Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 619
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IEEE JMEMS Special Proceeding for the Hilton Head 2020 WorkshopGhodssi, Reza / Rais-Zadeh, Mina / Sochol, Ryan et al. | 2020
- 621
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Paraffin-Based Reconfigurable Antenna Operating at 100 GHzGhassemiparvin, Behnam / Ghalichechian, Nima et al. | 2020
- 629
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Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial FingerSotgiu, Edoardo / Aguiam, Diogo E. / Calaza, Carlos et al. | 2020
- 637
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Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy ConvertersCampbell, Matthew F. / Azadi, Mohsen / Lu, Zhipeng et al. | 2020
- 645
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Miniaturized Electronic Circuit Design Challenges for Ingestible DevicesVan Helleputte, Nick / Even, Aniek J. G. / Leonardi, Francesca et al. | 2020
- 653
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SeedEZTM Interdigitated Electrodes and Multifunctional Layered Biosensor Composites (MLBCs): A Paradigm Shift in the Development of In Vitro BioMicrosystemsDidier, Charles Michael / Kundu, Avra / Shoemaker, James T. et al. | 2020
- 661
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AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic ImagingMahdavi, Mohammad / Nikooienejad, Nastaran / Moheimani, S. O. Reza et al. | 2020
- 669
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Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared MicroscopyDowling, Karen M. / Liu, Tanya / Alpert, Hannah S. et al. | 2020
- 677
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Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical ResonatorsMiller, James M. L. / Zhu, Haoshen / Sundaram, Subramanian et al. | 2020
- 685
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DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo CharacterizationKundu, Avra / Arnett, Parker / Bagde, Arvind et al. | 2020
- 692
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Ring-Focusing Fresnel Acoustic Lens for Long Depth-of-Focus Focused Ultrasound With Multiple Trapping ZonesTang, Yongkui / Kim, Eun Sok et al. | 2020
- 699
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Frequency Tunable Surface Acoustic Wave Actuators for Adjustable Pitch Diffraction GratingFrez, Clifford F. / Coskun, M. Bulut / Scott, Valerie J. et al. | 2020
- 706
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Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident DevicesLiu, Sanwei / Chu, Sangwook / Beardslee, Luke A. et al. | 2020
- 713
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Wireless Sensor-Integrated Platform for Localized Dissolved Oxygen Sensing in BioreactorsStine, Justin M. / Beardslee, Luke A. / Chu, Sangwook et al. | 2020
- 720
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Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological MonitoringLee, Sunwoo / Cortese, Alejandro Javier / Mok, Aaron et al. | 2020
- 727
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A Hybrid Biomonitoring System for Gut-Neuron CommunicationChapin, Ashley A. / Han, Jinjing / Ho, Ta-Wen et al. | 2020
- 734
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Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale LithographyGarcia, Ines S. / Ferreira, Carlos / Santos, Joana D. et al. | 2020
- 741
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A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride FilmsWang, Jialin / Park, Mingyo / Mertin, Stefan et al. | 2020
- 748
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A Flush-Mounted Dual-Axis Wall Shear Stress SensorFreidkes, Brett R. / Mills, David A. / Patterson, William C. et al. | 2020
- 755
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Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health MonitoringCalisgan, Sila Deniz / Rajaram, Vageeswar / Kang, Sungho et al. | 2020
- 762
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A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial KidneyChui, Benjamin W. / Wright, Nathan J. / Ly, Jimmy et al. | 2020
- 769
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Fabrication and Demonstration of a Self-Adaptive Microvalve Array for Distributed Liquid Cooling in Microelectronic InterposersAmnache, Amrid / Laguna, Gerard / Leveille, Etienne et al. | 2020
- 776
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Multi-Layer Micro-Nanofluidic Device for Isolation and Capture of Extracellular Vesicles Derived From Liposarcoma Cell Conditioned MediaSundaram, Prashanth Mohana / Casadei, Lucia / Lopez, Gonzalo et al. | 2020
