Journal of vacuum science and technology / B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
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Atomic force microscopy for nanoscale mechanical property characterizationStan, Gheorghe / King, Sean W. et al. | 2020
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Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectorsKang, Youngsoo / Ju, Sanghyun et al. | 2020
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Investigations of internal stresses in high-voltage devices with deep trenchesHieckmann, Ellen / Mühle, Uwe / Chekhonin, Paul et al. | 2020
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Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaNHorikawa, Kiyotaka / Okubo, Satoshi / Kawarada, Hiroshi et al. | 2020
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Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collectionBöwering, Norbert / Meier, Christian et al. | 2020
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Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasmaNishikawa, Naofumi et al. | 2020
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Electrical characteristics, stability, electromigration, Joule heating, and reliability aspect of focused ion beam fabricated gold and copper nanobar interconnects on SiO2 and glass substratesSingh, Abhishek Kumar / Kumar, Jitendra et al. | 2020
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Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidenceFavata, Joseph / Ray, Valery / Shahbazmohamadi, Sina et al. | 2020
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Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalystPanghulan, Glenson R. / Vasquez, Magdaleno R. / Edañol, Yasmin D. et al. | 2020
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Effectiveness of multipass and multirow writing methods for massively parallel e-beam systemsHasan, Md Nabid / Lee, Soo-Young / Ahn, Byung-Sup et al. | 2020
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Advanced methodology for assessing chip package interaction effects on chip performance and reliability after chip assembly and during chip operationChoy, Jun-Ho / Sukharev, Valeriy / Kteyan, Armen et al. | 2020
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Investigation of the electrical behavior of AlGaN/GaN high electron mobility transistors grown with underlying GaN:Mg layerMahaboob, Isra / Novak, Steven W. / Rocco, Emma et al. | 2020
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Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructuresWang, Xiaowei / Huang, Hsien-Chih / Green, Bruce et al. | 2020
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Preparation of clean MgO surface by oxygen plasma: Comparison with standard substrate cleaning proceduresGeler-Kremer, Jacqueline / Posadas, Agham B. / Demkov, Alexander A. et al. | 2020
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Bias-voltage-dependent measurement of apparent barrier height on low-work-function thin filmNagaoka, Katsumi / Ohmi, Shun-ichiro et al. | 2020
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Direct imprinting of TiO2 patterns on highly curved substratesLuo, Ming / Hu, Xin et al. | 2020
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Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxideBundesmann, Carsten / Hellmich, Anke et al. | 2020
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Deterministic and stochastic modeling of rarefied gas flows in fusion particle exhaust systemsTantos, Christos / Varoutis, Stylianos / Day, Christian et al. | 2020
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Selective lateral photoelectrochemical wet etching of InGaN nanorodsZhao, Chunyu / Zhang, Xu / Tang, Chak Wah et al. | 2020
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Investigation of the current level instability of the multitip field emitters with computerized field emission projectorKolosko, Anatoly G. / Filippov, Sergey V. / Popov, Eugeni O. et al. | 2020
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Phase errors reduction in multi-angle illumination digital holographic microscopyLu, Junsheng / Zeng, Yanan / Chang, Xinyu et al. | 2020
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Effect of oxygen vacancy gradient on ion-irradiated Ca-doped YMnO3 thin filmsRathod, Kunalsinh N. / Gadani, Keval / Dhruv, Davit et al. | 2020
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Parylene micropillars coated with thermally grown SiO2Liu, Xiaocheng / Fecko, Peter / Fohlerová, Zdenka et al. | 2020
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Chip layout impact on stress-induced mobility degradation studied with indentationSchlipf, Simon / Clausner, André / Paul, Jens et al. | 2020
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Experimental reliability study of cumulative damage models on state-of-the-art semiconductor technologies for step-stress tests and mission profile stressesHirler, A. / Biba, J. / Lipp, D. et al. | 2020
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Mechanically reliable hybrid organosilicate glasses for advanced interconnectsKilic, Karsu Ipek / Dauskardt, Reinhold H. et al. | 2020
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Electrospun Mn2O3 web electrodes: Influence of fabrication parameters on electrochemical performanceBrockway, Molly / Skinner, Jack L. et al. | 2020
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Shape and dose control for proximity effect correction on massively parallel electron-beam systemsHasan, Md Nabid / Lee, Soo-Young / Ahn, Byung-Sup et al. | 2020
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Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimationAmjadipour, Mojtaba / MacLeod, Jennifer / Motta, Nunzio et al. | 2020
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Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blueButalid, Rogel Jan B. / Cristobal, Anna Patricia S. / Montallana, Arantxa Danielle S. et al. | 2020
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Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloysGrzybowski, Gordon / Ware, Morgan E. / Kiefer, Arnold et al. | 2020
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Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cellsMehta, Ravindra / Min, Misook / Kaul, Anupama B. et al. | 2020
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nanolithography toolbox—Simplifying the design complexity of microfluidic chipsZhang, Haoqing / Pekárek, Jan / Feng, Jianguo et al. | 2020
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3D-electrode integrated microsieve structure as a rapid and cost-effective single neuron detectorDemircan Yalcin, Yagmur / Luttge, Regina et al. | 2020
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Electromigration simulation and design considerations for integrated circuit power gridsNajm, Farid N. / Sukharev, Valeriy et al. | 2020
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Effects of cavity shapes and rounded corners of mold on polymer filling process in nanoimprint lithographyMa, Lijun / Zhang, Mingya / Zhang, Xiaolei et al. | 2020
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Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on SiLu, Jiaying / Zhong, Yun / Zhao, Songrui et al. | 2020
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Hybrid approach to modeling large area field emittersBiswas, Debabrata et al. | 2020
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Mechanical analysis of a flexible microelectronic system under twisting stressKim, Cha-Hee / Kim, Jae-Min / Seo, Seung-Ho et al. | 2020