3E4.39 A Novel Particle Assembly Template using Plasma Surface Modification and Self-Assembly Monolayer for Nano/Micro Patterns (English)
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In:
Solid-state sensors, actuators and microsystems; Transducers '05
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1453-1456
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2005
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ISBN:
- Conference paper / Print
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Title:3E4.39 A Novel Particle Assembly Template using Plasma Surface Modification and Self-Assembly Monolayer for Nano/Micro Patterns
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Contributors:
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Conference:13th:; International Conference, Solid-state sensors, actuators and microsystems; Transducers '05 ; 2005 ; Seoul, Korea
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Published in:TRANSDUCERS; 2005 ; 2 ; 1453-1456
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Publisher:
- New search for: IEEE,
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Publication date:2005-01-01
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Size:4 pages
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ISBN:
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Type of media:Conference paper
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Type of material:Print
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Language:English
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Keywords:
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Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents conference proceedings
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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The International Conference on Solid-State Sensors, Actuators and Microsystems| 2005
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Breaker page| 2005
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Front Inside Cover [blank]| 2005
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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems| 2005
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Copyright| 2005
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Transducers'05 - Digest of Technical Papers| 2005
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The 14th International Conference on Solid-State Sensors and Actuators 2007| 2005
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Back Inside Cover [blank]| 2005
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ISBN:0-7803-8994-8 [Back Cover]| 2005
- 1
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1P1.1 A New Age for MEMSPetersen, K. et al. | 2005
- 1
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A new age for MEMSPetersen, K. et al. | 2005
- 5
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1P2.1 MEMS in RF-Filter Applications:Thin Film Bulk-Acoustic-Wave TechnologyAigner, R. et al. | 2005
- 5
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MEMS in RF-filter applications: thin film bulk-acoustic-wave technologyAigner, R. et al. | 2005
- 9
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Fusion of biomedical microcapsule endoscope and microsystem technologyTae Song Kim, / Byungkyu Kim, / Dongil Dan Cho, / Si Young Song, / Dario, P. / Sitti, M. et al. | 2005
- 9
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1P2.2 Fusion of Biomedical Microcapsule Endoscope and Microsystem TechnologyKim, T. S. / Kim, B. / Cho, D. / Song, S. Y. / Dario, P. / Sitti, M. et al. | 2005
- 15
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Three-dimensional nanosprings for electromechanical sensorsBell, D.J. / Sun, Y. / Zhang, L. / Dong, L.X. / Nelson, B.J. / Grutzmacher, D. et al. | 2005
- 15
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1A3.1 Three-Dimensional Nanosprings for Electromechanical SensorsBell, D. J. / Sun, Y. / Zhang, L. / Dong, L. X. / Nelson, B. J. / Gruzmacher, D. et al. | 2005
- 19
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3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stressBureau, J.-B. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2005
- 19
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1A3.2 3D-Self-Assembling of SU-8 Microstructures on Silicon by Plasma Induced Compressive StressBureau, J.-B. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2005
- 23
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1A3.3 Alkali Metal-Wax Micropackets for Chip-Scale Atomic ClocksRadhakrishnan, S. / Lal, A. et al. | 2005
- 23
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Alkali metal-wax micropackets for chip-scale atomic clocksRadhakrishnan, S. / Lal, A. et al. | 2005
- 27
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Fabrication of 3D nanowire frames by conventional micromachining technologySarajlic, E. / Berenschot, E. / Krijnen, G. / Elwenspoek, M. et al. | 2005
- 27
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1A3.4 Fabrication of 3D Nanowire Frames by Conventional Micromachining TechnologySarajlic, E. / Berenschot, E. / Krijnen, G. / Elwenspoek, M. et al. | 2005
- 31
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The 2D feedback conveyance with ciliary actuator arraysAtaka, M. / Legrand, B. / Buchaillot, L. / Collard, D. / Fujita, H. et al. | 2005
- 31
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1A3.5 The 2D Feedback Conveyance with Ciliary Actuator ArraysAtaka, M. / Legrand, B. / Buchaillot, L. / Collard, D. / Fujita, H. et al. | 2005
- 35
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Next generation pressure sensors in surface micromachining technologyLammel, G. / Armbruster, S. / Schelling, C. / Benzel, H. / Brasas, J. / Illing, M. / Gampp, R. / Senz, V. / Schafer, F. / Finkbeiner, S. et al. | 2005
- 35
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1B3.1 Next Generation Pressure Sensors in Surface Micromachining TechnologyLammel, G. / Armbruster, S. / Schelling, C. / Benzel, H. / Brasas, J. / Illing, M. / Gampp, R. / Senz, V. / Schaer, F. / Finkbeiner, S. et al. | 2005
- 37
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1B3.2 Fully CMOS Compatible On-LSI Capacitive Pressure Sensor Fabricated using Standard Back-End-of-Line ProcessesFujimori, T. / Hanaoka, Y. / Fujisaki, K. / Yokoyama, N. / Fukuda, H. et al. | 2005
- 37
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Fully CMOS compatible on-LSI capacitive pressure sensor fabricated using standard back-end-of-line processesFujimori, T. / Hanaoka, Y. / Fujisaki, K. / Yokoyama, N. / Fukuda, H. et al. | 2005
- 41
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1B3.3 A CMOS-Based Architecture for a Distributed Sensor Matrix in Underwater EnvironmentMagagni, L. / Sergio, M. / Nicolini, M. / Gennaretti, D. / Canegallo, R. / Guerrieri, R. et al. | 2005
- 41
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A CMOS-based architecture for a distributed sensor matrix in underwater environmentMagagni, L. / Sergio, M. / Nicolini, M. / Gennaretti, D. / Canegallo, R. / Guerrieri, R. et al. | 2005
- 45
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1B3.4 Multifunctional Smart Tactile-Image Sensor with Integrated Arrays of Strain and Temperature Sensors on Single Air-Pressurized Silicon DiaphragmTakao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 45
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Multifunctional smart tactile-image sensor with integrated arrays of strain and temperature sensors on single air-pressurized silicon diaphragmTakao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 49
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A capacitive pressure sensor with a novel multi-layered composite membrane structure fabricated by a three-mask processMin-Xin Zhou, / Qing-An Huang, / Ming Qin, et al. | 2005
- 49
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1B3.5 A Capacitve Pressure Sensor with a Novel Multi-Layered Composite Membrane Structre Fabricated by a Three-Mask ProcessZhou, M.-X. / Huang, Q.-A. / Qin, M. et al. | 2005
- 53
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1C3.1 High Performance Bidirectional Electrostatic Inchworm Motor Fabricated by Trench Isolation TechnologySarajlic, E. / Berenschot, E. / Tas, N. / Fujita, H. / Krijnen, G. / Elwenspoek, M. et al. | 2005
- 53
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High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technologySarajlic, E. / Berenschot, E. / Tas, N. / Fujita, H. / Krijnen, G. / Elwenspoek, M. et al. | 2005
- 57
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1C3.2 Stiction Drive Operation of Micromotors: Direct and Reverse Rotation ControlLegrand, B. / Buchaillot, L. / Collard, D. et al. | 2005
- 57
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Stiction drive operation of micromotors: direct and reverse rotation controlLegrand, B. / Buchaillot, L. / Collard, D. et al. | 2005
- 61
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1C3.3 Long Travel Parallel Plate Electrostatic ActuatorKrylov, V. / Bernstain, Y. et al. | 2005
- 61
