Journal of vacuum science and technology / B
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
Table of contents
- 677
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Intermediate-layer lithography method for producing metal micropatternsLiu, Xinchuan et al. | 2007
- 686
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Properties of Fe-doped, thick, freestanding GaN crystals grown by hydride vapor phase epitaxyPolyakov, A.Y. et al. | 2007
- 691
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Comprehensive investigation on emitter ledge length of InGaP-GaAs heterojunction bipolar transistorsFu, Ssu-I. et al. | 2007
- 697
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Crystallographic wing tilt and thermal-stress distribution of GaN laterally overgrown on maskless V-grooved sapphire substrate by metal-organic chemical vapor depositionXing, Zhigang et al. | 2007
- 703
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Experimental investigation of micro-mesoscale Knudsen compressor performance at low pressuresHan, Y.-L. et al. | 2007
- 715
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Etch mechanisms of hybrid low-k material (SiOCH with porogen) in fluorocarbon based plasmaEon, D. et al. | 2007
- 721
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Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111)Rosenberg, A. et al. | 2007
- 725
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Manufacturing method for the fabrication of sub-50 nm current-perpendicular-to-plane spin valve sensorsHan, G.C. et al. | 2007
- 730
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Fabrication of suspended single crystal diamond devices by electrochemical etchWang, C.F. et al. | 2007
- 734
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Improved performance of a dual-passivated heterojunction bipolar transistorCheng, Shiou-Ying et al. | 2007
- 739
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Profile control of novel non-Si gates using BCl3-N2 PlasmaShamiryan, Denis et al. | 2007
- 745
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Nanoscale resist morphologies of dense gratings using electron-beam lithographyMohammad, M.A. et al. | 2007
- 754
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Epitaxial growth of Sc2O3 films on GaN (0001) by pulsed laser depositionLiu, Chang et al. | 2007
- 760
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Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferrltin-iron-core maskKubota, Tomohiro et al. | 2007
- 767
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Poly-Si-TiN-HfO2 gate stack etching in high-density plasmasGouil, A.Le et al. | 2007
- 779
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Study of photoresist etching and roughness formation in electron-beam generated plasmasOrf, Bryan J. et al. | 2007
- 785
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UV nanoimprint materials: Surface energies, residual layers, and imprint qualitySchmitt, H. et al. | 2007
- 791
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Formation and morphology of InGaN nanoislands on GaN(0001)Gangopadhyay, S. et al. | 2007
- 796
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Sn quantum dots embedded in SiO2 formed by low energy ion implantationZhao, J.P. et al. | 2007
- 801
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Mask material effects in cryogenic deep reactive ion etchingSainiemi, L. et al. | 2007
- 808
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Spontaneous formation of Si nanocones vertically aligned to Si wafersTsuji, Yoshiko et al. | 2007
- 813
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Process for scanning near-field microwave microscope probes with integrated ultratall coaxial tipsWang, Yaqiang et al. | 2007
- 817
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Electron emission from SrTiO3-coated silicon-tlp arraysBian, H.J. et al. | 2007
- 822
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Embedded vertically grown carbon nanotubes for field emission applicationsAbdi, Yaser et al. | 2007
- 829
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Analysis of the driving characteristic of carbon nanotube triode with high frequencyChai, Weiqiang et al. | 2007
- 833
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Ordered silicon nanostructures by ion beam induced glancing angle depositionPatzig, Christian et al. | 2007
- 839
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Low bias reactive ion etching of GaAs with a SiCl4-N2-O2 time-multiplexed processGolka, S. et al. | 2007
- 845
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Characteristics of atomic-layer-deposited thin HfxZr1-xO2 gate dielectricsTriyoso, D.H. et al. | 2007
- 853
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Position measurement method for alignment in UV imprint using a high index mold and "electronic" moiré techniqueSuehira, Nobuhito et al. | 2007
- 857
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Characterization and control of unconfined lateral diffusion under stencil masksRácz, Zoltán et al. | 2007
- 862
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Nanopattern transfer to SiO2 by ion track lithography and highly selective HF vapor etchingSkupinski, M. et al. | 2007
- 868
