Journal of Micromechanics and Microengineering
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 1791
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A new compensation method for the footing effect in MEMS fabricationSeok, Seonho / Lee, Byeungleul / Kim, Jeonghun et al. | 2005
- 1797
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Optimization of electromechanical coupling for a thin-film PZT membrane: I. ModelingCho, J / Anderson, M / Richards, R et al. | 2005
- 1804
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Optimization of electromechanical coupling for a thin-film PZT membrane: II. ExperimentCho, J / Anderson, M / Richards, R et al. | 2005
- 1810
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Integrated optical measurement of microfluid velocityMcMullin, James N / Qiao, Hong / Goel, Sanket et al. | 2005
- 1817
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An improved micro-combustor design for micro gas turbine engine and numerical analysisWu, Meng / Hua, Jinsong / Kumar, Kurichi et al. | 2005
- 1824
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A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layerYoung, Steven / Weston, Don / Dauksher, Bill et al. | 2005
- 1831
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Micro throttle pump employing displacement amplification in an elastomeric substrateJohnston, I D / Tracey, M C / Davis, J B et al. | 2005
- 1840
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Dynamics of MEMS resonators under superharmonic and subharmonic excitationsNayfeh, Ali H / Younis, Mohammad I et al. | 2005
- 1848
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Non-tilting out-of-plane mode high-Q mechanical silicon oscillatorHahtela, O / Chekurov, N / Tittonen, I et al. | 2005
- 1854
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A mechanically reliable digital-type single crystalline silicon (SCS) RF MEMS variable capacitorKim, Jong-Man / Lee, Sanghyo / Kim, Jung-Mu et al. | 2005
- 1864
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Design and fabrication of in situ UV-LIGA assembled robust nickel micro check valves for compact hydraulic actuatorsLi, Bo / Chen, Quanfang et al. | 2005
- 1872
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Micromirror structure actuated by TiNi shape memory thin filmsFu, Y Q / Luo, J K / Hu, M et al. | 2005
- 1878
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Bulge formation and improvement of the polymer in CO2 laser micromachiningChung, C K / Lin, Y C / Huang, G R et al. | 2005
- 1885
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Continuously variable mixing-ratio micromixer with elastomer valvesTan, Christabel K L / Tracey, Mark C / Davis, John B et al. | 2005
- 1894
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Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologiesChen, Kuo-Shen / Lin, I-Kuan / Ko, Fu-Hsang et al. | 2005
- 1894
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Fabrication of 3D polymer microstrectures using electron beam lithography and nanoimprinting technologiesChen, Kuo-Shen / Lin, I-Kuan / Ko, Fu- Hsang et al. | 2005
- 1904
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Manufacture of high-aspect-ratio micro-hair sensor arraysSchmitz, G J / Brücker, Ch / Jacobs, P et al. | 2005
- 1911
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A film bulk acoustic resonator in liquid environmentsZhang, Hao / Marma, Mong S / Kim, Eun Sok et al. | 2005
- 1917
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Open-loop versus closed-loop control of MEMS devices: choices and issuesBorovic, B / Liu, A Q / Popa, D et al. | 2005
- 1925
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Micro grooving on single-crystal germanium for infrared Fresnel lensesYan, Jiwang / Maekawa, Kouki / Tamaki, Jun'ichi et al. | 2005
- 1932
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Metallic submicrometer sieves fabricated by interferometric lithography and electroformingGutierrez-Rivera, Luis E / de Carvalho, Edson J / Aparecida Silva, Maria et al. | 2005
- 1938
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Single nucleotide polymorphism (SNP) detection using microelectrode biochip arrayChoi, Yong-Sung / Lee, Kyung-Sup / Park, Dae-Hee et al. | 2005
- 1947
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Fabrication and performance of a flextensional microactuatorCheong, Jongpil / Goyal, Abhijat / Tadigadapa, Srinivas A et al. | 2005
- 1956
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Activated reactive evaporation deposited silicon nitride as a masking material for MEMS fabricationPatil, Sheetal J / Gangal, S A et al. | 2005
- 1963
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Numerical modeling of evaporator surface temperature of a micro loop heat pipe at steady-state conditionGhajar, M / Darabi, J et al. | 2005
- 1972
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A nonlinearity compensation approach based on Delaunay triangulation to linearize the scanning field of dual-axis micromirrorZhao, Yi / Tay, Francis E H / Chau, Fook Siong et al. | 2005
- 1979
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A hybrid sequential deposition fabrication technique for micro fuel cellsStanley, Kevin G / Czyzewska, Eva K / Vanderhoek, Tom P K et al. | 2005
- S251
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Special surface for power delivery to wireless micro-electro-mechanical systemsMartel, Sylvain et al. | 2005
- S259
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Micro manipulation by adhesion with two collaborating mobile micro robotsDriesen, W / Varidel, T / Régnier, S et al. | 2005
- S268
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Physical principles and miniaturization of spark assisted chemical engraving (SACE)Wüthrich, R / Hof, L A / Lal, A et al. | 2005
- S276
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Spark assisted chemical engraving (SACE) in microfactoryWüthrich, R / Fujisaki, K / Couthy, Ph et al. | 2005
- S281
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Necessary load for room temperature vacuum sealingItoh, Toshihiro / Suga, Tadatomo et al. | 2005
- S286
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A nanofactory by focused ion beamFujii, Toshiaki / Iwasaki, Koji / Munekane, Masanao et al. | 2005
- S292
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A micromanipulation cell including a tool changerClévy, Cédric / Hubert, Arnaud / Agnus, Joël et al. | 2005
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N-A EDITORIAL: The Fourth International Workshop on Microfactories (IWMF'04)| 2005