The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
<
Volume 122,
Issue part
Volume 122,
Issue a
Volume 86,
Issue 12
Volume 86,
Issue 11
Volume 86,
Issue 10
Volume 86,
Issue 9
Volume 86,
Issue 8
Volume 86,
Issue 7
Volume 86,
Issue 6
Volume 86,
Issue 5
Volume 86,
Issue 4
Volume 86,
Issue 3
Volume 86,
Issue 2
Volume 86,
Issue 1
Volume 85,
Issue 12
Volume 85,
Issue 11
Volume 85,
Issue 10
Volume 85,
Issue 9
Volume 85,
Issue 8
Volume 85,
Issue 7
Volume 85,
Issue 6
Volume 85,
Issue 5
Volume 85,
Issue 4
Volume 85,
Issue 3
Volume 85,
Issue 2
Volume 85,
Issue 1
Volume 84,
Issue 12
Volume 84,
Issue 11
Volume 84,
Issue 10
Volume 84,
Issue 9
Volume 84,
Issue 8
Volume 84,
Issue 7
Volume 84,
Issue 6
Volume 84,
Issue 5
Volume 84,
Issue 4
Volume 84,
Issue 3
Volume 84,
Issue 2
Volume 84,
Issue 1
Volume 83,
Issue 12
Volume 83,
Issue 11
Volume 83,
Issue 10
Volume 83,
Issue 9
Volume 83,
Issue 8
Volume 83,
Issue 7
Volume 83,
Issue 6
Volume 83,
Issue 5
Volume 83,
Issue 4
Volume 83,
Issue 3
Volume 83,
Issue 2
Volume 83,
Issue 1
Volume 82,
Issue 12
Volume 82,
Issue 11
Volume 82,
Issue 10
Volume 82,
Issue 9
Volume 82,
Issue 8
Volume 82,
Issue 7
Volume 82,
Issue 6
Volume 82,
Issue 5
Volume 82,
Issue 4
Volume 82,
Issue 3
Volume 82,
Issue 2
Volume 82,
Issue 1
Volume 81,
Issue 12
Volume 81,
Issue 11
Volume 81,
Issue 10
Volume 81,
Issue 9
Volume 81,
Issue 8
Volume 81,
Issue 7
Volume 81,
Issue 6
Volume 81,
Issue 5
Volume 81,
Issue 4
Volume 81,
Issue 3
Volume 81,
Issue 2
Volume 81,
Issue 1
Volume 80,
Issue 12
Volume 80,
Issue 11
Volume 80,
Issue 10
Volume 80,
Issue 9
Volume 80,
Issue 8
Volume 80,
Issue 7
Volume 80,
Issue 6
Volume 80,
Issue 5
Volume 80,
Issue 4
Volume 80,
Issue 3
Volume 80,
Issue 1
Volume 79,
Issue 4
Volume 79,
Issue 3
Volume 79,
Issue 2
Volume 79,
Issue 1
Volume 78,
Issue 4
Volume 78,
Issue 2
Volume 78,
Issue 1
Volume 77,
Issue 4
Volume 77,
Issue 3
Volume 77,
Issue 2
Volume 77,
Issue 1
Volume 76,
Issue 4
Volume 76,
Issue 3
Volume 76,
Issue 2
Volume 76,
Issue 1
Volume 75,
Issue 4
Volume 75,
Issue 3
Volume 75,
Issue 2
Volume 75,
Issue 1
Volume 74,
Issue 4
Volume 74,
Issue 3
Volume 74,
Issue 2
Volume 74,
Issue 1
Volume 73,
Issue 4
Volume 73,
Issue 3
Volume 73,
Issue 2
Volume 73,
Issue 1
Volume 72,
Issue 4
Volume 72,
Issue 3
Volume 72,
Issue 2
Volume 72,
Issue 1
Volume 71,
Issue 4
Volume 71,
Issue 3
Volume 71,
Issue 2
Volume 71,
Issue 1
Volume 70,
Issue 4
Volume 70,
Issue 3
Volume 70,
Issue 2
Volume 70,
Issue 1
Volume 69,
Issue 4
Volume 69,
Issue 3
Volume 69,
Issue 1
Volume 68,
Issue 4
Volume 68,
Issue 3
Volume 68,
