Journal of vacuum science and technology / B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 20601
-
Letters - Double-layered passivation film structure of Al2CO3/SiNx for high mobility oxide thin film transistorsPark, Sang-Hee Ko et al. | 2013
-
Graphene-capped InAs/GaAs quantum dotsAjlani, Hosni / Othmen, Riadh / Oueslati, Meherzi et al. | 2013
-
Surface chemistry controlled diameter-modulated semiconductor nanowire superstructuresMusin, Ildar R. / Boyuk, Dmitriy S. / Filler, Michael A. et al. | 2013
-
Effects of postdeposition annealing on a high-k-last/gate-last integration scheme for 20 nm nMOS and pMOSChen, Ying-Tsung / Fu, Ssu-I / Lin, Chien-Ting et al. | 2013
-
Ultraclean freestanding graphene by platinum-metal catalysisLongchamp, Jean-Nicolas / Escher, Conrad / Fink, Hans-Werner et al. | 2013
-
Metal–semiconductor–metal photodetector on as-deposited TiO2 thin films on sapphire substrateÇalışkan, Deniz / Bütün, Bayram / Özcan, Şadan et al. | 2013
- 20801
-
Review Article - Synthesis, properties, and applications of silicon nanocrystalsMangolini, Lorenzo et al. | 2013
- 21201
-
Electronic & Optoelectronic Materials, Devices & Processing - Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverageMimoun, Benjamin et al. | 2013
-
Measurement of Schottky barrier height tuning using dielectric dipole insertion method at metal–semiconductor interfaces by photoelectron spectroscopy and electrical characterization techniquesCoss, Brian E. / Sivasubramani, Prasanna / Brennan, Barry et al. | 2013
-
Ge epitaxial films on GaAs (100), (110), and (111) substrates for applications of CMOS heterostructural integrationsTang, Shih-Hsuan / Kuo, Chien-I / Trinh, Hai-Dang et al. | 2013
-
Device instability of postannealed TiOx thin-film transistors under gate bias stressesDu Ahn, Byung / Ok, Kyung-Chul / Park, Jin-Seong et al. | 2013
-
Effects of 2 MeV Ge+ irradiation on AlGaN/GaN high electron mobility transistorsDouglas, Erica A. / Bielejec, Edward / Frenzer, Patrick et al. | 2013
-
Comparison of the effects of downstream H2- and O2-based plasmas on the removal of photoresist, silicon, and silicon nitrideThedjoisworo, Bayu / Cheung, David / Crist, Vince et al. | 2013
- 21207
-
Chamber conditioning process development for improved inductively coupled plasma reactive ion etching of GaAs/AIGaAs materialsConnors, Michael K et al. | 2013
- 21208
-
X-ray enhanced sputter rates in argon cluster ion sputter-depth profiling of polymersCumpson, Peter J et al. | 2013
-
Bound states within the notch of the HfO2/GeO2/Ge stackWang, Zhong / Ralph, Jason / Sedghi, Naser et al. | 2013
-
Etching selectivity of indium tin oxide to photoresist in high density chlorine- and ethylene-containing plasmasVitale, Steven A. / Berry, Shaun et al. | 2013
- 21401
-
Energy Conversion and Storage Devices - Quantum simulation of thermionic emission from diamond filmsMusho, Terence D et al. | 2013
- 21601
-
Lithography - Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetryDu, Jun et al. | 2013
-
Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arraysDanylyuk, Serhiy / Kim, Hyun-su / Brose, Sascha et al. | 2013
-
Capped carbon hard mask and trimming process: A low-cost and efficient route to nanoscale devicesPauliac-Vaujour, Sébastien / Brianceau, Pierre / Comboroure, Corinne et al. | 2013
-
Lloyd's mirror interferometer using a single-mode fiber spatial filterSun, Yi-Lin / Mikolas, David / Chang, En-Chiang et al. | 2013