- 783
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Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear ResonancesChen, Hailong / Jia, Hao / Zorman, Christian A. et al. | 2020
- 790
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Controlled Single-Cell Compression With a High-Throughput MEMS ActuatorWalker, Jennifer L. / Patterson, Luke H. C. / Rodriguez-Mesa, Evelyn et al. | 2020
- 797
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Increasing the Energy Efficiency of NiTi Unimorph Actuators With a 3D-Printed Passive LayerBabaei, Mahnoush / Kim, Sukjun / Velez, Camilo et al. | 2020
- 804
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Near-Carrier Phase Noise Suppression at Turnover Temperature in a Thin-Film Piezoelectric-on-Silicon OscillatorMajd, Yasaman / Shahraini, Sarah / Goodale, Garett et al. | 2020
- 811
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Demonstration of Atmospheric-Pressure Radiometer With Nanocardboard VanesAzadi, Mohsen / Lu, Zhipeng / Popov, George A. et al. | 2020
- 818
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Accurate 3D Lighthouse Localization of a Low-Power Crystal-Free Single-Chip MoteKilberg, Brian G. / Campos, Felipe Mulinari Rocha / Maksimovic, Filip et al. | 2020
- 825
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A Paper-Based Flexible Tactile Sensor Array for Low-Cost Wearable Human Health MonitoringLuo, Weijie / Sharma, Vikas / Young, Darrin J. et al. | 2020
- 832
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Miniaturized PMUT-Based Receiver for Underwater Acoustic NetworkingHerrera, Bernard / Pop, Flavius / Cassella, Cristian et al. | 2020
- 839
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Active Noise Cancellation With MEMS Resonant Microphone ArrayLiu, Hai / Liu, Song / Shkel, Anton A. et al. | 2020
- 846
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Fast Selective Sensing of Nitrogen-Based Gases Utilizing δ-MnO2-Epitaxial Graphene-Silicon Carbide Heterostructures for Room Temperature Gas SensingPedowitz, Michael D. / Kim, Soaram / Lewis, Daniel I. et al. | 2020
- 853
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Microsensors in Icy Environments to Detect Microbial ActivitiesMcGlennen, Matthew / Neubauer, Michael / Driesler, Matthew et al. | 2020
- 860
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Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM ResonatorVukasin, Gabrielle D. / Sanchez, Veronica K. / Glaze, Janna et al. | 2020
- 867
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Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for MicroroboticsVelez, Camilo / Patel, Dinesh K. / Kim, Sukjun et al. | 2020
- 874
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1-Port Piezoelectric Resonators With > 100 V/V GainGalanko Klemash, Mary E. / Bedair, Sarah S. / Diamond, Daniel A. et al. | 2020
- 881
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A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile PropertiesDostanic, Milica / Windt, Laura M. / Stein, Jeroen M. et al. | 2020
- 888
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Fully Differential Actuation and Sensing in Piezoelectric Diaphragm Resonators for High Signal to Background Resonant SensingTiwari, Sudhanshu / Kumar, Randhir / Chandorkar, Saurabh Arun et al. | 2020
- 894
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Microfluidic Gasketless Interconnects Sealed by Superhydrophobic SurfacesZhao, Xiaoxiao / Park, Daniel S.-W. / Soper, Steven A. et al. | 2020
- 900
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Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature SwingsQamar, Afzaal / Eisner, Savannah R. / Senesky, Debbie G. et al. | 2020
- 906
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Direct Laser Writing for Deterministic Lateral Displacement of Submicron ParticlesAlsharhan, Abdullah T. / Stair, Anthony J. / Acevedo, Ruben et al. | 2020
- 912
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Complementary Capillary System Integrated Microneedles for Autonomously Localized Therapeutics LoadingChu, Sangwook / Uplekar, Nikhil / Liu, Sanwei et al. | 2020
- 918
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Printed Electroceutical Dressings for the Inhibition of Biofilms and Treatment of Chronic WoundsHeald, Rachel / Bennett, Molly / Subramaniam, Vish V. et al. | 2020
- 924
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3D Nanoprinted Liquid-Core-Shell MicroparticlesAcevedo, Ruben / Restaino, Michael A. / Yu, Dongyue et al. | 2020
- 930