Issue 2
Volume 68,
Issue 1
Volume 67,
Issue 4
Volume 67,
Issue 3
Volume 67,
Issue 2
Volume 67,
Issue 1
Volume 66,
Issue 4
Volume 66,
Issue 3
Volume 66,
Issue 2
Volume 66,
Issue 1
Volume 65,
Issue 4
Volume 65,
Issue 3
Volume 65,
Issue 2
Volume 65,
Issue 1
Volume 64,
Issue 4
Volume 64,
Issue 3
Volume 64,
Issue 2
Volume 64,
Issue 1
Volume 63,
Issue 4
Volume 63,
Issue 3
Volume 63,
Issue 2
Volume 63,
Issue 1
Volume 62,
Issue 4
Volume 62,
Issue 3
Volume 62,
Issue 2
Volume 62,
Issue 1
Volume 61,
Issue 4
Volume 61,
Issue 2
Volume 61,
Issue 1
Volume 60,
Issue 4
Volume 60,
Issue 3
Volume 60,
Issue 2
Volume 60,
Issue 1
Volume 59,
Issue 4
Volume 59,
Issue 3
Volume 59,
Issue 2
Volume 59,
Issue 1
Volume 58,
Issue 4
Volume 58,
Issue 3
Volume 58,
Issue 2
Volume 58,
Issue 1
Volume 57,
Issue 4
Volume 57,
Issue 3
Volume 57,
Issue 2
Volume 57,
Issue 1
Volume 56,
Issue 4
Volume 56,
Issue 3
Volume 56,
Issue 2
Volume 56,
Issue 1
Volume 55,
Issue 4
Volume 55,
Issue 3
Volume 55,
Issue 2
Volume 55,
Issue 1
Volume 54,
Issue 4
Volume 54,
Issue 1
Volume 53,
Issue 4
Volume 53,
Issue 3
Volume 53,
Issue 2
Volume 53,
Issue 1
Volume 52,
Issue 4
Volume 52,
Issue 3
Volume 52,
Issue 2
Volume 52,
Issue 1
Volume 51,
Issue 4
Volume 51,
Issue 3
Volume 51,
Issue 2
Volume 51,
Issue 1
Volume 50,
Issue 4
Volume 50,
Issue 3
Volume 50,
Issue 2
Volume 50,
Issue 1
Volume 49,
Issue 4
Volume 49,
Issue 3
Volume 49,
Issue 2
Volume 49,
Issue 1
Volume 48,
Issue 12
Volume 48,
Issue 11
Volume 48,
Issue 10
Volume 48,
Issue 9
Volume 48,
Issue 7
Volume 48,
Issue 6
Volume 48,
Issue 5
Volume 48,
Issue 4
Volume 48,
Issue 3
Volume 48,
Issue 2
Volume 48,
Issue 1
Volume 47,
Issue 12
Volume 47,
Issue 11
Volume 47,
Issue 10
Volume 47,
Issue 9
Volume 47,
Issue 8
Volume 47,
Issue 6
Volume 47,
Issue 5
Volume 47,
Issue 4
Volume 47,
Issue 3
Volume 47,
Issue 2
Volume 47,
Issue 1
Volume 46,
Issue 12
Volume 46,
Issue 11
Volume 46,
Issue 10
Volume 46,
Issue 8
Volume 46,
Issue 7
Volume 46,
Issue 6
Volume 46,
Issue 5
Volume 46,
Issue 4
Volume 46,
Issue 3
Volume 46,
Issue 2
Volume 46,
Issue 1
Volume 45,
Issue 12
Volume 45,
Issue 11
Volume 45,
Issue 10
Volume 45,
Issue 9
Volume 45,
Issue 8
Volume 45,
Issue 7
Volume 45,
Issue 6
Volume 45,
Issue 5
Volume 45,
Issue 4
Volume 45,
Issue 3
Volume 45,
Issue 2
Volume 45,
Issue 1
Volume 44,
Issue 12
Volume 44,
Issue 11
Volume 44,
Issue 10
Volume 44,
Issue 9
Volume 44,
Issue 8
Volume 44,
Issue 7
Volume 44,
Issue 5
Volume 44,
Issue 4
Volume 44,
Issue 3
Volume 44,
Issue 2
Volume 44,
Issue 1
Volume 43,
Issue 12
Volume 43,
Issue 11
Volume 43,