-
Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam–direct-write lithographyLiu, Chun-Hung / Ng, Philip C. W. / Shen, Yu-Tian et al. | 2013
-
Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithographyLee, Sangsul / Lee, Inhwan / Gul Doh, Jong et al. | 2013
- 21801
-
Nanometer Science & Technology - Wet etching silicon nanofins with (111)-oriented sidewallsLiu, Lianci et al. | 2013
-
Effects of Cs adsorption on the field emission characteristics of closed single-walled carbon nanotubesLee, Po-Han / Chiang, Cheng-Ying / Wang, Yeng-Tseng et al. | 2013
-
Fabrication of multiscale electrodes on organic photovoltaic thin films and in situ electrical characterization by nanostencil combined with Qplus AFMGrévin, Benjamin / Jradi, Khalil / Nisa Yahya, Wan Zaireen et al. | 2013
-
Preparation of porous alumina/ceria composite abrasive and its chemical mechanical polishing behaviorChen, Sisi / Lei, Hong / Chen, Ruling et al. | 2013
-
Field emission from nanometer-scale tips of crystalline PbZrxTi1−xO3Fletcher, Patrick C. / Mangalam, Vengadesh Kumara R. / Martin, Lane W. et al. | 2013
-
Controlling the silicon nanowire tapering angle in dense arrays of silicon nanowires using deep reactive ion etchingEngstrom, Daniel S. / Soh, Yeong-Ah et al. | 2013
-
Electrical properties of platinum interconnects deposited by electron beam induced deposition of the carbon-free precursor, Pt(PF3)4O'Regan, Colm / Lee, Angelica / Holmes, Justin D. et al. | 2013
- 22001
-
MEMS & NEMS - Effect of neutral beam etching on mechanical property of microcantileversNishimori, Yuki et al. | 2013
-
3D stepped electrodes on a flexible substrate with permanently bonded poly(dimethylsiloxane) channels for moving microfluidGuo, Xin / Xie, Kongying / Campbell, Robert J. et al. | 2013
- 22201
-
Microelectronic & Nanoelectronic Devices - Dependence on proton energy of degradation of AlGaN/GaN high electron mobility transistorsLiu, Lu et al. | 2013
-
Impact of both metal composition and oxygen/nitrogen profiles on p-channel metal-oxide semiconductor transistor threshold voltage for gate last high-k metal gateHempel, Klaus / Binder, Robert / Engelmann, H.-J. et al. | 2013
-
Temperature dependence of the resistive switching-related currents in ultra-thin high-k based MOSFETsCrespo-Yepes, Albert / Martin-Martinez, Javier / Rodriguez, Rosana et al. | 2013
-
Band offsets of metal–oxide–semiconductor capacitor with HfLaTaO/HfSiO stacked high-k dielectricCheng, Chin-Lung / Liu, Chi-Chung / Chang-Liao, Kuei-Shu et al. | 2013
- 22205
-
Thermal stability of Ti, Pt, and Ru interracial layers between seedless copper and a tantalum diffusion barrierLiu, Xin et al. | 2013
-
Effect of electron irradiation on AlGaN/GaN and InAlN/GaN heterojunctionsHwang, Ya-Shi / Liu, Lu / Ren, Fan et al. | 2013
-
Synthesis of diamond nanotips for enhancing the plasma illumination characteristics of capacitive-type plasma devicesLou, Shiu-Cheng / Chen, Chulung / Teng, Kuang-Yau et al. | 2013
-
Shop Notes - Ultrahigh vacuum-compatible sockets for pin grid arrays used in nanoscale and atomic physicsKatoch, Jyoti et al. | 2013
-
Investigation of resist filling behavior in microimprint lithography by computational fluid dynamics simulation and defocusing digital particle image velocimetryDu, Jun / Wei, Zhengying / Li, Shize et al. | 2013
-
Improved approach to Fowler–Nordheim plot analysisForbes, Richard G. / Fischer, Andreas / Mousa, Marwan S. et al. | 2013