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Characterization and Clinical Serum Test of a Molecular Imprinted Polymer (MIP)-Based Cardiac Troponin T Sensing Electrode for Patient Monitoring ApplicationsChen, Pei-Syuan / Lin, Yu-Tsan / Cheng, Yu-Ting et al. | 2020
- 936
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Temperature Compensation of Thermally Actuated, In-Plane Resonant Gas Sensor Using Embedded Oxide-Filled TrenchesSchwartz, Steven A. / Brand, Oliver / Beardslee, Luke A. et al. | 2020
- 942
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Electronic Immunoaffinity Assay for Differential Leukocyte CountsLiu, Ruxiu / Arifuzzman, A K M / Wang, Ningquan et al. | 2020
- 948
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Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)Schneider, Michael / Dorfmeister, Manuel / Moll, Philipp et al. | 2020
- 954
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Negative Nonlinear Dissipation in Microelectromechanical BeamsBousse, Nicholas Eric / Miller, James Marion Lehto / Alter, Anne Louise et al. | 2020
- 960
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A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure TransducersZhou, Haocheng / Sheplak, Mark et al. | 2020
- 966
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Graphene-Based Ion Sensitive-FET Sensor With Porous Anodic Aluminum Oxide Substrate for Nitrate DetectionKim, Jungyoon / Liu, Qingyuan / Cui, Tianhong et al. | 2020
- 972
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Dielectric Transfer Process for 3D Printed Metal MicrosystemsLohani, Bhushan / Hossain, Sheikh Dobir / Roberts, Robert C. et al. | 2020
- 978
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Sidewall Metallization on CMOS MEMS by Platinum ALD PatterningLin, Yi-Chung / Chung, Vincent P. J. / Santhanam, Suresh et al. | 2020
- 984
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Heater for Controlled Evaporation of Liquids for Personalized Drug Delivery to the LungsGoldschmidtboeing, Frank / Pelz, Uwe / Ghanam, Muhannad et al. | 2020
- 990
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A Customizable DNA and Microsphere-Based, Magnetically Actuated MicroswimmerHarmatz, Ian Mitchell / Travers, Matthew J. / Taylor, Rebecca E. et al. | 2020
- 996
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A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR ApplicationsWang, Dingkang / Koppal, Sanjeev J. / Xie, Huikai et al. | 2020
- 1002
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Directional Droplet Transport and Fog Removal on Textured Surfaces Using Liquid DielectrophoresisSun, Di / Bohringer, Karl F. et al. | 2020
- 1008
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Polysilicon Grating Switches for LiDARCook, Eugene H. / Spector, Steven J. / Moebius, Michael G. et al. | 2020
- 1014
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Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite ResonatorsGokhale, Vikrant J. / Downey, Brian P. / Katzer, D. Scott et al. | 2020
- 1020
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Flow Velocity Gradient Sensing Using a Single Curved Bistable MicrobeamKessler, Yoav / Liberzon, Alexander / Krylov, Slava et al. | 2020
- 1026
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Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt InksSui, Yongkun / Hess-Dunning, Allison / Sankaran, R. Mohan et al. | 2020
- 1032
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Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on BeatingBucken, Gerrit / Korner, Julia et al. | 2020
- 1038
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A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic ImagingWang, Haoran / Chen, Zhenfang / Yang, Hao et al. | 2020
- 1044
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Enhanced Capture of Aerosol Particles on Resonator-Based PM Mass Sensors Using Staggered Arrays of Micro-PillarsHajizadehmotlagh, Mandana / Singhal, Anuj / Paprotny, Igor et al. | 2020
- 1049
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Moisture-Responsive Paper RoboticsRyu, Jihyun / Tahernia, Mehdi / Mohammadifar, Maedeh et al. | 2020
- 1054
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A 512-Channel Multi-Layer Polymer-Based Neural Probe ArrayScholten, Kee / Larson, Christopher E. / Xu, Huijing et al. | 2020
- 1059
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A Fouling-Resistant Voltammetric Sensing System for Wearable Electroactive Biomarker MonitoringLin, Shuyu / Cheng, Xuanbing / Wang, Bo et al. | 2020
- 1064
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A 1-D Yarn-Based Biobattery for Scalable Power Generation in 2-D and 3-D Structured TextilesRyu, Jihyun / Gao, Yang / Cho, Jong Hyun et al. | 2020
