The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Volume 34,
Issue 7
Volume 34,
Issue 6
Volume 34,
Issue 5
Volume 34,
Issue 4
Volume 34,
Issue 3
Volume 34,
Issue 2
Volume 34,
Issue 1
Volume 33,
Issue 12
Volume 33,
Issue 11
Volume 33,
Issue 10
Volume 33,
Issue 9
Volume 33,
Issue 8
Volume 33,
Issue 7
Volume 33,
Issue 6
Volume 33,
Issue 5
Volume 33,
Issue 4
Volume 33,
Issue 3
Volume 33,
Issue 2
Volume 33,
Issue 1
Volume 32,
Issue 12
Volume 32,
Issue 11
Volume 32,
Issue 10
Volume 32,
Issue 9
Volume 32,
Issue 8
Volume 32,
Issue 7
Volume 32,
Issue 6
Volume 32,
Issue 5
Volume 32,
Issue 4
Volume 32,
Issue 3
Volume 32,
Issue 2
Volume 32,
Issue 1
Volume 31,
Issue 12
Volume 31,
Issue 11
Volume 31,
Issue 10
Volume 31,
Issue 9
Volume 31,
Issue 8
Volume 31,
Issue 7
Volume 31,
Issue 6
Volume 31,
Issue 5
Volume 31,
Issue 4
Volume 31,
Issue 3
Volume 31,
Issue 2
Volume 31,
Issue 1
Volume 30,
Issue 12
Volume 30,
Issue 11
Volume 30,
Issue 10
Volume 30,
Issue 9
Volume 30,
Issue 7
Volume 30,
Issue 3
Volume 29,
Issue 9
Volume 29,
Issue 8
Volume 29,
Issue 7
Volume 29,
Issue 6
Volume 29,
Issue 5
Volume 29,
Issue 4
Volume 29,
Issue 3
Volume 29,
Issue 2
Volume 29,
Issue 1
Volume 28,
Issue 12
Volume 28,
Issue 11
Volume 28,
Issue 10
Volume 28,
Issue 9
Volume 28,
Issue 8
Volume 28,
Issue 7
Volume 28,
Issue 6
Volume 28,
Issue 5
Volume 28,
Issue 4
Volume 28,
Issue 3
Volume 28,
Issue 2
Volume 28,
Issue 1
Volume 27,
Issue 12
Volume 27,
Issue 11
Volume 27,
Issue 10
Volume 27,
Issue 9
Volume 27,
Issue 8
Volume 27,
Issue 7
Volume 27,
Issue 6
Volume 27,
Issue 5
Volume 27,
Issue 4
Volume 27,
Issue 3
Volume 27,
Issue 2
Volume 27,
Issue 1
Volume 26,
Issue 12
Volume 26,
Issue 11
Volume 26,
Issue 10
Volume 26,
Issue 9
Volume 26,
Issue 8
Volume 26,
Issue 7
Volume 26,
Issue 6
Volume 26,
Issue 5
Volume 26,
Issue 4
Volume 26,
Issue 3
Volume 26,
Issue 2
Volume 26,
Issue 1
Volume 25,
Issue 12
Volume 25,
Issue 11
Volume 25,
Issue 10
Volume 25,
Issue 9
Volume 25,
Issue 8
Volume 25,
Issue 7
Volume 25,
Issue 6
Volume 25,
Issue 5
Volume 25,
Issue 4
Volume 25,
Issue 3
Volume 25,
Issue 2
Volume 25,
Issue 1
Volume 24,
Issue 12
Volume 24,
Issue 11
Volume 24,
Issue 10
Volume 24,
Issue 9
Volume 24,
Issue 8
Volume 24,
Issue 7
Volume 24,
Issue 6
Volume 24,
Issue 5
Volume 24,
Issue 4
Volume 24,
Issue 3
Volume 24,
Issue 2
Volume 24,
Issue 1
Volume 23,
Issue 12
Volume 23,
Issue 11
Volume 23,
Issue 10
Volume 23,
Issue 9
Volume 23,
Issue 8
Volume 23,
Issue 7
Volume 23,
Issue 6
Volume 23,
Issue 5
Volume 23,
Issue 4
Volume 23,
Issue 3
Volume 23,
Issue 2
Volume 23,
Issue 1
Volume 22,
Issue 12
Volume 22,
Issue 11
Volume 22,
Issue 10
Volume 22,
Issue 9
Volume 22,
Issue 8
Volume 22,
Issue 7
Volume 22,
Issue 6
Volume 22,
Issue 5
Volume 22,
Issue 4
Volume 22,
Issue 3
Volume 22,
Issue 2
Volume 22,
Issue 1
Volume 21,
Issue 12
Volume 21,
Issue 11
Volume 21,
Issue 10
Volume 21,
Issue 9
Volume 21,
Issue 8
Volume 21,
Issue 7
