Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 010601
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High temperature imaging using a thermally compensated cantilever resistive probe for scanning thermal microscopyZhang, Y. / Dobson, P.S. / Weaver, J.M.R. et al. | 2012
- 010602
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Effect of annealing on interfacial and band alignment characteristics of HfO~2/SiO~2 gate stacks on Ge substratesLi, X.-F. / Liu, X.-J. / Fu, Y.-Y. et al. | 2012
- 010603
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Extraction of a low-current discharge from a microplasma for nanoscale patterning applications at atmospheric pressureLee, S.W. / Zamani, H. / Feng, P.X.-L. et al. | 2012
- 010604
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Determination of crystal orientation of silicon via shape-controlled vapor-solid growth of copper nanoparticlesHan, J.-W. / Meyyappan, M. et al. | 2012
- 010605
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Directed assembly in epitaxial zinc oxide films on focused ion beam modified sapphire substratesMyers, B.D. / Stevens, B.L. / Rozkiewicz, D.I. et al. | 2012
- 010606
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Carbon monoxide detection sensitivity of ZnO nanorod-gated AlGaN/GaN high electron mobility transistors in different temperature environmentsLo, C.-F. / Liu, L. / Chu, B.-H. et al. | 2012
- 010607
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Fabrication of stable and reproducible submicron tunnel junctionsPop, I.M. / Fournier, T. / Crozes, T. et al. | 2012
- 010801
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Recent developments and design challenges in continuous roller micro- and nanoimprintingDumond, J.J. / Low, H.Y. et al. | 2012
- 011201
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Two-bit/four-level Pr~2O~3 trapping layer for silicon-oxide-nitride-oxide-silicon-type flash memoryLin, Y.-H. / You, H.-C. / Chien, C.-H. et al. | 2012
- 011202
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Physical and electrical properties of thermally oxidized dielectrics on Si-capped Ge-on-Si substrateZheng, Y. / Liu, G. / Li, C. et al. | 2012
- 011203
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Simulation and experimental study of ArF 193 nm laser lift-off AlGaN/GaN high electron mobility transistorsKang, T.S. / Wang, X.T. / Lo, C.F. et al. | 2012
- 011204
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Electron field emission from undoped polycrystalline diamond particles synthesized by microwave-plasma chemical vapor depositionNose, K. / Fujita, R. / Kamiko, M. et al. | 2012
- 011205
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Effect of buffer layer structure on electrical and structural properties of AlGaN/GaN high electron mobility transistorsLo, C.-F. / Liu, L. / Kang, T.S. et al. | 2012
- 011206
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Role of ions, photons, and radicals in inducing plasma damage to ultra low-k dielectricsShi, H. / Huang, H. / Bao, J. et al. | 2012
- 011207
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Strategy for focused ion beam compound material removal for circuit editingDrezner, Y. / Greenzweig, Y. / Raveh, A. et al. | 2012
- 011208
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Deep anisotropic LiNbO~3 etching with SF~6/Ar inductively coupled plasmasJun, D. / Wei, J. / Png, C.E. et al. | 2012
- 011209
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Integration of a thin film III-V edge emitting laser and a polymer microring resonator on an SiO~2/Si substratePalit, S. / Royal, M. / Jokerst, N. et al. | 2012
- 011601
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Adhesion and frictional force measurements employing scanning probe microscopy in a pentafluoropropane gas atmosphereOkada, M. / Iwasa, M. / Hiroshima, H. et al. | 2012
- 011602
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Viscoelastic properties measurements of thin polymer films from reflow of nanoimprinted patternsRognin, E. / Landis, S. / Davoust, L. et al. | 2012
- 011603
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Self-aligned patterning on a flexible substrate using a dual-tone, thermally activated photoresistJen, W.-L.K. / Rawlings, B.M. / Strahan, J.R. et al. | 2012
- 011801
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Physical properties of individual anatase TiO~2 nanowires investigated by field emission in a transmission electron microscopeShen, J. / Vincent, P. / Blanchard, N.P. et al. | 2012
- 011802
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Modifying optical properties of GaN nanowires by Ga~2O~3 overgrowthLee, Y.-K. / Medina, H. / Chiu, P.-W. et al. | 2012
- 011803
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Investigation of the factors determining the SIMS depth resolution in silicon-isotope multiple layersTomita, M. / Koike, M. / Akutsu, H. et al. | 2012
- 011804
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Nanofabrication of doped, complex oxidesWaller, G.H. / Stein, A. / Abiade, J.T. et al. | 2012
- 011805
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Barrier height determination of Au/Oxidized GaAs/n-GaAs using ballistic electron emission spectroscopyQin, H. / Liu, Z. / Troadec, C. et al. | 2012
- 011806
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Roughness optimization of electron-beam exposed hydrogen silsesquioxane for immobilization of DNA origamiShah, F.A. / Kim, K.N. / Lieberman, M. et al. | 2012
- 011807
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Crystallization of Ge in SiO~2 matrix by femtosecond laser processingSalihoglu, O. / Kurum, U. / Yaglioglu, H.G. et al. | 2012
- 012001
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Design and fabrication of GaN crystal ultra-small lateral comb-driven actuatorsTanae, T. / Sameshima, H. / Hane, K. et al. | 2012
- 012201
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Effect of ballast-resistor and field-screening on electron-emission from nanodiamond emitters fabricated on micropatterned silicon pillar arraysGhosh, N. / Kang, W.P. / Davidson, J.L. et al. | 2012
- 012202
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Effects of proton irradiation energies on degradation of AlGaN/GaN high electron mobility transistorsKim, H.-Y. / Kim, J. / Liu, L. et al. | 2012
- 012401
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Multi-phase model for reflection anisotropy spectra of copper phthalocyanine films on anisotropic silicon substratesSeidel, F. / Ding, L. / Gordan, O.D. et al. | 2012