-
Development of planar x-ray source using gated carbon nanotube emitterManabe, Tomoya / Nitta, Shogo / Abo, Satoshi et al. | 2013
-
Stable field emission of single B-doped Si tips and linear current scaling of uniform tip arrays for integrated vacuum microelectronic devicesSerbun, Pavel / Bornmann, Benjamin / Navitski, Aliaksandr et al. | 2013
-
X-ray tube with a graphite field emitter inflamed at high temperatureIwai, Yusuke / Koike, Takayoshi / Hayama, Youhei et al. | 2013
-
CUMULATIVE AUTHOR INDEX| 2013
-
Ultrahigh vacuum-compatible sockets for pin grid arrays used in nanoscale and atomic physicsKatoch, Jyoti / Glasscock, Cameron / Ishigami, Masa et al. | 2013
-
Facile fabrication of scalable patterned nickel nanocone arrays for field emission applicationsLe Shim, Ee / Yoo, Eunji / Jung Kang, Chi et al. | 2013
-
Microplasma enhancement via the formation of a graphite-like phase on diamond cathodesChen, Huang-Chin / Lin, I-Nan / Lou, Shiu-Cheng et al. | 2013
-
Synthesis, properties, and applications of silicon nanocrystalsMangolini, Lorenzo et al. | 2013
-
Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverageMimoun, Benjamin / Pham, Hoa T. M. / Henneken, Vincent et al. | 2013
-
Chamber conditioning process development for improved inductively coupled plasma reactive ion etching of GaAs/AlGaAs materialsConnors, Michael K. / Plant, Jason J. / Ray, Kevin G. et al. | 2013
-
Thermal stability of Ti, Pt, and Ru interfacial layers between seedless copper and a tantalum diffusion barrierLiu, Xin / King, Sean W. / Nemanich, Robert J. et al. | 2013
-
Illustrating field emission theory by using Lauritsen plots of transmission probability and barrier strengthForbes, Richard G. / Deane, Jonathan H. B. / Fischer, Andreas et al. | 2013
-
PAPERS FROM THE 25TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (25TH IVNC 2012) - Stable field emission of single B-doped Si tips and linear current scaling of uniform tip arrays for integrated vacuum microelectronic devicesSerbun, Pavel et al. | 2013
-
Fabrication of a single-atom electron source by noble-metal surface diffusionNakagawa, Tatsuhiro / Rokuta, Eiji / Murata, Hidekazu et al. | 2013
-
Double-layered passivation film structure of Al2O3/SiNx for high mobility oxide thin film transistorsKo Park, Sang-Hee / Ryu, Min-Ki / Oh, Himchan et al. | 2013
-
Quantum simulation of thermionic emission from diamond filmsMusho, Terence D. / Paxton, William F. / Davidson, Jim L. et al. | 2013
-
Wet etching silicon nanofins with (111)-oriented sidewallsLiu, Lianci / Kuryatkov, Vladimir V. / Nikishin, Sergey A. et al. | 2013
-
Observatio of fringelike electron emission pattern from triode Pt nano electron source fabricated by electron-beam-induced depositionKitayama, Tomohisa et al. | 2013
-
Observation of fringelike electron emission pattern from triode Pt nano electron source fabricated by electron-beam-induced depositionKitayama, Tomohisa / Abo, Satoshi / Wakaya, Fujio et al. | 2013
-
Dependence on proton energy of degradation of AlGaN/GaN high electron mobility transistorsLiu, Lu / Lo, Chien-Fong / Xi, Yuyin et al. | 2013
-
X-ray enhanced sputter rates in argon cluster ion sputter-depth profiling of polymersa)Cumpson, Peter J. / Portoles, Jose F. / Sano, Naoko et al. | 2013
-
Effect of neutral beam etching on mechanical property of microcantileversNishimori, Yuki / Ueki, Shinji / Miwa, Kazuhiro et al. | 2013