Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 065001
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A high-performance micro electret power generator based on microball bearingsZhaohui Yang / Jing Wang / Jinwen Zhang et al. | 2011
- 065002
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High-Q micromechanical resonators for mass sensing in dissipative mediaKirsi Tappura / Panu Pekko / Heikki Seppä et al. | 2011
- 065003
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A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantileversR H Poelma / H Sadeghian / S P M Noijen et al. | 2011
- 065004
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A microfluidic multichannel resistive pulse sensor using frequency division multiplexing for high throughput counting of micro particlesAshish V Jagtiani / Joan Carletta / Jiang Zhe et al. | 2011
- 065005
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Micromachined array-type Mirau interferometer for parallel inspection of MEMSJ Albero / S Bargiel / N Passilly et al. | 2011
- 065006
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Successful definition of nanowire and porous Si regions of different porosity levels by regular positive photoresist using metal-assisted chemical etchingMohammad Zahedinejad / Mahdi Khaje / Alireza Erfanian et al. | 2011
- 065007
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Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulationR K Jena / H K Taylor / Y C Lam et al. | 2011
- 065008
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CMOS-compatible fabrication of top-gated field-effect transistor silicon nanowire-based biosensorsPatrick Ginet / Sho Akiyama / Nobuyuki Takama et al. | 2011
- 065009
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A capillary pumping device utilizing super-hydrophobic silicon grassChun-Fei Kung / Chien-Cheng Chang / Chin-Chou Chu et al. | 2011
- 065010
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Fabrication of high-aspect-ratio microstructures using dielectrophoresis-electrocapillary force-driven UV-imprintingXiangming Li / Jinyou Shao / Hongmiao Tian et al. | 2011
- 065011
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SU-8 micropatterning for microfluidic droplet and microparticle focusingDamien Debuisson / Vincent Senez / Steve Arscott et al. | 2011
- 065012
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A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuitsWen-Chien Chen / Weileun Fang / Sheng-Shian Li et al. | 2011
- 065013
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Fabrication of microlens arrays by a rolling process with soft polydimethylsiloxane moldsChia-Nying Hu / Hsin-Ta Hsieh / Guo-Dung John Su et al. | 2011
- 065014
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Nano-tribometer integrated with a nano-photonic displacement-sensing mechanismHongbin Yu / Guangya Zhou / Xiongyue Chew et al. | 2011
- 065015
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Alternating SiCl4/O2 passivation steps with SF6 etch steps for silicon deep etchingC Y Duluard / P Ranson / L E Pichon et al. | 2011
- 065016
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Image-based visual servoing through micropart reflection for the microassembly processHenry K Chu / James K Mills / William L Cleghorn et al. | 2011
- 065017
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Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automatonM A Gosálvez / N Ferrando / Y Xing et al. | 2011
- 065018
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Characterization on the performance of a fractal-shaped microchannel network for microelectronic coolingF J Hong / P Cheng / H Y Wu et al. | 2011
- 065019
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Wideband mechanical response of a high-Q silicon double-paddle oscillatorA Borrielli / M Bonaldi / E Serra et al. | 2011
- 065020
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The mesa merging oxidation method for creating low-loss dielectrics and transmission lines on low-resistivity siliconS T Todd / N C MacDonald / J E Bowers et al. | 2011
- 065021
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An easy method to perform e-beam negative tone lift-off fabrication on dielectric material with a sandwiched conducting polymer layerV M Sundaram / S-B Wen et al. | 2011
- 065022
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Microfabrication of diamond-based slow-wave circuits for mm-wave and THz vacuum electronic sourcesM R Lueck / D M Malta / K H Gilchrist et al. | 2011
- 065022/1
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Microfabricatlon of diamond-based slow-wave circuits for ram-wave and THz vacuum electronic sourcesLueck, M.R. / Malta, D.M. / Gilchrist, K.H. et al. | 2011
- 065023
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On the fabrication of minimizing bulges and reducing the feature dimensions of microchannels using novel CO2 laser micromachiningC K Chung / S L Lin et al. | 2011
- 065024
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Plasma enhanced bonding of polydimethylsiloxane with parylene and its optimizationPouya Rezai / P Ravi Selvaganapathy / Gregory R Wohl et al. | 2011
- 065025
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On the mechanical behavior of slender, slightly curved, compressed microbridgesW L Hallauer / C Ma et al. | 2011