Issue 10
Volume 43,
Issue 9
Volume 43,
Issue 8
Volume 43,
Issue 7
Volume 43,
Issue 5
Volume 43,
Issue 4
Volume 43,
Issue 3
Volume 43,
Issue 2
Volume 43,
Issue 1
Volume 42,
Issue 18
Volume 42,
Issue 17
Volume 42,
Issue 16
Volume 42,
Issue 15
Volume 42,
Issue 14
Volume 42,
Issue 13
Volume 42,
Issue 12
Volume 42,
Issue 11
Volume 42,
Issue 10
Volume 42,
Issue 9
Volume 42,
Issue 8
Volume 42,
Issue 7
Volume 42,
Issue 6
Volume 42,
Issue 5
Volume 42,
Issue 4
Volume 42,
Issue 3
Volume 42,
Issue 2
Volume 42,
Issue 1
Volume 41,
Issue 9
Volume 41,
Issue 7
Volume 41,
Issue 6
Volume 41,
Issue 4
Volume 41,
Issue 3
Volume 41,
Issue 1
Volume 40,
Issue 6
Volume 40,
Issue 5
Volume 40,
Issue 4
Volume 40,
Issue 3
Volume 40,
Issue 2
Volume 40,
Issue 1
Volume 39,
Issue 12
Volume 39,
Issue 11
Volume 39,
Issue 10
Volume 39,
Issue 9
Volume 39,
Issue 8
Volume 39,
Issue 7
Volume 39,
Issue 6
Volume 39,
Issue 5
Volume 39,
Issue 4
Volume 39,
Issue 2
Volume 39,
Issue 1
Volume 38,
Issue 12
Volume 38,
Issue 11
Volume 38,
Issue 10
Volume 38,
Issue 8
Volume 38,
Issue 7
Volume 38,
Issue 5
Volume 38,
Issue 4
Volume 38,
Issue 3
Volume 38,
Issue 2
Volume 38,
Issue 1
Volume 37,
Issue 12
Volume 37,
Issue 11
Volume 37,
Issue 10
Volume 37,
Issue 9
Volume 37,
Issue 8
Volume 37,
Issue 7
Volume 37,
Issue 6
Volume 37,
Issue 5
Volume 37,
Issue 4
Volume 37,
Issue 3
Volume 37,
Issue 2
Volume 37,
Issue 1
Volume 36,
Issue 12
Volume 36,
Issue 11
Volume 36,
Issue 10
Volume 36,
Issue 9
Volume 36,
Issue 7
Volume 36,
Issue 6
Volume 36,
Issue 5
Volume 36,
Issue 4
Volume 36,
Issue 3
Volume 36,
Issue 1
Volume 35,
Issue 12
Volume 35,
Issue 11
Volume 35,
Issue 10
Volume 35,
Issue 9
Volume 35,
Issue 8
Volume 35,
Issue 7
Volume 35,
Issue 6
Volume 35,
Issue 5
Volume 35,
Issue 4
Volume 35,
Issue 3
Volume 35,
Issue 2
Volume 35,
Issue 1
Volume 34,
Issue 12
Volume 34,
Issue 11
Volume 34,
Issue 10
Volume 34,
Issue 9
Volume 34,
Issue 8
Volume 34,
Issue 7
Volume 34,
Issue 6
Volume 34,
Issue 5
Volume 34,
Issue 4
Volume 34,
Issue 3
Volume 34,
Issue 2
Volume 34,
Issue 1
Volume 33,
Issue 12
Volume 33,
Issue 10
Volume 33,
Issue 9
Volume 33,
Issue 8
Volume 33,
Issue 7
Volume 33,
Issue 6
Volume 33,
Issue 5
Volume 33,
Issue 4
Volume 33,
Issue 3
Volume 33,
Issue 2
Volume 33,
Issue 1
Volume 32,
Issue 12
Volume 32,
Issue 11
Volume 32,
Issue 10
Volume 32,
Issue 9
Volume 32,
Issue 8
Volume 32,
Issue 7
Volume 32,
Issue 6
Volume 32,
Issue 5
Volume 32,
Issue 4
Volume 32,
Issue 3
Volume 32,
Issue 2
Volume 32,
Issue 1
Volume 31,
Issue 12
Volume 31,
Issue 10
Volume 31,
Issue 9
Volume 31,
