Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 509
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Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale GlassblowingZotov, Sergei A. / Trusov, Alexander A. / Shkel, Andrei M. et al. | 2012
- 509
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JMEMS LETTERS - Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale GlassblowingZotov, S A et al. | 2012
- 511
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Characterization of Contact Resistance Stability in MEM Relays With Tungsten ElectrodesChen, Yenhao / Nathanael, Rhesa / Jeon, Jaeseok et al. | 2012
- 514
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Linear-Stiffness Rotary MEMS StageBaran, Utku / Davis, Wyatt O. / Holmstrom, Sven et al. | 2012
- 517
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Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic SensorPrasad, Mahanth / Yadav, R. P. / Sahula, V. et al. | 2012
- 520
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Experimental Technique for Fatigue Testing of MEMS in LiquidsAli, Shaikh Mubassar / Mantell, Susan C. / Longmire, Ellen K. et al. | 2012
- 523
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Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to $\hbox{C}_{60}$ Nanowire TestingTsuchiya, Toshiyuki / Ura, Yasutake / Sugano, Koji et al. | 2012
- 523
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JMEMS PAPERS - Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C60 Nanowire TestingTsuchiya, T et al. | 2012
- 523
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Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to Nanowire TestingTsuchiya, T. / Ura, Y. / Sugano, K. et al. | 2012
- 530
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Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront SensorLi, Chenhui / Hall, Gunnsteinn / Zhu, Difeng et al. | 2012
- 541
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Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated MicrostructuresShavezipur, M. / Gou, Wenjuan / Carraro, Carlo et al. | 2012
- 549
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Modeling, Analysis, and Experimental Validation of a Bifurcation-Based MicrosensorKumar, Vijay / Yang, Yushi / Boley, J. William et al. | 2012
- 559
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Dielectric Charge Control in Electrostatic MEMS Positioners/VaractorsBlokhina, Elena / Gorreta, Sergi / Lopez, David et al. | 2012
- 574
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Pushing the Limits for Microactuators Based on Electroactive PolymersGaihre, Babita / Alici, Gursel / Spinks, Geoffrey M. et al. | 2012
- 586
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Improved Designs for an Electrothermal In-Plane MicroactuatorKwan, Alex Man Ho / Song, Sichao / Lu, Xing et al. | 2012
- 596
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Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback ControlOuyang, Jing / Zhu, Yong et al. | 2012
- 605
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High-Angular-Range Electrostatic Rotary Stepper Micromotors Fabricated With SOI TechnologyStranczl, Marc / Sarajlic, Edin / Fujita, Hiroyuki et al. | 2012
- 621
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Mechanics of Out-of-Plane MEMS via Postbuckling: Model-Experiment Demonstration Using CMOSFachin, Fabio / Nikles, Stefan A. / Wardle, Brian L. et al. | 2012
- 635
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Micromachined Tactile Sensor for Soft-Tissue Compliance DetectionFath El Bab, Ahmed M. R. / Sugano, Koji / Tsuchiya, Toshiyuki et al. | 2012
- 646
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Sensitivity Improvement of Micromachined Convective AccelerometersBahari, Jamal / Jones, John Dewey / Leung, Albert M. et al. | 2012
- 656
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Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS GyroscopesTatar, Erdinc / Alper, Said Emre / Akin, Tayfun et al. | 2012
- 668
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Double-SOI Wafer-Bonded CMUTs With Improved Electrical Safety and Minimal Roughness of Dielectric and Electrode SurfacesZhang, Peiyu / Fitzpatrick, Glen / Harrison, Tyler et al. | 2012
- 681
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Doping-Induced Temperature Compensation of Thermally Actuated High-Frequency Silicon Micromechanical ResonatorsHajjam, Arash / Logan, Andrew / Pourkamali, Siavash et al. | 2012
- 681
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Doping-lnduced Temperature Compensation of Thermally Actuated High-Frequency Silicon Micromechanical ResonatorsHajjam, A et al. | 2012
- 688
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High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency TuningChen, Wen-Chien / Fang, Weileun / Li, Sheng-Shian et al. | 2012
- 688
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High- Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequenc TuningChen, W.-C. / Fang, W. / Li, S.-S. et al. | 2012
- 702
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Resonant MEMS Mass Sensors for Measurement of Microdroplet EvaporationPark, Kidong / Kim, Namjung / Morisette, Dallas T. et al. | 2012
- 712
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Wetting and Active Dewetting Processes of Hierarchically Constructed Superhydrophobic Surfaces Fully Immersed in WaterLee, Choongyeop / Kim, Chang-Jin et al. | 2012
- 721
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Rotary Liquid Droplet MicrobearingYoxall, Brian E. / Chan, Mei-Lin / Harake, Ryan S. et al. | 2012
- 730
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Micro Gas Chromatography Sample Injector for the Analysis of Natural GasNachef, Kinda / Marty, Frédéric / Donzier, Eric et al. | 2012
- 739
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Microscale Shock TubeMirshekari, Gholamreza / Brouillette, Martin et al. | 2012
- 749
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Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing MethodsHuang, Chi-Chieh / Zeng, Xuefeng / Jiang, Hongrui et al. | 2012
- 756
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Surface Morphology Control of Passivated Porous Silicon Using Reactive Ion EtchingLai, Meifang / Parish, Giacinta / Liu, Yinong et al. | 2012
- 762
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2012 IEEE Bipolar/Bicmos Circuits and Technology Meeting (BCTM)| 2012
- 763
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28th International Conference on Microelectronic Test Structures| 2012
- 763
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Call for Papers — 26th International Conference on Microelectronic Test Structures| 2012
- 764
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The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications| 2012
- 764
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powerMEMS2012| 2012
- C1
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Table of contents| 2012
- C2
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Journal of Microelectromechanical Systems publication information| 2012
- C3
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2012 IEEE International Electron Devices Meeting| 2012