Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1607
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Selective silicon-on-insulator (SOI) implant: a new micromachining method without footing and residual stressPark, Sangjun / Kwak, Donghun / Ko, Hyoungho et al. | 2005
- 1614
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Stochastic linkage model of a compliant bistable micromechanism for mechanical error analysisBahrami, Mohsen / Ghanbari, Ali et al. | 2005
- 1624
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Extending the validity of squeezed-film damper models with elongations of surface dimensionsVeijola, T / Pursula, A / Råback, P et al. | 2005
- 1637
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Theoretical and experimental study of photo-thermal expansion using an atomic force microscopeHe, Yulin / Zhang, Haijun / Zhang, Dongxian et al. | 2005
- 1641
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A novel large displacement electrostatic actuator: pre-stress comb-drive actuatorChiou, J C / Lin, Y J et al. | 2005
- 1649
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Cellular force measurements using single-spaced polymeric microstructures: isolating cells from base substrateZhao, Yi / Lim, Chee Chew / Sawyer, Douglas B et al. | 2005
- 1657
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Integration of robust fluidic interconnects using metal to glass anodic bondingBriand, Danick / Weber, Patrick / de Rooij, Nicolaas F et al. | 2005
- 1664
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MEMS SoC: observer-based coplanar gyro-free inertial measurement unitChen, Tsung-Lin / Park, Sungsu et al. | 2005
- 1674
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High-resolution inchworm linear motor based on electrostatic twisting microactuatorsKim, Sang-Ho / Hwang, Il-Han / Jo, Kyoung-Woo et al. | 2005
- 1683
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‘Blinking bubble’ micropump with microfabricated heatersYin, Zhizhong / Prosperetti, Andrea et al. | 2005
- 1692
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Microwave welding of polymeric-microfluidic devicesYussuf, A A / Sbarski, I / Hayes, J P et al. | 2005
- 1700
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Resist substrate studies for LIGA microfabrication with application to a new anodized aluminum substrateGriffiths, S K / Losey, M W / Hachman, J T et al. | 2005
- 1713
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Vibration mode frequency formulae for micromechanical scannersUrey, Hakan / Kan, Cihan / Davis, Wyatt O et al. | 2005
- 1722
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Surface-tension-driven liquid–liquid displacement in a capillaryChan, W K / Yang, C et al. | 2005
- 1722
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Surface-tension-driven liquid#8211liquid displacement in a capillaryChan, W.K. et al. | 2005
- 1729
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Polymer flip-chip bonding of pressure sensors on a flexible Kapton film for neonatal cathetersLi, Chunyan / Sauser, Frank E / Azizkhan, Richard G et al. | 2005
- 1736
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Supersonic flow in miniature nozzles of planar configurationChen, Kuan / Winter, Michael / Huang, R F et al. | 2005
- 1745
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Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometerAmarasinghe, Ranjith / Dao, Dzung Viet / Toriyama, Toshiyuki et al. | 2005
- 1754
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Fabrication of an optical beam scanning array integrating mirror and lens arrays by passive self-alignment using precisely formed through-holesAkashi, T / Kanamaru, M / Kazama, A et al. | 2005
- 1762
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Damping of a micro-resonator torsion mirror in rarefied gas ambientMinikes, Adi / Bucher, Izhak / Avivi, Gal et al. | 2005
- 1770
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Factors affecting the performance of micromachined sensors based on Fabry–Perot interferometryEklund, E Jesper / Shkel, Andrei M et al. | 2005
- 1770
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Factors affecting the performance of micromachined sensors based on Fabry#8211Perot interferometryEklund, E.Jesper et al. | 2005
- 1777
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Electrostatic scanning micromirrors using localized plastic deformation of siliconKim, Jongbaeg / Lin, Liwei et al. | 2005
- 1786
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Efficient femtosecond laser micromachining of bulk 3C-SiCFarsari, M / Filippidis, G / Zoppel, S et al. | 2005
- S171
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A micro-fuel processor with trench-refilled thick silicon dioxide for thermal isolation fabricated by water-immersion contact photolithographyChang, Kuei-Sung / Tanaka, Shuji / Esashi, Masayoshi et al. | 2005
- S179
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Development of porous silicon-based miniature fuel cellsPichonat, Tristan / Gauthier-Manuel, Bernard et al. | 2005
- S185
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Design consideration of micro thin film solid-oxide fuel cellsTang, Yanghua / Stanley, Kevin / Wu, Jonathan et al. | 2005
- S193
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Micromachined silicon structures for free-convection PEM fuel cellsModroukas, Dean / Modi, Vijay / Fréchette, Luc G et al. | 2005
- S202
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A passive micro gas regulator for hydrogen flow controlDebray, A / Nakakubo, T / Ueda, K et al. | 2005
- S210
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Urine-activated paper batteries for biosystemsLee, K. B. et al. | 2005
- S210
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Urine-activated paper batteries for biosystems*Lee, Ki Bang et al. | 2005
A portion of this paper was presented at The 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), 28–30 November, 2004, Kyoto, Japan.
- S215
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Studies on a micro combustor for gas turbine enginesShan, X C / Wang, Z F / Jin, Y F et al. | 2005
- S222
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Development of high-speed micro-gas bearings for three-dimensional micro-turbo machinesIsomura, Kousuke / Tanaka, Shuji / Togo, Shin-ichi et al. | 2005
- S228
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Hydroinertia gas bearings for micro spinnersHikichi, Kousuke / Goto, Satoshi / Togo, Shinichi et al. | 2005
- S233
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Fabrication of flexible thermopile generatorItoigawa, Koichi / Ueno, Hiroshi / Shiozaki, Masayoshi et al. | 2005
- S239
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Research on micro-thermophotovoltaic power generators with different emitting materialsWenming, Yang / Siawkiang, Chou / Chang, Shu et al. | 2005
- S243
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Tuning of the thermal radiation spectrum in the near-infrared region by metallic surface microstructuresSai, Hitoshi / Kanamori, Yoshiaki / Yugami, Hiroo et al. | 2005