Issue 8
Volume 31,
Issue 7
Volume 31,
Issue 6
Volume 31,
Issue 5
Volume 31,
Issue 4
Volume 31,
Issue 3
Volume 31,
Issue 2
Volume 31,
Issue 1
Volume 30,
Issue 12
Volume 30,
Issue 11
Volume 30,
Issue 10
Volume 30,
Issue 9
Volume 30,
Issue 8
Volume 30,
Issue 7
Volume 30,
Issue 6
Volume 30,
Issue 5
Volume 30,
Issue 4
Volume 30,
Issue 3
Volume 30,
Issue 2
Volume 30,
Issue 1
Volume 29,
Issue 12
Volume 29,
Issue 11
Volume 29,
Issue 10
Volume 29,
Issue 9
Volume 29,
Issue 8
Volume 29,
Issue 7
Volume 29,
Issue 6
Volume 29,
Issue 5
Volume 29,
Issue 4
Volume 29,
Issue 3
Volume 29,
Issue 2
Volume 29,
Issue 1
Volume 28,
Issue 12
Volume 28,
Issue 11
Volume 28,
Issue 10
Volume 28,
Issue 9
Volume 28,
Issue 8
Volume 28,
Issue 7
Volume 28,
Issue 6
Volume 28,
Issue 5
Volume 28,
Issue 4
Volume 28,
Issue 3
Volume 28,
Issue 2
Volume 28,
Issue 1
Volume 27,
Issue 12
Volume 27,
Issue 11
Volume 27,
Issue 10
Volume 27,
Issue 9
Volume 27,
Issue 8
Volume 27,
Issue 7
Volume 27,
Issue 6
Volume 27,
Issue 5
Volume 27,
Issue 4
Volume 27,
Issue 3
Volume 27,
Issue 2
Volume 27,
Issue 1
Volume 26,
Issue 12
Volume 26,
Issue 11
Volume 26,
Issue 10
Volume 26,
Issue 9
Volume 26,
Issue 8
Volume 26,
Issue 7
Volume 26,
Issue 6
Volume 26,
Issue 5
Volume 26,
Issue 4
Volume 26,
Issue 3
Volume 26,
Issue 2
Volume 26,
Issue 1
Volume 25,
Issue 12
Volume 25,
Issue 11
Volume 25,
Issue 10
Volume 25,
Issue 9
Volume 25,
Issue 8
Volume 25,
Issue 7
Volume 25,
Issue 6
Volume 25,
Issue 5
Volume 25,
Issue 4
Volume 25,
Issue 3
Volume 25,
Issue 2
Volume 25,
Issue 1
Volume 24,
Issue 12
Volume 24,
Issue 11
Volume 24,
Issue 10
Volume 24,
Issue 9
Volume 24,
Issue 8
Volume 24,
Issue 7
Volume 24,
Issue 6
Volume 24,
Issue 5
Volume 24,
Issue 4
Volume 24,
Issue 3
Volume 24,
Issue 2
Volume 24,
Issue 1
Volume 23,
Issue 12
Volume 23,
Issue 11
Volume 23,
Issue 10
Volume 23,
Issue 9
Volume 23,
Issue 8
Volume 23,
Issue 7
Volume 23,
Issue 6
Volume 23,
Issue 4
Volume 23,
Issue 3
Volume 23,
Issue 2
Volume 23,
Issue 1
Volume 22,
Issue 12
Volume 22,
Issue 11
Volume 22,
Issue 9
Volume 22,
Issue 8
Volume 22,
Issue 7
Volume 22,
Issue 6
Volume 22,
Issue 5
Volume 22,
Issue 4
Volume 22,
Issue 3
Volume 22,
Issue 2
Volume 22,
Issue 1
Volume 21,
Issue 12
Volume 21,
Issue 11
Volume 21,
Issue 10
Volume 21,
Issue 9
Volume 21,
Issue 8
Volume 21,
Issue 7
Volume 21,
Issue 6
Volume 21,
Issue 5
Volume 21,
Issue 4
Volume 21,
Issue 3
Volume 21,
Issue 2
Volume 21,
Issue 1
Volume 20,
Issue 12
Volume 20,
Issue 11
Volume 20,
Issue 10
Volume 20,
Issue 9
Volume 20,
Issue 8
Volume 20,
Issue 7
Volume 20,
Issue 6
