Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1351
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Scanning tunneling microscopy single atom/molecule manipulation and its application to nanoscience and technologyHla, Saw-Wai et al. | 2005
- 1361
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Optical waveguide loss induced by metal claddingLin, Jie / Leven, Andreas / Reyes, R. et al. | 2005
- 1364
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Chemical patterning for the highly specific and programmed assembly of nanostructuresKannan, Balaji / Kulkarni, Rajan P. / Satyanarayana, Srinath et al. | 2005
- 1371
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Material and process effects on line-edge-roughness of photoresists probed with a fast stochastic lithography simulatorPatsis, G. P. / Gogolides, E. et al. | 2005
- 1376
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Growth and magnetic properties of self-assembled (In, Mn)As quantum dotsChen, Y. F. / Lee, W. N. / Huang, J. H. et al. | 2005
- 1379
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Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxyPoblenz, C. / Waltereit, P. / Speck, J. S. et al. | 2005
- 1386
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In situ chemical sensing in high electron mobility transistor metalorganic chemical vapor deposition process for real-time prediction of product crystal quality and advanced process controlCho, Soon / Rubloff, Gary W. / Aumer, Michael E. et al. | 2005
- 1398
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Multi-axis retarder arrays by masked oblique depositionArnold, M. D. / Hodgkinson, I. J. / Wu, Q. H. et al. | 2005
- 1405
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Deep etching of silicon with smooth sidewalls by an improved gas-chopping process using a Faraday cage and a high bias voltageMin, Jae-Ho / Lee, Jin-Kwan / Moon, Sang Heup et al. | 2005
- 1412
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Electrical transport properties of ultrathin metallic filmsTay, Maureen / Li, Kebin / Wu, Yihong et al. | 2005
- 1417
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Nanowell device for the electrical characterization of metal–molecule–metal junctionsMajumdar, Nabanita / Gergel, Nadine / Routenberg, David et al. | 2005
- 1422
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Initial interface formation of Ta-based barriers on SiLK™ low dielectric constant filmsLiu, J. / Scharnberg, M. / Bao, J. et al. | 2005
- 1428
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Fabrication and characterization of a planarized vertical-cavity surface-emitting laser by using the silicon oxideTsai, Chia-Lung / Lee, Feng-Ming / Hu, Chih-Wei et al. | 2005
- 1434
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Thermal excitation effects of photoluminescence of annealed quantum-well laser structures grown by plasma-assisted molecular-beam epitaxyWang, S. Z. / Yoon, S. F. / Fan, W. J. et al. | 2005
- 1441
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Growth of InAsSb-channel high electron mobility transistor structuresTinkham, B. P. / Bennett, B. R. / Magno, R. et al. | 2005
- 1445
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Atmospheric pressure operation of a field emission diode based on self-assembled silicon nanostructuresLu, C.-T. / Johnson, S. / Lansley, S. P. et al. | 2005
- 1450
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Vertically aligned growth of carbon nanotubes with long length and high densityLee, Kuei-Yi / Honda, Shin-ichi / Katayama, Mitsuhiro et al. | 2005
- 1454
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Scanning capacitance force microscopy imaging of metal-oxide-semiconductor field effect transistorsKimura, Kenjiro / Kobayashi, Kei / Yamada, Hirofumi et al. | 2005
- 1459
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Patterned growth of self-assembled silicon nanostructures by ion implantation and electron beam annealingJohnson, S. / Markwitz, A. / Rudolphi, M. et al. | 2005
- 1463
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Compatibility of high pressure cleaning mixtures with a porous low dielectric constant film: A positronium annihilation lifetime spectroscopic studyMyneni, Satyanarayana / Peng, Hua-Gen / Gidley, David W. et al. | 2005
- 1470
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Synthesis of metallic nanocrystals with size and depth control: A case studyJacobsohn, L. G. / Zhang, X. / Misra, A. et al. | 2005
- 1474