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Novel spin-on hard mask with Si-containing bottom antireflective coating for nanolithographyChoi, Sang-Jun et al. | 2007
- 873
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Function of quantum-confinement effect in the AlGaN-AIN-GaN heterostructure with an AIN interfacial layerKong, Y.C. et al. | 2007
- 877
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Fabrication of nanostructures using a C-methylcalix(4)resorcinarene dielectric spacerFleischer, M. et al. | 2007
- 881
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High-adhesive back side metallization of ultrathin wafersFelmetsger, Valery V. et al. | 2007
- 886
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Analyses of chamber wall coatings during the patterning of ultralow-k materials with a metal hard mask: Consequences on cleaning strategiesChevolleau, T. et al. | 2007
- 893
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Nanosized tungsten carbide for NOx reductionRumaiz, A.K. et al. | 2007
- 899
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Defect-free two-dimensional-photonic crystal structures on a nonlinear optical polymer patterned by nanoimprint lithographyOkinaka, Motoki et al. | 2007
- 902
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High gain AlGaAs-GaAs heterojunction bipolar transistor fabricated on SiGe-Si substrateLew, K.L. et al. | 2007
- 906
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Restoration and pore sealing of plasma damaged porous organosilicate low k dielectrics with phenyl containing agentsLiu, J. et al. | 2007
- 913
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In0.68Ga0.32As-Al0.64In0.36As-InP 4.5 mm quantum cascade lasers grown by solid phosphorus molecular beam epitaxyChen, J. et al. | 2007
- 916
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Nanosoldering of carbon nanotubes on metal electrodes with an atomic force microscopeLee, Sungjun et al. | 2007
- 922
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Focused ion beam tomography of a microelectronic device with sub-2-nm resolutionYeoh, T.S. et al. | 2007
- 926
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High quality of 830 nm material grown by solid source molecular beam epitaxy for laser device printing applicationsHernandez, I.C. et al. | 2007
- 931
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Fabrication of local microvacuum package incorporating Si field emitter array and Ti getterNoda, Daiji et al. | 2007
- 935
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Fabrication and material properties of NiTi nanofluidChang, Ho et al. | 2007
- 940
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Novelty and versatility of self-catalytic nanowire growth: A case study with InN nanowiresHe, Maoqi et al. | 2007
- 945
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Brief Reports and Comments - Effect of surface pretreatment and substrate orientation on the characteristics of InAs quantum dots on Si and SiO2 substratesYoon, I. et al. | 2007
- 954
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Preface| 2007
- 955
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Heterostructures - Effects of temperature, nitrogen ions, and antimony on wide depletion width GainNAsPtak, A.J. et al. | 2007
- 960
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Heterostructures - Impact of arsenic species (AS2-As4) on the relaxation and morphology of step-graded InAsxP1-x on InP substratesZhang, Wanming et al. | 2007
- 964
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Nitrides - Epitaxial overgrowth of GaN nanocolumnsAverett, K.L. et al. | 2007
- 969
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Nitrides - Kinetics of gallium adlayer adsorption-desorption on polar and nonpolar GaN surfacesChoi, Soojeong et al. | 2007
- 974
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Nitrides - Direct-write composition patterning of InGaN by focused thermal beam during molecular-beam epitaxyChen, X. et al. | 2007
- 978
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Nitrides - Thermodynamic analysis of cation incorporation during molecular beam epitaxy of nitride films using metal-rich growth conditionsHoke, W.E. et al. | 2007
- 983
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Equipment - Promising new valved source for Ga or In evaporationSacks, R.N. et al. | 2007
- 987
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Applications - Chemical beam epitaxy of GaAsN-GaAs multiquantum well solar cellFreundlich, A. et al. | 2007
- 991
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Applications - Molecular beam epitaxy growth of antimonide type-II "W" high-power interband cascade lasers and long-wavelength infrared photodiodesKim, C.S. et al. | 2007
- 995
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Other Semiconductors - Intersubband transitions in molecular-beam-epitaxy-grown wide band gap II-VI semiconductorsShen, A. et al. | 2007
- 999
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Magnetic Materials - Anomalous x-ray diffraction study of disorders in epitaxial films of the Heusler alloy Co2MnGeCollins, Brian A. et al. | 2007
- 1004
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Magnetic Materials - Magnetoresistance of fully epitaxial MnAs-GaAs lateral spin valvesHolub, M. et al. | 2007
- 1009
