Materials science in semiconductor processing
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1
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Status and open problems in modeling of as-implanted damage in siliconHobler, G. / Otto, G. et al. | 2003
- 15
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Type and charge states of point defects in heavily As- and B-doped siliconNakabayashi, Y. / Osman, H.I. / Yokota, K. et al. | 2003
- 21
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Fast mixed modeling of doping for statistical process/device simulationPfitzner, Andrzej / Lejman, Adam et al. | 2003
- 27
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Modeling the impact of stress on silicon processes and devicesMoroz, Victor / Strecker, Norbert / Xu, Xiaopeng et al. | 2003
- 37
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Ultrathin oxynitridation process through ion implantation in a poly Si1−xGex gate MOS capacitorJacob, A.P. / Myrberg, T. / Friesel, M. et al. | 2003
- 43
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Diffusion of Sr, Bi, and Ta in amorphous SiO2Büngener, Ralf / Pamler, Werner / Gösele, Ulrich et al. | 2003
- 49
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Formation of ultrathin silicon oxides—modeling and technological constraintsBeck, Romuald B. et al. | 2003
- 59
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The Pr2O3/Si(001) interfaceSchmeißer, Dieter et al. | 2003
- 71
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Numerical simulation of the production processes of layered materialsSibona, Gustavo J. / Schreiber, Sascha / Hoppe, Ronald H.W. et al. | 2003
- 77
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Tracing the Ti-silicide formation by in situ ellipsometric measurementsStark, T. / Hergert, F. / Ley, L. et al. | 2003
- 85
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Static and dynamic analysis of failure locations and void formation in interconnects due to various migration mechanismsWeide-Zaage, Kirsten / Dalleau, David / Yu, Xiaoying et al. | 2003
- 93
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Device simulation for decananometer MOSFETsSangiorgi, Enrico / Palestri, Pierpaolo / Esseni, David et al. | 2003
- 107
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Challenges for signal integrity prediction in the next decadeAragones, Xavier / Rubio, Antonio et al. | 2003
- 119
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High-frequency noise in SiGe HBTsHerzel, Frank et al. | 2003
- 129
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Coherent leakage current in mesoscopic MIS-type capacitorsRacec, P.N. / Racec, E.R. / Nemnes, G.A. et al. | 2003
- 137
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Three-junction Au/AlGaAs(n)/GaAs(p)/Ag photodiodeKarimov, A.V. / Karimova, D.A. et al. | 2003
- 143
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Electronic spectral densities and optical spectra of quantum dot aggregates in sub-wetting layer regionKrál, Karel / Zdeněk, Petr et al. | 2003
- 149
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Coulomb and bandstructure effects in the intersubband optical spectra of III–V quantum wellsPereira, M.F. Jr. et al. | 2003
- 153
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Modeling of optical nonlinearities based on engineering the semiconductor bandZhao, G. / Patent, E. / van der Tol, J.J.G.M. et al. | 2003
- 159
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Predictive use of ab initio MO methods in PDECB-based approach to low-temperature epitaxy of stoichiometric group-III nitridesHayashi, Keiji / Kanayama, Takuo / Kojima, Hideki et al. | 2003