Journal of Microelectromechanical Systems
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 741
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MEMS Tunable Photonic Crystal-Cantilever CavityWang, Qiugu / Mao, Depeng / Dong, Liang et al. | 2019
- 744
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A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and CharacterizationChen, Chao-Yu / Li, Ming-Huang / Zope, Anurag Avinash et al. | 2019
- 755
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A CMOS-Integrated MEMS Platform for Frequency Stable Resonators—Part II: Design and AnalysisChen, Chao-Yu / Li, Ming-Huang / Li, Cheng-Syun et al. | 2019
- 766
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Fabrication of Phase Change Microstring Resonators via Top Down Lithographic Techniques: Incorporation of VO2/TiO2 Into Conventional ProcessesMcGee, Ryan / Goswami, Ankur / Bukhari, Syed Asad Manzoor et al. | 2019
- 776
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A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant AccelerometerYang, Jian / Zhang, Meng / Si, Chaowei et al. | 2019
- 782
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A High Resolution Differential Mode-Localized MEMS AccelerometerPandit, Milind / Zhao, Chun / Sobreviela, Guillermo et al. | 2019
- 790
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Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective AccelerometersWang, Xiaoyi / Xu, Wei / Luo, Huahuang et al. | 2019
- 799
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Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave ResonatorsLi, Ming-Huang / Chen, Chao-Yu / Lu, Ruochen et al. | 2019
- 810
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A Multifunctional Smart Soft Contact Lens Device Enabled by Nanopore Thin Film for Glaucoma Diagnostics and In Situ Drug DeliverySong, Chao / Ben-Shlomo, Gil / Que, Long et al. | 2019
- 817
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Batch Fabrication of Miniaturized Ag/AgCl Reference Electrode With Ion Exchanging Micro-Nano-Pores by Silicon-Base Double-Side Anisotropic Etching ProcessZhang, Zan / Guo, Hui / Yin, Jiawen et al. | 2019
- 824
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Thermally Reflowed Die-Attached Linear Variable Optical Filter for Mid-Infrared Volatile Organic Compounds DetectionGoh, Simon Chun Kiat / Shiau, Li Lynn / Lee, Chengkuo et al. | 2019
- 833
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Mosaic-Like Micropatterned Monolayer RGO/AgNPs Film Gas Sensor With Enhanced Room-Temperature NO2 Response/Recovery PropertiesJia, Xinyan / Wang, Xiaohong et al. | 2019
- 841
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A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature CompensationXu, Wei / Ma, Shenhui / Wang, Xiaoyi et al. | 2019
- 850
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Extended Design Space of Silicon-on-Nothing MEMSWong, Yu-Po / Lorenzo, Simon / Miao, Yu et al. | 2019
- 859
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AlN/SiC MEMS for High-Temperature ApplicationsEsteves, Giovanni / Habermehl, Scott D. / Clews, Peggy J. et al. | 2019
- 865
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Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing StructuresJe, Jinsol / Song, Jungki / Lee, Bong Jae et al. | 2019
- 869
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Shape Memory Alloy Actuators for Silicon MicrogrippersGarces-Schroder, Mayra / Zimmermann, Tom / Siemers, Carsten et al. | 2019
- 882
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Continuous Single-Phase Flow-Assisted Isolation for Parallel Observation of Reactions Between Deterministically Paired ParticlesLee, Wonhyung / Kim, Hojin / Lee, Sanghyun et al. | 2019
- 890
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On “Cavitation on Chip” in Microfluidic Devices With Surface and Sidewall Roughness ElementsGhorbani, Morteza / Deprem, Gokberk / Ozdemir, Ece et al. | 2019
- 900
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Permanent Stiffness Reduction by Thermal Oxidation of SiliconKuppens, P. Reinier / Herder, Just L. / Tolou, Nima et al. | 2019
- 910
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CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable FiltersAsadi, Mohammad Javad / Jin, Renfeng / Ding, Guanghai et al. | 2019
- 919
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Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-OpticsChen, Ssu-Han / Michael, Aron / Kwok, Chee Yee et al. | 2019
- C1
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Table of contents| 2019
- C2
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Journal of Microelectromechanical Systems| 2019
- C3
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Transducers 2019| 2019