Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 013001
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Development and evaluation of germanium telluride phase change material based ohmic switches for RF applicationsMuzhi Wang / Mina Rais-Zadeh et al. | 2017
- 014001
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Electrical properties of nanostructured SiN films for MEMS capacitive switchesM Koutsoureli / S Xavier / L Michalas et al. | 2017
- 014002
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Extensive performance evaluations of RF MEMS single-pole-multi-throw (SP3T to SP14T) switches up to X-band frequencySukomal Dey / Shiban K Koul / Ajay K Poddar et al. | 2017
- 014003
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A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonatorsJicong Zhao / Quan Yuan / Xiao Kan et al. | 2017
- 014004
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Lift-off process for fine-patterned PZT film using metal oxide as a sacrificial layerPhan Trong Tue / Tatsuya Shimoda / Yuzuru Takamura et al. | 2017
- 015001
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Fabrication of a micro through-hole array by gas-blowing a PDMS-treated polyamide screen for a flexible drag-reducing skin-like deviceYong Li / Kai Zhou / Xiang Zhao et al. | 2017
- 015002
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Implementation of various vacuum conditions in sealed chambers for wafer-level bonding by using embedded cavityC-W Cheng / K-C Liang / C-H Chu et al. | 2017
- 015003
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Direct observation of microcontact behaviours in pattern-generation step of reverse offset printingYasuyuki Kusaka / Shusuke Kanazawa / Noritaka Yamamoto et al. | 2017
- 015004
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Characterization and comparison of three microfabrication methods to generate out-of-plane microvortices for single cell rotation and 3D imagingRishabh M Shetty / Jakrey R Myers / Manoj Sreenivasulu et al. | 2017
- 015005
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Si-gold-glass hybrid wafer bond for 3D-MEMS and wafer level packagingJayaprakash Reddy / Rudra Pratap et al. | 2017
- 015006
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3D electroplated inductors with thickness variation for improved broadband performanceVictor Farm-Guoo Tseng / Sarah S Bedair / Nathan Lazarus et al. | 2017
- 015007
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The influence of flap inclination angle on fluid transport at ciliated wallsA Rockenbach / U Schnakenberg et al. | 2017
- 015008
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Mixing high-viscosity fluids via acoustically driven bubblesSinem Orbay / Adem Ozcelik / James Lata et al. | 2017
- 015009
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A translation micromirror with large quasi-static displacement and high surface qualityYuan Xue / Siyuan He et al. | 2017
- 015010
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Photolithography-free laser-patterned HF acid-resistant chromium-polyimide mask for rapid fabrication of microfluidic systems in glassKonstantin O Zamuruyev / Yuriy Zrodnikov / Cristina E Davis et al. | 2017
- 015011
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Surface micromachined differential piezoelectric shear-stress sensorsRandall P Williams / Donghwan Kim / David P Gawalt et al. | 2017
- 015012
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A novel approach to the analysis of squeezed-film air damping in microelectromechanical systemsWeilin Yang / Hongxia Li / Aveek N Chatterjee et al. | 2017
- 015013
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Contact assembly of cell-laden hollow microtubes through automated micromanipulator tip locatingHuaping Wang / Qing Shi / Yanan Guo et al. | 2017
- 015014
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A novel piezoresistive polymer nanocomposite MEMS accelerometerV Seena / K Hari / S Prajakta et al. | 2017
- 015015
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Tensile strength of oxygen plasma-created surface layer of PDMSTaiki Ohishi / Haruka Noda / Tsubasa S Matsui et al. | 2017
- 015016
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Theoretical and experimental studies of a magnetically actuated valveless micropumpMajid Ashouri / Mohammad Behshad Shafii / Ali Moosavi et al. | 2017
- 015017
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Fabrication and characterization of microsieve electrode array (µSEA) enabling cell positioning on 3D electrodesB Schurink / R M Tiggelaar / J G E Gardeniers et al. | 2017
- 015018
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Thin film metal sensors in fusion bonded glass chips for high-pressure microfluidicsMartin Andersson / Johan Ek / Ludvig Hedman et al. | 2017
- 015019
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Silicon micro venturi nozzles for cost-efficient spray coating of thin organic P3HT/PCBM layersMichael A Betz / Patric Büchele / Manfred Brünnler et al. | 2017
- 015020
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Fabrication and characterisation of suspended microstructures of tantalumA Al-masha’al / E Mastropaolo / A Bunting et al. | 2017
- 015021
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Fabrication of microfluidic devices: improvement of surface quality of CO2 laser machined poly(methylmethacrylate) polymerMazher I Mohammed / Muhd Nazrul Hisham Zainal Alam / Abbas Kouzani et al. | 2017
- 015022
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Design, simulation and fabrication of a MEMS accelerometer by using sequential and pulsed-mode DRIE processesR Gholamzadeh / K Jafari / M Gharooni et al. | 2017
- 015023
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Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuatorsZhuo Zhang / Weize Zhang / Qiyang Wu et al. | 2017
- 015024
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Modeling the performance limits of novel microcantilever heaters for volatile organic compound detectionIfat Jahangir / Goutam Koley et al. | 2017
- 015025
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Curved hierarchically micro–micro structured polypropylene surfaces by injection moldingK Mielonen / M Suvanto / T A Pakkanen et al. | 2017
- 015026
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Interfacing 3D micro/nanochannels with a branch-shaped reservoir enhances fluid and mass transportPrasoon Kumar / Prasanna S Gandhi / Mainak Majumder et al. | 2017
- 015027
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Inertial particle focusing in microchannels with gradually changing geometrical structuresLiang-Liang Fan / Qing Yan / Jing Guo et al. | 2017
- 015028
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An electrical test method for quality detecting of wafer level eutectic bondingLemin Zhang / Binbin Jiao / Will Ku et al. | 2017
- 015029
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Wafer-level hermetic thermo-compression bonding using electroplated gold sealing frame planarized by fly-cuttingMuhammad Salman Al Farisi / Hideki Hirano / Jörg Frömel et al. | 2017
- 015030
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Study of electrical breakdown and secondary pull-in failure modes for NEM relaysM Ramezani / S Severi / H A C Tilmans et al. | 2017
- 015031
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Acoustofluidic bacteria separationSixing Li / Fen Ma / Hunter Bachman et al. | 2017
- 015032
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Ball driven type MEMS SAD for artillery fuseJin Oh Seok / Ji-hun Jeong / Junseong Eom et al. | 2017
- 015033
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Unveiling the wet chemical etching characteristics of polydimethylsiloxane film for soft micromachining applicationsA Kakati / D Maji / S Das et al. | 2017
- 017001
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Mechanical stop mechanism for overcoming MEMS fabrication tolerancesHussein Hussein / Gilles Bourbon / Patrice Le Moal et al. | 2017
- 017002
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Rewetting of semi-dried ink patterns by vapour annealing for developing a reflow process in reverse offset printingYasuyuki Kusaka / Kazuyoshi Sugihara / Masayoshi Koutake et al. | 2017
- 017003
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A wavelike buffer for introducing samples into autonomous capillary microfluidic devicesJingmin Li / Chao Liang / Shuai Wang et al. | 2017