JOURNAL OF MICROMECHANICS AND MICROENGINEERING
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1
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Design and fabrication of meso-scale variable capacitance motor for miniature heat pumpsR Agrawal / Q Hasan / N Ashraf et al. | 2003
- 8
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Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic designKwang-Hyeon Hwang / Kwon-Hee Lee / Gyung-Jin Park et al. | 2003
- 18
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Protein patterning by virtual mask photolithography using a micromirror arrayKook-Nyung Lee / Dong-Sik Shin / Yoon-Sik Lee et al. | 2003
- 26
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Effective roughness reduction of {100} and {311} planes in anisotropic etching of {100} silicon in 5% TMAHDrago Resnik / D Vrtacnik / U Aljancic et al. | 2003
- 35
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Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantationJianmin Miao / Bernard L Weiss / Hans L Hartnagel et al. | 2003
- 40
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Time and frequency response of two-arm micromachined thermal actuatorsRyan Hickey / Dan Sameoto / Ted Hubbard et al. | 2003
- 47
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Precise [100] crystal orientation determination on ⟨110⟩-oriented silicon wafersFan-Gang Tseng / Kai-Chen Chang et al. | 2003
- 47
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Precise (100) crystal orientation determination on IMG entity="langle"SRC="http: ej.iop.org-icons-Entities-langle.gi "ALT="langle"ALIGN="MIDDLE">110IMG entity="rangl "SRC="http: ej.iop.org-icons-Entities-rangle.gif" ALT="rangle" ALIGN="MIDDLE">-oriented silicon wafersTseng, Fan-Gang et al. | 2003
- 53
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Evaluation of viscous dissipation in liquid flow in microchannelsB Xu / K T Ooi / C Mavriplis et al. | 2003
- 58
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Characterization of an integrated micro heat pipeMan Lee / Man Wong / Yitshak Zohar et al. | 2003
- 65
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System modelling of a vibratory micromachined gyroscope with bar structureLufeng Che / Bin Xiong / Yuelin Wang et al. | 2003
- 72
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Electric spring modeling for a comb actuator deformed by the footing effect in deep reactive ion etchingJune-Young Lee / Seong-Hyok Kim / Hyung-Taek Lim et al. | 2003
- 80
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Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatingsRu Feng / Richard J Farris et al. | 2003
- 89
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Quantitatively controlled nanoliter liquid manipulation using hydrophobic valving and control of surface wettabilitySang-Ho Lee / Chang-Soo Lee / Byung-Gee Kim et al. | 2003
- 98
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Fabrication of a microlens array using micro-compression molding with an electroformed mold insertSu-dong Moon / Namsuk Lee / Shinill Kang et al. | 2003
- 104
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Identification and speed control of ultrasonic motors based on neural networksX Xu / Y C Liang / H P Lee et al. | 2003
- 115
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Analytical treatment of flow in infinitely extended circular microchannels and the effect of slippage to increase flow efficiencyJun Yang / Daniel Y Kwok et al. | 2003
- 124
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Micromachined III#8211V cantilevers for AFM-tracking scanning Hall probe microscopyBrook, A.J. et al. | 2003
- 124
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Micromachined III–V cantilevers for AFM-tracking scanning Hall probe microscopyA J Brook / S J Bending / J Pinto et al. | 2003
- 129
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A simple deflection-testing method to determine Poisson's ratio for MEMS applicationsCheng Luo / Thomas W Schneider / Robert C White et al. | 2003
- 134
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Design, realization and teseting of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reductionGalayko, D. / Kaiser, A. / Buchaillot, L. et al. | 2003
- 134
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Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reductionDimitri Galayko / Andreas Kaiser / Lionel Buchaillot et al. | 2003
- 141
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Effect of width on the stress-induced bending of micromachined bilayer cantileversMax Ti-Kuang Hou / Rongshun Chen et al. | 2003
- 149
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Analysis of elastic micro optical components under large deformationKazunori Hoshino / Isao Shimoyama et al. | 2003
- 155
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Size and shape effects on two-phase flow patterns in microchannel forced convection boilingMan Lee / Yiu Yan Wong / Man Wong et al. | 2003
- N1
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A new technique using foil electrodes for the electro-discharge machining of micro groovesS H Yeo / M Murali et al. | 2003
- N6
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Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverageN R Tas / T Sonnenberg / R Molenaar et al. | 2003
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TECHNICAL NOTE: A new technique using foil electrodes for the electro-discharge machining of micro groovesYeo, S.H. et al. | 2003
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TECHNICAL NOTE: Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverageTas, N.R. et al. | 2003