The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Volume 35,
Issue 9
Volume 35,
Issue 8
Volume 35,
Issue 7
Volume 35,
Issue 6
Volume 35,
Issue 5
Volume 35,
Issue 4
Volume 35,
Issue 3
Volume 35,
Issue 2
Volume 35,
Issue 1
Volume 34,
Issue 12
Volume 34,
Issue 11
Volume 34,
Issue 10
Volume 34,
Issue 9
Volume 34,
Issue 8
Volume 34,
Issue 7
Volume 34,
Issue 6
Volume 34,
Issue 5
Volume 34,
Issue 4
Volume 34,
Issue 3
Volume 34,
Issue 2
Volume 34,
Issue 1
Volume 33,
Issue 12
Volume 33,
Issue 11
Volume 33,
Issue 10
Volume 33,
Issue 9
Volume 33,
Issue 8
Volume 33,
Issue 7
Volume 33,
Issue 6
Volume 33,
Issue 5
Volume 33,
Issue 4
Volume 33,
Issue 3
Volume 33,
Issue 2
Volume 33,
Issue 1
Volume 32,
Issue 12
Volume 32,
Issue 11
Volume 32,
Issue 10
Volume 32,
Issue 9
Volume 32,
Issue 8
Volume 32,
Issue 7
Volume 32,
Issue 6
Volume 32,
Issue 5
Volume 32,
Issue 4
Volume 32,
Issue 3
Volume 32,
Issue 2
Volume 32,
Issue 1
Volume 31,
Issue 12
Volume 31,
Issue 11
Volume 31,
Issue 10
Volume 31,
Issue 9
Volume 31,
Issue 7
Volume 31,
Issue 1
Volume 30,
Issue 12
Volume 30,
Issue 9
Volume 30,
Issue 8
Volume 30,
Issue 7
Volume 30,
Issue 6
Volume 30,
Issue 5
Volume 30,
Issue 4
Volume 30,
Issue 3
Volume 30,
Issue 2
Volume 30,
Issue 1
Volume 29,
Issue 12
Volume 29,
Issue 11
Volume 29,
Issue 10
Volume 29,
Issue 9
Volume 29,
Issue 8
Volume 29,
Issue 7
Volume 29,
Issue 6
Volume 29,
Issue 5
Volume 29,
Issue 4
Volume 29,
Issue 3
Volume 29,
Issue 2
Volume 29,
Issue 1
Volume 28,
Issue 12
Volume 28,
Issue 11
Volume 28,
Issue 10
Volume 28,
Issue 9
Volume 28,
Issue 8
Volume 28,
Issue 7
Volume 28,
Issue 6
Volume 28,
Issue 5
Volume 28,
Issue 4
Volume 28,
Issue 3
Volume 28,
Issue 2
Volume 28,
Issue 1
Volume 27,
Issue 12
Volume 27,
Issue 11
Volume 27,
Issue 10
Volume 27,
Issue 9
Volume 27,
Issue 8
Volume 27,
Issue 7
Volume 27,
Issue 6
Volume 27,
Issue 5
Volume 27,
Issue 4
Volume 27,
Issue 3
Volume 27,
Issue 2
Volume 27,
Issue 1
Volume 26,
Issue 12
Volume 26,
Issue 11
Volume 26,
Issue 10
Volume 26,
Issue 9
Volume 26,
Issue 8
Volume 26,
Issue 7
Volume 26,
Issue 6
Volume 26,
Issue 5
Volume 26,
Issue 4
Volume 26,
Issue 3
Volume 26,
Issue 2
Volume 26,
Issue 1
Volume 25,
Issue 12
Volume 25,
Issue 11
Volume 25,
Issue 10
Volume 25,
Issue 9
Volume 25,
Issue 8
Volume 25,
Issue 7
Volume 25,
Issue 6
Volume 25,
Issue 5
Volume 25,
Issue 4
Volume 25,
Issue 3
Volume 25,
Issue 2
Volume 25,
Issue 1
Volume 24,
Issue 12
Volume 24,
Issue 11
Volume 24,
Issue 10
Volume 24,
Issue 9
Volume 24,
Issue 8
Volume 24,
Issue 7
Volume 24,
Issue 6
Volume 24,
Issue 5
Volume 24,
Issue 4
Volume 24,
Issue 3
Volume 24,
Issue 2
Volume 24,
Issue 1
Volume 23,
Issue 12
Volume 23,
Issue 11
Volume 23,
Issue 10
Volume 23,
Issue 9
Volume 23,
Issue 8
Volume 23,
Issue 7
Volume 23,
Issue 6