- 1069
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Additive Manufacturing of Living ElectrodesGao, Yang / Kim, Jeonghwan / Ryu, Jihyun et al. | 2020
- 1074
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A Self-Powered, Biodegradable Dissolved Oxygen MicrosensorShe, Didi / Allen, Mark G. et al. | 2020
- 1079
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Successful Demonstration of an Electrostatically Actuated Microshutter System for Space Telescope Flight MissionsLi, M. J. / Aguayo, E. / Brekosky, R. P. et al. | 2020
- 1083
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Liquid-Loaded Piezo-Silicon Micro-Disc Oscillators for Pico-Scale Bio-Mass SensingMansoorzare, Hakhamanesh / Shahraini, Sarah / Todi, Ankesh et al. | 2020
- 1087
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Piezoelectric RF MEMS Switches on Si-on-Sapphire SubstratesBenoit, Robert R. / Rudy, Ryan Q. / Pulskamp, Jeffrey S. et al. | 2020
- 1091
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Development of a 3D Printed, Self-Insulated, High-Throughput 3D Microelectrode Array (HT-3DMEA)Kundu, Avra / Rozman, Adam / Rajaraman, Swaminathan et al. | 2020
- 1094
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Additive Assembly for PolyJet-Based Multi-Material 3D Printed MicrofluidicsChilds, Elizabeth H. / Latchman, Andrew V. / Lamont, Andrew C. et al. | 2020
- 1097
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Towards MEMS-Tunable Phase Matching and Mode Conversion in Nanophotonic WaveguidesPruessner, Marcel W. / Roxworthy, Brian J. / Stievater, Todd H. et al. | 2020
- 1100
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Acoustic Control of Directed Assembly in Microfluidic DevicesKarimi, Majid Bigdeli / Xie, Xin / Livermore, Carol et al. | 2020
- 1103
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A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature CalibrationNi, Sheng / Zhu, Hanliang / Neuzil, Pavel et al. | 2020
- 1106
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An Autonomous Diurnal Sweat Sampling Patch for Biomarker Data AnalyticsHojaiji, Hannaneh / Zhao, Yichao / Lin, Shuyu et al. | 2020
- 1109
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Investigation of the Enhanced Sensitivity of Interdigitated Electrodes for Cellular Biosensing With Geometric, Nanostructured Surface Area, and Surface Plasmon Resonance ModesHart, Cacie / Kumar, Kowsik Sambath / Li, Jinxin et al. | 2020
- 1112
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An Adhesive and Corrosion-Resistant Biomarker Sensing Film for Biosmart Wearable Consumer ElectronicsZhao, Yichao / Wang, Bo / Hojaiji, Hannaneh et al. | 2020
- 1115
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A Stimuli-Responsive Hydrogel Array Fabrication Scheme for Large-Scale and Wearable Microfluidic ValvingTan, Jiawei / Lin, Haisong / Lin, Shuyu et al. | 2020
- 1118
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Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large AmplitudesAlter, Anne L. / Flader, Ian B. / Chen, Yunhan et al. | 2020
- 1121
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Coupling of Lamb Waves and Spin Waves in Multiferroic HeterostructuresTiwari, Sidhant / Schneider, Joseph D. / Wintz, Sebastian et al. | 2020
- 1124
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Quality Factor Extraction and Enhancement Across Temperature in Ring ResonatorsAlter, Anne L. / Gerrard, Dustin D. / Kwon, Hyun-Keun et al. | 2020
- 1127
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Microfabricated Foldable Wings for Centimeter-Scale MicroflyersCha, Wujoon / Campbell, Matthew F. / Popov, George A. et al. | 2020
- 1130
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Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock RobustnessKwon, Hyun-Keun / Vukasin, Gabrielle D. / Bousse, Nicholas E. et al. | 2020
- 1132
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An 8-Bit Digitally Operated Micromachined AccelerometerAbbasalipour, Amin / Nikfarjam, Hamed / Pourkamali, Siavash et al. | 2020
- 1137
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MEMS Resonators for Frequency Reference and Timing ApplicationsWu, Guoqiang / Xu, Jinghui / Ng, Eldwin Jiaqiang et al. | 2020
- 1167
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Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator ArrayXu, Ruijia / Lin, Yu-Sheng et al. | 2020
- 1173
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A Double-Sided Comb-Drive Actuator With a Floating Rotor: Achieving a Strong Response While Eliminating the DC BiasKassie, Danny A. / Levi, Sivan / Elata, David et al. | 2020
