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Volume pp,
Issue 99
Volume 33,
Issue 3
Volume 33,
Issue 2
Volume 33,
Issue 1
Volume 32,
Issue 6
Volume 32,
Issue 5
Volume 32,
Issue 4
Volume 32,
Issue 3
Volume 32,
Issue 2
Volume 32,
Issue 1
Volume 31,
Issue 6
Volume 31,
Issue 4
Volume 31,
Issue 3
Volume 31,
Issue 2
Volume 31,
Issue 1
Volume 30,
Issue 6
Volume 30,
Issue 5
Volume 30,
Issue 4
Volume 30,
Issue 3
Volume 30,
Issue 2
Volume 30,
Issue 1
Volume 29,
Issue 6
Volume 29,
Issue 5
Volume 29,
Issue 4
Volume 29,
Issue 3
Volume 29,
Issue 1
Volume 28,
Issue 6
Volume 28,
Issue 5
Volume 28,
Issue 4
Volume 28,
Issue 3
Volume 28,
Issue 2
Volume 28,
Issue 1
Volume 27,
Issue 6
Volume 27,
Issue 5
Volume 27,
Issue 4
Volume 27,
Issue 3
Volume 27,
Issue 2
Volume 27,
Issue 1
Volume 26,
Issue 6
Volume 26,
Issue 5
Volume 26,
Issue 4
Volume 26,
Issue 3
Volume 26,
Issue 2
Volume 26,
Issue 1
Volume 25,
Issue 6
Volume 25,
Issue 5
Volume 25,
Issue 4
Volume 25,
Issue 3
Volume 25,
Issue 2
Volume 25,
Issue 1
Volume 24,
Issue 6
Volume 24,
Issue 5
Volume 24,
Issue 4
Volume 24,
Issue 3
Volume 24,
Issue 2
Volume 24,
Issue 1
Volume 23,
Issue 6
Volume 23,
Issue 5
Volume 23,
Issue 4
Volume 23,
Issue 3
Volume 23,
Issue 2
Volume 23,
Issue 1
Volume 22,
Issue 6
Volume 22,
Issue 5
Volume 22,
Issue 4
Volume 22,
Issue 3
Volume 22,
Issue 2
Volume 22,
Issue 1
Volume 21,
Issue 6
Volume 21,
Issue 5
Volume 21,
Issue 4
Volume 21,
Issue 3
Volume 21,
Issue 2
Volume 21,
Issue 1
Volume 20,
Issue 6
Volume 20,
Issue 5
Volume 20,
Issue 4
Volume 20,
Issue 3
Volume 20,
Issue 2
Volume 20,
Issue 1
Volume 19,
Issue 6
Volume 19,
Issue 5
Volume 19,
Issue 4
Volume 19,
Issue 3
Volume 19,
Issue 2
Volume 19,
Issue 1
Volume 18,
Issue 6
Volume 18,
Issue 5
Volume 18,
Issue 4
Volume 18,
Issue 3
Volume 18,
Issue 2
Volume 18,
Issue 1
Volume 17,
Issue 6
Volume 17,
Issue 5
Volume 17,
Issue 4
Volume 17,
Issue 3
Volume 17,
Issue 2
Volume 17,
Issue 1
Volume 16,
Issue 6
Volume 16,
Issue 5
Volume 16,
Issue 4
Volume 16,
Issue 3
Volume 16,
Issue 2
Volume 16,
Issue 1
Volume 15,
Issue 6
Volume 15,
Issue 5
Volume 15,
Issue 4
Volume 15,
Issue 3
Volume 15,
Issue 2
Volume 15,
Issue 1
Volume 14,
Issue 6
Volume 14,
Issue 5
Volume 14,
Issue 4
Volume 14,
Issue 3
Volume 14,
Issue 2
Volume 14,
Issue 1
Volume 13,
Issue 6
Volume 13,
Issue 5
Volume 13,
Issue 4
Volume 13,
Issue 3
Volume 13,
Issue 2
Volume 13,
Issue 1
Volume 12,
Issue 6
Volume 12,
Issue 5
Volume 12,
Issue 4
Volume 12,
Issue 3
Volume 12,
Issue 2
Volume 12,
Issue 1
Volume 11,
Issue 6
Volume 11,
Issue 5
Volume 11,
Issue 4
Volume 11,
Issue 3
Volume 11,
Issue 2
Volume 11,
Issue 1
Volume 10,
Issue 4
Volume 10,
Issue 3
Volume 10,
Issue 2
Volume 10,
Issue 1
Volume 9,
Issue 4
Volume 9,
Issue 3
Volume 9,
Issue 2
Volume 9,
Issue 1
Volume 8,
Issue 4
Volume 8,
Issue 3
Volume 8,
Issue 2
Volume 8,
Issue 1
Volume 7,
Issue 4
Volume 7,
Issue 3
Volume 7,
Issue 2
Volume 7,
Issue 1
Volume 6,
Issue 4
Volume 6,
Issue 3
Volume 6,
Issue 2
Volume 6,
Issue 1
Volume 5,
Issue 4
Volume 5,
Issue 3
Volume 5,
Issue 2
Volume 5,
Issue 1
Volume 4,
Issue 4
Volume 4,
Issue 3
Volume 4,
Issue 2
Volume 4,
Issue 1
Volume 3,
Issue 4
Volume 3,
Issue 3
Volume 3,
Issue 2
Volume 3,
Issue 1
Volume 2,
Issue 4
Volume 2,
Issue 3
Volume 2,
Issue 2
Volume 2,
Issue 1
Volume 1,
Issue 4
Volume 1,
Issue 3
Volume 1,
Issue 1
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Table of contents
183
In Memoriam: W. Trimmer
| 1997
184
Constructing Single- and Multiple-Helical Microcoils and Characterizing Their Performance as Components of Microinductors and Microelectromagnets
Rogers, J.A.
et al.
| 1997
193
A New Technique for Measuring the Mechanical Properties of Thin Films
Sharpe Jr, W.N.
et al.
| 1997
200
Micro Impact Drive Mechanisms Using Optically Excited Thermal Expansion
Ohmichi, O.
et al.
| 1997
208
A Liquid-Filled Microrelay with a Moving Mercury Microdrop
Simon, J.
et al.
| 1997
217
Microrivets for MEMS Packaging: Concept, Fabrication, and Strength Testing
Shivkumar, B.
et al.
| 1997
226
Dry Release for Surface Micromachining with HF Vapor-Phase Etching
Lee, Y.-I.
et al.
| 1997
234
A Fabrication Process for Electrostatic Microactuators with Integrated Gear Linkages
Legtenberg, R.
et al.
| 1997
242
A Micro Active Probe Device Compatible with SOI-CMOS Technologies
Yi, Y.-W.
et al.
| 1997
249
Magnetically Actuated, Addressable Microstructures
Judy, J.W.
et al.
| 1997
257
Electrostatic Curved Electrode Actuators
Legtenberg, R.
et al.
| 1997
266
Modeling and Optimal Design of Piezoelectric Cantilever Microactuators
DeVoe, D.L.
et al.
| 1997
271
Fabrication of Semiconducting YBaCuO Surface-Micromachined Bolometer Arrays
Travers, C.M.
et al.
| 1997
277
Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
Marxer, C.
et al.
| 1997
286
Correction To "M-test: A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures"
Osterberg, P.M.
/ Senturia, S.D.
et al.
| 1997