Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 435
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PAPERS - Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical depositionYeo, S.H. et al. | 2001
- 435
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Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical depositionS H Yeo / J H Choo et al. | 2001
- 443
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Thermoelastic effect of silicon for strain sensingYongchul Ahn / Henry Guckel et al. | 2001
- 443
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PAPERS - Thermoelastic effect of silicon for strain sensingAhn, Y. et al. | 2001
- 452
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Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuatorNilesh D Mankame / G K Ananthasuresh et al. | 2001
- 452
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PAPERS - Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuatorMankame, N.D. et al. | 2001
- 463
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The posture effects of a slider air bearing on its performance with a direct simulation Monte Carlo methodNingyu Liu / Eddie Yin-Kwee Ng et al. | 2001
- 463
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PAPERS - The posture effects of a slider air bearing on its performance with a direct simulation Monte Carlo methodLiu, N. et al. | 2001
- 474
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PAPERS - Study of factors influencing the microdosing of unfilled adhesivesDilthey, U. et al. | 2001
- 474
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Study of factors influencing the microdosing of unfilled adhesivesUlrich Dilthey / Anette Brandenburg / Markus Möller et al. | 2001
- 481
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Bonding of IC bare chips for microsystems using Ar atom bombardmentAkiomi Kohno / Yasuhiko Sasaki / Ryujirou Udo et al. | 2001
- 481
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PAPERS - Bonding of IC bare chips for microsystems using Ar atom bombardmentKohno, A. et al. | 2001
- 487
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Modeling and control of piezoelectric cantilever beam micro-mirror and micro-laser arrays to reduce image banding in electrophotographic processesHung-Ming Cheng / Michael T S Ewe / George T-C Chiu et al. | 2001
- 487
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PAPERS - Modeling and control of piezoelectric cantilever beam micro-mirror and micro-laser arrays to reduce image banding in electrophotographic processesCheng, H.-M. et al. | 2001
- 499
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PAPERS - Influence of the angle between etched (near) Si(111) surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of siliconNijdam, A.J. et al. | 2001
- 499
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Influence of the angle between etched (near) Si{ 111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of siliconA J Nijdam / J G E Gardeniers / J W Berenschot et al. | 2001
- 504
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PAPERS - An optimized micromachined convective accelerometer with no proof massLuo, X.B. et al. | 2001
- 504
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An optimized micromachined convective accelerometer with no proof massX B Luo / Y J Yang / F Zheng et al. | 2001
- 509
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Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arraysFrank Niklaus / Edvard Kälvesten / Göran Stemme et al. | 2001
- 509
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PAPERS - Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arraysNiklaus, F. et al. | 2001
- 514
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A fully packaged single crystalline resonant force sensorM Haueis / J Dual / C Cavalloni et al. | 2001
- 514
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PAPERS - A fully packaged single crystalline resonant force sensorHaueis, M. et al. | 2001
- 522
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Two-level electrochemical micromachining of titanium for device fabricationY Ferri / O Piotrowski / P-F Chauvy et al. | 2001
- 522
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PAPERS - Two-level electrochemical micromachining of titanium for device fabricationFerri, Y. et al. | 2001
- 528
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Fluidic microsystems based on printed circuit board technologyAnsgar Wego / Stefan Richter / Lienhard Pagel et al. | 2001
- 528
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PAPERS - Fluidic microsystems based on printed circuit board technologyWego, A. et al. | 2001
- 532
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Soft and rigid two-level microfluidic networks for patterning surfacesDavid Juncker / Heinz Schmid / André Bernard et al. | 2001
- 532
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PAPERS - Soft and rigid two-level microfluidic networks for patterning surfacesJuncker, D. et al. | 2001
- 542
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Electroporation microchips for in vitro gene transfectionYu-Cheng Lin / Ming-Yuan Huang et al. | 2001
- 542
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PAPERS - Electroporation microchips for in vitro gene transfectionLin, Y.-C. et al. | 2001
- 548
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Mathematical modeling of drop mixing in a slit-type microchannelK Handique / M A Burns et al. | 2001
- 548
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PAPERS - Mathematical modeling of drop mixing in a slit-type microchannelHandique, K. et al. | 2001
- 555
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Parallel-plate electrostatic actuation with vertical hingesMurat Gel / Isao Shimoyama et al. | 2001
- 555
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PAPERS - Parallel-plate electrostatic actuation with vertical hingesGel, M. et al. | 2001
- 561
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Silicon (110) grid for ion beam processing systemsR Sawada / E Higurashi / F Shimokawa et al. | 2001
- 561
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PAPERS - Silicon (110) grid for ion beam processing systemsSawada, R. et al. | 2001
- 567
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PAPERS - Micromachined pre-focused 1 x N flow switches for continuous sample injectionLee, G.-B. et al. | 2001
- 567
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Micromachined pre-focused 1 x N flow switches for continuous sample injectionLee, G.B. / Hung, C.I. / Ke, B.J. et al. | 2001
- 567
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Micromachined pre-focused 1×N flow switches for continuous sample injectionGwo-Bin Lee / Chen-I Hung / Bin-Jo Ke et al. | 2001
- 574
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A novel spiral CMOS compatible micromachined thermoelectric IR microsensorE Socher / O Bochobza-Degani / Y Nemirovsky et al. | 2001
- 574
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PAPERS - A novel spiral CMOS compatible micromachined thermoelectric IR microsensorSocher, E. et al. | 2001
- 577
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PAPERS - Micro-to-macro fluidic interconnectors with an integrated polymer sealantTsai, J.-H. et al. | 2001
- 577
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Micro-to-macro fluidic interconnectors with an integrated polymer sealantJr-Hung Tsai / Liwei Lin et al. | 2001
- 582
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Microsprings and microcantilevers: studies of mechanical responseMary W Seto / Brian Dick / Michael J Brett et al. | 2001
- 582
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PAPERS - Microsprings and microcantilevers: Studies of mechanical responseSeto, M.W. et al. | 2001
- 589
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PAPERS - Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layerWinchester, K.J. et al. | 2001
- 589
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Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layerK J Winchester / J M Dell et al. | 2001
- 595
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Novel micro torque measurement method for microdevicesH Ota / T Ohara / Y Karata et al. | 2001
- 595
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PAPERS - Novel micro torque measurement method for microdevicesOta, H. et al. | 2001
- 603
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PAPERS - Resolution enhanced proximity printing by phase and amplitude modulating masksBühling, S. et al. | 2001
- 603
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Resolution enhanced proximity printing by phase and amplitude modulating masksSven Bühling / Frank Wyrowski / Ernst-Bernhard Kley et al. | 2001
- 612
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Fabrication of a micromachined optical modulator using the CMOS processChing-Liang Dai / Hung-Lin Chen / Pei-Zen Chang et al. | 2001
- 612
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PAPERS - Fabrication of a micromachined optical modulator using the CMOS processDai, C.-L. et al. | 2001
- N1
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Chemical analysis of bonded and debonded silicon-glass interfacesM M Visser / J A Plaza / D T Wang et al. | 2001
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TECHNICAL NOTE - Chemical analysis of bonded and debonded silicon-glass interfacesVisser, M.M. et al. | 2001