Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1273
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JMEMS LETTERS - Parallel Heterogeneous Integration of Chip-Scale Parts by Self-AssemblyPark, K S et al. | 2012
- 1273
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Parallel Heterogeneous Integration of Chip-Scale Parts by Self-AssemblyPark, Kwang Soon / Hoo, Ji Hao / Baskaran, Rajashree et al. | 2012
- 1276
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Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using ElectromigrationMohanasundaram, S. M. / Pratap, Rudra / Ghosh, Arindam et al. | 2012
- 1279
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A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing TechniqueMohammadi, A. / Yuce, M. R. / Moheimani, S. O. R. et al. | 2012
- 1282
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Fabrication Process for Integrating Nanoparticles With Released Structures Using Photoresist Replacement of Sublimated p-Dichlorobenzene for Temporary SupportHwang, Yongha / Candler, Rob N. et al. | 2012
- 1285
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A Lithographic Resist-Based Simple Technology for High Yield Microfabrication of Air BridgesJie, S. et al. | 2012
- 1288
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Polyethersulfone Membrane Coated With Nanoporous Parylene for UltrafiltrationPrihandana, Gunawan Setia / Ito, Hikaru / Nishinaka, Yuya et al. | 2012
- 1291
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A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence TomographySamuelson, Sean R. / Wu, Lei / Sun, Jingjing et al. | 2012
- 1291
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JMEMS PAPERS - A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence TomographySamuelson, S R et al. | 2012
- 1303
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Resonant PZT MEMS Scanner for High-Resolution DisplaysBaran, Utku / Brown, Dean / Holmstrom, Sven et al. | 2012
- 1311
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A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency VibrationsGalchev, Tzeno / Aktakka, Ethem Erkan / Najafi, Khalil et al. | 2012
- 1321
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Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning ForksMyers, David R. / Azevedo, Robert G. / Chen, Li et al. | 2012
- 1329
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A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing ElectrodesTsai, Ming-Han / Liu, Yu-Chia / Fang, Weileun et al. | 2012
- 1338
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A SU-8-Based Microfabricated Implantable Inductively Coupled Passive RF Wireless Intraocular Pressure SensorXue, Ning / Chang, Sung-Pil / Lee, Jeong-Bong et al. | 2012
- 1347
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Modeling and Demonstration of Thermally Stable High-Sensitivity Reproducible Acoustic SensorsAkkaya, Onur Can / Akkaya, Onur / Digonnet, Michel J. F. et al. | 2012
- 1357
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A Tunable Optofluidic Silicon Optical BenchWeber, Niklas / Zappe, Hans / Seifert, Andreas et al. | 2012
- 1365
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A Waveform Design Method for a Piezo Inkjet Printhead Based on Robust Feedforward ControlKhalate, Amol A. / Bombois, Xavier / Scorletti, Gérard et al. | 2012
- 1375
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Porous Silicon in a Semiconductor Manufacturing EnvironmentBoehringer, Matthias / Artmann, Hans / Witt, Kevin et al. | 2012
- 1382
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Energy-Based Approach to Adaptive Pulse Shaping for Control of RF-MEMS DC-Contact SwitchesDo, Cuong / Lishchynska, Maryna / Cychowski, Marcin et al. | 2012
- 1392
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Design and Fabrication of Addressable Microfluidic Energy Storage MEMS DeviceLifton, Victor A. / Simon, Steve / Holmqvist, Johan et al. | 2012
- 1402
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Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas SensorsXu, Lei / Wang, Yuchen / Zhou, Hong et al. | 2012
- 1410
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Elastomer-Based Pneumatic Switch for Radio Frequency MicrodevicesShah, Charan M. / Sriram, Sharath / Bhaskaran, Madhu et al. | 2012
- 1418
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Engineering a Biomimetic Villus Array for In Vitro Three-Dimensional Culture of Intestinal Epithelial CellsYang, Wen-Cheng / Chen, Yuan-Ching / Huang, Yu-Sheng et al. | 2012
- 1426
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CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording–Characterization and ApplicationSeidl, Karsten / Schwaerzle, Michael / Ulbert, Istvan et al. | 2012
- 1436
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Isotropic Silicon Etching With Formula Not Shown Gas for Wafer-Level Micromachining ApplicationsXu, D. / Xiong, B. / Wu, G. et al. | 2012
- 1436
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Isotropic Silicon Etching With XeF2 Gas for Wafer-Level Micromachining ApplicationsXu, D et al. | 2012
- 1436
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Isotropic Silicon Etching With $\hbox{XeF}_{2}$ Gas for Wafer-Level Micromachining ApplicationsXu, Dehui / Xiong, Bin / Wu, Guoqiang et al. | 2012
- 1445
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Stress-Driven and Carbon-Assisted Growth of $ \hbox{SiO}_{x}\hbox{N}_{y}$ Nanowires on Photoresist-Derived Carbon MicroelectrodeZhang, Lei / Shi, Tielin / Tang, Zirong et al. | 2012
- 1445
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Stress-Driven and Carbon-Assisted Growth of SiOx-Ny, Nanowires on Photoresist-Derived Carbon MicroelectrodeZhang, L et al. | 2012
- 1445
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Stress-Driven and Carbon-Assisted Growth of Formula Not Shown Nanowires on Photoresist-Derived Carbon MicroelectrodeZhang, L. / Shi, T. / Tang, Z. et al. | 2012
- 1452
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Thin-Film Piezoelectric MEMS Transducer Suitable for Middle-Ear Audio ProsthesesCampanella, Humberto / Camargo, Carlos J. / Lopez Garcia, Javier et al. | 2012
- 1464
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Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry–Pérot-Based Accelerometer Integrated With Channel WaveguidesZandi, Kazem / Belanger, Joseph André / Peter, Yves-Alain et al. | 2012
- 1464
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Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry-Pirot-Based Accelerometer Integrated With Channel WaveguidesZandi, K. / Belanger, J. A. / Peter, Y. A. et al. | 2012
- 1471
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Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in MicrosystemsGkotsis, Petros / Kilchytska, Valeriya / Fragkiadakis, Charalampos et al. | 2012
- 1484
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Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit BondingWu, Guoqiang / Xu, Dehui / Xiong, Bin et al. | 2012
- 1492
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Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic LegRhee, Choong-Ho / Pulskamp, Jeffrey S. / Polcawich, Ronald G. et al. | 2012
- 1504
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Fabrication of Very-High-Aspect-Ratio Microstructures in Complex Patterns by Photoelectrochemical EtchingSun, Guangyi / Zhao, Xin / Kim, Chang-Jin “CJ” et al. | 2012
- 1513
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Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZTHareesh, Prakruthi / Misri, Isaac / Yang, Shuang et al. | 2012
- 1519
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Ultrahigh-Dynamic-Range Resonant MEMS Load Cells for Micromechanical Test FramesAzgin, Kivanc / Akin, Tayfun / Valdevit, Lorenzo et al. | 2012
- 1530
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The 17th International Conference on Solid-State Sensors, Actuators and Microsystems| 2012
- 1531
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2013 IEEE International Reliability Physics Symposium - Call for Papers and Posters| 2012
- 1532
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2013 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2013)| 2012
- 1533
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2012 Index Journal of Microelectromechanical Systems Vol. 21| 2012
- C1
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Table of contents| 2012
- C2
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Journal of Microelectromechanical Systems publication information| 2012
- C3
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The 26th International Conference on Micro Electro Mechanical Systems| 2012