Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 429
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Design and optimization of a MEMS electret-based capacitive energy scavengerPeano, F. / Tambosso, T. et al. | 2005
- 436
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Optimization of a thermal flow sensor for acoustic particle velocity measurementsvan Honschoten, J.W. / Svetovoy, V.B. / Krijnen, G.J.M. et al. | 2005
- 444
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An x-axis single-crystalline silicon microgyroscope fabricated by the extended SBM processJongpal Kim, / Sangjun Park, / Donghun Kwak, et al. | 2005
- 456
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Reconfigurable millimeter-wave filters using CPW-based periodic structures with novel multiple-contact MEMS switchesJae-Hyoung Park, / Sanghyo Lee, / Jung-Mu Kim, et al. | 2005
- 464
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RF MEMS membrane switches on GaAs substrates for X-band applicationsWei-Bin Zheng, / Qing-An Huang, / Xiao-Ping Liao, et al. | 2005
- 472
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Arrays of hollow out-of-plane microneedles for drug deliveryStoeber, B. / Liepmann, D. et al. | 2005
- 480
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A three-dimensional dielectrophoretic particle focusing channel for microcytometry applicationsChoongho Yu, / Vykoukal, J. / Vykoukal, D.M. et al. | 2005
- 488
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A hybrid PZT-silicon microvalveDuggirala, R. / Lal, A. et al. | 2005
- 498
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Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography systemWei-Cheng Tian, / Chan, H.K.L. / Chia-Jung Lu, et al. | 2005
- 508
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Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuitVerd, J. / Abadal, G. / Teva, J. et al. | 2005
- 520
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An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopesAcar, C. / Shkel, A.M. et al. | 2005
- 529
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Mechanical stability of a latching MEMS variable optical attenuatorSyms, R.R.A. / Zou, H. / Boyle, P. et al. | 2005
- 539
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Design, modeling, fabrication, and performances of bridge-type high-performance electroactive polymer micromachined actuatorsTian-Bing Xu, / Ji Su, et al. | 2005
- 548
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A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-Part i: design and analysisYi-Chung Tung, / Kurabayashi, K. et al. | 2005
- 558
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A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-part II: fabrication and characterizationYi-Chung Tung, / Kurabayashi, K. et al. | 2005
- 567
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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabricationWiser, R.F. / Juyong Chung, / Mehregany, M. et al. | 2005
- 567
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Polycrystalline Silicon-Carbide Surface-Micromachined Vertical Resonators-Part 1: Growth Study and Device FabricationWiser, R. F. / Chung, J. / Mehregany, M. et al. | 2005
- 579
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Polycrystalline silicon-carbide surface-micromachined vertical resonators-part II: electrical testing and material property extractionWiser, R.F. / Tabib-Azar, M. / Mehregany, M. et al. | 2005
- 590
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Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strengthBhattacharya, S. / Datta, A. / Berg, J.M. et al. | 2005
- 598
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Wet-etch release process for silicon-micromachined structures using polystyrene microspheres for improved yieldMantiziba, F. / Gory, I. / Skidmore, G. et al. | 2005
- 603
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Fine ZnO patterning with controlled sidewall-etch front slopeJae Wan Kwon, / Eun Sok Kim, et al. | 2005
- 610
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Micromachined III-V multimorph actuators for MOEMS applications - concept, design, and modelOngkodjojo, A. / Tay, F.E.H. / Akkipeddi, R. et al. | 2005
- 619
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Precision poly-(dimethyl siloxane) masking technology for high-resolution powder blastingPawlowski, A.-G. / Sayah, A. / Gijs, M.A.M. et al. | 2005
- 625
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A parametrized three-dimensional model for MEMS thermal shear-stress sensorsQiao Lin, / Yong Xu, / Fukang Jiang, et al. | 2005
- 634
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Microbridge testing on symmetrical trilayer filmsXusheng Wang, / Jie Wang, / Ming-Hao Zhao, et al. | 2005
- 646
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2005 International Electron Devices Meeting (IEDM)| 2005
- 646
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2005 IEEE International Electron Devices Meeting| 2005
- 647
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2006 International Conference on Microelectronic Test Structures (ICMTS)| 2005
- 647
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2006 International Conference on Microelectronic Test Structures| 2005
- 648
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2006 Advanced Semiconductor Manufacturing Conference and Workshop| 2005
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Table of contents| 2005
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Journal of Microelectromechanical Systems publication information| 2005
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Journal of Microelectromechanical Systems Information for authors| 2005