Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 105
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High aspect ratio UV photolithography for electroplated structuresS Roth / L Dellmann / G-A Racine et al. | 1999
- 105
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PAPERS - High aspect ratio UV photolithography for electroplated structuresRoth, S. et al. | 1999
- 109
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CMOS integrated pressure sensor optimization using electrical network simulator-FEM tool couplingA Götz / H Krassow / M Zabala et al. | 1999
- 109
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PAPERS - CMOS integrated pressure sensor optimization using electrical network simulator -- FEM tool couplingGötz, A. et al. | 1999
- 111
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INVITED ARTICLES - Sensor, sensor interfacing and front-end data management for stand-alone MicrosystemsPuers, R. et al. | 1999
- 113
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Tantalum oxide thin films as protective coatings for sensorsCarsten Christensen / Roger de Reus / Siebe Bouwstra et al. | 1999
- 113
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PAPERS - Tantalum oxide thin films as protective coatings for sensorsChristensen, C. et al. | 1999
- 119
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Micro-coil with movable core for application in an inductive displacment sensorVelten, T. / Stefan, D. / Obermeier, E. et al. | 1999
- 119
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Micro-coil with movable core for application in an inductive displacement sensorTh Velten / D Stefan / E Obermeier et al. | 1999
- 119
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PAPERS - Micro-coil with movable core for application in an inductive displacement sensorVelten, Th et al. | 1999
- 123
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Fabrication and characterization of a piezoelectric accelerometerRoger de Reus / Jens Ole Gulløv / Patrick R Scheeper et al. | 1999
- 123
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PAPERS - Fabrication and characterization of a piezoelectric accelerometerReus, R.de et al. | 1999
- 127
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Decreasing the optical path length in an optoelectronic module using silicon micromachiningÅse Richard / Pelle Rangsten / Carola Strandman et al. | 1999
- 127
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PAPERS - Decreasing the optical path length in an optoelectronic module using silicon micromachiningRichard, °A et al. | 1999
- 130
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Repeatability aspects in surface micromachining - investigations on polycrystalline silicon filmsL Elbrecht / J Binder et al. | 1999
- 130
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PAPERS - Repeatability aspects in surface micromachining -- Investigations on polycrystalline silicon filmsElbrecht, L. et al. | 1999
- 135
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Velocity sources as an explanation for experimentally observed variations in Si{111} etch ratesA J Nijdam / J W Berenschot / J van Suchtelen et al. | 1999
- 135
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PAPERS - Velocity sources as an explanation for experimentally observed variations in Si(111) etch ratesNijdam, A.J. et al. | 1999
- 139
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Micropyramidal hillocks on KOH etched {100} silicon surfaces: formation, prevention and removalH Schröder / E Obermeier / A Steckenborn et al. | 1999
- 139
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PAPERS - Micropyramidal hillocks on KOH etched (100) silicon surfaces: Formation, prevention and removalSchröder, H. et al. | 1999
- 146
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Comparison of lateral and vertical switches for application as microrelaysIgnaz Schiele / Bernd Hillerich et al. | 1999
- 146
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PAPERS - Comparison of lateral and vertical switches for application as microrelaysSchiele, I. et al. | 1999
- 151
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Optical fibre switches based on full wafer silicon micromachiningMartin Hoffmann / Peter Kopka / Torsten Groß et al. | 1999
- 151
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PAPERS - Optical fibre switches based on full wafer silicon micromachiningHoffmann, M. et al. | 1999
- 156
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Improved characterization technique for micromixersM Koch / H Witt / A G R Evans et al. | 1999
- 156
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PAPERS - Improved characterization technique for micromixersKoch, M. et al. | 1999
- 159
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PAPERS - Design and fabrication of a micromachined Coulter counterKoch, M. et al. | 1999
- 159
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Design and fabrication of a micromachined Coulter counterM Koch / A G R Evans / A Brunnschweiler et al. | 1999
- 162
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Silver-based reflective coatings for micromachined optical filtersM Bartek / J H Correia / R F Wolffenbuttel et al. | 1999