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Highly -axis oriented thin AlN films deposited on gold seed layer for FBAR devicesTay, Kok-Wan / Huang, Cheng-Liang / Wu, Long et al. | 2005
- 1480
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MOS-diode characteristics of ultrathin gate dielectrics after exposure to an electron-cyclotron-resonance plasma streamJin, Yoshito / Saito, Kunio / Shimada, Masaru et al. | 2005
- 1487
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Gray-scale photolithography using maskless exposure systemTotsu, Kentaro / Esashi, Masayoshi et al. | 2005
- 1491
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Porosity-induced effects during Ar plasma etching of silica-based ultralow- dielectricsLazzeri, P. / Hua, X. / Oehrlein, G. S. et al. | 2005
- 1499
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Impact of buried capping layer on electrical stability of advanced interconnectsa)Yiang, K. Y. / Yoo, W. J. / Krishnamoorthy, Ahila et al. | 2005
- 1504
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Structural and electrical investigation of high temperature annealed As-implanted Si crystalsa)Bocchi, C. / Felisari, L. / Catellani, A. et al. | 2005
- 1504
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Structural and electrical investigation of high temperature annealed as-implanted Si crystalsBocchi, C. / Felisari, L. / Catellani, A. et al. | 2005
- 1515
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Importance of evaporation in the design of materials for step and flash imprint lithographyKim, Eui Kyoon / Ekerdt, John G. / Willson, C. Grant et al. | 2005
- 1521
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Optimization of an inductively coupled plasma etching process of GaInP/GaAs based material for photonic band gap applicationsCombrie, S. / Bansropun, S. / Lecomte, M. et al. | 2005
- 1521
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Optimization of an inductively coupled plasma etching process of based material for photonic band gap applicationsa)Combrié, S. / Bansropun, S. / Lecomte, M. et al. | 2005
- 1527
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Structural characterization of strained AlGaN layers in different Al content heterostructures and its effect on two-dimensional electron transport propertiesa)Miyoshi, Makoto / Egawa, Takashi / Ishikawa, Hiroyasu et al. | 2005
- 1532
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Scanning tunneling microscopy investigation of nanostructures produced by and bombardment of surfacesPark, J. B. / France, C. B. / Parkinson, B. A. et al. | 2005
- 1543
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Deposition of gold nanofeatures on silicon samples by field-induced deposition using a scanning tunneling microscopeAbed, H. / Jamgotchian, H. / Dallaporta, H. et al. | 2005
- 1551
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Effect of plasma treatments on a low- dielectric polymer surfaceHoyas, A. Martin / Schuhmacher, J. / Whelan, C. M. et al. | 2005
- 1558
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Nitrogen diffusion and accumulation at the interface in structures for nonvolatile semiconductor memoriesSaraf, Meirav / Edrei, Rachel / Shima-Edelstein, Ruth et al. | 2005
- 1562
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Effect of AlN nucleation layer growth conditions on buffer leakage in high electron mobility transistors grown by molecular beam epitaxy (MBE)Poblenz, C. / Waltereit, P. / Rajan, S. et al. | 2005
- 1568
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Physical properties and high-temperature oxidation resistance of sputtered nanocomposite coatingsMusil, J. / Dohnal, P. / Zeman, P. et al. | 2005
- 1576
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Optimization of the active region of 405 nm light emitting diodes using statistical design of experiments for determination of interaction effectsGrandusky, J. R. / Jamil, M. / Shahedipour-Sandvik, F. et al. | 2005
- 1582
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Microfabrication and application of high-aspect-ratio silicon tipsWang, Yaqiang / van der Weide, Daniel W. et al. | 2005
- 1585
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Controllable two-dimensional photonic crystal patterns fabricated by nanosphere lithographyHan, Shuo / Hao, Zhibiao / Wang, Jian et al. | 2005
- 1589
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Magnetic metal etching with organic based plasmas. I. plasmasOrland, A. S. / Blumenthal, R. et al. | 2005
- 1597
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Metal etching with organic based plasmas. II. plasmasOrland, A. S. / Blumenthal, R. et al. | 2005