Volume 21,
Issue 6
Volume 21,
Issue 5
Volume 21,
Issue 4
Volume 21,
Issue 3
Volume 21,
Issue 2
Volume 21,
Issue 1
Volume 20,
Issue 12
Volume 20,
Issue 11
Volume 20,
Issue 10
Volume 20,
Issue 9
Volume 20,
Issue 8
Volume 20,
Issue 7
Volume 20,
Issue 6
Volume 20,
Issue 5
Volume 20,
Issue 4
Volume 20,
Issue 3
Volume 20,
Issue 2
Volume 20,
Issue 1
Volume 19,
Issue 12
Volume 19,
Issue 11
Volume 19,
Issue 10
Volume 19,
Issue 9
Volume 19,
Issue 8
Volume 19,
Issue 7
Volume 19,
Issue 6
Volume 19,
Issue 5
Volume 19,
Issue 4
Volume 19,
Issue 3
Volume 19,
Issue 2
Volume 19,
Issue 1
Volume 18,
Issue 12
Volume 18,
Issue 11
Volume 18,
Issue 10
Volume 18,
Issue 9
Volume 18,
Issue 8
Volume 18,
Issue 7
Volume 18,
Issue 6
Volume 18,
Issue 5
Volume 18,
Issue 4
Volume 18,
Issue 3
Volume 18,
Issue 2
Volume 18,
Issue 1
Volume 17,
Issue 12
Volume 17,
Issue 11
Volume 17,
Issue 10
Volume 17,
Issue 9
Volume 17,
Issue 8
Volume 17,
Issue 7
Volume 17,
Issue 6
Volume 17,
Issue 5
Volume 17,
Issue 4
Volume 17,
Issue 3
Volume 17,
Issue 2
Volume 17,
Issue 1
Volume 16,
Issue 12
Volume 16,
Issue 11
Volume 16,
Issue 10
Volume 16,
Issue 9
Volume 16,
Issue 8
Volume 16,
Issue 7
Volume 16,
Issue 6
Volume 16,
Issue 5
Volume 16,
Issue 4
Volume 16,
Issue 3
Volume 16,
Issue 2
Volume 16,
Issue 1
Volume 15,
Issue 12
Volume 15,
Issue 11
Volume 15,
Issue 10
Volume 15,
Issue 9
Volume 15,
Issue 8
Volume 15,
Issue 7
Volume 15,
Issue 6
Volume 15,
Issue 5
Volume 15,
Issue 4
Volume 15,
Issue 3
Volume 15,
Issue 2
Volume 15,
Issue 1
Volume 14,
Issue 12
Volume 14,
Issue 11
Volume 14,
Issue 10
Volume 14,
Issue 9
Volume 14,
Issue 8
Volume 14,
Issue 7
Volume 14,
Issue 6
Volume 14,
Issue 5
Volume 14,
Issue 4
Volume 14,
Issue 3
Volume 14,
Issue 2
Volume 14,
Issue 1
Volume 13,
Issue 6
Volume 13,
Issue 5
Volume 13,
Issue 4
Volume 13,
Issue 3
Volume 13,
Issue 2
Volume 13,
Issue 1
Volume 12,
Issue 6
Volume 12,
Issue 5
Volume 12,
Issue 4
Volume 12,
Issue 3
Volume 12,
Issue 2
Volume 12,
Issue 1
Volume 11,
Issue 6
Volume 11,
Issue 5
Volume 11,
Issue 4
Volume 11,
Issue 3
Volume 11,
Issue 2
Volume 11,
Issue 1
Volume 10,
Issue 4
Volume 10,
Issue 3
Volume 10,
Issue 2
Volume 10,
Issue 1
Volume 9,
Issue 4
Volume 9,
Issue 3
Volume 9,
Issue 2
Volume 9,
Issue 1
Volume 8,
Issue 4
Volume 8,
Issue 3
Volume 8,
Issue 2
Volume 8,
Issue 1
Volume 7,
Issue 4
Volume 7,
Issue 3
Volume 7,
Issue 2
Volume 7,
Issue 1
Volume 6,
Issue 4
Volume 6,
Issue 3
Volume 6,
Issue 2
Volume 6,
Issue 1
Volume 5,
Issue 4
Volume 5,
Issue 3
Volume 5,
Issue 2
Volume 5,
Issue 1
Volume 4,
Issue 4
Volume 4,
Issue 3
Volume 4,
Issue 2
Volume 4,
Issue 1
Volume 3,
Issue 4
Volume 3,
Issue 3
Volume 3,
Issue 2
Volume 3,
Issue 1
Volume 2,
Issue 4
Volume 2,
Issue 3
Volume 2,
Issue 2
Volume 2,
Issue 1
Volume 1,
Issue 4
Volume 1,
Issue 3
Volume 1,
Issue 2
Volume 1,
Issue 1
>
Table of contents
1
Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer
Bong-Hwan Kim
/ Kukjin Chun
et al.