Volume 23,
Issue 5
Volume 23,
Issue 4
Volume 23,
Issue 3
Volume 23,
Issue 2
Volume 23,
Issue 1
Volume 22,
Issue 12
Volume 22,
Issue 11
Volume 22,
Issue 10
Volume 22,
Issue 9
Volume 22,
Issue 8
Volume 22,
Issue 7
Volume 22,
Issue 6
Volume 22,
Issue 5
Volume 22,
Issue 4
Volume 22,
Issue 3
Volume 22,
Issue 2
Volume 22,
Issue 1
Volume 21,
Issue 12
Volume 21,
Issue 11
Volume 21,
Issue 10
Volume 21,
Issue 9
Volume 21,
Issue 8
Volume 21,
Issue 7
Volume 21,
Issue 6
Volume 21,
Issue 5
Volume 21,
Issue 4
Volume 21,
Issue 3
Volume 21,
Issue 2
Volume 21,
Issue 1
Volume 20,
Issue 12
Volume 20,
Issue 11
Volume 20,
Issue 10
Volume 20,
Issue 9
Volume 20,
Issue 8
Volume 20,
Issue 7
Volume 20,
Issue 6
Volume 20,
Issue 5
Volume 20,
Issue 4
Volume 20,
Issue 3
Volume 20,
Issue 2
Volume 20,
Issue 1
Volume 19,
Issue 12
Volume 19,
Issue 11
Volume 19,
Issue 10
Volume 19,
Issue 9
Volume 19,
Issue 8
Volume 19,
Issue 7
Volume 19,
Issue 6
Volume 19,
Issue 5
Volume 19,
Issue 4
Volume 19,
Issue 3
Volume 19,
Issue 2
Volume 19,
Issue 1
Volume 18,
Issue 12
Volume 18,
Issue 11
Volume 18,
Issue 10
Volume 18,
Issue 9
Volume 18,
Issue 8
Volume 18,
Issue 7
Volume 18,
Issue 6
Volume 18,
Issue 5
Volume 18,
Issue 4
Volume 18,
Issue 3
Volume 18,
Issue 2
Volume 18,
Issue 1
Volume 17,
Issue 12
Volume 17,
Issue 11
Volume 17,
Issue 10
Volume 17,
Issue 9
Volume 17,
Issue 8
Volume 17,
Issue 7
Volume 17,
Issue 6
Volume 17,
Issue 5
Volume 17,
Issue 4
Volume 17,
Issue 3
Volume 17,
Issue 2
Volume 17,
Issue 1
Volume 16,
Issue 12
Volume 16,
Issue 11
Volume 16,
Issue 10
Volume 16,
Issue 9
Volume 16,
Issue 8
Volume 16,
Issue 7
Volume 16,
Issue 6
Volume 16,
Issue 5
Volume 16,
Issue 4
Volume 16,
Issue 3
Volume 16,
Issue 2
Volume 16,
Issue 1
Volume 15,
Issue 12
Volume 15,
Issue 11
Volume 15,
Issue 10
Volume 15,
Issue 9
Volume 15,
Issue 8
Volume 15,
Issue 7
Volume 15,
Issue 6
Volume 15,
Issue 5
Volume 15,
Issue 4
Volume 15,
Issue 3
Volume 15,
Issue 2
Volume 15,
Issue 1
Volume 14,
Issue 12
Volume 14,
Issue 11
Volume 14,
Issue 10
Volume 14,
Issue 9
Volume 14,
Issue 8
Volume 14,
Issue 7
Volume 14,
Issue 6
Volume 14,
Issue 5
Volume 14,
Issue 4
Volume 14,
Issue 3
Volume 14,
Issue 2
Volume 14,
Issue 1
Volume 13,
Issue 12
Volume 13,
Issue 11
Volume 13,
Issue 10
Volume 13,
Issue 9
Volume 13,
Issue 8
Volume 13,
Issue 7
Volume 13,
Issue 6
Volume 13,
Issue 5
Volume 13,
Issue 4
Volume 13,
Issue 3
Volume 13,
Issue 2
Volume 13,
Issue 1
Volume 12,
Issue 12
Volume 12,
Issue 11
Volume 12,
Issue 10
Volume 12,
Issue 9
Volume 12,
Issue 8
Volume 12,
Issue 7
Volume 12,
Issue 6
Volume 12,
Issue 5
Volume 12,
Issue 4
Volume 12,
Issue 3
Volume 12,
Issue 2
Volume 12,
Issue 1
Volume 11,
Issue 12
Volume 11,
Issue 11
Volume 11,
Issue 10
Volume 11,
Issue 9
Volume 11,
Issue 8
Volume 11,
