Journal of vacuum science and technology / B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
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Novel electron monochromator for high resolution imaging and spectroscopyMankos, Marian / Shadman, Khashayar / Kolarik, Vladimir et al. | 2016
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Investigating compositional effects of atomic layer deposition ternary dielectric Ti-Al-O on metal-insulator-semiconductor heterojunction capacitor structure for gate insulation of InAlN/GaN and AlGaN/GaNColon, Albert / Stan, Liliana / Divan, Ralu et al. | 2016
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Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithographyAngelov, Tihomir / Ahmad, Ahmad / Guliyev, Elshad et al. | 2016
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Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughnessMack, Chris A. et al. | 2016
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Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM imagesLi, Dehua / Guo, Rui / Lee, Soo-Young et al. | 2016
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Injection of 2D electron gas into a quantum-dot organic light-emitting diode structure on silicon substrateEmon, Daud Hasan / Kim, Myungji / Sharbati, Mohammad Taghi et al. | 2016
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Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithographyBabocký, Jiří / Dvořák, Petr / Ligmajer, Filip et al. | 2016
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Silicon nanostructures with very large negatively tapered profile by inductively coupled plasma-RIEAyari-Kanoun, Asma / Aydinoglu, Ferhat / Cui, Bo et al. | 2016
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Comparative study of resists and lithographic tools using the Lumped Parameter ModelFallica, Roberto / Kirchner, Robert / Ekinci, Yasin et al. | 2016
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Deposition and etching characteristic of magnetite thin film for absorptive wire grid polarizer with 45 nm line and space patternCho, Young Tae / Jeong, Jiyun / Kim, Ji Hoon et al. | 2016
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Versatile multicharacterization platform involving tailored superhydrophobic SU-8 micropillars for the investigation of breast cancer estrogen receptor isoformsAccardo, Angelo / Trevisiol, Emmanuelle / Cerf, Aline et al. | 2016
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Atomic emission spectroscopy of electrically triggered exploding nanoparticle analytes on graphene/SiO2/Si substrateLiu, Siyang / Kim, Myungji / Kim, Hong Koo et al. | 2016
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Mask registration and lithography platform portability for nitride fin-based field effect transistors prototypingSuh, Jae Woo / Babb, Michael E. / Principe, Edward L. et al. | 2016
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Pattern-generation and pattern-transfer for single-digit nano devicesRangelow, Ivo W. / Ahmad, Ahmad / Ivanov, Tzvetan et al. | 2016
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Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototypingLeonhardt, Alessandra / Puydinger dos Santos, Marcos Vinicius / Diniz, José Alexandre et al. | 2016
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Flat and highly flexible composite stamps for nanoimprint, their preparation and their limitsPapenheim, Marc / Mayer, Andre / Wang, Si et al. | 2016
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Impact of template stiffness during peeling release in nanoimprint lithographyChalvin, Florian / Nakamura, Naoto / Tochino, Takamitsu et al. | 2016
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Mixture of ZEP and PMMA with varying ratios for tunable sensitivity as a lift-off resist with controllable undercutZheng, Shuo / Dey, Ripon Kumar / Aydinoglu, Ferhat et al. | 2016
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Displacement Talbot lithography nanopatterned microsieve array for directional neuronal network formation in brain-on-chipXie, Sijia / Schurink, Bart / Berenschot, Erwin J. W. et al. | 2016
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Pt-guided formation of Au nanoislands on Au nanorods and its optical propertiesLiu, Jian-Bo / Zhang, Yu-Shi / Wang, Yue-Ping et al. | 2016
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Source imperfection impacts on optical proximity correctionMelvin, Lawrence S. / Isoyan, Artak / Sawh, Chander et al. | 2016
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Effects of contact states on polymer pattern deformation during demolding process in nanoimprint lithographyMa, Lijun / Wang, Qing / Zhang, Rui et al. | 2016
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Nanoimprint-induced orientation of localized wrinkles with SU-8Steinberg, Christian / Runkel, Manuel / Papenheim, Marc et al. | 2016
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Development of transparent microwell arrays for optical monitoring and dissection of microbial communitiesHalsted, Michelle / Wilmoth, Jared L. / Briggs, Paige A. et al. | 2016
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Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin filmsYang, Kyungwhan / Cho, Kyoungah / Kim, Sangsig et al. | 2016