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Long travel parallel plate electrostatic actuatorKrylov, V. / Bernstain, Y. et al. | 2005
- 65
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1C3.4 Design and Fabrication of a Pure-Rotation Microscanner with Self-Aligned Electrostatic Vertical Combdrives in Double SOI WaferMizoguchi, Y. / Esashi, M. et al. | 2005
- 65
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Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI waferMizoguchi, Y. / Esashi, M. et al. | 2005
- 69
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1C3.5 Micro XY-Stages With Spider-Leg Actuators for 2-Dimensional Optical ScanningKwon, H. N. / Lee, J.-H. / Takahashi, K. / Toshiyoshi, H. et al. | 2005
- 69
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Micro XY-stages with spider-leg actuators for 2-dimensional optical scanningHo Nam Kwon, / Jong-Hyun Lee, / Takahashi, K. / Toshiyoshi, H. et al. | 2005
- 73
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Beads actuation with kinesin on a microtubule immobilized in a nano fluidic channelYokokawa, R. / Yoshida, Y. / Takeuchi, S. / Kon, T. / Sutoh, K. / Fujita, H. et al. | 2005
- 73
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1D3.1 Beads Actuation with Kinesin on a Microtubule Immobilized in a Nano Fluidic ChannelYokokawa, R. / Yoshida, Y. / Takeuchi, S. / Kon, T. / Sutoh, K. / Fujita, H. et al. | 2005
- 77
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1D3.2 Two Dimensional Magnetic Manipulation of Microdroplets on a ChipLehmann, U. / Hadjidj, S. / Parashar, V. K. / Rida, A. / Gijs, M. A. M. et al. | 2005
- 77
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Two dimensional magnetic manipulation of microdroplets on a chipLehmann, U. / Hadjidj, S. / Parashar, V.K. / Rida, A. / Gijs, M.A.M. et al. | 2005
- 81
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1D3.3 Magnetic Force-Based Immunoassay using Superparamagnetic Nanoparticles in Microfluidic ChannelKim, K. S. / Park, J.-K. et al. | 2005
- 81
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Magnetic force-based immunoassay using superparamagnetic nanoparticles in microfluidic channelKyu Sung Kim, / Je-Kyun Park, et al. | 2005
- 85
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1D3.4 Trapping and Manipulation of Particles and Droplets using Micro-Toroidal Convection CurrentsBasu, A. S. / Gianchandani, Y. B. et al. | 2005
- 85
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Trapping and manipulation of particles and droplets using micro-toroidal convection currentsBasu, A.S. / Gianchandani, Y.B. et al. | 2005
- 89
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1D3.5 EWOD Actuation with Electrode-Free Cover PlateYi, U.-C. / Kim, C.-J. et al. | 2005
- 89
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EWOD actuation with electrode-free cover plateUi-Chong Yi, / Chang-Jin Kim, et al. | 2005
- 93
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Localized and CMOS compatible growth of carbon nanotubes on a 3 /spl times/ 3 /spl mu/m/sup 2/ microheater spotJungen, A. / Stampfer, C. / Tonteling, M. / Schiesser, S. / Sarangi, D. / Hierold, C. et al. | 2005
- 93
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Localized and CMOS compatible growth of carbon nanotubes on A 3 x 3 my m2 microheater spotJungen, Alain / Stampfer, Christoph / Tonteling, Marc / Schiesser, Sebastien / Sarangi, Debajyoti / Hierold, Christofer et al. | 2005
- 93
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1A4.1 Localized and CMOS Compatible Growth of Carbon Nanotubes on a 3x3 mum^2 Microheater SpotJungen, A. / Stampfer, C. / Tonteling, M. / Schiesser, S. / Sarangi, D. / Hierold, C. et al. | 2005
- 97
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Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensor arraysPham, H.T.M. / de Boer, C.R. / Sarro, P.M. et al. | 2005
- 97
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1A4.2 Non-Catalyst and Low Temperature Growth of Vertically Aligned Carbon Nanotubes for Nanosensor ArraysPham, H. T. M. / de Boer, C. R. / Sarro, P. M. et al. | 2005
- 101
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1A4.3 Selective Bridging of Single-Walled Carbon Nanotubes Controlled with Electric Field Applied to Silicon StructuresTakei, Y. / Hoshino, K. / Matsumoto, K. / Shimoyama, I. et al. | 2005
- 101
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Selective bridging of single-walled carbon nanotubes controlled with electric field applied to silicon structuresTakei, Y. / Hoshino, K. / Matsumoto, K. / Shimoyama, I. et al. | 2005
- 105
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Novel process flow for the integration of carbon nanotubes into MEMSJungen, A. / Stampfer, C. / Hoetzel, J. / Hierold, C. et al. | 2005
- 105
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1A4.4 Novel Process Flow for the Integration of Carbon Nanotubes into MEMSJungen, A. / Stampfer, C. / Hoetzel, J. / Hierold, C. et al. | 2005
- 109
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1B4.1 Sub-mm Encapsulated Accelerometers: A Fully Implantable Sensor for Cochlear ImplantsPark, W.-T. / O Connor, K. N. / Mallon, J. R. / Maetani, T. / Candler, R. N. / Ayanoor-Vitikkate, V. / Roberson, J. B. / Puria, S. / Kenny, T. W. et al. | 2005
- 109
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Sub-mm encapsulated accelerometers: a fully implantable sensor for cochlear implantsWoo-Tae Park, / O'Connor, K.N. / Mallon, J.R. / Maetani, T. / Candler, R.N. / Ayanoor-Vitikkate V, / Roberson, J.B. / Puria, S. / Kenny, T.W. et al. | 2005
- 113
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1B4.2 A MEMS Hybrid Inertial Sensor Based on Convection Heat TransferZhu, R. / Su, Y. / Ding, H. et al. | 2005
- 113
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A MEMS hybrid inertial sensor based on convection heat transferRong Zhu, / Yan Su, / Henggao Ding, et al. | 2005
- 117
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A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoringXuemeng Chen, / Xinxin Li, / Zhaohui Song, / Shusen Huang, / Yuelin Wang, / Jiwei Jiao, / Heng Yang, / Ying Zhang, et al. | 2005
- 117
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1B4.3 A Micromachined Gyroscope with Piezoresistance for both High Performance Coriolis-Effect Detection and Torsional Vibration MonitoringChen, X. / Li, X. / Song, Z. / Huang, S. / Wang, Y. / Jiao, J. / Yang, H. / Zhang, Y. et al. | 2005
- 121
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1B4.4 A Bulk Micromachined Lateral Axis Gyroscope with Vertical Sensing Comb CapacitorsYang, Z. / Wang, C. / Yan, G. / Hao, Y. / Wu, G. et al. | 2005
- 121
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A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitorsZhenchuan Yang, / Congshun Wang, / Guizhen Yan, / Yilong Hao, / Guoying Wu, et al. | 2005
- 125
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1C4.1 A Distributed Actuation Method Based on Young-Laplace ForcesBorno, R. T. / Maharbiz, M. M. et al. | 2005
- 125
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A distributed actuation method based on Young-Laplace forcesBorno, R.T. / Maharbiz, M.M. et al. | 2005
- 129
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1C4.2 A Micro Particle Sampler using Electrowetting-Actuated Droplet SweepingZhao, Y. / Cho, S. K. et al. | 2005
- 129
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A micro particle sampler using electrowetting-actuated droplet sweepingYuejun Zhao, / Sung Kwon Cho, et al. | 2005
- 135
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Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applicationsLeichle, T. / Saya, D. / Belaubre, P. / Pourciel, J.B. / Mathieu, F. / Laur, J.P. / Nicu, L. / Bergaud, C. et al. | 2005
- 135
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1C4.3 Liquid Loading of Silicon-Based Cantilevers using Electrowetting Actuation for Microspotting ApplicationsLeichle, T. / Saya, D. / Belaubre, P. / Pourciel, J. / Mathieu, F. / Laur, J. / Nicu, L. / Bergaud, C. et al. | 2005
- 139
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1C4.4 Using EWOD (Electrowetting-On-Dielectric) Actuation in a Micro Conveyor SystemMoon, I. / Kim, J. et al. | 2005
- 139
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Using EWOD (electrowetting-on-dielectric) actuation in a micro conveyor systemIlju Moon, / Joonwon Kim, et al. | 2005
- 143
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Flat fluidics: acoustically driven planar microfluidic devices for biological and chemical applicationsWixforth, A. et al. | 2005
- 143
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1D4.1 Invited Speaker Flat Fluidics: Acoustically Driven Planar Microfluidic Devices for Biological and Chemical ApplicationsWixforth, A. et al. | 2005
- 147
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Single potential electrophoresis on-chip using pressure pulse injectionLacharme, F. / Gijs, M.A.M. et al. | 2005
- 147
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1D4.2 Single Potential Electrophoresis on-Chip using Pressure Pulse InjectionLacharme, F. / Gijs, M. A. M. et al. | 2005
- 151