| 2001
1
PAPERS - Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer
Kim, B.-H.
et al.
| 2001
7
PAPERS - Raman and finite-element analysis of a mechanically strained silicon microstructure
Bowden, M.
et al.
| 2001
7
Raman and finite-element analysis of a mechanically strained silicon microstructure
Michael Bowden
/ Derek J Gardiner
/ David Wood
et al.
| 2001
13
PAPERS - A novel isolation technology in bulk micromachining using deep reactive ion etching and a polysilicon refill
Zhang, D.
et al.
| 2001
13
A novel isolation technology in bulk micromachining using deep reactive ion etching and a polysilicon refill
Dacheng Zhang
/ Zhihong Li
/ Ting Li
et al.
| 2001
20
Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS
J Zhang
/ K L Tan
/ G D Hong
et al.
| 2001
20
PAPERS - Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS
Zhang, J.
et al.
| 2001
27
A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
Francis E H Tay
/ J A van Kan
/ F Watt
et al.
| 2001
27
PAPERS - A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels
Tay, F.E.H.
et al.
| 2001
33
Fabrication of microsieves with sub-micron pore size by laser interference lithography
Stein Kuiper
/ Henk van Wolferen
/ Cees van Rijn
et al.
| 2001
33
PAPERS - Fabrication of microsieves with sub-micron pore size by laser interference lithography
Kuiper, S.
et al.
| 2001
38
PAPERS - A quality study on the excimer laser micromachining of electro-thermal-compliant micro devices
Li, J.
et al.
| 2001
38
A quality study on the excimer laser micromachining of electro-thermal-compliant micro devices
Jun Li
/ G K Ananthasuresh
et al.
| 2001
48
Design and fabrication of a highly symmetrical capacitive triaxial accelerometer
Gang Li
/ Zhihong Li
/ Congshun Wang
et al.
| 2001
48
PAPERS - Design and fabrication of a highly symmetrical capacitive triaxial accelerometer
Li, G.
et al.
| 2001
55
New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams
T Ikehara
/ R A F Zwijze
/ K Ikeda
et al.
| 2001
55
PAPERS - New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams
Ikehara, T.
et al.
| 2001
61
Evolution of hillocks during silicon etching in TMAH
J T L Thong
/ P Luo
/ W K Choi
et al.
| 2001
61
PAPERS - Evolution of hillocks during silicon etching in TMAH
Thong, J.T.L.
et al.
| 2001
70
Capacitive microbeam resonator design
Yongchul Ahn
/ Henry Guckel
/ J David Zook
et al.
| 2001
70
PAPERS - Capacitive microbeam resonator design
Ahn, Y.
et al.
| 2001
81
PAPERS - Fabrication of a vacuum-sealed magnetic sensor with a Si field emitter tip
Uemura, K.
et al.
| 2001
81
Fabrication of a vacuum-sealed magnetic sensor with a Si field emitter tip
Koji Uemura
/ Seigo Kanemaru
/ Junji Itoh
et al.
| 2001