Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1277
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Parylene-Insulated Ultradense Microfabricated CoilsHerrault, Florian / Yorish, Svyatoslav / Crittenden, Thomas M et al. | 2010
- 1284
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A Cavity Chip Interconnection Technology for Thick MEMS Chip Integration in MEMS-LSI Multichip ModuleKang-Wook Lee, / Kanno, S / Kiyoyama, K et al. | 2010
- 1292
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Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS DevicesHook, D Adam / Olhausen, James A / Krim, Jacqueline et al. | 2010
- 1299
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Temperature-Dependent Viscoelasticity in Thin Au Films and Consequences for MEMS DevicesMcLean, Mark / Brown, Walter L / Vinci, Richard P et al. | 2010
- 1309
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A Novel Method for In Situ Uniaxial Tests at the Micro/Nano Scale—Part I: TheoryKang, Wonmo / Saif, M Taher A et al. | 2010
- 1322
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A Novel Method for In Situ Uniaxial Tests at the Micro/Nanoscale—Part II: ExperimentWonmo Kang, / Han, Jong H / Saif, M Taher A et al. | 2010
- 1331
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Modeling of Front-Etched Micromachined Thermopile IR Detector by CMOS TechnologyDehui Xu, / Bin Xiong, / Yuelin Wang, et al. | 2010
- 1341
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Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic PolymerDer-Song Lin, / Xuefeng Zhuang, / Wong, Serena H et al. | 2010
- 1352
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Parylene-Based Electrochemical-MEMS TransducersGutierrez, Christian A / Meng, Ellis et al. | 2010
- 1362
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Large-Scale Silicone-Rubber-Based Optical Interconnect Packaged With FR4Dengke Cai, / Neyer, Andreas et al. | 2010
- 1370
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A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational EffectsKah How Koh, / Chengkuo Lee, / Kobayashi, Takeshi et al. | 2010
- 1380
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Linear High-Resolution BioMEMS Force Sensors With Large Measurement RangeRajagopalan, J / Tofangchi, A / Saif, M T A et al. | 2010
- 1390
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Drug Particle Delivery Investigation Through a Valveless MicropumpGuoguang Su, / Pidaparti, R M et al. | 2010
- 1400
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Bioinspired 3-D Tactile Sensor for Minimally Invasive SurgeryYating Hu, / Katragadda, R B / Hongen Tu, et al. | 2010
- 1400
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Bioinspired 3-D Tactile Sensor for Minimally Invasive SurgeryYating Hu Katragadda, R.B. Hongen Tu Qinglong Zheng Yuefa Li Yong XuYating, Hu et al. | 2010
- 1409
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An Ultra Compact Integrated Front End for Wireless Neural Recording MicrosystemsPerlin, G E / Wise, K D et al. | 2010
- 1422
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Low-Power High-Speed Electromagnetic Flapping Shutters Using Trapezoidal Shutter Blades Suspended by H-Type Torsional SpringsHyun-Young Choi, / Won Han, / Young-Ho Cho, et al. | 2010
- 1430
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MEMS-Based Nanospray-Ionization Mass SpectrometerWright, Steven / Syms, Richard R A / Moseley, Richard et al. | 2010
- 1444
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Thermally Tunable Polymer Microlenses for Biological ImagingXian Huang, / Junhui Ni, / Shengmei Yan, et al. | 2010
- 1450
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A Tip-Tilt-Piston Micromirror Array for Optical Phased Array ApplicationsLei Wu, / Dooley, Sarah / Watson, Edward A et al. | 2010
- 1450
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A Tip-Tilt-Piston Micromirror Array for Optical Phased Array ApplicationsLei Wu Dooley, S. Watson, E.A. McManamon, P.F. Huikai XieLei, Wu et al. | 2010
- 1462
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High-Pressure Peristaltic Membrane Micropump With Temperature ControlSvensson, Stefan / Sharma, Gunjana / Ogden, Sam et al. | 2010
- 1470
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Design and Fabrication of a High-Power Eyeball-Like Microactuator Using a Symmetric Piezoelectric Pusher ElementSheng-Chih Shen, / Juin-Cherng Huang, et al. | 2010
- 1477
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An Optofluidic Concept for a Tunable Micro-irisMüller, Philipp / Spengler, Nils / Zappe, H et al. | 2010
- 1485
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Vortex Anemometer Using MEMS Cantilever SensorZylka, Paweł / Modrzynski, Paweł / Janus, Paweł et al. | 2010
- 1490
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Vibration-Based Monitoring and Diagnosis of Dielectric Charging in RF-MEMS SwitchesJin Woo Lee, / Mahapatro, A K / Peroulis, D et al. | 2010
- 1503
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Modeling and Measurement of a Bistable Beam in a Microelectromechanical SystemBrake, M R / Baker, M S / Moore, N W et al. | 2010
- 1515
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A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon WafersJiachou Wang, / Xinxin Li, et al. | 2010
- 1521
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Strain Effect of the Dielectric Constant in Silicon DioxideJian-Qiu Huang, / Qing-An Huang, / Ming Qin, et al. | 2010
- 1524
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Call for papers 2011 Symposium on VLSI Technology| 2010
- 1525
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2011 IEEE Workshop on Microelectronics and Electron Devices| 2010
- 1526
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2011 IEEE International Reliabilty Physics Symposium (IRPS)| 2010
- 1527
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2010 Index Journal of Microelectromechanical Systems Vol. 19| 2010
- 1556
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Scitopia.org| 2010
- C1
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Table of contents| 2010
- C2
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Journal of Microelectromechanical Systems publication information| 2010
- C3
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Call for papers MMB2011| 2010