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1D4.3 Elcrochemical Bio-Lithography for in-situ Immobilization of Proteins and Cells within MicrochannelsNishizawa, M. / Kaji, H. / Tsukidate, K. / Hashimoto, M. / Abe, T. et al. | 2005
- 151
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Electrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannelsNishizawa, M. / Kaji, H. / Tsukidate, K. / Hashimoto, M. / Abe, T. et al. | 2005
- 155
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A new design of knife edged-AFM probe for chromosome precision manipulatingSaito, M. / Nakagawa, K. / Yamanaka, K. / Takamura, Y. / Hashiguchi, G. / Tamiya, E. et al. | 2005
- 155
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1A5.1 A New Design of Knife Edged-AFM Probe for Chromosome Precision ManipulatingSaito, M. / Nakagawa, K. / Yamanaka, K. / Takamura, Y. / Hashiguchi, G. / Tamiya, E. et al. | 2005
- 159
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Multifunctional tool for expanding AFM-based applicationsDeladi, S. / Tas, N.R. / Krijnen, G.J.M. / Elwenspoek, M.C. et al. | 2005
- 159
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1A5.2 Multifunctional Tool for Expanding AFM-Based ApplicationsDeladi, S. / Tas, N. R. / Krijnen, G. J. M. / Elwenspoek, M. C. et al. | 2005
- 163
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Scanning probe parallel nanolithography using multi-probes cantilever array for silicon nanodevicesGandjar, H. / Takagi, Y. / Isono, Y. et al. | 2005
- 163
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1A5.3 Scanning Probe Parallel Nanolithography using Multi-Probes Cantilever Array for Silicon NanodevicesGandjar, H. / Takagi, Y. / Isono, Y. et al. | 2005
- 168
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1A5.4 Fabrication of Silicon Nanostructures with Various Sidewall Profiles and Sharp TipsChoi, C.-H. / Kim, C.-J. et al. | 2005
- 168
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Fabrication of silicon nanostructures with various sidewall profiles and sharp tipsChang-Hwan Choi, / Chang-Jin Kim, et al. | 2005
- 172
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Inertial-grade out-of-plane and in-plane differential resonant silicon accelerometers (DRXLs)Hyeon Cheol Kim, / Seonho Seok, / Ilwhan Kim, / Soon-Don Choi, / Kukjin Chun, et al. | 2005
- 172
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1B5.1 Inertial-Grade Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers (DRXLs)Kim, H. C. / Seok, S. / Kim, I. / Choi, S.-D. / Chun, K. et al. | 2005
- 176
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Outrigger: solid outer frame lateral accelerometer designO'Brien, G.J. / Hammond, J. / Li, G. / Koury, D. / Monk, D.J. et al. | 2005
- 176
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1B5.2 Outrigger: Solid Outer Frame Lateral Accelerometer DesignO Brien, G. J. / Hammond, J. / Li, G. / Koury, D. / Monk, D. J. et al. | 2005
- 180
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The first sub-deg/hr bias stability, silicon-microfabricated gyroscopeByoung-doo Choi, / Sangjun Park, / Hyoungho Ko, / Seung-Joon Paik, / Yonghwa Park, / Geunwon Lim, / Ahra Lee, / Sang Chul Lee, / Carr, W. / Setiadi, D. et al. | 2005
- 180
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1B5.3 The First Sub-deg/hr Bias Stability, Silicon-Microfabricated GyroscopeChoi, B.-d. / Park, S. / Ko, H. / Paik, S.-J. / Park, Y. / Lim, G. / Lee, A. / Lee, S. C. / Carr, W. / etiadi, D. et al. | 2005
- 184
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New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applicationsGomez, U.-M. / Kuhlmann, B. / Classen, J. / Bauer, W. / Lang, C. / Veith, M. / Esch, E. / Frey, J. / Grabmaier, F. / Offterdinger, K. et al. | 2005
- 184
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1B5.4 New Surface Micromachined Angular Rate Sensor for Vehicle Stabilizing Systems in Automotive ApplicationsGoez, U.-M. / Kuhlmann, B. / Classen, J. / Bauer, W. / Lang, C. / Veith, M. / Esch, E. / Frey, J. / Grabmaier, F. / Offterdinger, K. et al. | 2005
- 188
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1C5.1 A High Performance Bidirectional Micropump for a Novel Artificial Sphincter SystemDoll, A. / Reimers, S. / Heinrichs, M. / Goldschmidtboeing, F. / Schrag, H.-J. / Hopt, U. T. / Woias, P. et al. | 2005
- 188
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A high performance bidirectional micropump for a novel artificial sphincter systemDoll, A. / Reimers, S. / Heinrichs, M. / Goldschmidtboeing, F. / Schrag, H.-J. / Hopt, U.T. / Woias, P. et al. | 2005
- 192
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1C5.2 Electromagnetically Actuated Ball Valve MicropumpsYamahata, C. / Lacharme, F. / Matter, J. / Schnydrig, S. / Burri, Y. / Gijs, M. A. M. et al. | 2005
- 192
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Electromagnetically actuated ball valve micropumpsYamahata, C. / Lacharme, F. / Matter, J. / Schnydrig, S. / Burri, Y. / Gijs, M.A.M. et al. | 2005
- 197
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1C5.3 An Electrohydrodynamically Driven Microfabricated Actuator for the Study of Miniature Ion Propulsion Engine and Electric Wind DevicesChua, B. L. / Logeeswaran, V. J. / Chan, M. L. / Park, H. K. / Horsley, D. A. / Tien, N. C. et al. | 2005
- 197
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An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devicesChua, B.L. / Logeeswaran, V.J. / Chan, M.L. / Park, H.K. / Horsley, D.A. / Tien, N.C. et al. | 2005
- 201
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A polymeric paraffin micropump with active valves for high-pressure microfluidicsBoden, R. / Lehto, M. / Simu, U. / Thornell, G. / Hjort, K. / Schweitz, J.-A. et al. | 2005
- 201
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1C5.4 A Polymeric Paraffin Micropump with Active Valves for High-Pressure MicrofluidicsBoden, R. / Lehto, M. / Simu, U. / Thornell, G. / Hjort, K. / Schweitz, J.-A. et al. | 2005
- 205
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MEMS-based sonoporation devices for intratumoral gene therapySiu, T. / Trivedi, D.M. / Chiao, M. / Rohling, R. et al. | 2005
- 205
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1D5.1 MEMS-Based Sonoporation Devices for Intratumoral Gene TherapySiu, T. / Trivedi, D. M. / Chiao, M. / Rohling, R. et al. | 2005
- 209
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1D5.2 Microdevice Components for a Cellular Microsurgery SuiteChang, W. C. / Keller, C. G. / Hawkes, E. A. / Sretavan, D. W. et al. | 2005
- 209
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Microdevice components for a cellular microsurgery suiteChang, W.C. / Keller, C.G. / Hawkes, E.A. / Sretavan, D.W. et al. | 2005
- 213
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Reliable in-vivo penetration and transdermal injection using ultra-sharp hollow microneedlesRoxhed, N. / Griss, P. / Stemme, G. et al. | 2005
- 213
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1D5.3 Reliable in-vivo Penetration and Transdermal Injection using Ultra-Sharp Hollow MicroneedlesRoxhed, N. / Griss, P. / Stemme, G. et al. | 2005
- 217
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A novel fabrication of ionic polymer-metal composites (IPMC) actuator with silver nano-powdersChung, C.K. / Hong, Y.Z. / Fung, P.K. / Ju, M.S. / Lin, C.C.K. / Wu, T.C. et al. | 2005
- 217
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1D5.4 A Novel Fabrication of Ionic Polymer-Metal Composites (IPMC) Actuator with Silver Nano-PowdersChung, C. K. / Hong, Y. Z. / Fung, P. K. / Ju, M. S. / Lin, C. C. K. / Wu, T. C. et al. | 2005
- 221
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2A1.1 Invited Speaker Smart Clothes and Associated Wearable Devices for Biomedical Ambulatory MonitoringDittmar, A. / Lymberis, A. et al. | 2005
- 221
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Smart clothes and associated wearable devices for biomedical ambulatory monitoringDittmar, A. / Lymberis, A. et al. | 2005
- 228
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2A1.2 Integrating Wireless ECG Monitoring in TextilesCoosemans, J. / Hermans, B. / Puers, R. et al. | 2005
- 228
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Integrating wireless ECG monitoring in textilesCoosemans, J. / Hermans, B. / Puers, R. et al. | 2005
- 233
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2A1.3 An Autonomous Microsystem for Environmental and Biological Data GatheringLemmerhirt, D. F. / Fick, D. A. / Wise, K. D. et al. | 2005
- 233
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An autonomous microsystem for environmental and biological data gatheringLemmerhirt, D.F. / Fick, D.A. / Wise, K.D. et al. | 2005
- 239
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2A1.4 CMOS-Based Tactile Sensor for Coronary Artery IdentificationSalo, T. / Kirstein, K.-U. / Vanura, T. / Baltes, H. et al. | 2005
- 239
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CMOS-based tactile sensor for coronary artery identificationSalo, T. / Kirstein, K.-U. / Vancura, T. / Baltes, H. et al. | 2005
- 243
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Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution?Nguyen, C.T.-C. et al. | 2005
