BAL35 optical glass with various carbide and other precision glass mold tooling [8884-90]
British Library Conference Proceedings | 2013| -
Melt spun aluminium alloys for moulding optics [8884-65]
British Library Conference Proceedings | 2013| -
Nanoscale optical features via hot-stamping of As~2Se~3 glass [8884-61]
British Library Conference Proceedings | 2013| -
Refractive index of thin films realized by Satisloh SP reactive sputtering system [8884-43]
British Library Conference Proceedings | 2013| -
Round-robin measurements of toroidal window [8884-30]
British Library Conference Proceedings | 2013| -
Dressing of fine grained diamond grinding wheels for ultra precision grinding of structured molds in brittle hard materials [8884-5]
British Library Conference Proceedings | 2013| -
Thin monolithic glass shells for future high angular resolution and large collecting area x-ray telescope [8884-59]
British Library Conference Proceedings | 2013| -
Design of freeform optical elements generating a line-shaped directivity diagram [8884-49]
British Library Conference Proceedings | 2013| -
Development of a high-speed nanoprofiler using normal vector tracing method for high-accuracy mirrors [8884-32]
British Library Conference Proceedings | 2013| -
Improved averaging for non-null interferometry [8884-31]
British Library Conference Proceedings | 2013| -
Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the tilted-wave-interferometer [8884-25]
British Library Conference Proceedings | 2013| -
Fabricating freeform multispectral-ZnS corrector lenses [8884-21]
British Library Conference Proceedings | 2013|
Meine Suche schicken an (beta)
Schicken Sie ihre Suchanfrage (Suchterm ohne Filter) an andere Datenbanken, Portale und Kataloge, um ggf. weitere interessante Treffer zu finden:
Dimensions ist eine Datenbank für Abstracts und Zitate, die Informationen zu Forschungsförderungen mit daraus resultierenden Veröffentlichungen, Studien und Patenten verknüpft.
Im TIB AV-Portal können audiovisuelle Medien aus Wissenschaft und Lehre recherchiert und eigene wissenschaftliche Videos publiziert werden.
Im FID move kann nach fachspezifischer Literatur, Forschungsdaten und weitere Informationen aus der Mobilitäts- und Verkehrsforschung gesucht werden.
Der Open Research Knowledge Graph liefert strukturiert beschriebene Forschungsinhalte und macht diese vergleichbar.
Frei zugänglicher Ausschnitt der Verbunddatenbank K10plus des GBV und des SWB mit für die Fernleihe und Direktlieferdienste relevanten Materialien.