Issue 7
Volume 11,
Issue 6
Volume 11,
Issue 5
Volume 11,
Issue 4
Volume 11,
Issue 3
Volume 11,
Issue 2
Volume 11,
Issue 1
Volume 10,
Issue 12
Volume 10,
Issue 11
Volume 10,
Issue 10
Volume 10,
Issue 9
Volume 10,
Issue 8
Volume 10,
Issue 7
Volume 10,
Issue 6
Volume 10,
Issue 5
Volume 10,
Issue 4
Volume 10,
Issue 3
Volume 10,
Issue 2
Volume 10,
Issue 1
Volume 9,
Issue 12
Volume 9,
Issue 11
Volume 9,
Issue 10
Volume 9,
Issue 9
Volume 9,
Issue 8
Volume 9,
Issue 7
Volume 9,
Issue 6
Volume 9,
Issue 5
Volume 9,
Issue 4
Volume 9,
Issue 3
Volume 9,
Issue 2
Volume 9,
Issue 1
Volume 8,
Issue 12
Volume 8,
Issue 11
Volume 8,
Issue 10
Volume 8,
Issue 9
Volume 8,
Issue 8
Volume 8,
Issue 7
Volume 8,
Issue 6
Volume 8,
Issue 5
Volume 8,
Issue 4
Volume 8,
Issue 3
Volume 8,
Issue 2
Volume 8,
Issue 1
Volume 7,
Issue mar
Volume 7,
Issue 12
Volume 7,
Issue 11
Volume 7,
Issue 10
Volume 7,
Issue 9
Volume 7,
Issue 8
Volume 7,
Issue 7
Volume 7,
Issue 6
Volume 7,
Issue 5
Volume 7,
Issue 4
Volume 7,
Issue 3
Volume 7,
Issue 2
Volume 7,
Issue 1
Volume 6,
Issue 12
Volume 6,
Issue 11
Volume 6,
Issue 10
Volume 6,
Issue 9
Volume 6,
Issue 8
Volume 6,
Issue 7
Volume 6,
Issue 6
Volume 6,
Issue 5
Volume 6,
Issue 4
Volume 6,
Issue 3
Volume 6,
Issue 2
Volume 6,
Issue 1
Volume 5,
Issue 12
Volume 5,
Issue 11
Volume 5,
Issue 10
Volume 5,
Issue 9
Volume 5,
Issue 8
Volume 5,
Issue 7
Volume 5,
Issue 6
Volume 5,
Issue 5
Volume 5,
Issue 4
Volume 5,
Issue 3
Volume 5,
Issue 2
Volume 5,
Issue 1
Volume 4,
Issue 12
Volume 4,
Issue 11
Volume 4,
Issue 10
Volume 4,
Issue 9
Volume 4,
Issue 8
Volume 4,
Issue 7
Volume 4,
Issue 6
Volume 4,
Issue 5
Volume 4,
Issue 4
Volume 4,
Issue 3
Volume 4,
Issue 2
Volume 4,
Issue 1
Volume 3,
Issue 12
Volume 3,
Issue 11
Volume 3,
Issue 10
Volume 3,
Issue 9
Volume 3,
Issue 8
Volume 3,
Issue 7
Volume 3,
Issue 6
Volume 3,
Issue 5
Volume 3,
Issue 4
Volume 3,
Issue 3
Volume 3,
Issue 2
Volume 3,
Issue 1
Volume 2,
Issue 12
Volume 2,
Issue 11
Volume 2,
Issue 10
Volume 2,
Issue 9
Volume 2,
Issue 8
Volume 2,
Issue 7
Volume 2,
Issue 6
Volume 2,
Issue 5
Volume 2,
Issue 4
Volume 2,
Issue 3
Volume 2,
Issue 2
Volume 2,
Issue 1
Volume 1,
Issue 12
Volume 1,
Issue 11
Volume 1,
Issue 10
Volume 1,
Issue 9
Volume 1,
Issue 8
Volume 1,
Issue 7
Volume 1,
Issue 6
Volume 1,
Issue 5
Volume 1,
Issue 4
Volume 1,
Issue 3
Volume 1,
Issue 2
Volume 1,
Issue 1
>
Table of contents
319
Ultraprecision micro-CMM using a low force 3D touch probe
A Küng
/ F Meli
/ R Thalmann
et al.
| 2007
328
3D metrology with a compact scanning probe microscope based on self-sensing cantilever probes
C Dal Savio
/ S Dejima
/ H-U Danzebrink
et al.
| 2007
334
Nanoscale surface measurements at sidewalls of nano- and micro-structures
Gaoliang Dai
/ Helmut Wolff
/ Thomas Weimann
et al.
