Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 055001
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Morphologies of conductive looped liquid lines inkjet-printed on substrate surfacesChin-Tai Chen / Kun-Ze Tu et al. | 2012
- 55001
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Paper: Morphologies of conductive looped liquid lines inkjet-printed on substrate surfacesChen, Chin-Tai et al. | 2012
- 055002
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A thermal-driven silicon micro xy-stage integrated with piezoresistive sensors for nano-positioningYoung-Soo Choi / Yan Zhang / Dong-Weon Lee et al. | 2012
- 55002
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Paper: A thermal-driven silicon micro xy-stage integrated with piezoresistive sensors for nano-positioningChoi, Young-Soo et al. | 2012
- 55003
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Paper: Formation of liposomes using a 3D flow focusing microfluidic device with spatially patterned wettability by corona dischargeDavies, Ryan T et al. | 2012
- 055003
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Formation of liposomes using a 3D flow focusing microfluidic device with spatially patterned wettability by corona dischargeRyan T Davies / Donghwan Kim / Jaesung Park et al. | 2012
- 055004
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Effect of iron catalyst thickness on vertically aligned carbon nanotube forest straightness for CNT-MEMSKellen Moulton / Nicholas B Morrill / Adam M Konneker et al. | 2012
- 55004
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Paper: Effect of iron catalyst thickness on vertically aligned carbon nanotube forest straightness for CNT-MEMSMoulton, Kellen et al. | 2012
- 055005
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Resolution, masking capability and throughput for direct-write, ion implant mask patterning of diamond surfaces using ion beam lithographySarvesh K Tripathi / Declan Scanlan / Neal O'Hara et al. | 2012
- 55005
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Paper: Resolution, masking capability and throughput for direct-write, ion implant mask patterning of diamond surfaces using ion beam lithographyTripathi, Sarvesh K et al. | 2012
- 55006
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Paper: Study of design parameters affecting the motion of DNA for nanoinjectionDavid, Regis A et al. | 2012
- 055006
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Study of design parameters affecting the motion of DNA for nanoinjectionRegis A David / Brian D Jensen / Justin L Black et al. | 2012
- 055007
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Piezoelectrically operated MEMS corner cube retroreflector for optical communicationsJ Park / J Won / D Kim et al. | 2012
- 55007
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Paper: Piezoelectrically operated MEMS corner cube retroreflector for optical communicationsPark, J et al. | 2012
- 055008
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Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structuresStefan Eder-Kapl / Andreas Steiger-Thirsfeld / Markus Wellenzohn et al. | 2012
- 55008
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Paper: Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structuresEder-Kapl, Stefan et al. | 2012
- 055009
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A time-of-flight flow sensor for the volume measurement of trace amount of interstitial fluidH Yu / D Li / R C Roberts et al. | 2012
- 55009
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Paper: A time-of-flight flow sensor for the volume measurement of trace amount of interstitial fluidYu, H et al. | 2012
- 055010
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Implementation of a monolithic capacitive accelerometer in a wafer-level 0.18 µm CMOS MEMS processSheng-Hsiang Tseng / Michael S-C Lu / Po-Chang Wu et al. | 2012
- 55010
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Paper: Implementation of a monolithic capacitive accelerometer in a wafer-level 0.18 µm CMOS MEMS processTseng, Sheng-Hsiang et al. | 2012
- 055011
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Control of nanoenergetics through organized microstructuresVenkata Sharat Parimi / Srinivas A Tadigadapa / Richard A Yetter et al. | 2012
- 55011
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Paper: Control of nanoenergetics through organized microstructuresParimi, Venkata Sharat et al. | 2012
- 55012
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Paper: Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elementsLou, Liang et al. | 2012
- 055012
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Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elementsLiang Lou / Songsong Zhang / Woo-Tae Park et al. | 2012
- 055013
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Modeling and design of a capacitive microwave power sensor for X-band applications based on GaAs technologyYan Cui / Xiaoping Liao et al. | 2012
- 55013
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Paper: Modeling and design of a capacitive microwave power sensor for X-band applications based on GaAs technologyCui, Yan et al. | 2012
- 55014
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Paper: Fabrication of an ultrathin silicon wafer with a honeycomb structure by the thermal-stress-induced pattern transfer (TIPT) methodWang, Teng-Yu et al. | 2012
- 055014
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Fabrication of an ultrathin silicon wafer with a honeycomb structure by the thermal-stress-induced pattern transfer (TIPT) methodTeng-Yu Wang / Chien-Hsun Chen / Chen-Hsun Du et al. | 2012
- 055015