- 243
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2B1.1 Invited Speaker Vibrating RF MEMS Technology: Fuel for an Integrated Micromechanical Circuit Revolution?Nguyen, C. T.-C. et al. | 2005
- 247
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Quartz-crystal cantilevered resonator for nanometric sensingYu-Ching Lin, / Ono, T. / Esashi, M. et al. | 2005
- 247
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2B1.2 Quartz-Crystal Cantilevered Resonator for Nanometric SensingLin, Y.-C. / Ono, T. / Esashi, M. et al. | 2005
- 252
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Feedback control of high-intensity silicon ultrasonic surgical actuatorIl-Seok Son, / Lal, A. et al. | 2005
- 252
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2B1.3 Feedback Control of High-Intensity Silicon Ultrasonic Surgical ActuatorSon, I.-S. / Lal, A. et al. | 2005
- 256
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2B1.4 Capacitive Resonant Mass Sensor with LC Resonant Circuit for use in AtmosphereKim, S.-J. / Ono, T. / Esashi, M. et al. | 2005
- 256
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Capacitive resonant mass sensor with LC resonant circuit for use in atmosphereSang-Jin Kim, / Ono, T. / Esashi, M. et al. | 2005
- 261
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"Semiconductor nanostructure devices: recent advances and their potentials for transducers applications"Sakaki, H. et al. | 2005
- 261
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2C1.1 Invited Speaker Semiconductor Nanostructure Devices: Recent Advances and Their Potentials for Transducers ApplicationsSakaki, H. et al. | 2005
- 263
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2C1.2 Terahertz Emission Properties from Palladium/Silicon InterfaceKiwa, T. / Tsukada, K. / Suzuki, M. / Tonouchi, M. / Migitaka, S. / Yokosawa, K. et al. | 2005
- 263
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Terahertz emission properties from palladium/silicon interfaceKiwa, T. / Tsukada, K. / Suzuki, M. / Tonouchi, M. / Migitaka, S. / Yokosawa, K. et al. | 2005
- 267
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Schottky emitters with carbon nanotubes as electron sourcePhan Ngoc Minh, / Nguyen Tuan Hong, / Ngo Quang Minh, / Phan Hong Khoi, / Nomura, Y. / Ono, T. / Esashi, M. et al. | 2005
- 267
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2C1.3 Schottky Emitters with Carbon Nanotubes as Electron SourceMinh, P. N. / Hong, N. T. / Minh, N. Q. / Khoi, P. H. / Nomura, Y. / Ono, T. / Esashi, M. et al. | 2005
- 271
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Semiconductivity of pyrolyzed polymer for MEMS applicationKonishi, S. / Nagae, H. / Sagawa, T. / Naka, K. / Yoshioka, K. et al. | 2005
- 271
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2C1.4 Semiconductivity of Pyrolyzed Polymer for MEMS ApplicationKonishi, S. / Nagae, H. / Sagawa, T. / Naka, K. / Yoshioka, K. et al. | 2005
- 275
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Micromachined endovascularly-implantable wireless aneurysm pressure sensors: from concept to clinicAllen, M.G. et al. | 2005
- 275
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2D1.1 Invited Speaker Micromachined Endovascularly-Implantable Wireless Aneurysm Pressure Sensors: from Concept to ClinicAllen, M. G. et al. | 2005
- 279
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Smart microfuluidic electrochemical DNA sensors integrated signal processing circuitsSawada, Kazuaki / Oda, Chigusa / Takao, Hidekuni / Ishida, Makoto et al. | 2005
- 279
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2D1.2 Smart Microfuluidic Electrochemical DNA Sensors Integrated Signal Processing CircuitsSawada, K. / Oda, C. / Takao, H. / Ishida, M. et al. | 2005
- 279
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Smart microfluidic electrochemical DNA sensors integrated signal processing circuitsSawada, K. / Oda, C. / Takao, H. / Ishida, M. et al. | 2005
- 283
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2D1.3 Monitoring of Yeast Cell Concentration using a Micromachined Impedance SensorKrommenhoek, E. E. / Gardeniers, J. G. E. / Bomer, J. G. / Van den Berg, A. / Li, X. / Ottens, M. / van der Wielen, L. A. M. / van Dedem, G. W. K. / Van Leeuwen, M. / van Gulik, W. M. et al. | 2005
- 283
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Monitoring of yeast cell concentration using a micromachined impedance sensorKrommenhoek, E.E. / Gardeniers, J.G.E. / Bomer, J.G. / Van den Berg, A. / Li, X. / Ottens, M. / van der Wielen, L.A.M. / van Dedem, G.W.K. / Van Leeuwen, M. / van Gulik, W.M. et al. | 2005
- 287
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A microfabricated narrow gap biofuel cell with membraneless design flexibilityKorivi, N.S. / Jin-Woo Choi, et al. | 2005
- 287
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2D1.4 A Microfabricated Narrow Gap Biofuel Cell with Membraneless Design FlexibilityKorivi, N. S. / Choi, J.-W. et al. | 2005
- 291
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2A2.1 Thermoelectric MEMS Generators as a Power Supply for a Body Area NetworkLeonov, V. / Fiorini, P. / Sedky, S. / Torfs, T. / Van Hoof, C. et al. | 2005
- 291
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Thermoelectric MEMS generators as a power supply for a body area networkLeonov, V. / Fiorini, P. / Sedky, S. / Torfs, T. / Van Hoof, C. et al. | 2005
- 295
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2A2.2 Novel MEMS Power Generator with Integrated Thermoelectric and Vibrational DevicesSato, N. / Ishii, H. / Urano, M. / Sakata, T. / Terada, J. / Morimura, H. / Shigematsu, S. / Kudou, K. / Kamei, T. / Machida, K. et al. | 2005
- 295
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Novel MEMS power generator with integrated thermoelectric and vibrational devicesSato, N. / Ishii, H. / Urano, M. / Sakata, T. / Terada, J. / Morimura, H. / Shigematsu, S. / Kudou, K. / Kamei, T. / Machida, K. et al. | 2005
- 299
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2A2.3 Design and Implementation of an Integrated Floating-Gate Electrostatic Power Micro-GeneratorMa, W. / Rufer, L. / Zohar, Y. / Wong, M. et al. | 2005
- 299
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Design and implementation of an integrated floating-gate electrostatic power micro-generatorWei Ma, / Rufer, L. / Zohar, Y. / Man Wong, et al. | 2005
- 303
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2A2.4 A Micro Direct Methanol Fuel Cell using PDMS Assembly TechnologyJiang, Y. / Wang, X. / Xie, K. / Qiu, X. / Zhong, L. / Liu, L. et al. | 2005
- 303
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A micro direct methanol fuel cell using PDMS assembly technologyYingqi Jiang, / Xiaohong Wang, / Kewen Xie, / Xinping Qiu, / Lingyan Zhong, / Litian Liu, et al. | 2005
- 307
-
2B2.1 Pyroelectric Infrared Sensors with Fast Response Time and High Sensitivity using Epitaxial Pb(Zr,Ti)O~3 Films on Epitaxial gamma-Al~2O~3/Si SubstratesAkai, D. / Hirabayashi, K. / Yokawa, M. / Sawada, K. / Taniguchi, Y. / Murashige, S. / Nakayama, N. / Yamada, T. / Murakami, K. / Ishida, M. et al. | 2005
- 307
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Pyroelectric infrared sensors with fast response time and high sensitivity using epitaxial Pb(ZrTi)O/sub 3/ films on epitaxial /spl gamma/-Al/sub 2/O/sub 3//Si substratesAkai, D. / Hirabayashi, K. / Yokawa, M. / Sawada, K. / Taniguchi, Y. / Murashige, S. / Nakayama, N. / Yamada, T. / Murakami, K. / Ishida, M. et al. | 2005
- 311
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An ultra-low-power physics package for a chip-scale atomic clockMescher, M.J. / Lutwak, R. / Varghese, M. et al. | 2005
- 311
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2B2.2 An Ultra-Low-Power Physics Package for a Chip-Scale Atomic ClockMescher, M. J. / Lutwakg, R. / Varghese, M. et al. | 2005
- 317
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2B2.3 First Fully CMOS-Integrated 3D Hall ProbeKejik, P. / Schurig, E. / Bergsma, F. / Popovic, R. S. et al. | 2005
- 317
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First fully CMOS-integrated 3D Hall probeKejik, P. / Schurig, E. / Bergsma, F. / Popovic, R.S. et al. | 2005
- 321
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Novel highly miniaturized multi-stress sensor field effect transistor with eight source/drain terminalsDoelle, M. / Bartholomeyczik, J. / Ruther, P. / Paul, O. et al. | 2005
- 321
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2B2.4 Novel Highly Miniaturized Multi-Stress Sensor Field Effect Transistor with Eight Source/Drain TerminalsDoelle, M. / Bartholomeyczik, J. / Ruther, P. / Paul, O. et al. | 2005
- 325
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2-D and 3-D tactile pin display using SMA micro-coil actuator and magnetic latchMatsunaga, T. / Makishi, W. / Totsu, K. / Esashi, M. / Haga, Y. et al. | 2005
- 325
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2B2.5 2-D and 3-D Tactile Pin Display using SMA Micro-coil Actuator and Magnetic LatchMatsunaga, T. / Makishi, W. / Totsu, K. / Esashi, M. / Haga, Y. et al. | 2005
- 329
