Erscheinungsjahr
Medientyp
Format
Lizenz
Sprache
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Effects of Bias, Pressure and Temperature in Plasma Damage of Ultra Low-k Films
British Library Conference Proceedings | 2008| -
Study of a Metal Gate and Silicon Selective ``Dry Ash Only'' Process for Combined Extension and Halo Implanted Photo Resist
British Library Conference Proceedings | 2008| -
Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applications
British Library Online Contents | 2012| -
New Test Structure Development for Pattern Collapse Evaluations
British Library Conference Proceedings | 2021| -
Effects of bias, pressure and temperature in plasma damage of ultra low-k films
Tema Archiv | 2008| -
Resist Rework on Metal Hardmask in Low-Plasma Damage Patterning Approach
British Library Conference Proceedings | 2005| -
Properties and growth peculiarities of Si0.30Ge0.70 stressor integrated in 14nm fin-based p-type metal-oxide-semiconductor field-effect transistors
British Library Online Contents | 2016| -
Manufacturing Challenges of GaN-on-Si HEMTs in a 200 mm CMOS Fab
British Library Online Contents | 2013| -
Metrology for Implanted Si Substrate and Dopant Loss Studies
British Library Conference Proceedings | 2009| -
Using a biased-ICP reactor for PR strip and Cu barrier removal
British Library Online Contents | 2004| -
Optimization of Resist Ash Processes on Si~0~.~4~5Ge~0~.~5~5 Substrates for Post Extension-Halo Ion Implantation
British Library Conference Proceedings | 2011| -
Optimization of Resist Ash Processes on Si~0~.~4~5Ge~0~.~5~5 Substrates for Post Extension-Halo Ion Implantation
British Library Conference Proceedings | 2011| -
Minimizing plasma damage and in situ sealing of ultralow- dielectric films by using oxygen free fluorocarbon plasmas
American Institute of Physics | 2005| -
Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion
British Library Conference Proceedings | 1999| -
Au-Free AlGaN/GaN Power Diode on 8-in Si Substrate With Gated Edge Termination
British Library Online Contents | 2013| -
Low temperature oxidation and selective etching of chemical vapor deposition films
American Institute of Physics | 2000| -
Minimizing plasma damage and in situ sealing of ultralow-k dielectric films by using oxygen free fluorocarbon plasmas
British Library Online Contents | 2005| -
Post Extension Ion Implant Photo Resist Strip for 32 nm Technology and beyond
British Library Conference Proceedings | 2009| -
P7-1855 Characterization of Epitaxial Si:C:P and Si:P Layers for Source/Drain Formation in Advanced Bulk FinFETs
British Library Conference Proceedings | 2014| -
Low temperature oxidation and selective etching of chemical vapor deposition a-SiC:H films
British Library Online Contents | 2000| -
Optimization of Etching and Stripping Chemistries for Z3MS™ Low-k
British Library Conference Proceedings | 2001| -
Effects of Plasma Chemistry on Low-k Film Properties
British Library Conference Proceedings | 2007| -
Metrology for Implanted Si Substrate and Dopant Loss Studies
British Library Conference Proceedings | 2009| -
P1-28 Effects of Plasma Chemistry on Low-k Film Properties
British Library Conference Proceedings | 2007| -
An Experimental Study of Atomic-Layer-Deposited Films on Dielectric Substrates With Different Porosity
British Library Conference Proceedings | 2006| -
Resist Strip and Cu Diffusion Barrier Etch in Cu BEOL Integration Schemes in a Mattson Highlands™ Chamber
British Library Conference Proceedings | 2003| -
13:55 7A-2 Tall Triple-Gate Devices with TiN/HfO~2 Gate Stack
British Library Conference Proceedings | 2005| -
Late News: Integration Feasibility of Porous SiLK™ Semiconductor Dielectric
British Library Conference Proceedings | 2001| -
11.1 Surface Acoustic Waves as a Technique for In-Line Detection of Processing Damage to Low-K Dielectrics
British Library Conference Proceedings | 2005|
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