Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 093001
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Microinjection molding of microsystem components: new aspects in improving performanceCan Yang / Xiao-Hong Yin / Guang-Ming Cheng et al. | 2013
- 095001
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Measurements of residual stresses in the Parylene C film/silicon substrate using a microcantilever beamJyun-Siang Peng / Weileun Fang / Hung-Yi Lin et al. | 2013
- 095002
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AlN micromechanical radial-contour disc resonatorGang Wang / Li-Xin Xu / Abdallah Ababneh et al. | 2013
- 095003
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A microneedle array able to inject tens of thousands of cells simultaneouslyGregory H Teichert / Sandra Burnett / Brian D Jensen et al. | 2013
- 095004
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Residual stresses at cavity corners in silicon-on-insulator bonded wafersT-W Lin / O Elkhatib / J Makinen et al. | 2013
- 095005
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A MEMS-fluxgate-based sensing system for the detection of DynabeadsJian Lei / Chong Lei / Tao Wang et al. | 2013
- 095006
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Development of a peristaltic gas micropump with a single chamber and multiple electrodesK S Lee / B Kim / M A Shannon et al. | 2013
- 095007
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A quadratic-shaped-finger comb parametric resonatorCongzhong Guo / Gary K Fedder et al. | 2013
- 095008
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A wafer-level Sn-rich Au–Sn intermediate bonding technique with high strengthZhiqiang Fang / Xu Mao / Jinling Yang et al. | 2013
- 095009
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Formation, release and assembly of a non-evaporative photocurable liquid through micromolding and inkjet printingChin-Tai Chen / Hsiang-Pi Huang et al. | 2013
- 095010
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An approach for controlling printed line-width in high resolution roll-to-roll gravure printingHo Anh Duc Nguyen / Jongsu Lee / Chung Hwan Kim et al. | 2013
- 095011
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A MEMS lamination technology based on sequential multilayer electrodepositionMinsoo Kim / Jooncheol Kim / Florian Herrault et al. | 2013
- 095012
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Resonant probing system comprising a high accurate uniaxial nanoprobe and a new evaluation unitB Goj / L Dressler / M Hoffmann et al. | 2013
- 095013
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A low-profile three-dimensional neural probe array using a silicon lead transfer structureMing-Yuan Cheng / Minkyu Je / Kwan Ling Tan et al. | 2013
- 095014
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A novel non-sequential hydrogen-pulsed deep reactive ion etching of siliconM Gharooni / A Mohajerzadeh / A Sandoughsaz et al. | 2013
- 095015
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Mosaic-like micropillar array for hard x-ray focusing—one-dimensional versionVladimir Nazmov / Juergen Mohr / Rolf Simon et al. | 2013
- 095016
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Preparation of monodisperse PEG hydrogel composite microspheres via microfluidic chip with rounded channelsBing Yu / Hailin Cong / Xuesong Liu et al. | 2013
- 095017
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Integrated optic/nanofluidic fluorescent detection device with plasmonic excitationJ S Varsanik / J J Bernstein et al. | 2013
- 095018
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Mechanical frequency selectivity of an artificial basilar membrane using a beam array with narrow supportsSangwon Kim / Won Joon Song / Jongmoon Jang et al. | 2013
- 095019
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Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantileverRuiwen Liu / Binbin Jiao / Yanmei Kong et al. | 2013
- 095020
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Piezoresistive pressure sensor using low-temperature aluminium induced crystallization of sputter-deposited amorphous silicon filmRuchi Tiwari / Sudhir Chandra et al. | 2013
- 095021
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Polyimide as a versatile enabling material for microsystems fabrication: surface micromachining and electrodeposited nanowires integrationThomas Walewyns / Nicolas Reckinger / Sophie Ryelandt et al. | 2013
- 095022
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A multilayered integrated sensor for three-dimensional, micro total analysis systemsJing Xiao / Fuchuan Song / Sang-Woo Seo et al. | 2013
- 095023
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Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachiningSharon Roslyn Oh / Kui Yao / Francis Eng Hock Tay et al. | 2013
- 095024
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Enhancement of the thermo-mechanical properties of PDMS molds for the hot embossing of PMMA microfluidic devicesMyeongsub Kim / Byeong-Ui Moon / Carlos H Hidrovo et al. | 2013
- 095025
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Microfabrication of a digital microfluidic platform integrated with an on-chip electrochemical cellYuhua Yu / Jianfeng Chen / Jian Li et al. | 2013
- 095026
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High precision batch mode micro-electro-discharge machining of metal alloys using DRIE silicon as a cutting toolTao Li / Qing Bai / Yogesh B Gianchandani et al. | 2013
- 095027
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Controllable fabrication of periodic arrays of high-aspect-ratio micro-nano hierarchical structures and their superhydrophobicityZhibo Ma / Chengyu Jiang / Xiangming Li et al. | 2013
- 095028
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Ag dot morphologies printed using electrohydrodynamic (EHD) jet printing based on a drop-on-demand (DOD) operationFariza Dian Prasetyo / Hadi Teguh Yudistira / Vu Dat Nguyen et al. | 2013
- 095029
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Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensorChun-I Chang / Ming-Han Tsai / Yu-Chia Liu et al. | 2013
- 095030
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Variation of the intrinsic stress gradient in thin aluminum nitride filmsH Mehner / S Leopold / M Hoffmann et al. | 2013
- 095031
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Fabrication of highly oriented reduced graphene oxide microbelts array for massive production of sensitive ammonia gas sensorsJia Zhang / Rongfu Zhang / Xiaona Wang et al. | 2013
- 095032
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A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environmentsDa Chen / Jingjing Wang / Yan Xu et al. | 2013
- 095033
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Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technologyHaiyang Mao / Yuanjing Chen / Yi Ou et al. | 2013
- 095034
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Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablationSimonas Indrišiūnas / Bogdan Voisiat / Mindaugas Gedvilas et al. | 2013
- 095035
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Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beamYe Tian / Gang Shao / Xingwei Wang et al. | 2013
- 095036
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Testing of a single-polarity piezoresistive three-dimensional stress-sensing chipH H Gharib / W A Moussa et al. | 2013
- 097001
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Fabrication of multi-electrode array platforms for neuronal interfacing with bi-layer lift-off resist sputter depositionYong Hee Kim / Gook Hwa Kim / Nam Seob Baek et al. | 2013