Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 759
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2003 Reviewers List| 2003
- 761
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Etch rates for micromachining processing-Part IIWilliams, K.R. / Gupta, K. / Wasilik, M. et al. | 2003
- 779
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Micro-Raman measurement of bending stresses in micromachined silicon flexuresSrikar, V.T. / Swan, A.K. / Unlu, M.S. et al. | 2003
- 788
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Deformation of blanketed and patterned bilayer thin-film microstructures during post-release and cyclic thermal loadingYanhang Zhang, / Dunn, M.L. et al. | 2003
- 797
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Effect of trimethylsilane flow rate on the growth of SiC thin-films for fiber-optic temperature sensorsLin Cheng, / Steckl, A.J. / Scofield, J.D. et al. | 2003
- 804
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A wafer-scale membrane transfer Process for the fabrication of optical quality, large continuous membranesEui-Hyeok Yang, / Wiberg, D.V. et al. | 2003
- 816
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New low-stress PECVD poly-SiGe Layers for MEMSRusu, C. / Sedky, S. / Parmentier, B. et al. | 2003
- 826
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Precision passive mechanical alignment of wafersSlocum, A.H. / Weber, A.C. et al. | 2003
- 835
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High-voltage constraints for vacuum packaged microstructuresWilson, C.G. / Gianchandani, Y.B. / Wendt, A.E. et al. | 2003
- 840
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Electrolyte-based on-demand and disposable microbatteryKi Bang Lee, / Liwei Lin, et al. | 2003
- 848
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Control mechanism of an organic self-regulating microfluidic systemSanghoon Lee, / Eddington, D.T. / Youngmin Kim, et al. | 2003
- 855
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Silicon micromachined hollow microneedles for transdermal liquid transportGardeniers, H.J.G.E. / Luttge, R. / Berenschot, E.J.W. et al. | 2003
- 863
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Planar CMOS compatible process for the fabrication of buried microchannels in silicon, using porous-silicon technologyKaltsas, G. / Pagonis, D.N. / Nassiopoulou, A.G. et al. | 2003
- 873
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Thermocapillary actuation of droplets on chemically patterned surfaces by programmable microheater arraysDarhuber, A.A. / Valentino, J.P. / Troian, S.M. et al. | 2003
- 880
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A new measurement microphone based on MEMS technologyScheeper, P.R. / Nordstrand, B. / Gullv, J.O. et al. | 2003
- 892
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Piezoelectric bimorph microphone built on micromachined parylene diaphragmMeng-Nian Niu, / Eun Sok Kim, et al. | 2003
- 899
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Electromechanical coupling correction for piezoelectric layered beamsTadmor, E.B. / Kosa, G. et al. | 2003
- 907
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Digitally tunable microfluidic optical fiber devicesCattaneo, F. / Baldwin, K. / Shu Yang, et al. | 2003
- 913
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A multiple electrostatic electrodes torsion micromirror device with linear stepping angle effectJin-Chern Chiou, / Yu-Chen Lin, et al. | 2003
- 921
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MOEMS tuning element for a Littrow external cavity laserSyms, R.R.A. / Lohmann, A. et al. | 2003
- 929
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Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bendingZhixiong Xiao, / Wuyong Peng, / Farmer, K.R. et al. | 2003
- 937
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A static turbine flow meter with a micromachined silicon torque sensorSvedin, N. / Stemme, E. / Stemme, G. et al. | 2003
- 947
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Power delivery and locomotion of untethered microactuatorsDonald, B.R. / Levey, C.G. / McGray, C.D. et al. | 2003
- 960
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Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometryLee, A.P. / McConaghy, C.F. / Sommargren, G. et al. | 2003
- 972
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AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: application to silicon microphonesNadal-Guardia, R. / Brosa, A.M. / Dehe, A. et al. | 2003
- 979
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Development and characterization of surface micromachined, out-of-plane hot-wire anemometerChen, J. / Chang Liu, et al. | 2003
- 989
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Out-of-plane high-Q inductors on low-resistance siliconChua, C.L. / Fork, D.K. / Van Schuylenbergh, K. et al. | 2003
- 996
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Author index| 2003
- 996
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2004 Solid-State Sensor, Actuator, and Microsystems Workshop| 2003
- 997
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2004 IEEE International Micro Electro Mechanical Systems (MEMS) Conference| 2003
- 998
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EDS CD-ROM Single Sale Order Form| 2003
- 999
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IEEE Copyright Form| 2003
- 1000
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2003 INDEX| 2003
- 1001
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Subject index| 2003