Volume 20,
Issue 5
Volume 20,
Issue 4
Volume 20,
Issue 3
Volume 20,
Issue 2
Volume 20,
Issue 1
Volume 19,
Issue 12
Volume 19,
Issue 11
Volume 19,
Issue 10
Volume 19,
Issue 9
Volume 19,
Issue 8
Volume 19,
Issue 7
Volume 19,
Issue 6
Volume 19,
Issue 5
Volume 19,
Issue 4
Volume 19,
Issue 3
Volume 19,
Issue 2
Volume 19,
Issue 1
Volume 18,
Issue 12
Volume 18,
Issue 11
Volume 18,
Issue 10
Volume 18,
Issue 9
Volume 18,
Issue 8
Volume 18,
Issue 7
Volume 18,
Issue 6
Volume 18,
Issue 5
Volume 18,
Issue 4
Volume 18,
Issue 3
Volume 18,
Issue 2
Volume 18,
Issue 1
Volume 17,
Issue 12
Volume 17,
Issue 11
Volume 17,
Issue 10
Volume 17,
Issue 9
Volume 17,
Issue 8
Volume 17,
Issue 7
Volume 17,
Issue 6
Volume 17,
Issue 5
Volume 17,
Issue 4
Volume 17,
Issue 3
Volume 17,
Issue 2
Volume 17,
Issue 1
Volume 16,
Issue 12
Volume 16,
Issue 11
Volume 16,
Issue 10
Volume 16,
Issue 9
Volume 16,
Issue 8
Volume 16,
Issue 7
Volume 16,
Issue 6
Volume 16,
Issue 5
Volume 16,
Issue 4
Volume 16,
Issue 3
Volume 16,
Issue 2
Volume 16,
Issue 1
Volume 15,
Issue 12
Volume 15,
Issue 11
Volume 15,
Issue 10
Volume 15,
Issue 9
Volume 15,
Issue 8
Volume 15,
Issue 7
Volume 15,
Issue 6
Volume 15,
Issue 5
Volume 15,
Issue 4
Volume 15,
Issue 3
Volume 15,
Issue 2
Volume 15,
Issue 1
Volume 14,
Issue 12
Volume 14,
Issue 11
Volume 14,
Issue 10
Volume 14,
Issue 9
Volume 14,
Issue 8
Volume 14,
Issue 7
Volume 14,
Issue 6
Volume 14,
Issue 5
Volume 14,
Issue 4
Volume 14,
Issue 3
Volume 14,
Issue 2
Volume 14,
Issue 1
Volume 13,
Issue 12
Volume 13,
Issue 11
Volume 13,
Issue 10
Volume 13,
Issue 9
Volume 13,
Issue 8
Volume 13,
Issue 7
Volume 13,
Issue 6
Volume 13,
Issue 5
Volume 13,
Issue 4
Volume 13,
Issue 3
Volume 13,
Issue 2
Volume 13,
Issue 1
Volume 12,
Issue 6
Volume 12,
Issue 5
Volume 12,
Issue 4
Volume 12,
Issue 3
Volume 12,
Issue 2
Volume 12,
Issue 1
Volume 11,
Issue 6
Volume 11,
Issue 5
Volume 11,
Issue 4
Volume 11,
Issue 3
Volume 11,
Issue 2
Volume 11,
Issue 1
Volume 10,
Issue 6
Volume 10,
Issue 5
Volume 10,
Issue 4
Volume 10,
Issue 3
Volume 10,
Issue 2
Volume 10,
Issue 1
Volume 9,
Issue 6
Volume 9,
Issue 5
Volume 9,
Issue 4
Volume 9,
Issue 3
Volume 9,
Issue 2
Volume 9,
Issue 1
Volume 4,
Issue 4
Volume 4,
Issue 3
Volume 4,
Issue 2
Volume 4,
Issue 1
Volume 3,
Issue 4
Volume 3,
Issue 3
Volume 3,
Issue 2
Volume 3,
Issue 1
Volume 2,
Issue 4
Volume 2,
Issue 3
Volume 2,
Issue 2
Volume 2,
Issue 1
Volume 1,
Issue 4
Volume 1,
Issue 3
Volume 1,
Issue 2
Volume 1,
Issue 1
>
Table of contents
189
Surface molecular dynamics of Si-SiO2 reactive ion etching
Hamaguchi, S.