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Small footprint knife gate microvalves for large flow controlBraun, S. / Haasl, S. / Sadoon, S. / Ridgeway, A.S. / van der Wijngaart, W. / Stemme, G. et al. | 2005
- 329
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2C2.1 Small Footprint Knife Gate Microvalves for Large Flow ControlBraun, S. / Haasl, S. / Sadoon, S. / Ridgeway, A. S. / van der Wijngaart, W. / Stemme, G. et al. | 2005
- 333
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2C2.2 Comparison of Two Seal Technologies for Hydraulic MicroactuatorsDe Volder, M. / Peirs, J. / Reynaerts, D. / Coosemans, J. / Puers, R. / Smal, O. / Raucent, B. et al. | 2005
- 333
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Comparison of two seal technologies for hydraulic microactuatorsDe Volder, M. / Peirs, J. / Reynaerts, D. / Coosemans, J. / Puers, R. / Smal, O. / Raucent, B. et al. | 2005
- 337
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2C2.3 Fuel and Air Supply System for Combustion Based Power SourcesSatoh, D. / Tanaka, S. / Esashi, M. et al. | 2005
- 337
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Fuel and air supply system for combustion based power sourcesSatoh, D. / Tanaka, S. / Esashi, M. et al. | 2005
- 342
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Characterization and modeling of a liquid-vapor phase change membrane actuator with an integrated SU-8 micro capillary wicking structureWhalen, S.A. / Won, S.Y. / Richards, R.F. / Bahr, D.F. / Richards, C.D. et al. | 2005
- 342
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2C2.4 Charaterization and Modeling of a Liquid-Vapor Phase Change Membrane Actuator with an Integrated SU-8 Micro Capillary Wicking StructureWhalen, S. A. / Won, S. Y. / Richards, R. F. / Bahr, D. F. / Richards, C. D. et al. | 2005
- 348
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2C2.5 A Lobster-Sniffing Inspired Actuator for Manipulation of Micro-Objects via Controlling Local FluidChiang, C.-F. / Liu, C.-H. / Chang, C. et al. | 2005
- 348
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A lobster-sniffing inspired actuator for manipulation of micro-objects via controlling local fluidChia-Fang Chiang, / Cheng-Hsiang Liu, / Chieh Chang, / Cheng-Hsien Liu, et al. | 2005
- 352
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Nanofluidic molecular filters for efficient protein separation and preconcentrationYing-Chih Wang, / Jianping Fu, / Pan Mao, / Jongyoon Han, et al. | 2005
- 352
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2D2.1 Nanofluidic Molecular Filters for Efficient Protein Separation and PreconcentrationWang, Y.-C. / Fu, J. / Mao, P. / Han, J. et al. | 2005
- 356
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Nanoliter liquid handling on a low cost disposable with embedded fluid actuatorsSamel, B. / Nock, V. / Russom, A. / Griss, P. / Stemme, G. et al. | 2005
- 356
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2D2.2 Nanoliter Liquid Handling on a Low Cost Disposable with Embedded Fluid ActuatorsSamel, B. / Nock, V. / Russom, A. / Griss, P. / Stemme, G. et al. | 2005
- 360
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2D2.3 Microfluidic Device for Immobilization of Bio-Vesicles Towards Controlled on-chip ElectrofusionZiegler, D. / Coquet, P. / Tixier-Mita, A. / Tresset, G. / Fujita, H. / Takeuchi, S. et al. | 2005
- 360
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Microfluidic device for immobilization of bio-vesicles towards controlled on-chip electrofusionZiegler, D. / Coquet, P. / Tixier-Mita, A. / Tresset, G. / Fujita, H. / Takeuchi, S. et al. | 2005
- 364
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An on-chip autonomous microfluidic cooling systemAgarwal, A.K. / Sridharamurthy, S.S. / Beebe, D.J. / Hongrui Jiang, et al. | 2005
- 364
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2D2.4 An on-chip Autonomous Microfluidic Cooling SystemAgarwal, A. K. / Sridharamurthy, S. S. / Beebe, D. J. / Jiang, H. et al. | 2005
- 368
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A planar 2-stage micromixerStoeber, B. / Liepmann, D. / Muller, S.J. et al. | 2005
- 368
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2D2.5 A Planar 2-Stage MicromixerStoeber, B. / Liepmann, D. / Muller, S. J. et al. | 2005
- 372
-
Novel fabrication method of self positioned and focal length tuned microlensSei-Hwan Jung, / Kook-Nyung Lee, / Yun-Ho Jang, / Yong-Kweon Kim, et al. | 2005
- 372
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2A3.1 Novel Fabrication Method of Self Positioned and Focal Length Tuned MicrolensJung, S.-H. / Lee, K.-N. / Jang, Y.-H. / Kim, Y.-K. et al. | 2005
- 376
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2A3.2 Tunable Micro-Aspherical Lens Manipulated by 2D Electrostatic ForcesChen, C.-W. / Tseng, F.-G. et al. | 2005
- 376
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Tunable micro-aspherical lens manipulated by 2D electrostatic forcesChang-Wei Chen, / Fan-Gang Tseng, et al. | 2005
- 380
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Application of flowing thermal lens to flow sensors for microchemical chipsKikutani, Y. / Morishima, K. / Tokeshi, M. / Yamaguchi, J. / Fukuzawa, T. / Hattori, A. / Yoshida, Y. / Kitaoka, M. / Kitamori, T. et al. | 2005
- 380
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2A3.3 Application of Flowing Thermal Lens to Flow Sensors for Microchemical ChipsKikutani, Y. / Morishima, K. / Tokeshi, M. / Yamaguchi, J. / Fukuzawa, T. / Hattori, A. / Yoshida, Y. / Kitaoka, M. / Kitamori, T. et al. | 2005
- 384
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2A3.4 High Aspect Ratio Nano-Structures (HAMS) for Photonic MEMS Based on Vertical DBR ArchitectureMarty, F. / Saadany, B. / Bourouina, T. / Mita, Y. / Shibata, T. et al. | 2005
- 384
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High aspect ratio nano-structures (HARNS) for photonic MEMS based on vertical DBR architectureMarty, F. / Saadany, B. / Bourouina, T. / Mita, Y. / Shibata, T. et al. | 2005
- 388
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2A3.5 MEMS Injection-Locked LaserZhang, X. M. / Liu, A. Q. / Cai, H. / Lu, C. / Tang, D. Y. et al. | 2005
- 388
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MEMS injection-locked laserZhang, X.M. / Liu, A.Q. / Cai, H. / Lu, C. / Tang, D.Y. et al. | 2005
- 392
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2B3.1 Effects of Stress on the Temperature Coefficient of Frequency in Double Clamped ResonatorsMelamud, R. / Hopcroft, M. / Jha, C. / Kim, B. / Chandorkar, S. / Candler, R. / Kenny, T. W. et al. | 2005
- 392
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Effects of stress on the temperature coefficient of frequency in double clamped resonatorsMelamud, R. / Hopcroft, M. / Jha, C. / Bongsang Kim, / Chandorkar, S. / Candler, R. / Kenny, T.W. et al. | 2005
- 396
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Novel integrated shock protection for MEMSSang Won Yoon, / Yazdi, N. / Perkins, N.C. / Najafi, K. et al. | 2005
- 396
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2B3.2 Novel Integrated Shock Protection for MEMSYoon, S. W. / Yazdi, N. / Perkins, N. C. / Najafi, K. et al. | 2005
- 401
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2B3.3 A New Self-Test and Self-Calibration Concept for Micro-Machined GyroscopesLink, T. / Simon, I. / Trachtler, M. / Gaisser, A. / Braxmaier, M. / Manoli, Y. / Sandmaier, H. et al. | 2005
- 401
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A new self-test and self-calibration concept for micro-machined gyroscopesLink, T. / Simon, I. / Trachtler, M. / Gaisser, A. / Braxmaier, M. / Manoli, Y. / Sandmaier, H. et al. | 2005
- 405
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2B3.4 Design of a Micromachined CMOS CompassDumas, N. / Latorre, L. / Nouet, P. et al. | 2005
- 405
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Design of a micromachined CMOS compassDumas, N. / Latorre, L. / Nouet, P. et al. | 2005
- 409
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2B3.5 A Hard-Disk Drive Tracking Servo Microactuator Driven by PZT with Stroke Amplification MechanismHirano, T. / Yang, H. et al. | 2005
- 409
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A hard-disk drive tracking servo microactuator driven by PZT with stroke amplification mechanismHirano, T. / Yang, H. et al. | 2005
- 413
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Fabrication of miniaturized electron beam systemHak Kim, / Changho Han, / Hyeon Cheol Kim, / Soondon Choi, / Kukjin Chun, et al. | 2005
- 413
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2C3.1 Fabrication of Miniaturized Electron Beam SystemKim, H. / Han, C. / Kim, H. C. / Choi, S. / Chun, K. et al. | 2005
- 417
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2C3.2 Monolithic Integration of High Voltage Driver Circuits and MEMS Actuators by ASIC-Like PostprocessTakahashi, K. / Kwon, H. N. / Mita, M. / Fujita, H. / Toshiyoshi, H. / Suzuki, K. / Funaki, H. et al. | 2005
- 417
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Monolithic integration of high voltage driver circuits and MEMS actuators by ASIC-like postprocessTakahashi, K. / Kwon, H.N. / Mita, M. / Fujita, H. / Toshiyoshi, H. / Suzuki, K. / Funaki, H. et al. | 2005
