JOURNAL OF MICROMECHANICS AND MICROENGINEERING
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 299
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Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanicsS S Kucherenko / K D Leaver et al. | 2000
- 299
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PAPERS - Modelling effects of surface tension on surface topology in spin coatings for integrated optics and micromechanicsKucherenko, S.S. et al. | 2000
- 309
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Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOHXinxin Li / Rongming Lin / Jianmin Miao et al. | 2000
- 309
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PAPERS - Study on convex-corner undercutting formed by masked-maskless etching in aqueous KOHLi, X. et al. | 2000
- 314
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In situ measurement of residual stress in micromachined thin films using a specimen with composite-layered cantileversYoung-Hoon Min / Yong-Kweon Kim et al. | 2000
- 314
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PAPERS - In situ measurement of residual stress in micromachined thin films using a specimen with composite-layered cantileversMin, Y.-H. et al. | 2000
- 322
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PAPERS - Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensorsBeeby, S.P. et al. | 2000
- 322
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Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensorsS P Beeby / J N Ross / N M White et al. | 2000
- 329
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Bulk micromachined relay with lateral contactZhihong Li / Dacheng Zhang / Ting Li et al. | 2000
- 329
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PAPERS - Bulk micromachined relay with lateral contactLi, Z. et al. | 2000
- 334
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An embedded mask for application in high-frequency integrated circuits using UV positive resist technologyB E J Alderman / C M Mann / M L Oldfield et al. | 2000
- 334
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PAPERS - An embedded mask for application in high-frequency integrated circuits using UV positive resist technologyAlderman, B.E.J. et al. | 2000
- 337
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A robust micro conveyer realized by arrayed polyimide joint actuators1Thorbjörn Ebefors / Johan Ulfstedt Mattsson / Edvard Kälvesten et al. | 2000
- 337
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A robust micro conveyer realized by arrayed polimide joint actuatorsEbefors, T. / Mattsson, J.U. / Kälvesten, E. et al. | 2000
- 337
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PAPERS - A robust micro conveyer realized by arrayed polimide joint actuatorsEbefors, T. et al. | 2000
- 350
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An integrated digital silicon micro-accelerometer with MOSFET-type sensing elementsYoungjoo Yee / Jong Uk Bu / Kukjin Chun et al. | 2000
- 350
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PAPERS - An integrated digital silicon micro-accelerometer with MOSFET-type sensing elementsYee, Y. et al. | 2000
- 359
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PAPERS - Using biological principles to design MEMSScherge, M. et al. | 2000
- 359
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Using biological principles to design MEMSM Scherge / S N Gorb et al. | 2000
- 365
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A generic micromachined silicon platform for high-performance RF passive componentsBabak Ziaie / Khalil Najafi et al. | 2000
- 365
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PAPERS - A generic micromachined silicon platform for high-performance RF passive componentsZiaie, B. et al. | 2000
- 372
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PAPERS - Navier-Stokes simulations of gas flow in micro devicesJie, D. et al. | 2000
- 372
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Navier-Stokes simulations of gas flow in micro devicesDai Jie / Xu Diao / Khoo Boo Cheong et al. | 2000
- 380
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A fabrication process for integrating polysilicon microstructures with post-processed CMOS circuitsY B Gianchandani / H Kim / M Shinn et al. | 2000
- 380
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PAPERS - A fabrication process for integrating polysilicon microstructures with post-processed CMOS circuitsGianchandani, Y.B. et al. | 2000
- 387
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A two-way membrane-type micro-actuator with continuous deflectionsChenpeng Hsu / Wensyang Hsu et al. | 2000
- 387
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PAPERS - A two-way membrane-type micro-actuator with continuous deflectionsHsu, C. et al. | 2000
- 395
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PAPERS - Silicon-processed plastic micropyramids for brightness enhancement applicationsLin, L. et al. | 2000
- 395
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Silicon-processed plastic micropyramids for brightness enhancement applicationsLiwei Lin / T K Shia / C-J Chiu et al. | 2000
- 401
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Semi-disposable microvalves for use with microfabricated devices or microchipsPo Ki Yuen / Larry J Kricka / Peter Wilding et al. | 2000
- 401
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PAPERS - Semi-disposable microvalves for use with microfabricated devices or microchipsYuen, P.K. et al. | 2000
- 410
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PAPERS - Process of spacer with high aspect ratio for field emission displayPark, S. et al. | 2000
- 410
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Process of spacer with high aspect ratio for field emission displaySekwang Park / Minsoo Kim et al. | 2000
- 415
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PAPERS - A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer techniqueHosokawa, K. et al. | 2000
- 415
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A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer techniqueKazuo Hosokawa / Ryutaro Maeda et al. | 2000
- 421
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Behavior of bulk micromachined silicon flow sensor in the negative differential resistance regimeSisira K Gamage / Nihat Okulan / H Thurman Henderson et al. | 2000
- 421
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PAPERS - Behavior of bulk micromachined silicon flow sensor in the negative differential resistance regimeGamage, S.K. et al. | 2000
- 430
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PAPERS - Morphological study of (311) crystal planes anisotropically etched in (100) silicon: Role of etchants and etching parametersResnik, D. et al. | 2000
- 430
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Morphological study of {311} crystal planes anisotropically etched in (100) silicon: role of etchants and etching parametersDrago Resnik / Danilo Vrtacnik / Slavko Amon et al. | 2000
- 440
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Fabrication of a beam-mass structure using single-step electrochemical etching for micro structures (SEEMS)H Ohji / P T J Gennissen / P J French et al. | 2000
- 440
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PAPERS - Fabrication of a beam-mass structure using single-step electrochemical etching for micro structures (SEEMS)Ohji, H. et al. | 2000
- 445
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Micro-discharge and electric breakdown in a micro-gapTakahito Ono / Dong Youn Sim / Masayoshi Esashi et al. | 2000
- 445
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PAPERS - Micro-discharge and electric breakdown in a micro-gapOno, T. et al. | 2000
- 452
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A laterally driven symmetric micro-resonator for gyroscopic applicationsYoon Shik Hong / Jong Hyun Lee / Soo Hyun Kim et al. | 2000
- 452
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PAPERS - A laterally driven symmetric micro-resonator for gyroscopic applicationsHong, Y.S. et al. | 2000
- 459
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PAPERS - Optimization of a circular piezoelectric bimorph for a micropump driverMorris, C.J. et al. | 2000
- 459
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Optimization of a circular piezoelectric bimorph for a micropump driverChristopher J Morris / Fred K Forster et al. | 2000
- 466
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PAPERS - Transient temperature performance of an integrated micro-thermal systemJiang, L. et al. | 2000
- 466
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Transient temperature performance of an integrated micro-thermal systemLinan Jiang / Man Wong / Yitshak Zohar et al. | 2000
- 477
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PAPERS - Calculation of electrostatic forces and torques in MEMS using path-independent integralsHui, C.-Y. et al. | 2000
- 477
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Calculation of electrostatic forces and torques in MEMS using path-independent integralsC-Y Hui / J-L A Yeh / N C Tien et al. | 2000
- N1
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Cost effective realization of nanoscaled interdigitated electrodesP Van Gerwen / W Laureyn / A Campitelli et al. | 2000
- R1
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The future of MEMS in telecommunications networksJames A Walker et al. | 2000
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TOPICAL REVIEW - The future of MEMS in telecommunications networksWalker, J.A. et al. | 2000
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TECHNICAL NOTE - Cost effective realization of nanoscaled interdigitated electrodesGerwen, P.Van et al. | 2000