- 1180
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Monolithic Integration and Analysis of Vertical, Partially Encapsulated Nanoelectrode ArraysAllani, Sonja / Jupe, Andreas / Staufer, Oskar et al. | 2020
- 1189
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Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic TransducersRobichaud, Alexandre / Deslandes, Dominic / Cicek, Paul-Vahe et al. | 2020
- 1199
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Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas SensorsNg, Doris K. T. / Wu, Guoqiang / Zhang, Tan-Tan et al. | 2020
- 1208
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Magnetic Field-Induced Recoverable Dynamic Morphological Change of Gallium-Based Liquid MetalJeong, Jinwon / Seo, Jeonghwa / Chung, Sang Kug et al. | 2020
- 1216
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Systematic Characterization of Hydrophilized PolydimethylsiloxaneO'Brien, Daniel Joseph / Sedlack, Andrew J. H. / Bhatia, Pia et al. | 2020
- 1225
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Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask ProcessThachil, George / Nair, Deleep R. / DasGupta, Amitava et al. | 2020
- 1234
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The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow MechanismWu, Guorong / Xing, Yan et al. | 2020
- 1245
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Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS ChipsTsiamis, Andreas / Li, Yifan / Dunare, Camelia et al. | 2020
- 1253
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Improved Cyclohexanone Vapor Detection via Gravimetric SensingColon-Berrios, Aida R. / McGinn, Christine K. / Cavallari, Marco R. et al. | 2020
- 1264
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Multiwalled Carbon Nanotubes in Microfluidic Chip for the Separation of X- and Y-Sperm Based on a Photolithography TechniquePhiphatanaphiphop, Chalinee / Leksakul, Komgrit / Phatthanakun, Rungrueang et al. | 2020
- 1278
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A MEMS Turbopump for High Temperature Rankine Micro Heat Engines—Part I: Design and FabricationAmnache, Amrid / Liamini, Mokhtar / Gauthier, Felix et al. | 2020
- 1293
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A MEMS Turbopump for High-Temperature Rankine Micro Heat Engines—Part II: Experimental DemonstrationAmnache, Amrid / Liamini, Mokhtar / Gauthier, Felix et al. | 2020
- 1304
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4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and DemonstrationKim, Su-Bon / Yoon, Yong-Hoon / Lee, Yong-Bok et al. | 2020
- 1314
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A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS MembraneLi, Jian-Hua / Liao, Xiaoping / Chu, Chenlei et al. | 2020
- 1322
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Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness MechanismWu, Wenjie / Liu, Dandan / Liu, Huafeng et al. | 2020
- 1332
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Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin FilmsLu, Ruochen / Yang, Yansong / Link, Steffen et al. | 2020
- 1347
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Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic CantileversDurdaut, Phillip / Rubiola, Enrico / Friedt, Jean-Michel et al. | 2020
- 1362
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Dynamics Characterization of a U-Shaped Micro-Resonator Portal FrameRocha, Rodrigo Tumolin / Alcheikh, Nouha / Khan, Fahimullah et al. | 2020
- 1372
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Dynamics of V-Shaped Electrothermal MEMS-Based ResonatorsAlcheikh, Nouha / Ouakad, Hassen M. / Younis, Mohammad I. et al. | 2020
- 1382
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Resonant MEMS Accelerometer With CW Laser ExcitationChallener, William A. / Kasten, Ansas M. / Wang, Mengli et al. | 2020
- 1389
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Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring StructureZhang, Hongcai / Wei, Xueyong / Gao, Yang et al. | 2020
- 1401
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Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMSYao, Zhichao / Zega, Valentina / Su, Yan et al. | 2020
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Table of contents| 2020
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Journal of Microelectromechanical Systems| 2020
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IEEE Access| 2020
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TechRxiv: Share Your Preprint Research with the World!| 2020