Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 2
-
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy HarvesterWang, Kai / Wang, Guangyuan / Dai, Xuhan et al. | 2021
- 15
-
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single ResonatorTsukamoto, Takashiro / Tanaka, Shuji et al. | 2021
- 24
-
Design and Development of the MEMS-Based High-g Acceleration Threshold SwitchSingh, Virender / Kumar, Vijay / Saini, Ashish et al. | 2021
- 32
-
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness PerturbationDing, Hong / Wu, Changju / Xie, Jin et al. | 2021
- 42
-
Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion SensorLuo, Huahuang / Wang, Xiaoyi / Duan, Mingzheng et al. | 2021
- 53
-
Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating StructuresLiu, Jia-Ren / Tsai, Chun-Pu / Du, Wun-Ruei et al. | 2021
- 64
-
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS EncapsulationTemel, Oguzhan / Kalay, Yunus Eren / Akin, Tayfun et al. | 2021
- 72
-
Monolithic Multiband MEMS RF Front-End Module for 5G MobileCampanella, Humberto / Qian, You / Romero, Christian O. et al. | 2021
- 81
-
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range DetectionLuo, Guo-Lun / Kusano, Yuri / Horsley, David A. et al. | 2021
- 90
-
Deep Etching of LiNbO3 Using Inductively Coupled Plasma in SF6-Based Gas MixtureOsipov, Artem A. / Osipov, Armenak A. / Iankevich, Gleb A. et al. | 2021
- 96
-
A Microtissue Platform to Simultaneously Actuate and Detect Mechanical Forces via Non-Contact Magnetic ApproachJavor, Josh / Sundaram, Subramanian / Chen, Christopher S. et al. | 2021
- 105
-
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical SystemsDahl-Hansen, Runar Plunnecke / Tyholdt, Frode / Gjessing, Jo et al. | 2021
- 116
-
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical TransductionTina, B. S. / Anjana, C. / Kumar, Nitish et al. | 2021
- 126
-
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-MoleculeJeong, Hyunhak / Domulevicz, Lucas K. / Hihath, Joshua et al. | 2021
- 137
-
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency DrivingJeong, Yongbin / Genoe, Jan / Gijsenbergh, Pieter et al. | 2021
- 144
-
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon SuspensionHalim, Miah A. / Rendon-Hernandez, Adrian A. / Smith, Spencer E. et al. | 2021
- 156
-
Manipulating Etch Selectivities in XeF₂ Vapour EtchingRonde, Markus / Walton, Anthony J. / Terry, Jonathan G. et al. | 2021
- 165
-
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet MetasurfaceHui, Yu / Kang, Sungho / Qian, Zhenyun et al. | 2021
- 173
-
2020 Reviewers List| 2021
- 176
-
The 21st International Conference on Sollid-State Sensors, Actuators and Microsystems| 2021
- C1
-
Table of contents| 2021
- C2
-
Journal of Microelectromechanical Systems| 2021
- C3
-
IEEE Access| 2021
- C4
-
TechRxiv: Share Your Preprint Research with the World!| 2021