Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 671
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Modeling of three-dimensional cutting forces in micro-end-millingLi, Chengfeng / Lai, Xinmin / Li, Hongtao et al. | 2007
- 679
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Experimental and theoretical study of an on-wall in-tube flexible thermal sensorTan, Zhiyong / Shikida, Mitsuhiro / Hirota, Masafumi et al. | 2007
- 687
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Effects of intrinsic hydrophobicity on wettability of polymer replicas of a superhydrophobic lotus leafLee, Seung-Mo / Kwon, Tai Hun et al. | 2007
- 693
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An SU-8 microlens array fabricated by soft replica molding for cell counting applicationsKuo, Ju-Nan / Hsieh, Chia-Chun / Yang, Sung-Yi et al. | 2007
- 700
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Reliable small via interconnects made of multiple sub-micron wires in flexible PCBYousef, Hanna / Hjort, Klas / Lindeberg, Mikael et al. | 2007
- 709
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Measuring the thin film elastic modulus with a magnetostrictive sensorLiang, C / Prorok, B C et al. | 2007
- 717
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Nanocone array glassD'Urso, Brian / Simpson, John T / Kalyanaraman, Meenaa et al. | 2007
- 722
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Fabrication of a LCP-based conductivity cell and resistive temperature device via PCB MEMS technologyBroadbent, Heather A / Ivanov, Stanislav Z / Fries, David P et al. | 2007
- 730
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Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature rangeEklund, E Jesper / Shkel, Andrei M et al. | 2007
- 737
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Atomic layer deposited alumina (Al2O3) thin films on a high-Q mechanical silicon oscillatorHahtela, O / Sievilä, P / Chekurov, N et al. | 2007
- 737
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Atomic layer deposited alumina (AI2O3) thin films on a high-Q mechanical silicon oscillatorHahtela, O. / Sievilä, P. / Chekurov, N. et al. | 2007
- 743
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Surface microfluidics—high-speed DEP liquid actuation on planar substrates and critical factors in reliable actuationKanagasabapathi, Thirukumaran T / Kaler, Karan V I S et al. | 2007
- 753
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Deflections and curvatures of a film–substrate structure with the presence of gradient stress in MEMS applicationsZhang, Yin et al. | 2007
- 763
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Fabrication of a micro-tool in micro-EDM combined with co-deposited Ni–SiC composites for micro-hole machiningHung, Jung-Chou / Wu, Wei-Chieh / Yan, Biing-Hwa et al. | 2007
- 775
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Application of PECVD SiC in glass micromachiningZhang, Haixia / Guo, Hui / Chen, Zhe et al. | 2007
- 781
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A strain amplifying piezoelectric MEMS actuatorConway, Nicholas J / Traina, Zachary J / Kim, Sang-Gook et al. | 2007
- 788
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A new type of diabatic flow pattern map for boiling heat transfer in microchannelsRevellin, R / Thome, J R et al. | 2007
- 797
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Electrostatically actuated bilayer polyimide-based microresonatorsZhang, Guandong / Chu, Virginia / Conde, Joao Pedro et al. | 2007
- 804
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Sub-0.25 micron silicon via etching for 3D interconnectsWang, Xiaodong / Zeng, Wanxue / Eisenbraun, Eric et al. | 2007
- 812
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A MEMS-based tunable coplanar patch antenna fabricated using PCB processing techniquesMaddela, M / Ramadoss, R / Lempkowski, R et al. | 2007
- 820
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Electrokinetic flow focusing and valveless switching integrated with electrokinetic instability for mixing enhancementPan, Yu-Jen / Ren, Chen-Ming / Yang, Ruey-Jen et al. | 2007
- 828
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A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devicesvan Spengen, W Merlijn / Oosterkamp, Tjerk H et al. | 2007
- 835
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An electrochemical albumin-sensing system utilizing microfluidic technologyHuang, C.-J. / Lu, C.-C. / Lin, T.-Y. et al. | 2007
- 835
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An electrochemical albumin-sensing system utilizing microfluidic technology*Huang, Chao-June / Lu, Chiu-Chun / Lin, Thong-Yueh et al. | 2007
Preliminary results of the current paper were presented at the 2nd International Meeting on Microsensors and Microsystems 2006 (National Cheng Kung University, Tainan, Taiwan, 15–18 January).
- 835
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An electrochemical albumin-sensing system utilizing microfluidic technologyfootnote pos="infobottom" id="*">Preliminary results of the current paper were presented at the 2nd International Meeting on Microsensors and Microsystems 2006 (National Cheng Kung University, Tainan, Taiwan, 15–18 January).Huang, Chao-June et al. | 2007
- N11
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Capillary flow control using hydrophobic patternsSuk, Ji Won / Cho, Jun-Hyeong et al. | 2007
- N16
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Instant oxidation of closed microchannelsThorslund, Sara / Nikolajeff, Fredrik et al. | 2007
- N22
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Passive washing using inlet-pressure difference and a washing valveKim, Byung-Kwon / Kim, Sung-Jin / Yang, Sang-Youn et al. | 2007
- S1
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An atomistic introduction to anisotropic etchingGosálvez, M A / Sato, K / Foster, A S et al. | 2007
- S27
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Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(1 1 0)Gosálvez, M A / Xing, Y / Hynninen, T et al. | 2007
- S38
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A cellular automaton-based simulator for silicon anisotropic etching processes considering high index planesZhou, Zai-fa / Huang, Qing-an / Li, Wei-hua et al. | 2007
- S50
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Anodic etching of SiC in alkaline solutionsvan Dorp, D H / Weyher, J L / Kelly, J J et al. | 2007
- S56
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Electronic and surface properties during the etch-back of anodic oxides on Si(1 1 1) surfaces in 40% NH4F solutionYang, F / Roodenko, K / Hinrichs, K et al. | 2007
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NOTE: Instant oxidation of closed microchannelsThorslund, Sara et al. | 2007
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The Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors (PCWES 2006)Helmut Seidel et al. | 2007
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NOTE: Capillary flow control using hydrophobic patternsSuk, Ji Won et al. | 2007
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NOTE: Passive washing using inlet-pressure difference and a washing valveKim, Byung-Kwon et al. | 2007