et al.
| 2002
197
In situ monitoring of plasma parameters in the afterglow region of ECR sputtering system for tribological coatings
Lungu, C.P.
et al.
| 2002
203
Large area electron-beam-excited plasma of meter size for industrial applications
Homyara, H.
et al.
| 2002
209
Numerical investigation of the production mechanism of a low-temperature electron cyclotron resonance plasma
Muta, Hiroshi
et al.
| 2002
215
Numerical simulation of electron orbits in a magnetized plasma excited by a surface wave
Yoshida, Y.
et al.
| 2002
221
Effect of tin oxide dispersion on nodule formation in ITO sputtering
Nakashima, K.
et al.
| 2002
227
CrN films deposited by rf reactive sputtering using a plasma emission monitoring control
Inoue, Shozo
et al.
| 2002
233
GaN films deposited by planar magnetron sputtering
Kikuma, T.
et al.
| 2002
239
Study of electron field emission and structural properties of nanostructured carbon thin films deposited by hot-filament-assisted reactive sputtering using methane gas
Lee, K.-Y.
et al.
| 2002
245
Preparation of boron-carbon-nitrogen thin films by magnetron sputtering
Yokomichi, H.
et al.
| 2002
251
Characteristics of Fe-N films deposited by a reactive ion beam sputtering using adsorptive and ionized nitrogen
Iwatsubo, S.
et al.
| 2002
257
Effects of ion flux on the properties of dc magnetron-sputtered stainless steel films
Inoue, Shozo
et al.
| 2002
263
Preparation of TiO2 thin films by sputtering applying electron cyclotron resonance plasma produced in arched magnetic mirrors
Honbo, E.
et al.
| 2002
269
Effects of oxygen gettering and target mode change in the formation process of reactively RF sputtered WOx thin films
Yamamoto, A.
et al.
| 2002
275
Development of a cylindrical DC magnetron sputtering apparatus assisted by microwave plasma
Yonesu, Akira
et al.
| 2002
279
Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr
Tominaga, Kikuo
et al.
| 2002
285
Fine particles in dusty plasmas
Lin, I.
et al.
| 2002
293
What is the difference between catalytic CVD and plasma-enhanced CVD? Gas-phase kinetics and film properties
Masuda, Atsushi
et al.
| 2002
299
Plasma-enhanced chemical vapor deposition of silicon nitride below 250(degree)C
Kuo, Yue
et al.
| 2002
305
Sum-frequency vibrational spectroscopy of oxygen-ion and oxygen-radical treated poly(ethylene terephthalate) and oxide-poly(ethylene terephthalate) interface
Miyamae, Takayuki
et al.
| 2002
311
Preparation of silicon oxide with bubble layer by helium plasma irradiation followed by oxidation
Hino, T.
et al.
| 2002
317
High-quality SiO2 film deposition using active reaction by oxygen radical
Kumagai, A.
et al.
| 2002
323
Production of low-electron-temperature electron cyclotron resonance plasma with large area using 915MHz microwave
Itagaki, N.
et al.
| 2002
329
Ion temperature and fluctuation in a large-diameter electron-cyclotron-resonance plasma
Koga, Mayuko
et al.
| 2002
335
Deposition of carbon films by plasma-based ion implantation using glow discharge plasma ignited by high voltage pulses applied to substrates
Shinno, H.
et al.
| 2002
341
Characterization of low temperature growth carbon nanofibers synthesized by using plasma enhanced chemical vapor deposition
Ikuno, T.
et al.
| 2002
347
Low temperature deposition of TiO2 films with high refractive indices by oxygen-radical beam-assisted evaporation combined with ion beam
Yamada, Yasumi
et al.