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Transmission electron imaging in the Delft multibeam scanning electron microscope 1Ren, Yan / Kruit, Pieter et al. | 2016
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Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealingHou, Huilong / Hamilton, Reginald F. / Horn, Mark W. et al. | 2016
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Large area three dimensional structure fabrication using multilayer electron beam lithographyBonam, Ravi K. / Hartley, John G. et al. | 2016
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Lithography via electrospun fibers with quantitative morphology analysisBeisel, Joshua D. / Murphy, John P. / Andriolo, Jessica M. et al. | 2016
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Viscosity range of UV-curable resins usable in print and imprint method for preparing sub-100-nm-wide resin patternsUehara, Takuya / Onuma, Akiko / Tanabe, Akira et al. | 2016
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Analytic estimation of line edge roughness for large-scale uniform patterns in electron-beam lithographyGuo, Rui / Lee, Soo-Young / Choi, Jin et al. | 2016
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Replication of nanopits and nanopillars by roll-to-roll extrusion coating using a structured cooling rollMurthy, Swathi / Pranov, Henrik / Pedersen, Henrik C. et al. | 2016
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Design, fabrication, and characterization of polymer-based cantilever probes for atomic force microscopesYu, Fangzhou / Liu, Jiangbo / Zhang, Xiao et al. | 2016
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Study of alternate hardmasks for extreme ultraviolet patterningDe Silva, Anuja / Seshadri, Indira / Arceo, Abraham et al. | 2016
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Effect of elastic modulus of UV cured resist on demolding forceShirai, Masamitsu / Uemura, Kimiaki / Shimomukai, Kazuma et al. | 2016
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Shape positional accuracy optimization via writing order correctionLopez, Gerald G. / Wood, Steven A. / Metzler, Meredith G. et al. | 2016
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High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stampsChidambaram, Nachiappan / Kirchner, Robert / Altana, Mirco et al. | 2016
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Hybrid organic–inorganic perovskite composite fibers produced via melt electrospinningMurphy, John P. / Ross, Brandon M. / Andriolo, Jessica M. et al. | 2016
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Temperature induced color change in gold nanoparticle arrays: Investigating the annealing effect on the localized surface plasmon resonanceHolm, Vårin R. A. / Greve, Martin M. / Holst, Bodil et al. | 2016
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Overlay improvement in nanoimprint lithography for 1×-nm patterningFukuhara, Kazuya / Suzuki, Masato / Mitsuyasu, Masaki et al. | 2016
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Nanoimprint-assisted shear exfoliation plus transfer printing for producing transition metal dichalcogenide heterostructuresLi, Da / Wi, Sungjin / Chen, Mikai et al. | 2016
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Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFMLorenzoni, Matteo / Llobet, Jordi / Gramazio, Federico et al. | 2016
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Scatterometry for nanoimprint lithographyZhu, Ruichao / Brueck, Steven R. J. / Dawson, Noel et al. | 2016
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Ultralow voltage imaging using a miniature electron beam columnSpallas, James / Meisburger, Dan / Muray, Lawrence et al. | 2016
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Materials characterization for multilayer electron beam lithographyBonam, Ravi K. / Hartley, John G. et al. | 2016
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Extraction of bulk and interface trap densities in amorphous InGaZnO thin-film transistorsJeong, Chan-Yong / Kim, Hee-Joong / Kim, Jong In et al. | 2016
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Embedded silicon carbide “replicas” patterned by rapid thermal processing of DNA origami on siliconPillers, Michelle A. / Lieberman, Marya et al. | 2016
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Electromigration behavior of Cu metallization interfacing with Ta versus TaN at high temperaturesMardani, Shabnam / Norström, Hans / Smith, Ulf et al. | 2016
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Massive Ta diffusion observed in Cu thin films but not in Ag counterpartsMardani, Shabnam / Norström, Hans / Gustavsson, Fredrik et al. | 2016
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Modified photoluminescence and photodetection characteristics of chemically grown SnO coated ZnO nanoneedlesBayan, Sayan / Mishra, Sheo K. / Satpati, Biswarup et al. | 2016
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Influence of hydrogen passivation on the luminescence of Si quantum dots embedded in Si3NxCadogan, Carolyn C. / Goncharova, Lyudmila V. / Simpson, Peter J. et al. | 2016
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Energetic Cs+ ion interaction with common microelectronic materials—An investigation of a future FIB candidate sourceDrezner, Yariv / Greenzweig, Yuval / Raveh, Amir et al. | 2016
