Journal of Microelectromechanical Systems
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Table of contents
- 177
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JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing MethodLathia, Rutvik / Sen, Prosenjit et al. | 2022
- 180
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On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass SensorsZhang, Hemin / Quan, Aojie / Wang, Chen et al. | 2022
- 183
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Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall ProfilesJeong, Mun Goung / Kim, Taeyeong / Lee, Bong Jae et al. | 2022
- 186
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SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded WafersShen, Junyao / Fu, Sulei / Su, Rongxuan et al. | 2022
- 194
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Triple Mass Resonator for Electrostatic Quality Factor TuningChen, Jianlin / Tsukamoto, Takashiro / Tanaka, Shuji et al. | 2022
- 204
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Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical ResonatorsMiller, James M. L. / Vukasin, Gabrielle D. / Zhang, Ze et al. | 2022
- 217
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Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic ResonatorsYandrapalli, Soumya / Eroglu, Seniz Esra Kucuk / Plessky, Victor et al. | 2022
- 226
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Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and UncertaintyMaughan, Michael R. / Bahr, David F. et al. | 2022
- 234
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High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N FilmsWang, Jialin / Park, Mingyo / Ansari, Azadeh et al. | 2022
- 241
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Thermomechanical Modeling and Optimization of Zero-Power Micromechanical PhotoswitchKang, Sungho / Rajaram, Vageeswar / Risso, Antea et al. | 2022
- 249
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Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and TemperaturesWu, Guorong / Gosalvez, Miguel A. / Xing, Yan et al. | 2022
- 265
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Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay ContactsFalicov, Ethan / Marvin, Jessica / Ye, Zhixin Alice et al. | 2022
- 275
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A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped StructureXue, Feng / Adedokun, George / Xie, Dongcheng et al. | 2022
- 283
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Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile MemoryPamunuwa, Dinesh / Worsey, Elliott / Reynolds, Jamie D. et al. | 2022
- 292
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Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology OptimizationZhou, Peng / Zhang, Tianyi / Simon, Terrence W. et al. | 2022
- 298
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MEMS-Scale Angular Position Sensor Based on Ultracapacitor TechnologyBakhoum, Ezzat G. et al. | 2022
- 305
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The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula StructureGao, Chengwu / Zhang, Dacheng et al. | 2022
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[Front cover]| 2022
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Journal of Microelectromechanical Systems| 2022
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Table of Contents| 2022