- 421
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Microlens array and micro clampers for high performance optoelectronic devices packagingNallani, A.K. / Ting Chen, / Lee, J.B. / Hayes, D.J. / Wallace, D.B. et al. | 2005
- 421
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2C3.3 Microlens Array and Micro Clampers for High Performance Optoelectronic Devices PackagingNallani, A. K. / Chen, T. / Lee, J.-B. / Hayes, D. J. / Wallace, D. B. et al. | 2005
- 427
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Resonance-free HRS MEMS package for microwave and millimeter-waveYo-Tak Song, / Ono, T. / Hai-Young Lee, / Esashi, M. et al. | 2005
- 427
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2C3.4 Resonance-Free HRS MEMS Package for Microwave and Millimeter-WaveSong, Y.-T. / Ono, T. / Lee, H.-Y. / Esashi, M. et al. | 2005
- 433
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H/sub 2//air self-breathing micro PEM fuel cell stacks with MEMS fabrication technologyCong Chen, / Tao Wang, / Peitao Dong, / Xigui Zhang, / Jufeng Li, / Dan Zheng, / Baojia Xia, / Xinxin Li, et al. | 2005
- 433
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2C3.5 H~2/Air Self-Breathing Micro PEM Fuel Cell Stacks with MEMS Fabrication TechnologyChen, C. / Wang, T. / Dong, P. / Zhang, X. / Li, J. / Zheng, D. / Xia, B. / Li, X. et al. | 2005
- 437
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Disposable polymer "smart" lab-on-a-chip for point-of-care testing (POCT) in clinical diagnosticsAhn, C.H. et al. | 2005
- 437
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2D3.1 Invited Speaker Disposable Polymer "Smart" Lab-on-a-chip for Point-of-care Testing (POCT) in Clinical DiagnosticsAhn, C. H. et al. | 2005
- 441
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Design and operation of a micromachined bubble-jet cell sorterChung-Chu Chen, / Jen-Shiang Wang, / Zappe, S. / Xiaojing Zhang, / Solgaard, O. et al. | 2005
- 441
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2D3.2 Design and Operation of a Micromachined Bubble-Jet Cell SorterChen, C.-C. / Wang, J.-S. / Zappe, S. / Zhang, X. / Solgaard, O. et al. | 2005
- 445
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Multi particles and biomolecules sorting system using thermoreversible gelation controlled by DMD [digital mirror device]Watabe, S. / Tatsuoka, M. / Shimomae, T. / Shirasaki, Y. / Mizuno, J. / Funatsu, T. / Shoji, S. et al. | 2005
- 445
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2D3.3 Multi Particles and Biomolecules Sorting System using Thermoreversible Gelation Controlled by DMDWatabe, S. / Tatsuoka, M. / Shimomae, T. / Shirasaki, Y. / Mizuno, J. / Funatsu, T. / Shoji, S. et al. | 2005
- 449
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Dispensing of cells for highly parallel production of living cell microarraysGutmann, O. / Wintermantel, M.K. / Niekrawietz, R. / de Heij, B. / Zengerle, R. / Daub, M. et al. | 2005
- 449
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2D3.4 Dispensing of Cells for Highly Parallel Production of Living Cell MicroarraysGutmann, O. / Wintermantel, M. K. / Niekrawietz, R. / de Heij, B. / Zengerle, R. / Daub, M. et al. | 2005
- 453
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RF smart-sensor for venous ulcer treatmentMeiners, M. / Sussenguth, M. / Missal, W. / Schary, T. / Benecke, W. / Lang, W. / Stucker, M. et al. | 2005
- 453
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2E4.1 RF Smart-Sensor for Venous Ulcer TreatmentMeiners, M. / Sussenguth, M. / Missal, W. / Schary, T. / Benecke, W. / Lang, W. / Stucker, M. et al. | 2005
- 457
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"chip-size" antennas for implantable sensors and smart dustBasset, P. / Alfaro, F. / Novosel, D. / de la Plaza, A. / Stancil, D. / Fedder, G.K. et al. | 2005
- 457
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2E4.2 "Chip-Size" Antennas for Implantable Sensors and Smart DustBasset, P. / Alfaro, F. / Novosel, D. / de la Plaza, A. / Stancil, D. / Fedder, G. K. et al. | 2005
- 461
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Simplified circuit modeling and fabrication of intrabody communication devicesHachisuka, K. / Terauchi, Y. / Kishi, Y. / Hirota, T. / Sasaki, K. / Hosaka, H. / Ito, K. et al. | 2005
- 461
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2E4.3 Simplified Circuit Modeling and Fabrication of Intrabody Communication DevicesHachisuka, K. / Terauchi, Y. / Kishi, Y. / Hirota, T. / Sasaki, K. / Hosaka, H. / Ito, K. et al. | 2005
- 465
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A portable multi-sensor datalogger for heart rate variability (HRV) study during skydiver's free fallHermans, B. / Verheyden, B. / Beckers, F. / Aubert, A. / Puers, R. et al. | 2005
- 465
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2E4.4 A Portable Multi-Sensor Datalogger for Heart Rate Variability (HRV) Study During Skydiver's Free FallHermans, B. / Verheyden, B. / Beckers, F. / Aubert, A. / Puers, R. et al. | 2005
- 470
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2E4.5 SiC Pressure Sensor for Detection of Combustor Thermo-Acoustic InstabilitiesOkojie, R. S. / DeLaat, J. C. / Saus, J. R. et al. | 2005
- 470
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SiC pressure sensor for detection of combustor thermoacoustic instabilities [aircraft engine applications]Okojie, R.S. / DeLaat, J.C. / Saus, J.R. et al. | 2005
- 474
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Multipole marker and correlation image sensor for position and pose estimation in sensor networksNagai, Y. / Shimizu, T. / Kurihara, T. / Ono, N. / Nara, T. / Ando, S. et al. | 2005
- 474
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2E4.6 Multipole Marker and Correlation Image Sensor for Position and Pose Estimation in Sensor NetworksNagai, Y. / Shimizu, T. / Kurihara, T. / Ono, N. / Nara, T. / Ando, S. et al. | 2005
- 479
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A locally autocompensating image sensorFriedrich, N. / Boehm, M. et al. | 2005
- 479
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2E4.7 A Locally Autocompensating Image SensorFriedrich, N. / Boehm, M. et al. | 2005
- 483
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2E4.8 A Micromachined Polyurethane/Stainless-Steel Capacitive Pressure Sensor without Cavity and DiaphragmTakahata, K. / Gianchandani, Y. B. et al. | 2005
- 483
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A micromachined polyurethane/stainless-steel capacitive pressure sensor without cavity and diaphragmTakahata, K. / Gianchandani, Y.B. et al. | 2005
- 487
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2E4.9 Diaphragm-Type Miniature Optical Fiber Pressure Sensor with a SleeveWatanabe, T. / Kaneko, Y. / Shimada, M. / Takahashi, K. et al. | 2005
- 487
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Diaphragm-type miniature optical fiber pressure sensor with a sleeveWatanabe, T. / Kaneko, Y. / Shimada, M. / Takahashi, K. et al. | 2005
- 491
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Liquid-core, piezoresistive, fully polymer-based pressure sensorLichtenberg, J. / Hierlemann, A. et al. | 2005
- 491
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2E4.10 Liquid-Core, Piezoresistive, Fully Polymer-Based Pressure SensorLichtenberg, J. / Hierlemann, A. et al. | 2005
- 495
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Proposal of a new magneto-transistor with a recombination region in the base of the bipolar transistorKimura, M. / Takahashi, S. et al. | 2005
- 495
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2E4.11 Proposal of a New Magneto-Transistor with a Recombination Region in the Base of the Bipolar TransistorKimura, M. / Takahashi, S. et al. | 2005
- 499
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2E4.12 A Thin Film Strip for Aerodynamic Body Pressure Profile MonitoringZagnoni, M. / Rossetti, A. / Proli, P. / Golfarelli, A. / Callegari, S. / Talamelli, A. / Sangiorgi, E. / Tartagni, M. et al. | 2005
- 499
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A thin film strip for aerodynamic body pressure profile monitoringZagnoni, M. / Rossetti, A. / Proli, P. / Golfarelli, A. / Callegari, S. / Talamelli, A. / Sangiorgi, E. / Tartagni, M. et al. | 2005
- 503
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Sapphire-based capacitance diaphragm gauge for high temperature applicationsIshihara, T. / Sekine, M. / Ishikura, Y. / Kimura, S. / Harada, H. / Nagata, M. / Masuda, T. et al. | 2005
- 503
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2E4.13 Sapphire-based Capacitance Diaphragm Gauge for High Temperature ApplicationsIshihara, T. / Sekine, M. / Ishikura, Y. / Kimura, S. / Harada, H. / Nagata, M. / Masuda, T. et al. | 2005
- 507
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2E4.14 Two-Chip Implemented, Wafer-Level Hermetic Packaged Accelerometer for Tactical and Inertial ApplicationsKo, H. / Park, S. / Choi, B.-d. / Park, Y. / Lim, G. / Paik, S.-J. / Lee, A. / Yoo, K. / Lee, S. / Lim, J. et al. | 2005
- 507