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Differential pressure sensor using a piezoresistive cantileverHidetoshi Takahashi / Nguyen Minh Dung / Kiyoshi Matsumoto et al. | 2012
- 55015
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Paper: Differential pressure sensor using a piezoresistive cantileverTakahashi, Hidetoshi et al. | 2012
- 55016
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Paper: Magnetic CoPt (60–70 wt%Pt) microstructures fabricated by the electrochemical methodCortés, M et al. | 2012
- 055016
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Magnetic CoPt (60–70 wt%Pt) microstructures fabricated by the electrochemical methodM Cortés / E Gómez / E Vallés et al. | 2012
- 55017
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Paper: An online test structure for the thermal expansion coefficient of surface micromachined polysilicon beams by a pull-in approachLiu, Hai-Yun et al. | 2012
- 055017
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An online test structure for the thermal expansion coefficient of surface micromachined polysilicon beams by a pull-in approachHai-Yun Liu / Zai-Fa Zhou / Wei-Hua Li et al. | 2012
- 055018
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Silicon micro-masonry using elastomeric stamps for three-dimensional microfabricationHohyun Keum / Andrew Carlson / Hailong Ning et al. | 2012
- 55018
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Paper: Silicon micro-masonry using elastomeric stamps for three-dimensional microfabricationKeum, Hohyun et al. | 2012
- 055019
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A planar microfluidic mixer based on logarithmic spiralsThomas Scherr / Christian Quitadamo / Preston Tesvich et al. | 2012
- 55019
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Paper: A planar microfluidic mixer based on logarithmic spiralsScherr, Thomas et al. | 2012
- 055020
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A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonatorsJ Giner / A Uranga / J L Muñóz-Gamarra et al. | 2012
- 55020
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Paper: A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonatorsGiner, J et al. | 2012
- 055021
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Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon viasPradeep Dixit / Tapani Vehmas / Sami Vähänen et al. | 2012
- 55021
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Paper: Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon viasDixit, Pradeep et al. | 2012
- 55022
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Paper: 3D micro-structures by piezoelectric inkjet printing of gold nanofluidsKullmann, Carmen et al. | 2012
- 055022
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3D micro-structures by piezoelectric inkjet printing of gold nanofluidsCarmen Kullmann / Niklas C Schirmer / Ming-Tsang Lee et al. | 2012
- 055023
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Fabrication and characterization of a tethered rotational planar variable capacitance micro driveS Kühne / C Hierold et al. | 2012
- 55023
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Paper: Fabrication and characterization of a tethered rotational planar variable capacitance micro driveKühne, S et al. | 2012
- 055024
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Study of CMOS micromachined self-oscillating loop utilizing a phase-locked loop-driving circuitHsin-Chih Li / Sheng-Hsiang Tseng / Po-Chiun Huang et al. | 2012
- 55024
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Paper: Study of CMOS micromachined self-oscillating loop utilizing a phase-locked loop-driving circuitLi, Hsin-Chih et al. | 2012
- 055025
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Wire-bonder-assisted integration of non-bondable SMA wires into MEMS substratesA C Fischer / H Gradin / S Schröder et al. | 2012
- 55025
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Paper: Wire-bonder-assisted integration of non-bondable SMA wires into MEMS substratesFischer, A C et al. | 2012
- 055026
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Low-temperature hermetic packaging for microsystems using Au–Au surface-activated bonding at atmospheric pressureShin-ichi Yamamoto / Eiji Higurashi / Tadatomo Suga et al. | 2012
- 55026
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Paper: Low-temperature hermetic packaging for microsystems using Au–Au surface-activated bonding at atmospheric pressureYamamoto, Shin-ichi et al. | 2012
- 055027
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Monolithic fabrication of millimeter-scale machinesP S Sreetharan / J P Whitney / M D Strauss et al. | 2012
- 055028
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A triple-layer protection process for high-aspect-ratio silicon micromachining by DRIE of SOI substratesZhibo Ma / Chengyu Jiang / Weizheng Yuan et al. | 2012
- 057001
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A gas bubble-based parallel micro manipulator: conceptual design and kinematics modelWei Dong / Michaël Gauthier / Cyrille Lenders et al. | 2012
- 57001
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Technical Note: A gas bubble-based parallel micro manipulator: conceptual design and kinematics modelDong, Wei et al. | 2012
- 57002
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Technical Note: Design of etch holes to compensate spring width loss for reliable resonant frequenciesJang, Yun-Ho et al. | 2012
- 057002
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Design of etch holes to compensate spring width loss for reliable resonant frequenciesYun-Ho Jang / Jong-Wan Kim / Jung-Mu Kim et al. | 2012