Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1369
-
Droplet-based micro oscillating-flow PCR chipWang, Wei / Li, Zhi-Xin / Luo, Rong et al. | 2005
- 1378
-
Bidirectional electromagnetic microactuator with microcoil fabricated on a single wafer: static characteristics of membrane displacementsBintoro, J S / Papania, A D / Berthelot, Y H et al. | 2005
- 1389
-
Study on rheological behavior of polymer melt flowing through micro-channels considering the wall-slip effectChien, Rean-Der / Jong, Wen-Ren / Chen, Shia-Chung et al. | 2005
- 1397
-
Static micromixers using alternating whirls and laminationChang, Sunghwan / Cho, Young-Ho et al. | 2005
- 1406
-
Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcagesLuo, J K / He, J H / Fu, Y Q et al. | 2005
- 1414
-
Two-dimensional analysis of temperature-gradient actuation of cantilever beam resonatorsMahameed, Rashed / Elata, David et al. | 2005
- 1425
-
Thermo-pneumatic, single-stroke micropumpSong, W H / Lichtenberg, J et al. | 2005
- 1433
-
Encapsulation of film bulk acoustic resonator filters using a wafer-level microcap arrayLin, Chung-Hsien / Lu, Ju-Mei / Fang, Weileun et al. | 2005
- 1439
-
Vertically supported two-directional comb driveLee, K. B. / Lin, L. et al. | 2005
- 1439
-
Vertically supported two-directional comb drive*Lee, Ki Bang / Lin, Liwei et al. | 2005
A portion of this paper was presented at the 12th International Conference on Solid-State Sensors and Actuators (Transducers '03), 8–12 June 2003, Boston, USA.
- 1439
-
Vertically supported two-directional comb drivefootnote pos="infobottom"id="*">A portion of this paper was presented at the 12th International Conference on Solid-State Sensors and Actuators (Transducers '03), 8#821112 June 2003, Boston, USA.Lee, Ki Bang et al. | 2005
- 1446
-
Response of c-Si PV arrays under monochromatic light for MEMS power supplyBermejo, S / Ortega, P / Jimenez, J J et al. | 2005
- 1454
-
Temperature and pressure dependence of resonance in multi-layer microcantileversSandberg, R / Svendsen, W / Mølhave, K et al. | 2005
- 1459
-
Micro-encoder based on higher-order diffracted light interferenceHigurashi, Eiji / Sawada, Renshi et al. | 2005
- 1466
-
MEMS variable optical attenuator using a translation motion of 45(degree) tilted vertical mirrorKim, Che-Heung et al. | 2005
- 1466
-
MEMS variable optical attenuator using a translation motion of 45 deg of angle tilted vertical mirrorKim, Che-Heimg / Kim, Yong-Kweon et al. | 2005
- 1466
-
MEMS variable optical attenuator using a translation motion of 45^o tilted vertical mirrorKim, C.-H. / Kim, Y.-K. et al. | 2005
- 1466
-
MEMS variable optical attenuator using a translation motion of 45° tilted vertical mirrorKim, Che-Heung / Kim, Yong-Kweon et al. | 2005
- 1476
-
A novel miniaturized PCR multi-reactor array fabricated using flip-chip bonding techniquesZou, Zhi-Qing / Chen, Xiang / Jin, Qing-Hui et al. | 2005
- 1482
-
Design and characterization of a dual-stage, thermally actuated nanopositionerHubbard, Neal B / Howell, Larry L et al. | 2005
- 1494
-
Soft lithography based micron-scale electrophoretic patterning of purple membraneCrittenden, S / Reifenberger, R / Hillebrecht, J et al. | 2005
- 1498
-
Electrochemical printing: software reconfigurable electrochemical microfabricationWhitaker, J D / Nelson, J B / Schwartz, D T et al. | 2005
- 1504
-
A microfabricated Pirani pressure sensor operating near atmospheric pressureDoms, Marco / Bekesch, Andre / Mueller, Joerg et al. | 2005
- 1511
-
A pulse-operating electrostatic microactuator for bi-stable latchingKwon, Ho Nam / Hwang, Il-Han / Lee, Jong-Hyun et al. | 2005
- 1517
-
Polydimethylsiloxane based microfluidic diodeAdams, M L / Johnston, M L / Scherer, A et al. | 2005
- 1522
-
SU-8 Ka-band filter and its microfabricationJiang, K / Lancaster, M J / Llamas-Garro, I et al. | 2005
- 1527
-
Three types of planar structure microspring electro-thermal actuators with insulating beam constraintsLuo, J K / Flewitt, A J / Spearing, S M et al. | 2005
- 1536
-
RF sputtered silicon for MEMSPal, Prem / Chandra, Sudhir et al. | 2005
- 1547
-
Fabrication of high aspect ratio microstructure arrays by micro reverse wire-EDMLiao, Yunn-Shiuan / Chen, Shun-Tong / Lin, Chang-Sheng et al. | 2005
- 1556
-
Micromachining using ultrasonic impact grindingMedis, Praveen S / Henderson, H Thurman et al. | 2005
- 1560
-
Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughsSparks, Douglas / Massoud-Ansari, Sonbol / Najafi, Nader et al. | 2005
- 1565
-
A miniature low cost and high reliability 1 x 2 mechanical optical switchFan, Kuang-Chao et al. | 2005
- 1565
-
A miniature low cost and high reliability 1 × 2 mechanical optical switchFan, Kuang-Chao / Lin, Wu-Lang / Chung, Tien-Tung et al. | 2005
- 1571
-
The fabrication and test of a square prism shaped dye micro laser based on the SU-8 molding processLi, Yigui / Liu, Jinquan / Sugiyama, Susumu et al. | 2005
- 1576
-
A novel technological process for fabricating micro-tips for biomimetic adhesionSpina, G La / Stefanini, C / Menciassi, A et al. | 2005
- 1588
-
SOI bonded wafer process for high precision MEMS inertial sensorsSawyer, William D / Prince, Mert S / Brown, Giles J et al. | 2005
- 1594
-
Cryogenic characterization and testing of magnetically-actuated microshutter arrays for the James Webb Space TelescopeKing, T T / Kletetschka, G / Jah, M A et al. | 2005
- 1601
-
A novel safety device with metal counter meshing gears discriminator directly driven by axial flux permanent magnet micromotors based on MEMS technologyZhang, Weiping / Chen, Wenyuan / Zhao, Xiaolin et al. | 2005