Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1909
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Monolithic surface micromachined fluidic devices for dielectrophoretic preconcentration and routing of particlesJames, Conrad D / Okandan, Murat / Mani, Seethambal S et al. | 2006
- 1919
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Fabrication of a micro cryogenic cold stage using MEMS-technologyLerou, P P P M / Venhorst, G C F / Berends, C F et al. | 2006
- 1926
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Young's modulus measurement of thin-film materials using micro-cantileversMcShane, G J / Boutchich, M / Srikantha Phani, A et al. | 2006
- 1935
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A multi-ink linear array of nanofountain probesMoldovan, N / Kim, K-H / Espinosa, H D et al. | 2006
- 1943
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A silicon electrothermal rotational micro motor measuring one cubic millimeterGeisberger, A / Kadylak, D / Ellis, M et al. | 2006
- 1951
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A simple approach to convex corner compensation in anisotropic KOH etching on a (1 0 0) silicon waferFan, Wei / Zhang, Dacheng et al. | 2006
- 1958
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Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devicesOh, Kwang H / Lee, M K / Jeong, S H et al. | 2006
- 1967
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Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplatingAnsari, Kambiz / van Kan, Jeroen Anton / Bettiol, Andrew Anthony et al. | 2006
- 1975
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AFM-measured surface roughness of SU-8 structures produced by deep x-ray lithographyVora, K D / Lochel, B / Harvey, E C et al. | 2006
- 1984
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Micromachined integrated pressure–thermal sensors on flexible substratesShamanna, Vinayak / Das, Sharmita / Çelik-Butler, Zeynep et al. | 2006
- 1993
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Development of a micromachined rotating gyroscope with electromagnetically levitated rotorWu, Xiaosheng / Chen, Wenyuan / Zhao, Xiaolin et al. | 2006
- 2000
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A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and low Tg optical glassYi, A Y / Chen, Y / Klocke, F et al. | 2006
- 2006
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Numerical modeling and verification of gas flow through a network of crossed narrow v-groovesBejhed, Johan / Nguyen, Hugo / Åstrand, Peter et al. | 2006
- 2014
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A silicon-based fuel cell micro power system using a microfabrication techniqueXiao, Zhiyong / Yan, Guizhen / Feng, Chunhua et al. | 2006
- 2021
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A micromachined separable RF connector fabricated using low-resistivity siliconLarsson, M P / Lucyszyn, S et al. | 2006
- 2034
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Design criteria for bi-stable behavior in a buckled multi-layered MEMS bridgeMichael, Aron / Kwok, Chee Yee et al. | 2006
- 2044
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Modelling and control of an electrostatically actuated torsional micromirrorZhu, Guchuan / Packirisamy, Muthukumaran / Hosseini, Mehran et al. | 2006
- 2053
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Characterization of electrowetting actuation on addressable single-side coplanar electrodesYi, Ui-Chong / Kim, Chang-Jin et al. | 2006
- 2060
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Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applicationsPramanik, C / Saha, H / Gangopadhyay, U et al. | 2006
- 2067
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An in-plane, bi-directional electrothermal MEMS actuatorVenditti, Roberto / Lee, Jacky S H / Sun, Yu et al. | 2006
- 2071
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Micromachined air-gap structure MEMS acoustic sensor using reproducible high-speed lateral etching and CMP processKo, Sang Choon / Jun, Chi-Hoon / Jang, Won Ick et al. | 2006
- 2077
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Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantileversRose, F / Hattori, M / Kobayashi, D et al. | 2006
- 2086
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Mechanical properties of sacrificial polymers used in RF-MEMS applicationsStanec, James R / Begley, Matthew R / Barker, N Scott et al. | 2006
- 2092
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Pool boiling heat transfer on artificial micro-cavity surfaces in dielectric fluid FC-72Yu, Chih Kuang / Lu, Ding Chong / Cheng, Tsung Chieh et al. | 2006
- 2100
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Silicon-on-insulator cantilevers as charge collectors for radioisotope micropower sources: design, fabrication and characterizationYan, Dong / Lal, Amit et al. | 2006
- 2109
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A planar self-sacrificial multilayer SU-8-based MEMS process utilizing a UV-blocking layer for the creation of freely moving partsFoulds, I G / Parameswaran, M et al. | 2006
- 2116
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A planar polymer microfluidic electrocapture device for bead immobilizationJönsson, Mats / Lindberg, Ulf et al. | 2006
- 2116
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A planar polymer microfluidic electrocapture device for beads immobilizationJönsson, Mats et al. | 2006
- 2121
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A low-energy, turning microvalve with high-pressure seals: scaling of frictionBitsch, Lennart / Kutter, Jörg P / Storgaard-Larsen, Torben et al. | 2006
- 2128
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Systematic modeling of microfluidic concentration gradient generatorsWang, Yi / Mukherjee, Tamal / Lin, Qiao et al. | 2006
- 2138
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Pressure drop and flow boiling instabilities in silicon microchannel heat sinksWu, H Y / Cheng, Ping / Wang, Hao et al. | 2006
- 2147
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Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirrorJoudrey, Kurt / Adams, George G / McGruer, Nicol E et al. | 2006
- 2157
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Effects of surface roughness on electromagnetic characteristics of capacitive switchesYu, A B / Liu, A Q / Zhang, Q X et al. | 2006
- 2167
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Slip-flow irreversibility of dissipative kinetic and internal energy exchange in microchannelsOgedengbe, E O B / Naterer, G F / Rosen, M A et al. | 2006
- 2177
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A crystallographic alignment method in silicon for deep, long microchannel fabricationJames, T D / Parish, G / Winchester, K J et al. | 2006
- 2183
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Novel compact low-loss millimeter-wave filters using micromachined overlay and inverted overlay coplanar waveguide transmission lines with defected ground structuresKim, Jong-Man / Chu, Kyongtae / Lee, Sanghyo et al. | 2006
- 2192
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Nanostructures prepared on polyimide films by nanoimprinting with the assistance of residual solventPai, I-Ting / Leu, Ing-Chi / Hon, Min Hsiung et al. | 2006
- 2197
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Electroplated nickel micromachined probes with out-of-plane predeformation for IC chip testingTsou, Chingfu / Huang, Shuen-Lung / Li, Hungchung et al. | 2006
- 2203
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A platform for monolithic CMOS-MEMS integration on SOI wafersVillarroya, María / Figueras, Eduard / Montserrat, Josep et al. | 2006
- 2211
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High pressure-resistant SU-8 microchannels for monolithic porous structure integrationCarlier, Julien / Chuda, Katarzyna / Arscott, Steve et al. | 2006
- 2220
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Structural instability of a parallel array of mutually attracting identical microbeamsZhu, J / Ru, C Q / Mioduchowski, A et al. | 2006
- 2230
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Fabrication of a hollow needle structure by dicing, wet etching and metal depositionShikida, Mitsuhiro / Hasada, Takehiko / Sato, Kazuo et al. | 2006
- 2240
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Prediction of Darcy–Forchheimer drag for micro-porous structures of complex geometry using the lattice Boltzmann methodJeong, Namgyun / Choi, Do Hyung / Lin, Ching-Long et al. | 2006
- L1
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Control of strain gradient in doped polycrystalline silicon carbide films through tailored dopingZhang, Jingchun / Howe, Roger T / Maboudian, Roya et al. | 2006
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BRIEF COMMUNICATION: Control of strain gradient in doped polycrystalline silicon carbide films through tailored dopingZhang, Jingchun et al. | 2006