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - In Situ Characterization - Reproducible reflection high energy electron diffraction signatures for improvement of AIN using in situ growth regime characterizationBurnham, Shawn D. et al. | 2007
- 1014
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - In Situ Characterization - Real time optical monitoring of molecular beam epitaxy of InN on SiC substratesLosurdo, Maria et al. | 2007
- 1019
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - In Situ Characterization - In situ spectroscopic ellipsometry to monitor surface plasmon resonant group-III metals deposited by molecular beam epitaxyWu, Pae C. et al. | 2007
- 1024
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxides on Semiconductors - GdGaO: A gate dielectric for GaAs metal-oxide-semiconductor field-effect transistorsHolland, M. et al. | 2007
- 1029
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxides on Semiconductors - Epitaxial calcium oxide films deposited on gallium nitride surfacesLosego, Mark D. et al. | 2007
- 1033
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxides on Semiconductors - Thin, crystalline MgO on hexagonal 6H-SIC(0001) by molecular beam epitaxy for functional oxide integrationGoodrich, T.L. et al. | 2007
- 1039
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxide Materials - Integration of functional epitaxial oxides into silicon: From high-K application to nanostructuresOsten, H.J. et al. | 2007
- 1044
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxide Materials - Growth by molecular beam epitaxy of self-assembled InAs quantum dots on InAlAs and InGaAs lattice-matched to InPSimmonds, P.J. et al. | 2007
- 1049
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Oxide Materials - rf oxygen plasma assisted molecular beam epitaxy growth of BiFeO3 thin films on SrTiO3(001)Kabelac, J. et al. | 2007
- 1053
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Epitaxial growth and strain relaxation of BaTiO3 thin films on SrTiO3 buffered (001) Si by molecular beam epitaxyNiu, F. et al. | 2007
- 1058
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Unintentional calcium incorporation in Ga(Al, In, N)AsHurst, J.B. et al. | 2007
- 1063
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Effect of Al composition on filtering of threading dislocations by AlxIn1-xSb-AlyIn1-ySb heterostructures grown on GaAs (001)Edirisooriya, M. et al. | 2007
- 1066
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Optical monitoring of molecular beam epitaxy growth of AIN-GaN using single-wavelength laser interferometry: A simple method of tracking real-time changes in growth rateGriffiths, C.L. et al. | 2007
- 1072
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Kinetic Monte Carlo simulation of InAs quantum dot growth on nonlithographically patterned substratesGuo, W. et al. | 2007
- 1077
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Excitation dependent photoluminescence measurements of the nonradiative lifetime and quantum efficiency in GaAsJohnson, S.R. et al. | 2007
- 1083
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Midinfrared InGaAsSb quantum well lasers with digitally grown tensile-strained AlGaAsSb barriersLi, W. et al. | 2007
- 1087
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Optical properties of molecular-beam-epitaxy-grown InGaMnAs thin filmsPeiris, F.C. et al. | 2007
- 1090
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Molecular-beam opitaxy of phosphor-free 1.3 mm InAlGaAs multiple-quantum-well lasers on InP (100)Li, W. et al. | 2007
- 1093
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Fabrication and optical characterization of highly ordered InAs-GaAs quantum dots on nonlithographically patterned substratesGuico, Rodney S. et al. | 2007
- 1098
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Molecular-beam epitaxy growth of device-compatible GaAs on silicon substrates with thin (-80 nm) Si1-xGex step-graded buffer layers for high-k III-V metal-oxide-semiconductor field effect transistor applicationsOye, Michael M. et al. | 2007
- 1103
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Study of intersubband transitions of ZnxCd1-xSe-Znx'Cdy'Mg1-x'-y' Se multiple quantum wells grown by molecular beam epitaxy for midinfrared device applicationsLu, H. et al. | 2007
- 1108
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - DX-like centers in InAs-GaAs QDIPs observed by polarization-dependent Fourier transform infrared spectroscopyZhao, Z.Y. et al. | 2007
- 1113
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Papers from the 24th North American Conference on Molecular Beam Epitaxy - Posters - Optical studies of molecular beam epitaxy grown GaAsSbN-GaAs single quantum well structuresNunna, Kalyan et al. | 2007
- 1117
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AUTHOR INDEX| 2007
- 1118
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CUMULATIVE AUTHOR INDEX| 2007
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Processing, Measurement, and Phenomena - Information for Contributors| 2007
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Letters - Field emission from GaN and (Al,Ga)N-GaN nanorod heterostructuresDeb, Parijat et al. | 2007
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Deposition of zinc oxide layers by high-power impulse magnetron sputteringKonstantinidis, S. et al. | 2007