| 2007
342
Two-dimensional encoder with picometre resolution using lattice spacing on regular crystalline surface as standard
Masato Aketagawa
/ Hiroshi Honda
/ Masashi Ishige
et al.
| 2007
350
An atomic force microscope for the study of the effects of tip–sample interactions on dimensional metrology
Andrew Yacoot
/ Ludger Koenders
/ Helmut Wolff
et al.
| 2007
360
Facility and methods for the measurement of micro and nano forces in the range below 10−5 N with a resolution of 10−12 N (development concept)
Vladimir Nesterov
et al.
| 2007
367
Method for linear measurements in the nanometre range
Yu A Novikov
/ Yu V Ozerin
/ A V Rakov
et al.
| 2007
375
Imaging laser diffractometer for traceable grating pitch calibration
J R Pekelsky
/ B J Eves
/ P R Nistico
et al.
| 2007
384
Increase of maximum detectable slope with optical profilers, through controlled tilting and image processing
F Marinello
/ P Bariani
/ A Pasquini
et al.
| 2007
390
Calibration strategies for scanning probe metrology
K R Koops
/ M G A van Veghel
/ G J W L Kotte
et al.
| 2007
395
Calibration of a commercial AFM: traceability for a coordinate system
V Korpelainen
/ A Lassila
et al.
| 2007
395
Calibration of a commerical AFM: traceability for a coordinate system
Korpelainen, V.
/ Lassila, A.
et al.
| 2007
404
A landmark-based 3D calibration strategy for SPM
Martin Ritter
/ Thorsten Dziomba
/ Axel Kranzmann
et al.
| 2007
415
Accurate and traceable calibration of two-dimensional gratings
Gaoliang Dai
/ Frank Pohlenz
/ Thorsten Dziomba
et al.
| 2007
422
A nanoscale linewidth/pitch standard for high-resolution optical microscopy and other microscopic techniques
U Huebner
/ W Morgenroth
/ R Boucher
et al.
| 2007
430
Quantitative linewidth measurement down to 100 nm by means of optical dark-field microscopy and rigorous model-based evaluation
G Ehret
/ B Bodermann
/ W Mirandé
et al.
| 2007
439
SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 µm
C G Frase
/ W Häßler-Grohne
/ G Dai
et al.
| 2007
439
SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 micron
Frase, C.G.
/ Häßler-Grohne, W.
/ Dai, G.
et al.
| 2007
439
SEM linewidth measurements of anisotropically etched silicon structures smaller than 0.1 mum
Frase, C. G.
/ Hassler-Grohne, W.
/ Dai, G.
et al.
| 2007
448
Higher order tip effects in traceable CD-AFM-based linewidth measurements
N G Orji
/ R G Dixson
et al.
| 2007
456
Correction of structure width measurements performed with a combined shear-force/tunnelling microscope
Andrzej Sikora
et al.
| 2007
462
Use of cylindrical artefacts for AFM vertical calibration
F Marinello
/ E Savio
et al.
| 2007
469
Detecting and addressing the surface following errors in the calibration of step heights by atomic force microscopy
J Haycocks
/ K Jackson
et al.
| 2007
476
A method for the in situ determination of Abbe errors and their correction
R Köning
/ J Flügge
/ H Bosse
et al.
| 2007
482
Investigations and calculations into decreasing the uncertainty of a nanopositioning and nanomeasuring machine (NPM-Machine)
I Schmidt
/ T Hausotte
/ U Gerhardt
et al.
| 2007
487
Preliminary study on nanoparticle sizes under the APEC technology cooperative framework
C Y Wang
/ W E Fu
/ H L Lin
et al.
| 2007
496
AFM investigation on surface damage caused by mechanical probing with small ruby spheres
Felix Meli
/ Alain Küng
et al.
| 2007
503
Optical encoder calibration using lattice spacing and optical fringe derived from a scanning tunnelling microscope and optical interferometer
Masato Aketagawa
/ Yosuke Ikeda
/ Nuttapong Tanyarat
et al.
| 2007
510
CD characterization of nanostructures in SEM metrology
Carl Georg Frase
/ Egbert Buhr
/ Kai Dirscherl
et al.
| 2007
520
New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes
E Manske
/ T Hausotte
/ R Mastylo
et al.
| 2007
528
Atomic force microscopy studies of cross-sections of columnar thin films
P Klapetek
/ I Ohlídal
/ J Buršík
et al.
| 2007
EDITORIAL: Nanoscale Metrology
| 2007
Nanoscale Metrology
L Koenders
/ F Meli
/ G Wilkening
et al.
| 2007