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Electrical characterization of a gate-recessed AlGaN/GaN high-electron-mobility transistor with a p-GaN passivation layerHsueh, Kuang-Po / Chien, Feng-Tso / Peng, Li-Yi et al. | 2016
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Optical constants of germanium and thermally grown germanium dioxide from 0.5 to 6.6eV via a multisample ellipsometry investigationNunley, Timothy Nathan / Fernando, Nalin S. / Samarasingha, Nuwanjula et al. | 2016
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Electrical transport properties of nickel chromium alloy filmsLi, Zhaoguo / Peng, Liping / Zhang, Jicheng et al. | 2016
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Aluminum-based contacts for use in GaSb-based diode lasersTran, Thanh-Nam / Patra, Saroj Kumar / Breivik, Magnus et al. | 2016
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Influence of ambient gas pressure and carbon adsorption on dark current emission from a cathodeMárquez-Mijares, Maykel / Lepetit, Bruno / Lemoine, Didier et al. | 2016
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Electron beam lithography patterned hydrogen silsesquioxane resist as a mandrel for self-aligned double patterning applicationDesai, Vishal U. / Hartley, John G. / Cady, Nathaniel C. et al. | 2016
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CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperatureKaganskiy, Arsenty / Heuser, Tobias / Schmidt, Ronny et al. | 2016
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Multifield sub-5 nm overlay in imprint lithographyAjay, Paras / Cherala, Anshuman / Yin, Bailey A. et al. | 2016
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Toward reliable photoconductive atomic force microscopy measurementsSviridov, Dmitry E. / Kozlovsky, Vladimir I. et al. | 2016
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PMMA removal selectivity to polystyrene using dry etch approachSarrazin, Aurelien / Posseme, Nicolas / Pimenta-Barros, Patricia et al. | 2016
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Prediction of surface topography due to finite pixel spacing in FIB milling of rectangular boxes and trenchesBorgardt, Nikolay I. / Rumyantsev, Alexander V. et al. | 2016
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Bim+ ion beam patterning of germanium surfaces at different temperatures and ion fluenceHernández, Angélica Guadalupe / Kudriavtsev, Yuriy et al. | 2016
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Etch stop improvement using a roof mask structure in a magnetic material etched by CO/NH3 plasmaSatake, Makoto / Yamada, Masaki / Matsumoto, Eiji et al. | 2016
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Milling a silicon nitride membrane by focused ion beamPeltonen, Antti / Nguyen, Hung Q. / Muhonen, Juha T. et al. | 2016
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Stabilizing effect of diamond thin film on nanostructured silicon carbide field emission arrayGolubkov, Vladimir A. / Ivanov, Alexey S. / Ilyin, Vladimir A. et al. | 2016
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Effects of aging on nanoscale planar metal-insulator-metal tunnel junctionsDroulers, Gabriel / Ecoffey, Serge / Pioro-Ladrière, Michel et al. | 2016
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Plasma and photon interactions with organosilicon polymers for directed self-assembly patterning applicationsAzarnouche, Laurent / Sirard, Stephen M. / Durand, William J. et al. | 2016
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Reconstructing focused ion beam current density profile by iterative simulation methodologyChang, Eddie / Toula, Kevin / Ray, Valery et al. | 2016
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Large area fast-AFM scanning with active “Quattro” cantilever arraysAhmad, Ahmad / Nikolov, Nikolay / Angelov, Tihomir et al. | 2016
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Fabrication process for 200 nm-pitch polished freestanding ultrahigh aspect ratio gratingsBruccoleri, Alexander R. / Heilmann, Ralf K. / Schattenburg, Mark L. et al. | 2016
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Nanofluidic flow assisted assembly of dispersed plasmonic nanostructures into shallow nanochannel sensorsNam, Hongsuk / Yoon, Jeong Seop / Izuoka, Hiroto et al. | 2016
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Experimental constructions of binary matrices with good peak-sidelobe distancesMichel, Jerod et al. | 2016
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Review Article: FePt heat assisted magnetic recording mediaWeller, Dieter / Parker, Gregory / Mosendz, Oleksandr et al. | 2016
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Impact of parallelism on data volumes for a multibeam mask writerChaudhary, Narendra / Luo, Yao / Savari, Serap A. et al. | 2016
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Induction-heated nanoimprint on soda-lime glass using sapphire moldsCai, Jingxuan / Li, Shijie / Guo, Xu et al. | 2016
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High-resolution, high-aspect-ratio iridium–nickel composite nanoimprint moldsLee, Chang-Sheng / Lee, Yeong-Yuh / Chong, Karen S. L. et al. | 2016