| 2002
353
Gas barrier properties of silicon oxide films prepared by plasma-enhanced CVD using tetramethoxysilane
Teshima, K.
et al.
| 2002
359
Production of a large-area argon microwave plasma by a ring slot antenna
Shimatani, Kouhei
et al.
| 2002
365
Electrical and mechanical properties of SnO2:Nb films for touch screens
Kikuchi, N.
et al.
| 2002
373
Crystallinity and stoichiometry of InNx films deposited by reactive dc magnetron sputtering
Song, P.K.
et al.
| 2002
379
Water-repellency of a-C:H films deposited by rf plasma-enhanced CVD
Kim, Je-Deok
et al.
| 2002
385
Influence of surface morphology on the tribological properties of silver-graphite overlays
Lungu, C.P.
et al.
| 2002
391
Characterization of CNx films prepared by reactive magnetron sputtering
Togashi, Yuki
et al.
| 2002
397
Dependence of dielectric and ferroelectric behaviors on growth orientation in epitaxial BaTiO3-SrTiO3 superlattices
Nakagawara, O.
et al.
| 2002
403
Limited reaction growth of YSZ (ZrO2:Y2O3) thin films for gate insulator
Sasaki, Kimihiro
et al.
| 2002
409
Dependence on substrate temperature of the film structure of mc-Si:H prepared by RF magnetron sputtering
Kondo, J.
/ Tabata, A.
/ Kawamura, T.
et al.
| 2002
409
Dependence on substrate temperature of the film structure of (micro)c-Si:H prepared by RF magnetron sputtering
Kondo, J.
et al.
| 2002
415
Blue shift of photoluminescence spectrum of porous silicon by helium ion irradiation
Yamauchi, Y.
et al.
| 2002
419
Frontier of transparent conductive oxide thin films
Hosono, H.
et al.
| 2002
427
Ferroelectric properties of epitaxial Bi4Ti3O12 films deposited on epitaxial (100) Ir and (100) Pt films on Si by sputtering
Horita, S.
et al.
| 2002
435
The structure of TiN films deposited by arc ion plating
Matsue, Tatsuya
et al.
| 2002
441
Effect of sputtering gas pressure and nitrogen concentration on crystal orientation and residual stress in sputtered AlN films
Kusaka, K.
et al.
| 2002
447
Structural and electrical properties of Cu films deposited on glass by DC magnetron sputtering
Qiu, Hong
et al.
| 2002
453
Effects of argon and hydrogen plasmas on the surface of silicon
Umezu, I.
et al.
| 2002
457
Fabrication of Silicon-Germanium superlattice by ion-beam sputtering
Sasaki, K.
et al.
| 2002
463
Effective electromechanical coupling coefficient (kt2) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film
Takeuchi, Masaki
et al.
| 2002
467
Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges
Yoshino, Y.
et al.
| 2002
473
Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays
Suchaneck, G.
et al.
| 2002
479
Etching characteristics of magnetic materials (Co, Fe, Ni) using CO-NH3 gas plasma for hardening mask etching
Matsui, N.
et al.
| 2002
487
ECR-plasma parameters and properties of thin DLC films
Inaba, H.
et al.
| 2002
495
Multilayer Fresnel zone plate for high-energy X-ray by DC sputtering deposition
Tamura, Shigeharu
et al.
| 2002
501
Optical and electrical properties of pure Ag and Ag-based alloy thin films prepared by RF magnetron sputtering
Suzuki, T.
et al.
| 2002
505
Amorphous ZnO-In2O3 transparent conductive films by simultaneous sputtering method of ZnO and In2O3 targets
Tominaga, K.
et al.
| 2002
511
Film properties of ZnO:Al films deposited by co-sputtering of ZnO:Al and contaminated Zn targets with Co, Mn and Cr
Tominaga, K.
et al.
| 2002
517
Relationship between composition and work function of gold-samarium alloy thin films
Kiwa, N.
et al.
| 2002
523
Characterization of solid oxide fuel cell device having a three-layer film structure grown by RF magnetron sputtering
Nagata, A.
et al.
| 2002
Volume Contents for Volume 66
| 2002
Author Index for Volume 66
| 2002