Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 513
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Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency ControlGong, Yi / Zhang, Menglun / Sun, Sheng et al. | 2023
- 516
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A MEMS Frequency Comb Energy HarvesterZhang, Teng / Seshia, Ashwin A. et al. | 2023
- 519
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Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat PipeHashimoto, Masaaki / Kawakami, Taiga / Alasli, Abdulkareem et al. | 2023
- 522
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Phononic Graded Meta-MEMS for Elastic Wave Amplification and FilteringMaspero, Federico / De Ponti, Jacopo Maria / Iorio, Luca et al. | 2023
- 529
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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum NitrideCho, Sinwoo / Barrera, Omar / Simeoni, Pietro et al. | 2023
- 533
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A Low-Noise Piezoelectric MEMS Oscillator Based on a Flexural Mode Membrane Resonator Array Toward In-Air Resonant SensorsLuo, Hexu / Zhang, Menglun / Gong, Yi et al. | 2023
- 542
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A Microfabricated Nanobubble-Based Sensor for Physiological Pressure MonitoringWang, Xuechun / Yoon, Eugene / Meng, Ellis et al. | 2023
- 552
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Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning MicromirrorZhou, Tong / Wu, Qilong / Pang, Bo et al. | 2023
- 562
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High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator ArraysPestana, Tiago G. / Pinto, Rui M. R. / Dias, Rosana A. et al. | 2023
- 574
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System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface CircuitsXu, Hao / Wang, Jiuzhou / Zhou, Zai-Fa et al. | 2023
- 583
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The Effect of Squeeze-Film Damping on the Step Response of Electrostatic Micro-ActuatorsLevin, Peleg / Yonaei, Amit / Krylov, Slava et al. | 2023
- 593
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Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical SwitchingSharma, Suraj / Nabavi, Seyedfakhreddin / Rabih, Almur Abdelkreem Saeed et al. | 2023
- 604
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Multi-Gate In-Plane Actuated NEMS Relays for Effective Complementary Logic Gate DesignsSmith, Bennett / Mamun, Md. Ataul / Horstmann, Benjamin et al. | 2023
- 612
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A Monolithic LTCC-MEMS Microfabrication ProcessFallahnia, Ehsan / Kouki, Ammar B. et al. | 2023
- 622
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Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBWBarrera, Omar / Cho, Sinwoo / Matto, Lezli et al. | 2023
- 626
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On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear ApplicationsGazzola, Chiara / Zega, Valentina / Cerini, Fabrizio et al. | 2023
- 638
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A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected CantileversHu, Bohao / Liu, Wenjuan / Yang, Chaoxiang et al. | 2023
- 645
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37th Annual IEEE Conference on Micro Electro Mechanical Systems| 2023
- 646
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Member ad suite| 2023
- 647
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Introducing IEEE Collabratec| 2023
- 648
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TechRxiv: Share Your Preprint Research with the World!| 2023
- 649
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2023 Index Journal of Microelectromechanical Systems Vol. 31| 2023
- C1
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Front Cover| 2023
- C2
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Journal of Microelectromechanical Systems| 2023
- C3
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Table of Contents| 2023