Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 45
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Surface versus bulk micromachining: the contest for suitable applicationsP J French / P M Sarro et al. | 1998
- 54
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Space applications of micro/nano-technologiesAntonio Martínez de Aragón et al. | 1998
- 57
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Development of biofactory-on-a-chip technology using excimer laser micromachiningR Pethig / J P H Burt / A Parton et al. | 1998
- 64
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Silicon microphones - a Danish perspectiveSiebe Bouwstra / Torben Storgaard-Larsen / Patrick Scheeper et al. | 1998
- 69
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Electrical characterization of anodically bonded wafersA Cozma / H Jakobsen / R Puers et al. | 1998
- 74
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Patterned thick photoresist layers for protection of protruding structures during wet and dry etching processesP-F Indermühle / S Roth / L Dellmann et al. | 1998
- 77
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Collective wet etching of a 3D monolithic silicon seismic mass systemGerold Schröpfer / Michel de Labachelerie / Sylvain Ballandras et al. | 1998
- 80
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A generalized model describing corner undercutting by the experimental analysis of TMAH/IPAH K Trieu / W Mokwa et al. | 1998
- 84
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Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as maskThierry Corman / Peter Enoksson / Göran Stemme et al. | 1998
- 88
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Surface-micromachined Ta-Si-N beams for use in micromechanicsM-A Grétillat / C Linder / A Dommann et al. | 1998
- 91
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Dry release of metal structures in oxygen plasma: process characterization and optimizationM Bartek / R F Wolffenbuttel et al. | 1998
- 95
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Fabrication of a gray-tone mask and pattern transfer in thick photoresistsS Nicolas / E Dufour-Gergam / A Bosseboeuf et al. | 1998
- 99
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Effects of the etchmask properties on the anisotropy ratio in anisotropic etching of (100) silicon in aqueous KOHSchröder, H. et al. | 1998
- 99
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Effects of the etchmask properties on the anisotropy ratio in anisotropic etching ofH Schröder / E Obermeier / A Steckenborn et al. | 1998
silicon in aqueous KOH
- 99
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Effects on the etchmask properties on the anisotropy ratio in anisotropic etching of (100) silicon in aqueous KOHSchröder, H. / Obermeier, E. / Steckenborn, A. et al. | 1998
- 104
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Micromachining of (111) plates in (001) oriented siliconBerenschot, J.W. et al. | 1998
- 104
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Micromachining of {111} plates in <001>oriented siliconBerenschot, J. W. / Oosterbroek, R. E. / Lammerink, T. S. J. et al. | 1998
- 104
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Micromachining ofJ W Berenschot / R E Oosterbroek / T S J Lammerink et al. | 1998
plates in
oriented silicon
- 108
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Photoresist parabolas for curved micromirrorsS K Rotich / J G Smith / A G R Evans et al. | 1998
- 111
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Microfabrication of new sensors for scanning probe microscopyWilfried Noell / Michael Abraham / W Ehrfeld et al. | 1998
- 114
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Two-axis electrodynamic micropositioning devicesThomas Frank et al. | 1998
- 119
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The dynamic micropump driven with a screen printed PZT actuatorM Koch / A G R Evans / A Brunnschweiler et al. | 1998
- 123
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Two simple micromixers based on siliconM Koch / D Chatelain / A G R Evans et al. | 1998
- 123
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Two simple micromixers based oh siliconKoch, M. et al. | 1998
- 127
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The characterization of a miniature silicon micromachined capacitive accelerometerR Puers / S Reyntjens et al. | 1998
- 134
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Micromachined thin solar cells with a novel light trapping schemeS K Rotich / J G Smith / A G R Evans et al. | 1998
- 138
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Piezoresistive friction force sensor for tribological researchJohannes Burger / Erwin Berenschot / Gert-Jan Burger et al. | 1998
- 141
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The development of a LIGA-microfabricated gripper for micromanipulation tasksM C Carrozza / A Menciassi / G Tiezzi et al. | 1998
- 144
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A micromachined continuous ink jet print head for high-resolution printingT Diepold / E Obermeier / A Berchtold et al. | 1998
- 148
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Integrated bio/chemical microsystems employing optical detection: the clip-onOtto Leistiko / Peter Friis Jensen et al. | 1998
- 151
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Reduction of friction in a fluid driven micro-actuator using a stepped bearing plateS M Flockhart / R S Dhariwal et al. | 1998
- 155
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Tongue-mouse for quadriplegicsWolfgang Nutt / Christian Arlanch / Silvio Nigg et al. | 1998
- 158
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Complete set of piezoresistive coefficients of CMOSMichael Mayer / Oliver Paul / Henry Baltes et al. | 1998
-diffusion
- 158
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Complete set of piezoresistive coefficients of CMOS n+-diffusionMayer, M. et al. | 1998
- 161
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Positioning system for catheter tips based on an active microvalve systemA Ruzzu / K Bade / J Fahrenberg et al. | 1998
- 165
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Automatic mask adaptation of CMOS-compatible micromachined devices using their finite element modelM Lang / M Glesner et al. | 1998
- 168
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Measurement of package-induced stress and thermal zero shift in transfer molded silicon piezoresistive pressure sensorsJ B Nysæ ther / A Larsen / B Liverød et al. | 1998
- 172
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Nanofabrication of advanced waveguide structures incorporating a visible photonic band gapM D B Charlton / G J Parker et al. | 1998