- 1603
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Nanometer metal line fabrication using a PMMA bilayer resist by e-beam lithographyAn, Lihua / Zheng, Yuankai / Li, Kebin et al. | 2005
- 1607
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Surface etching of YBCO films by xenon difluorideCrossley, Benjamin L. / Drehman, Alvin J. / Reid, James R. et al. | 2005
- 1611
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Using Ni masks in inductively coupled plasma etching of high density hole patterns in GaNHsu, David S. Y. / Kim, Chul Soo / Eddy, Charles R. et al. | 2005
- 1615
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Solvent vapor annealed block copolymer films on organosilane self-assembled monolayersHarant, Adam W. / Bowman, Christopher N. et al. | 2005
- 1622
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Growth of high quality on nano-scale patterned Si structuresVanamu, G. / Datye, A. K. / Zaidi, Saleem H. et al. | 2005
- 1630
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Chemical mapping of polymer photoresists by scanning transmission x-ray microscopyMuntean, Ligia / Planques, Romain / Kilcoyne, A. L. D. et al. | 2005
- 1637
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Fabrication and mechanism of relaxed SiGe-on-insulator by modified Ge condensationDi, Zengfeng / Zhang, Miao / Liu, Weili et al. | 2005
- 1641
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Growth optimization of GaAsSb lattice matched to InP by gas-source molecular-beam epitaxyWu, Bing-Ruey / Xu, Chaofeng / Chang, Kuo-Lih et al. | 2005
- 1645
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Emission limited electrostatic atomization and the fine structure constantKelly, A. J. et al. | 2005
- 1650
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Selective wet etching of in solution: Application to vertical taper structures in integrated optoelectronic devicesHuang, Hui / Wang, Xingyan / Ren, Xiaomin et al. | 2005
- 1654
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Monolithic organic-oxide microcavities fabricated by low-temperature electron-beam evaporationPersano, Luana / Cingolani, Roberto / Pisignano, Dario et al. | 2005
- 1659
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Solid state amorphization at the room temperature deposited interfaceWen, J.-F. / Wang, L.-B. / Liu, C.-H. et al. | 2005
- 1664
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Thermal stability of nitrogen in barriers applied to polymetal gatesYamamoto, Naoki / Hanaoka, Yuko / Yoshida, Takehiko et al. | 2005
- 1674
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Low temperature deposition of epitaxial films in a rotating disk vertical MOCVD reactorDhote, A. M. / Meier, A. L. / Towner, D. J. et al. | 2005
- 1679
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Fabrication of nanometer-sized ferromagnetic probeTsai, J. T. H. / Wu, C. H. et al. | 2005
- 1682
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Character tables for the symmetry groups of single-walled carbon nanotubesLi, Tsung-Lung / Ting, Jyh-Hua et al. | 2005
- 1684
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Combined molecular beam epitaxy low temperature scanning tunneling microscopy system: Enabling atomic scale characterization of semiconductor surfaces and interfacesKrause, M. / Stollenwerk, A. / Awo-Affouda, C. et al. | 2005
- 1693
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Ordering of quantum dot molecules by self-organizationvan Lippen, Twan / Nötzel, Richard / Wolter, Joachim H. et al. | 2005
- 1700
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Anisotropic strain fields in granular GaAs:MnAs epitaxial layers: Towards self-assembly of magnetic nanoparticles embedded in GaAsMoreno, M. / Jenichen, B. / Däweritz, L. et al. | 2005
- 1706
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Growth kinetics and theoretical modeling of selective molecular beam epitaxy for growth of GaAs nanowires on nonplanar (001) and (111)B substratesSato, Taketomo / Tamai, Isao / Hasegawa, Hideki et al. | 2005
- 1714
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Effects of surface states and Si-interlayer based surface passivation on GaAs quantum wires grown by selective molecular beam epitaxyShiozaki, Nanako / Sato, Taketomo / Hasegawa, Hideki et al. | 2005
- 1722
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Growth of -SiC nanowires and thin films by metalorganic chemical vapor deposition using dichloromethylvinylsilaneKang, B.-C. / Lee, S.-B. / Boo, J.-H. et al. | 2005
- 1726
