Journal of vacuum science and technology / B
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Table of contents
- 50601
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Letters - Creating nanoscale Ag patterns on the Si(111)-(√3 × √3)R30°-Ag surface via guided self-assemblyBelianinov, Alex et al. | 2012
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Proximity error correction method for continuous moving stage electron beam writingKasture, Sachin / V. V., Nikesh / Mulay, Gajendra et al. | 2012
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Effect of niobium doping on the optical and electrical properties in titanium dioxide grown by pulsed laser depositionBae, Hyojung / Ha, Jun-Seok / Park, Seunghwan et al. | 2012
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Review Article - Interplay of native point defects with ZnO Schottky barriers and dopingBrillson, Leonard J et al. | 2012
- 51201
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Electronic & Optoelectronic Materials, Devices & Processing - Formation of high quality nano-crystallized Ge films on quartz substrates at moderate temperatureLi, Cong et al. | 2012
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Thin InAs membranes and GaSb buffer layers on GaAs(001) substratesAstromskas, Gvidas / Borg, Mattias / Wernersson, Lars-Erik et al. | 2012
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Studies on InAs/GaSb superlattice structural properties by high resolution x-ray diffractionZhou, Yi / Chen, Jianxin / Xu, Qingqing et al. | 2012
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Boron filling of high aspect ratio holes by chemical vapor deposition for solid-state neutron detector applicationsHuang, Kuan-Chih / Dahal, Rajendra / LiCausi, Nicolas et al. | 2012
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In situ grown Ge in an arsenic-free environment for GaAs/Ge/GaAs heterostructures on off-oriented (100) GaAs substrates using molecular beam epitaxyHudait, Mantu K. / Zhu, Yan / Jain, Nikhil et al. | 2012
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Interface studies on high-k/GaAs MOS capacitors by deep level transient spectroscopyKundu, Souvik / Anitha, Yelagam / Chakraborty, Supratic et al. | 2012
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Formation and morphological evolution of InAs quantum dots grown by chemical beam epitaxyZribi, Jihene / Morris, Denis / Arès, Richard et al. | 2012
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Inductively coupled plasma deep etching of InP/InGaAsP in Cl2/CH4/H2 based chemistries with the electrode at 20 °CWieczorek, Andreas / Djara, Vladimir / Peters, Frank H. et al. | 2012
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193 nm excimer laser lift-off for AlGaN/GaN high electron mobility transistorsWang, Xiaotie / Lo, Chien-Fong / Liu, Lu et al. | 2012
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Effects of polarity and surface treatment on Ga- and N-polar bulk GaNFoussekis, Michael / Ferguson, Josephus D. / McNamara, Joy D. et al. | 2012
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Lithography - Large contrast enhancement by sonication assisted cold development process for low dose and ultrahigh resolution patterning on ZEP520A positive tone resistTobing, Landobasa Y M et al. | 2012
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Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nmHo, Grace H. / Shao, Chih-H. / Sung, Jia-J. et al. | 2012
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Thermally reflowed ZEP 520A for gate length reduction and profile rounding in T-gate fabricationDowney, Brian P. / Meyer, David J. / Bass, Robert et al. | 2012
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Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanksUpadhyaya, Mihir / Denbeaux, Gregory / Kadaksham, Arun John et al. | 2012
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Mitigation of extreme ultraviolet mask defects by pattern shifting: Method and statisticsWagner, Alfred / Burkhardt, Martin / Clay, Alexander B. et al. | 2012
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Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithographyJohnson, Kenneth C. et al. | 2012
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Nanometer Science & Technology - Influence of film thickness and deposition rate on surface quality of polyparylene coatingsSchamberger, Florian et al. | 2012
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First-principles calculations and XPS measurements of gold segregation at the Cu3Au(111) surfaceDionízio Moreira, Marcos / Fontes, Giselle N. / Niehus, Horst et al. | 2012
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Void detection in copper interconnects using energy dispersive x-ray spectroscopyTsigkourakos, Menelaos / Vandervorst, Wilfried / Hantschel, Thomas et al. | 2012
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ac heating–dc detecting method for Seebeck coefficient measurement of the thermoelectric micro/nano devicesMiao, Tingting / Ma, Weigang / Zhang, Xing et al. | 2012
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Substrate temperature and electron fluence effects on metallic films created by electron beam induced depositionRosenberg, Samantha G. / Landheer, Kees / Hagen, Cornelis W. et al. | 2012
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Laser polishing of niobium for application to superconducting radio frequency cavitiesSingaravelu, Senthilraja / Klopf, J. Michael / Xu, Chen et al. | 2012
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Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer depositionZhu, Chiyu / Smith, David J. / Nemanich, Robert J. et al. | 2012
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Microelectronic & Nanoelectronic Devices - Characterization of enhancement-mode n-channel sulfur-treated InP MOSFET with liquid phase deposition-TiO2 gate oxideYen, Chih-Feng et al. | 2012
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Formation of large-area GaN nanostructures with controlled geometry and morphology using top-down fabrication schemeParamanik, Dipak / Motayed, Abhishek / Aluri, Geetha S. et al. | 2012
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Cu film thermal stability on plasma cleaned polycrystalline RuLiu, Xin / Zhu, Chiyu / Eller, Brianna S. et al. | 2012
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Formation of high quality nano-crystallized Ge films on quartz substrates at moderate temperatureLi, Cong / Xu, Jun / Li, Wei et al. | 2012
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Large contrast enhancement by sonication assisted cold development process for low dose and ultrahigh resolution patterning on ZEP520A positive tone resistTobing, Landobasa Y. M. / Tjahjana, Liliana / Zhang, Dao Hua et al. | 2012
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Interplay of native point defects with ZnO Schottky barriers and dopingBrillson, Leonard J. / Dong, Yufeng / Tuomisto, Filip et al. | 2012
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Characterization of enhancement-mode n-channel sulfur-treated InP MOSFET with liquid phase deposition-TiO2 gate oxideYen, Chih-Feng / Lee, Ming-Kwei et al. | 2012
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Influence of film thickness and deposition rate on surface quality of polyparylene coatingsSchamberger, Florian / Ziegler, Astrid / Franz, Gerhard et al. | 2012
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CUMULATIVE AUTHOR INDEX| 2012
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Nanotechnology & Microelectronics: Materials, Processing, Measurement, and Phenomena| 2012
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Creating nanoscale Ag patterns on the Si(111)–(√3 × √3)R30°-Ag surface via guided self-assemblyBelianinov, Alex / Ünal, Barış / Tringides, Michael C. et al. | 2012