Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 729
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Polyurethane rubber all-polymer artificial hair cell sensorEngel, J.M. / Chen, J. / Chang Liu, et al. | 2006
- 737
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Effect of temperature on in-use stiction of cantilever beams coated with perfluorinated alkysiloxane monolayersFrechette, J. / Maboudian, R. / Carraro, C. et al. | 2006
- 745
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Piezoelectrically actuated tunable capacitorChuang-Yuan Lee, / Eun Sok Kim, et al. | 2006
- 756
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A MEMS reconfigurable DGS resonator for K-band applicationsHamad, E.K.I. / Safwat, A.M.E. / Omar, A.S. et al. | 2006
- 763
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High-resolution electrostatic analog tunable grating with a single-mask fabrication processWei-Chuan Shih, / Sang-Gook Kim, / Barbastathis, G. et al. | 2006
- 770
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Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite™ ProcessHall, N. A. / Okandan, M. / Degertekin, F. L. et al. | 2006
- 770
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Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite™ ProcessHall, N.A. / Okandan, M. / Degertekin, F.L. et al. | 2006
- 770
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Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-LiteTM ProcessHall, N.A. et al. | 2006
- 777
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Spatial-mode analysis of micromachined optical cavities using electrothermal mirror actuationWei Liu, / Talghader, J.J. et al. | 2006
- 786
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Two-axis electromagnetic microscanner for high resolution displaysYalcinkaya, A.D. / Urey, H. / Brown, D. et al. | 2006
- 795
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Fully Lagrangian modeling of MEMS with thin platesTelukunta, S. / Mukherjee, S. et al. | 2006
- 811
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Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuatorsNielson, G.N. / Barbastathis, G. et al. | 2006
- 822
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Air-damped microresonators with enhanced quality factorLijie Li, / Brown, G. / Uttamchandani, D. et al. | 2006
- 832
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Design of MEMS PZT circular diaphragm actuators to generate large deflectionsEunki Hong, / Trolier-McKinstry, S. / Smith, R.L. et al. | 2006
- 840
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Towards a versatile DRIE: silicon pit structures combined with electrochemical etch stopKurzawski, P. / Salo, T. / Baltes, H. et al. | 2006
- 849
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A mold and transfer technique for lead-free fluxless soldering and application to MEMS packagingStark, B.H. / Najafi, K. et al. | 2006
- 859
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Silicon-carbide microfabrication by silicon lost molding for glass-press moldsItoh, T. / Tanaka, S. / Jing-Feng Li, et al. | 2006
- 864
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Fluidic heterogeneous microsystems assembly and packagingWei Zheng, / Jaehoon Chung, / Jacobs, H.O. et al. | 2006
- 871
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Self-assembly of PZT actuators for micropumps with high process repeatabilityJiandong Fang, / Kerwin Wang, / Bohringer, K.F. et al. | 2006
- 879
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Electrostatically actuated metal-droplet microswitches integrated on CMOS chipWenjiang Shen, / Edwards, R.T. / Chang-Jin Kim, et al. | 2006
- 890
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Polymer-based cantilevers with integrated electrodesMouaziz, S. / Boero, G. / Popovic, R.S. et al. | 2006
- 896
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All PDMS pneumatic microfinger with bidirectional motion and its applicationOk Chan Jeong, / Konishi, S. et al. | 2006
- 904
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Modeling and performance of a magnetic MEMS wiping actuatorGray, G.D. / Kohl, P.A. et al. | 2006
- 912
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Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulationFukuta, Y. / Chapuis, Y.-A. / Mita, Y. et al. | 2006
- 927
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Impact of geometry on thermoelastic dissipation in micromechanical resonant beamsCandler, R.N. / Duwel, A. / Varghese, M. et al. | 2006
- 935
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Design and characterization of an electrothermally driven monolithic long-stretch microdrive in compact arrangementChenpeng Hsu, / Hsu, W. et al. | 2006
- 945
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Using feedback control of microflows to independently steer multiple particlesArmani, M.D. / Chaudhary, S.V. / Probst, R. et al. | 2006
- 957
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Acoustic picoliter droplets for emerging applications in semiconductor industry and biotechnologyDemirci, U. et al. | 2006
- 967
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High-precision digital microflow controllers using fluidic digital-to-analog converters composed of binary-weighted flow resistorsSang-Hee Yoon, / Young-Ho Cho, et al. | 2006
- 976
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Methanol steam reformer on a silicon waferHyung Gyu Park, / Malen, J.A. / Piggott, W.T. et al. | 2006
- 986
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Modeling the fluid dynamics of electrowetting on dielectric (EWOD)Walker, S.W. / Shapiro, B. et al. | 2006
- 1001
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Planar brushless magnetic micromotorsAchotte, N. / Gilles, P.-A. / Cugat, O. et al. | 2006
- 1015
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Microfluidic mixer and transporter based on PZT self-focusing acoustic transducersHongyu Yu, / Jae Wan Kwon, / Eun Sok Kim, et al. | 2006
- 1025
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A shuttered neural probe with on-chip flowmeters for chronic in vivo drug deliveryPapageorgiou, D.P. / Shore, S.E. / Bledsoe, S.C. et al. | 2006
- 1034
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16th International Conference on Solid-State Sensors and Actuators| 2006
- 1034
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2007 Transducers| 2006
- 1035
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EDS archival collection on DVD| 2006
- 1035
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EDS Digital Archive Collections| 2006
- 1036
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Join EDS and get online access| 2006
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Table of contents| 2006
- c2
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Journal of Microelectromechanical Systems publication information| 2006
- c3
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Journal of Microelectromechanical Systems Information for authors| 2006