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Interaction of single pentacene molecules with monatomic quantum wiresLagoute, Jérôme / Fölsch, Stefan et al. | 2005
- 1732
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Control on self-organization of InGaAs/GaAs(100) quantum-dot chainsWang, Zh. M. / Mazur, Yu. I. / Holmes, K. et al. | 2005
- 1736
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Control of quantum dot density and alignment using modified buffer layersYe, W. / Hanson, S. / Reason, M. et al. | 2005
- 1741
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Role of thin InP cap layer and anion exchange reaction on structural and optical properties of InAs quantum dots on InP (001)a)Sakuma, Y. / Takeguchi, M. / Takemoto, K. et al. | 2005
- 1747
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Effects of doping profile and post-growth annealing on spin injection from Fe into (Al,Ga)As heterostructuresAdelmann, C. / Xie, J. Q. / Palmstrøm, C. J. et al. | 2005
- 1752
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Phase behavior of thin film interfacial reactionsHilton, J. L. / Schultz, B. D. / McKernan, S. et al. | 2005
- 1759
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Tailoring of the structural and magnetic properties of MnAs films grown on GaAs—Strain and annealing effectsDäweritz, L. / Herrmann, C. / Mohanty, J. et al. | 2005
- 1769
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Electronic and magnetotransport properties of ferromagnetic -(In,Mn)As∕-InAs heterojunctionsMay, S. J. / Wessels, B. W. et al. | 2005
- 1773
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Development methodology for high- gate dielectrics on III–V semiconductors: dielectric stacks on GaAsPasslack, Matthias et al. | 2005
- 1782
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Effect of interface roughness on silicon-on-insulator–metal-semiconductor field-effect transistor mobility and the device low-power high-frequency operationKhan, T. / Vasileska, D. / Thornton, T. J. et al. | 2005
- 1785
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Scanning tunneling microscopy study of single molecule motion on the Si(100)- surfaceBasu, R. / Tovar, J. D. / Hersam, M. C. et al. | 2005
- 1790
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Nucleation and growth of InN by high-pressure chemical vapor deposition: Optical monitoringWoods, Vincent / Senawirante, Jayantha / Dietz, Nikolaus et al. | 2005
- 1795
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GaN films deposited at low temperature on (111)Si by compound-source molecular beam epitaxy techniqueHonda, T. / Aoki, Y. / Akiyama, M. et al. | 2005
- 1799
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Lateral tunneling injection and peripheral dynamic charging in nanometer-scale Schottky gates on AlGaN/GaN hetrosturucture transistorsKotani, Junji / Kasai, Seiya / Hashizume, Tamotsu et al. | 2005
- 1808
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Imaging of thickness and compositional fluctuations in quantum wells by scanning capacitance microscopyZhou, X. / Yu, E. T. / Florescu, D. I. et al. | 2005
- 1814
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Effect of growth conditions, surface orientation, and alloy composition on Cl incorporation and activation in ZnSe and grown by molecular beam epitaxyVanMil, B. L. / Tompkins, R. P. / Feng, Ke et al. | 2005
- 1821
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Kinetic lattice Monte Carlo simulations of germanium epitaxial growth on the silicon (100) surface incorporating Si–Ge exchangeAkis, R. / Ferry, D. K. et al. | 2005
- 1826
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High-rate and low-temperature synthesis of , TiN, and thin films and study of their optical and interfacial characteristicsJung, Min Jae / Lee, Ho Young / Han, Jeon G. et al. | 2005
- 1832
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Atomic diffusion and band lineups at -on-InP heterointerfacesSmith, P. E. / Goss, S. H. / Gao, M. et al. | 2005
- 1838
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Molecule-solid interfaces studied with infrared ellipsometry: Ultrathin nitrobenzene filmsGensch, M. / Roodenko, K. / Hinrichs, K. et al. | 2005
- L5
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Dynamically ordered thin film nanoclustersZhang, Wei / Zhang, Chi / Kalyanaraman, Ramki et al. | 2005
- L9
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Ideally ordered anodic porous alumina with Sub- hole intervals based on imprinting using metal moldsYasui, Kenji / Nishio, Kazuyuki / Nunokawa, Hiroshi et al. | 2005