Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 033001
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Integration of functional materials and surface modification for polymeric microfluidic systemsMaria Kitsara / Jens Ducrée et al. | 2013
- 035001
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A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technologyZhenxiang Yi / Xiaoping Liao et al. | 2013
- 035002
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A large area nano-gap interdigitated electrode array on a polymer substrate as a disposable nano-biosensorJoon S Shim / Michael J Rust / Chong H Ahn et al. | 2013
- 035003
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Novel photodefined polymer-embedded vias for silicon interposersParagkumar A Thadesar / Muhannad S Bakir et al. | 2013
- 035004
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Study on diffraction effect and microstructure profile fabricated by one-step backside lithographyWen-Cheng Yang / Yu-Sheng Huang / Bor-Yuan Shew et al. | 2013
- 035005
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Sub-micron-scale femtosecond laser ablation using a digital micromirror deviceB Mills / M Feinaeugle / C L Sones et al. | 2013
- 035006
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Microfabrication of air core power inductors with metal-encapsulated polymer viasJungkwun Kim / Florian Herrault / Xuehong Yu et al. | 2013
- 035007
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Effect of thermal treatment on the chemical resistance of polydimethylsiloxane for microfluidic devicesJihoon Lee / Jungwoo Kim / Hyoungsub Kim et al. | 2013
- 035008
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Influence of acoustic streaming on ultrasonic particle manipulation in a 100-well ring-transducer microplateMathias Ohlin / Athanasia E Christakou / Thomas Frisk et al. | 2013
- 035009
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Seamless integration of CMOS and microfluidics using flip chip bondingDavid Welch / Jennifer Blain Christen et al. | 2013
- 035010
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Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivityA M K Dagamseh / C M Bruinink / R J Wiegerink et al. | 2013
- 035011
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Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devicesSang Choon Ko / Byoung-Gue Min / Young-Rak Park et al. | 2013
- 035012
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Targeted electrohydrodynamic printing for micro-reservoir drug delivery systemsTae Heon Hwang / Jin Bum Kim / Da Som Yang et al. | 2013
- 035013
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Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing unitsPei-Hsuan Lo / Shih-Hsiung Tseng / Jen-Hao Yeh et al. | 2013
- 035014
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The silicon–glass microreactor with embedded sensors—technology and results of preliminary qualitative tests, toward intelligent microreaction plantP Knapkiewicz et al. | 2013
- 035015
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Detection of distributed static and dynamic loads with electrolyte-enabled distributed transducers in a polymer-based microfluidic deviceWenting Gu / Peng Cheng / Arindam Ghosh et al. | 2013
- 035016
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MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolutionZ Xiong / B Walter / E Mairiaux et al. | 2013
- 035017
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Experimental investigation of Cu-based, double-layered, microchannel heat exchangersBin Lu / W J Meng / Fanghua Mei et al. | 2013
- 035018
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Microstructure formation in a thick polymer by electrostatic-induced lithographyG Liu / W Yu / H Li et al. | 2013
- 035019
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Microfabrication and calibration of a single-polarity piezoresistive three-dimensional stress sensing chipH H Gharib / W A Moussa et al. | 2013
- 035020
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Laser micromachining as a metallization tool for microfluidic polymer stacksT Brettschneider / C Dorrer / D Czurratis et al. | 2013
- 035021
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Transfer of a continuous-relief lenticular array onto a quartz substrate by using SIL combined with the dry-etching methodQing-Long Deng / Chien-Yue Chen / Wei-Li Lin et al. | 2013
- 035022
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Realization of complex three-dimensional free-standing structures on silicon substrates using controllable underetching in a deep reactive ion etchingA Sandoughsaz / S Azimi / H Mazreati et al. | 2013
- 035023
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Temperature-dependent yield effects on composite beams used in CMOS MEMSF Y Kuo / C S Chang / Y S Liu et al. | 2013
- 035024
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Effects of the process temperature and rolling speed on the thermal roll-to-roll imprint lithography of flexible polycarbonate filmKi-Ju Sohn / Jae Hong Park / Dong-Eon Lee et al. | 2013
- 035025
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Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etchingV F G Tseng / H Xie et al. | 2013
- 035026
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Microfluidic jet injection for delivering macromolecules into cellsA Adamo / O Roushdy / R Dokov et al. | 2013
- 035027
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Design of a piezoresistive triaxial force sensor probe using the sidewall doping methodTetsuo Kan / Hidetoshi Takahashi / Nguyen Binh-Khiem et al. | 2013
- 035028
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Vertical comb drive actuator for the measurement of piezoelectric coefficients in small-scale systemsJ Wooldridge / A Muniz-Piniella / M Stewart et al. | 2013
- 035029
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Bulk micromachined energy harvesters employing (K, Na)NbO3 thin filmLe Van Minh / Motoaki Hara / Fumimasa Horikiri et al. | 2013
- 035030
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Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processesY C Chen / J P Chu / J S C Jang et al. | 2013
- 035031
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Fabrication and electromechanical actuation of epitaxial SrTiO3 (0 0 1) microcantileversMichele Biasotti / Luca Pellegrino / Renato Buzio et al. | 2013
- 035032
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Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidityTomoki Tanemura / Shuichi Yamashita / Hiroyuki Wado et al. | 2013
- 035033
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A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing techniqueCheng-Huan Yang / Sen-Yeu Yang et al. | 2013
- 035034
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Rapid laser prototyping of valves for microfluidic autonomous systemsM I Mohammed / E Abraham / M P Y Desmulliez et al. | 2013
- 035035
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Plasma extraction by centrifugo-pneumatically induced gating of flowRobert Burger / Nuno Reis / João Garcia da Fonseca et al. | 2013
- 035036
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Wettability-gradient-driven micropump for transporting discrete liquid dropsHamzeh K Bardaweel / Konstantin Zamuruyev / Jean-Pierre Delplanque et al. | 2013
- 035037
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Development of an SU-8 MEMS process with two metal electrodes using amorphous silicon as a sacrificial materialKhaled S Ramadan / Tarek Nasr / Ian G Foulds et al. | 2013
- 035038
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A simple approach to sub-100 nm resist nanopatterns with a high aspect ratioB Y Zong / P Ho / G C Han et al. | 2013
- 035039
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The effects of DRIE operational parameters on vertically aligned micropillar arraysKane Miller / Mingxiao Li / Kevin M Walsh et al. | 2013
- 035040
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Micro-scale delaminating and buckling of thin film on soft substrateDan Wu / Huimin Xie / Yajun Yin et al. | 2013
- 037001
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The application of temperature-sensitive paints for surface and fluid temperature measurements in both thermal developing and fully developed regions of a microchannelChih-Yung Huang / Chen-An Li / Hsiang-Yu Wang et al. | 2013
- 037002
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Fabrication and bonding of thiol-ene-based microfluidic devicesTiina M Sikanen / Josiane P Lafleur / Maria-Elisa Moilanen et al. | 2013