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Two-chip implemented, wafer-level hermetic packaged accelerometer for tactical and inertial applicationsHyoungho Ko, / Sangjun Park, / Byoung-doo Choi, / Yonghwa Park, / Geunwon Lim, / Seung-Joon Paik, / Ahra Lee, / Kwangho Yoo, / Sangmin Lee, / Jaesang Lim, et al. | 2005
- 511
-
SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection modeWatanabe, Y. / Mitsui, T. / Mineta, T. / Matsu, Y. / Okada, K. et al. | 2005
- 511
-
2E4.15 SOI Micromachined 5-Axis Motion Sensor using Resonant Electrostatic Drive and Non-Resonant Capacitive Detection ModeWatanabe, Y. / Mitsui, T. / Mineta, T. / Matsu, Y. / Okada, K. et al. | 2005
- 515
-
2E4.16 Sub-Micro-Gravity Capacitive SOI MicroaccelerometersAmini, B. V. / Abdolvand, R. / Ayazi, F. et al. | 2005
- 515
-
Sub-micro-gravity capacitive SOI microaccelerometersAmini, B.V. / Abdolvand, R. / Ayazi, F. et al. | 2005
- 519
-
A novel thermal-bubble-based micromachined accelerometerKe-Min Liao, / Rongshun Chen, / Chou, B.C.S. et al. | 2005
- 519
-
2E4.17 A Novel Thermal-Bubble-Based Micromachined AccelerometerLiao, K.-M. / Chen, R. / Chou, B. C. S. et al. | 2005
- 523
-
Fabrication of nano-gap accelerometer using photo-assisted electrochemical etchingHyeon Cheol Kim, / Dae Hyun Kim, / Jinwoo Jeong, / Kukjin Chun, et al. | 2005
- 523
-
2E4.18 Fabrication of Nano-Gap Accelerometer using Photo-Assisted Electrochemical EtchingKim, H. C. / Kim, D. H. / Jeong, J. / Chun, K. et al. | 2005
- 527
-
Polysilicon packaging and a new anchoring technology for thick SOI mems - Dynamic response model and application to over-damped inertial sensorsDiem, B. / Barbe, J.C. / De Crecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 527
-
Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensorsDiem, B. / Barbe, J.C. / de Crecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 527
-
2E4.19 Polysilicon Packaging and a New Anchoring Technology for Thick SOI MEMS - Dynamic Response Model and Application to Over-Damped Inertial SensorsDiem, B. / Barbee, J. C. / de Creecy, F. / Giroud, S. / Renaud, D. / Grange, H. / Hammond, J. / Vandemeer, J. / Roop, R. / Gogoi, B. et al. | 2005
- 531
-
2E4.20 Vacuum Packaged Single Crystal Silicon Gyroscope with Sub mdeg/s/√ Hz ResolutionLee, J.-Y. / Jeon, S.-H. / Jung, H.-K. / Chang, H.-K. / Kim, Y.-K. et al. | 2005
- 531
-
Vacuum packaged single crystal silicon gyroscope with sub mdeg/s//spl radic/Hz resolutionJune-Young Lee, / Seung-Hoon Jeon, / Hyoung-Kyoon Jung, / Hyun-Kee Chang, / Yong-Kweon Kim, et al. | 2005
- 535
-
A digitally controlled MEMS gyroscope with 3.2 deg/hr stabilityRodjegard, H. / Sandstrom, D. / Pelin, P. / Hedenstierna, N. / Eckerbert, D. / Andersson, G.I. et al. | 2005
- 535
-
2E4.21 A Digitally Controlled MEMS Gyroscope with 3.2 deg/hr StabilityRodjegard, H. / Sandstrom, D. / Pelin, P. / Hedenstierna, N. / Eckerbert, D. / Andersson, G. I. et al. | 2005
- 539
-
2E4.22 Two-Mass System with Wide Bandwidth for SiOG (Silicon on Glass) Vibratory GyroscopesJeon, S.-H. / Lee, J.-Y. / Jung, H.-K. / Chang, H.-K. / Kim, Y.-K. et al. | 2005
- 539
-
Two-mass system with wide bandwidth for SiOG (silicon on glass) vibratory gyroscopesSeung-Hoon Jeon, / June-Young Lee, / Hyoung-Kyoon Jung, / Hyun-Kee Chang, / Yong-Kweon Kim, et al. | 2005
- 543
-
Technology and integration of poly-crystalline diamond piezoresistive position sensor for cochlear implant probeYuxing Tang, / Aslam, D.M. / Jianbai Wang, / Wise, K.D. et al. | 2005
- 543
-
2E4.23 Technology and Integration of Poly-Crystalline Diamond Piezoresistive Position Sensor for Cochlear Implant ProbeTang, Y. / Aslam, M. / Wang, J. / Wise, K. D. et al. | 2005
- 547
-
2E4.24 A Dynamic Millinewton Thrust Vector Measurement System in SiliconEriksson, A. B. / Lindegren, R. / Kohler, J. et al. | 2005
- 547
-
A dynamic millinewton thrust vector measurement system in siliconEriksson, A.B. / Lindegren, R. / Kohler, J. et al. | 2005
- 551
-
Micro force sensor with piezoresistive amorphous carbon strain gaugePeiner, E. / Tibrewala, A. / Bandorf, R. / Biehl, S. / Luthje, H. / Doering, L. et al. | 2005
- 551
-
2E4.25 Micro Force Sensor with Piezoresistive Amorphous Carbon Strain GaugePeiner, E. / Tibrewala, A. / Bandorf, R. / Biehl, S. / Luhje, H. / Doering, L. et al. | 2005
- 555
-
2E4.26 Multidirectional Force and Torque Sensor for Insect Flight ResearchNasir, M. / Dickinson, M. / Liepmann, D. et al. | 2005
- 555
-
Multidirectional force and torque sensor for insect flight researchNasir, M. / Dickinson, M. / Liepmann, D. et al. | 2005
- 559
-
2E4.27 A New Capacitive Displacement Sensor with High Accuracy and Long RangeKim, M. / Moon, W. / Yoon, E. / Lee, K.-r. et al. | 2005
- 559
-
A new capacitive displacement sensor with high accuracy and long rangeMoojin Kim, / Wonkyu Moon, / Euisung Yoon, / Kwang-ryeol Lee, et al. | 2005
- 563
-
Thin film NiTi fluidic-thermostat arrayShin, D.D. / Dong-Gun Lee, / Mohanchandra, K.P. / Carman, G.P. et al. | 2005
- 563
-
2E4.28 Thin Film NiTi Fluidic-Thermostat ArrayShin, D. D. / Lee, D.-G. / Mohanchandra, K. P. / Carman, G. P. et al. | 2005
- 567
-
2E4.29 Characteristics of Improved Thin-Film Multijunction Thermal ConvertersLee, Y. H. / Kwon, S. W. / Kim, K. J. / Lee, K. C. / Park, S. I. / Ihm, Y. E. et al. | 2005
- 567
-
Characteristics of improved thin-film multijunction thermal convertersLee, Y.H. / Kwon, S.W. / Kim, K.J. / Lee, K.C. / Park, S.I. / Ihm, Y.E. et al. | 2005
- 571
-
Micromachined thermal conductivity sensor for the liquid phaseKuntner, J. / Kohl, F. / Jakoby, B. et al. | 2005
- 571
-
2E4.30 Micromachined Thermal Conductivity Sensor for the Liquid PhaseKuntner, J. / Kohl, F. / Jakoby, B. et al. | 2005
- 575
-
A high-temperature thermopile fabrication process for thermal flow sensorsBuchner, R. / Rohloff, K. / Benecke, W. / Lang, W. et al. | 2005
- 575
-
2E4.31 A High-Temperature Thermopile Fabrication Process for Thermal Flow SensorsBuchner, R. / Rohloff, K. / Benecke, W. / Lang, W. et al. | 2005
- 579
-
Thermal flexible foil-fingerprint sensorSchippers, P. / Dobmeier, M.P. / Kuehlewein, R. / Bustgens, B. / Urban, G. et al. | 2005
- 579
-
2E4.32 Thermal Flexible Foil-FingerprintsensorSchippers, P. / Dobmeier, M. P. / Kuehlewein, R. / Bustgens, B. / Urban, G. et al. | 2005
- 581
-
2E4.33 Highly Sensitive Electron-Emission-Type Infrared Sensor using a Single Crystalline LiNbO~3Takamuro, D. / Takao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 581
-
Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNbO3Takamuro, Daisuke / Takao, Hidekuni / Sawada, Kazuaki / Ishida, Makoto et al. | 2005
- 581
-
Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNbO/sub 3/Takamuro, D. / Takao, H. / Sawada, K. / Ishida, M. et al. | 2005
- 585
-
A floated absorbing structure for uncooled microbolometerAhn, M.S. / Han, Y.H. / Shin, H.J. / Kim, K.T. / Lee, S.H. / Moon, S. / Oh, M.H. et al. | 2005
- 585
-
2E4.34 A Floated Absorbing Structure for Uncooled MicrobolometerAhn, M. S. / Han, Y. H. / Shin, H. J. / Kim, K. T. / Lee, S. H. / Moon, S. / Oh, M. H. et al. | 2005
- 589
-
Development of a MOEMS sun sensor for space applicationsBohnke, T. / Stenmark, L. et al. | 2005
- 589
-
2E4.35 Development of a Moems Sun Sensor for Space ApplicationsBohnke, T. / Stenmark, L. et al. | 2005
- 593
-
2E4.36 Novel High Q-Factor Resonant Microsensor Platform for Chemical and Biological ApplicationsSeo, J. H. / Brand, O. et al. | 2005
- 593
-
Novel high Q-factor resonant microsensor platform for chemical and biological applicationsJae Hyeong Seo, / Brand, O. et al. | 2005
- 597
-
Impact of slot location on thermoelastic dissipation in micromechanical resonatorsCandler, R.N. / Hopcroft, M. / Low, C.W. / Chandorkar, S. / Bongsang Kim, / Varghese, M. / Duwel, A. / Kenny, T.W. et al. | 2005
- 597
-
2E4.37 Impact of Slot Location on Thermoelastic Dissipation in Micromechanical ResonatorsCandler, R. N. / Hopcroft, M. / Low, C. W. / Chandorkar, S. / Kim, B. / Varghese, M. / Duwel, A. / Kenny, T. W. et al. | 2005
- 601
-
A new height-adjustable aeroMEMS surface fence probe fabricated in SOI technology for high resolution wall shear stress measurement in turbulent flowsSchiffer, M. / Obermeier, E. / Grewe, F. / Ebner, A. / Fernholz, H.H. et al. | 2005
- 601
-
2E4.38 A New Height-Adjustable Aeromems Surface Fence Probe Fabricated in SOI Technology for High Resolution Wall Shear Stress Measurement in Turbulent FlowsSchiffer, M. / Obermeier, E. / Grewe, F. / Ebner, A. / Fernholz, H. H. et al. | 2005
- 605
-
Particle cytometer utilizing rotating flexural plate modes and capacitive sensingSathaye, A. / Lal, A. et al. | 2005
- 605
-
2E4.39 Particle Cytometer Utilizing Rotating Flexural Plate Modes and Capacitive SensingSathaye, A. / Lal, A. et al. | 2005
- 609
-
2E4.40 An Injection Quantity Sensor for Automotive ApplicationsSchmid, U. / Seidel, H. et al. | 2005
- 609
-
An injection quantity sensor for automotive applicationsSchmid, U. / Seidel, H. et al. | 2005
- 613
-
2E4.41 Degradation Level Monitoring Sensor for Insulating Oil of Power Transformer using Capacitive High Aspect Ratio of ElectrodesKim, S. / Kim, Y. / Yang, J. / Kwon, S. / Park, S. et al. | 2005
- 613
-
Degradation level monitoring sensor for insulating oil of power transformer using capacitive high aspect ratio of electrodesSunghyun Kim, / Yiseok Kim, / Jooran Yang, / Sangjin Kwon, / Sekwang Park, et al. | 2005