- 162
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PAPERS - Silver-based reflective coatings for micromachined optical filtersBartek, M. et al. | 1999
- 166
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Printed solenoid windings for miniature electromagnetic devicesArvi Kruusing / Seppo Leppävuori / Antti Uusimäki et al. | 1999
- 166
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PAPERS - Printed solenoid windings for miniature electromagnetic devicesKruusing, A. et al. | 1999
- 170
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PAPERS - Microsieves made with laser interference lithography for micro-filtration applicationsRijn, C.J.M.van et al. | 1999
- 170
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Microsieves made with laser interference lithogrpahy for microfiltration applicationsRijn, C.J.M. van / Nijdam, W. / Kuiper, S. et al. | 1999
- 170
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Microsieves made with laser interference lithography for micro-filtration applicationsCees J M van Rijn / Wietze Nijdam / Stein Kuiper et al. | 1999
- 173
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Potentialities of a new positive photoresist for the realization of thick mouldsV Conédéra / B Le Goff / N Fabre et al. | 1999
- 173
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PAPERS - Potentialities of a new positive photoresist for the realization of thick mouldsConédéra, V. et al. | 1999
- 176
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Design and fabrication of a microfluidic circuitboardC G J Schabmueller / M Koch / A G R Evans et al. | 1999
- 176
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PAPERS - Design and fabrication of a microfluidic circuitboardSchabmueller, C.G.J. et al. | 1999
- 176
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Design and fabrication of a microfluid circuitboardSchabmueller, C.G.J. / Koch, M. / Evans, A.G.R. et al. | 1999
- 180
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PAPERS - Stationary hillocks on etching siliconElwenspoek, M. et al. | 1999
- 180
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Stationary hillocks on etching siliconM Elwenspoek et al. | 1999
- 186
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PAPERS - Bi-directional fast How sensor with a large dynamic rangeBree, H.-E.de et al. | 1999
- 186
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Bi-directional fast flow sensor with a large dynamic rangeHans-Elias de Bree / Henri V Jansen / Theo S J Lammerink et al. | 1999
- 190
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PAPERS - Test microstructures for measurement of SiC thin film mechanical propertiesSerre, C. et al. | 1999
- 190
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Test microstructures for measurement of SiC thin film mechanical propertiesChristophe Serre / Alejandro Pérez-Rodríguez / Albert Romano-Rodríguez et al. | 1999
- 194
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Designing, simulation and realization of in-plane operating micro valves, using new etching techniquesR E Oosterbroek / J W Berenschot / S Schlautmann et al. | 1999
- 194
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PAPERS - Designing, simulation and realization of in-plane operating micro valves, using new etching techniquesOosterbroek, R.E. et al. | 1999
- 199
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Characterization method for a new diffusion mixer applicable in micro flow injection analysis systemsT T Veenstra / T S J Lammerink / M C Elwenspoek et al. | 1999
- 199
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PAPERS - Characterization method for a new diffusion mixer applicable in micro flow injection analysis systemsVeenstra, T.T. et al. | 1999
- 203
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Optical devices based on fluidic controlled two-mode interferenceGijs J M Krijnen / Theo S J Lammerink / Paul V Lambeck et al. | 1999
- 203
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PAPERS - Optical devices based on fluidic controlled two-mode interferenceKrijnen, G.J.M. et al. | 1999
- 206
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Production of seismic mass suspensions in silicon by electro-discharge machiningDominiek Reynaerts / Wim Meeusen / Hendrik Van Brussel et al. | 1999
- 206
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PAPERS - Production of seismic mass suspensions in silicon by electro-discharge machiningReynaerts, D. et al. | 1999
- R1
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Sensor, sensor interfacing and front-end data management for stand-alone microsystemsRobert Puers et al. | 1999
- R8
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Technology and applications of micromachined adaptive mirrorsG Vdovin / P M Sarro / S Middelhoek et al. | 1999
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Preface| 1999
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IntroductionPer Ohlckers et al. | 1999
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INVITED ARTICLES - Technology and applications of micromachined adaptive mirrorsVdovin, G. et al. | 1999