- 065026
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Fabrication of a large-scale Ni stamp using a multi-level SU-8 photoresist mold for advanced printed circuit board manufacturingH-S Lee / H-H Yang / S Ra et al. | 2011
- 065027
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A novel experimental technique for determining node location in resonant mode cantileversBlake N Johnson / Raj Mutharasan et al. | 2011
- 065028
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Integrated vertical parallel-plate capacitive humidity sensorN Lazarus / G K Fedder et al. | 2011
- 065029
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Co-integrated microfluidic and THz functions for biochip devicesS Laurette / A Treizebre / B Bocquet et al. | 2011
- 065030
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Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflectionB A Goessling / T M Lucas / E V Moiseeva et al. | 2011
- 065031
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Scratch tests on micro-structured polymer surfaces produced by injection molding and reaction processesSascha Kuhn / August Burr / Michael Kübler et al. | 2011
- 065032
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Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuatorSatoshi Amaya / Dzung Viet Dao / Susumu Sugiyama et al. | 2011
- 065033
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Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer–ceramic hybrid materialE Käpylä / S Turunen / J Pelto et al. | 2011
- 065034
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A vacuum-driven peristaltic micropump with valved actuation chambersJianguo Cui / Tingrui Pan et al. | 2011
- 065035
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A wafer-level multi-chip module process with thick photosensitive benzocyclobutene as the dielectric for microwave applicationJiajie Tang / Xiaowei Sun / Le Luo et al. | 2011
- 065036
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Inclined nanoimprinting lithography-based 3D nanofabricationZhan Liu / David G Bucknall / Mark G Allen et al. | 2011
- 065037
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A highly integrated vertical SU8 valve for stepwise in-series reactionsV Calvo / A Ezkerra / J Elizalde et al. | 2011
- 065038
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Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact designBo Liu / Zhiqiu Lv / Xunjun He et al. | 2011
- 065039
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Micro wishbone interferometer for Fourier transform infrared spectrometryYoung-Min Lee / Masaya Toda / Masayoshi Esashi et al. | 2011
- 67001
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TECHNICAL NOTE: Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabricationLi, Yuanhui et al. | 2011
- 067001
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Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabricationYuanhui Li / Quan Xie / Wei Wang et al. | 2011
- 67002
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TECHNICAL NOTE: A razor-blade test of the demolding energy in a thermoplastic embossing processTaylor, Hayden et al. | 2011
- 067002
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A razor-blade test of the demolding energy in a thermoplastic embossing processHayden Taylor / Duane Boning / Ciprian Iliescu et al. | 2011
- 67003
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TECHNICAL NOTE: High-throughput anisotropic plasma etching of polyimide for MEMSBliznetsov, Vladimir et al. | 2011
- 067003
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High-throughput anisotropic plasma etching of polyimide for MEMSVladimir Bliznetsov / Anbumalar Manickam / Junwei Chen et al. | 2011
- 067004
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Amplifying transmission and compact suspension for a low-profile, large-displacement piezoelectric actuatorJ F Domke / C-H Rhee / Z Liu et al. | 2011
- 67004
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TECHNICAL NOTE: Amplifying transmission and compact suspension for a low-profile, large-displacement piezoelectric actuatorDomke, J F et al. | 2011
- 067005
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Generation of Au micropatterns on two sidewalls of a Si channel through a PDMS shadow maskHui Wang / Cheng Luo et al. | 2011
- 67005
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TECHNICAL NOTE: Generation of Au micropatterns on two sidewalls of a Si channel through a PDMS shadow maskWang, Hui et al. | 2011
- 067006
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Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulationMitsuhiro Shikida / Noriyuki Inagaki / Mina Okochi et al. | 2011
- 67006
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TECHNICAL NOTE: Fabrication of a pen-shaped portable biochemical reaction system based on magnetic bead manipulationShikida, Mitsuhiro et al. | 2011
- 067007
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Formation of micro/nano-scale wrinkling patterns atop shape memory polymersY Zhao / W M Huang / Y Q Fu et al. | 2011
- 67007
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TECHNICAL NOTE: Formation of micro/nano-scale wrinkling patterns atop shape memory polymersZhao, Y et al. | 2011