- 617
-
2E4.42 Fabrication and Characteristics of the Suppressed Sidewall Injection Magnetotransistor using a CMOS ProcessSong, Y.-G. / Ryu, J.-G. / Choi, Y.-S. / Kim, N.-H. et al. | 2005
- 617
-
Fabrication and characteristics of the suppressed sidewall injection magnetotransistor using a CMOS processYoun-Gui Song, / Ji-Goo Ryu, / Young-Shig Choi, / Nam-Ho Kim, et al. | 2005
- 621
-
The AFM tweezers: integration of a tweezers function with an AFM probeTakekawa, T. / Nakagawa, K. / Hashiguchi, G. et al. | 2005
- 621
-
2E4.43 The AFM Tweezers: Integration of a Tweezers Function With an AFM ProbeTakekawa, T. / Nakagawa, K. / Hashiguchi, G. et al. | 2005
- 625
-
Optimization of the piezoresistive AFM cantilever design for use at cryogenic temperaturesSeung Seoup Lee, / Miyatake, Y. / Shiraki, I. / Nagamura, T. / Miki, K. / Ono, T. / Esashi, M. et al. | 2005
- 625
-
2E4.44 Optimization of the Piezoresistive AFM Cantilever Design for use at Cryogenic TemperaturesLee, S. S. / Miyatake, Y. / Shiraki, I. / Nagamura, T. / Miki, K. / Ono, T. / Esashi, M. et al. | 2005
- 630
-
2E4.45 Frequency and Transient Analysis of Micromachined U-Shaped Cantilever Devices for Magnetic Field MeasurementKeplinger, F. / Beigelbeck, R. / Kohl, F. / Kvasnica, S. / Jachimowicz, A. / Jakoby, B. et al. | 2005
- 630
-
Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurementKeplinger, F. / Beigelbeck, R. / Kohl, F. / Kvasnica, S. / Jachimowicz, A. / Jakoby, B. et al. | 2005
- 636
-
Enhanced functionality of cantilever based mass sensors using higher modes and functionalized particlesDohn, S. / Sandberg, R. / Svendsen, W. / Boisen, A. et al. | 2005
- 636
-
2E4.46 Enhanced Functionality of Cantilever Based Mass Sensors using Higher Modes and Functionalized ParticlesDohn, S. / Sandberg, R. / Svendsen, W. / Boisen, A. et al. | 2005
- 640
-
Fully integrated CMOS resonant cantilever sensor for biochemical detection in liquid environmentsVancura, C. / Yue Li, / Kirstem, K.-U. / Josse, F. / Hierlemann, A. / Lichtenberg, J. et al. | 2005
- 640
-
2E4.47 Fully Integrated CMOS Resonant Cantilever Sensor for Biochemical Detection in Liquid EnvironmentsVancura, C. / Li, Y. / Kirstein, K.-U. / Josse, F. / Hierlemann, A. / Lichtenberg, J. et al. | 2005
- 644
-
A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitationYeolho Lee, / Geunbae Lim, / Wonkyu Moon, et al. | 2005
- 644
-
2E4.48 A Piezoelectric Micro-Cantilever Bio-Sensor using the Mass-Microbalancing Technique with Self-ExcitationLee, Y. / Lim, G. / Moon, W. et al. | 2005
- 648
-
First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers rowBelaubre, P. / Pourciel, J.-B. / Saya, D. / Leichle, T. / Mathieu, F. / Nicu, L. / Bergaud, C. et al. | 2005
- 648
-
2E4.49 First Step Towards a Fully Automated Trim Control for Liquid Deposition Device at the Microscale using Piezoresistive Cantilevers RowBelaubre, P. / Pourciel, J.-B. / Saya, D. / Leichle, T. / Mathieu, F. / Nicu, L. / Bergaud, C. et al. | 2005
- 652
-
2E4.50 Micro Valves Using Nanoparticle-Based Giant Electrorheological FluidNiu, X. / Wen, W. / Lee, Y.-K. et al. | 2005
- 652
-
Micro valves using nanoparticle-based giant electrorheological fluidXize Niu, / Weijia Wen, / Yi-Kuen Lee, et al. | 2005
- 656
-
Buckled-type valves integrated by parylene micro-tubesJiun-Min Wang, / Kuan-Chun Liu, / Kai-Chung Ko, / Lung-Jieh Yang, / Wen-Pin Shih, et al. | 2005
- 656
-
2E4.51 Buckeld-Type Valves Integrated by Parylene Micro-TubesWang, J.-M. / Liu, K.-C. / Ko, K.-C. / Yang, L.-J. / Shih, W.-P. et al. | 2005
- 660
-
A capillary system with thermal-bubble-actuated 1/spl times/N micro flow switch via time-sequence power control for continuous liquid handlingChih-Ming Cheng, / Cheng-Hsien Liu, et al. | 2005
- 660
-
2E4.52 A Capillary System with Thermal-Bubble-Actuated 1xN Micro Flow Switch via Time-Sequence Power Ontrol for Continuous Liquid HandlingCheng, C.-M. / Liu, C.-H. et al. | 2005
- 664
-
2E4.53 Thermopneumatic-Actuated PDMS Microvalve and Micropump Integrated with the Same Fabrication ProcessYoo, J.-C. / Moon, M.-C. / Kang, C. J. / Kim, Y.-S. et al. | 2005
- 664
-
Thermopneumatic-actuated PDMS microvalve and micropump integrated with the same fabrication processJong-Chul Yoo, / Min-Chul Moon, / Kang, C.J. / Yong-Sang Kim, et al. | 2005
- 668
-
A micro diaphragm air pump for air supply of micro fuel cellXing Yang, / Zhaoying Zhou, / Xiongying Ye, et al. | 2005
- 668
-
2E4.54 A Micro Diaphragm Air Pump for Air Supply of Micro Fuel CellYang, X. / Zhou, Z. / Ye, X. et al. | 2005
- 672
-
A low temperature co-fired ceramic solid propellant microthruster for micropropulsion applicationsKaili Zhang, / Siaw Kiang Chou, / Ang, S.S. et al. | 2005
- 672
-
2E4.55 A Low Temperature Co-Fired Ceramic Solid Propellant Microthruster for Micropropulsion ApplicationsZhang, K. / Chou, S. K. / Ang, S. S. et al. | 2005
- 676
-
Micromachined array microjet for inhalation drug therapyJunhua Zhu, / Zhaoying Zhou, / Yanying Feng, / Dong Lin, / Guibing Du, et al. | 2005
- 676
-
2E4.56 Micromachined Array Microjet for Inhalation Drug TherapyZhu, J. / Zhou, Z. / Feng, Y. / Lin, D. / Du, G. et al. | 2005
- 680
-
Foxtail actuatorsMita, M. / Kakushima, K. / Ataka, M. / Toshiyoshi, H. / Fujita, H. et al. | 2005
- 680
-
2E4.57 Foxtail ActuatorsMita, M. / Kakushima, K. / Ataka, M. / Toshiyoshi, H. / Fujita, H. et al. | 2005
- 684
-
Out of plane motion of assembled microstructures using a single-mask SOI processLast, M. / Subramaniam, V. / Pister, K.S.J. et al. | 2005
- 684
-
2E4.58 Out of Plane Motion of Assembled Microstructures using a Singlemask SOI ProcessLast, M. / Subramaniam, V. / Pister, K. S. J. et al. | 2005
- 688
-
Resonant drive for stabilizing parallel-plate actuators beyond the pull-in pointCagdaser, B. / Boser, B.E. et al. | 2005
- 688
-
2E4.59 Resonant Drive for Stabilizing Parallel-Plate Actuators Beyond the Pull-in PointCagdaser, B. / Boser, B. E. et al. | 2005
- 693
-
2E4.60 A Microball-Bearing-Supported Linear Electrostatic Micromotor with Benzocyclobutene Polymer Insulating LayersModafe, A. / Ghalichechian, N. / Frey, A. / Lang, J. H. / Ghodssi, R. et al. | 2005
- 693
-
A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layersModafel, A. / Ghalichechian, N. / Frey, A. / Lang, J.H. / Ghodssi, R. et al. | 2005
- 697
-
2E4.61 2-D Scanning Mirror using Plastically Deformed Angular Vertical Comb Drive ActuatorKim, J. / Christensen, D. / Lin, L. et al. | 2005
- 697
-
2-D scanning mirror using plastically deformed angular vertical comb drive actuatorJongbaeg Kim, / Christensen, D. / Liwei Lin, et al. | 2005
- 701
-
2E4.62 High-Speed Characterization and Mechanical Modeling of Microscale, Axial-Flux, Permanent-Magnet GeneratorsArnold, D. P. / Joung, Y.-H. / Zana, I. / Park, J.-W. / Das, S. / Lang, J. H. / Veazie, D. / Allen, M. G. et al. | 2005
- 701
-
High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generatorsArnold, D.P. / Yeun-Ho Joung, / Zana, I. / Jin-Woo Park, / Das, S. / Lang, J.H. / Veazie, D. / Allen, M.G. et al. | 2005
- 705
-
Electrostatic fringe-field actuation for liquid-metal dropletsSen, P. / Chang-Jin Kim, et al. | 2005
- 705
-
2E4.63 Electrostatic Fringe-Field Actuation for Liquid-Metal DropletsSen, P. / Kim, C.-J. et al. | 2005
- 709
-
High power electrostatic motor with micropatterned electret on shrouded turbineGenda, T. / Tanaka, S. / Esashi, M. et al. | 2005
- 709
-
2E4.64 High Power Electrostatic Motor with Micropatterned Electret on Shrouded TurbineGenda, T. / Tanaka, S. / Esashi, M. et al. | 2005
- 713
-
2E4.65 A Piezoelectric Micro-Actuator with Three Dimensional Structure and its Micro-FabricationGao, P. / Yao, K. / Tang, X. / He, X. / Shannigrahi, S. / Lou, Y. / Zhang, J. / Okada, K. et al. | 2005
- 713
-
A piezoelectric micro-actuator with three dimensional structure and its micro-fabricationPeng Gao, / Kui Yao, / Xiaosong Tang, / Xujiang He, / Shannigrahi, S. / Yaolong Lou, / Jian Zhang, / Okada, K. et al. | 2005
- 717
-
Development of monolithic PZT microstage for the application of ultra high-density data storageXu, H.G. / Okamoto, K. / Zhang, D.Y. / Ono, T. / Esashi, M. et al. | 2005
- 717
-
2E4.66 Development of Monolithic PZT Microstage for the Application of Ultra High-Density Data StorageXu, H. G. / Okamoto, K. / Zhang, D. Y. / Ono, T. / Esashi, M. et al. | 2005
- 721
-
2E4.67 A Cylindrical Micro Ultrasonic Motor using Micro-Machined Piezoelectric VibratorKanda, T. / Makino, A. / Omori, Y. / Suzumori, K. et al. | 2005
- 721
-
A cylindrical micro ultrasonic motor using micro-machined piezoelectric vibratorKanda, T. / Makino, A. / Oomori, Y. / Suzumori, K. et al. | 2005
- 725
-
A self-limited large-displacement-ratio micromechanical amplifierLi, J. / Liu, Z.S. / Lu, C. / Zhang, Q.X. / Liu, A.Q. et al. | 2005
- 725
-
2E4.68 A Self-Limited Large-Displacement-Ratio Micromechanical AmplifierLi, J. / Liu, Z. S. / Lu, C. / Zhang, Q. X. / Liu, A. Q. et al. | 2005
- 729
-
2E4.69 Shape Memory Thin Film Actuator for Holding a Fine Blood VesselSugawara, T. / Hirota, K.-i. / Watanabe, M. / Mineta, T. / Makino, E. / Toh, S. / Shibata, T. et al. | 2005
- 729
-
Shape memory thin film actuator for holding a fine blood vesselSugawara, T. / Hirota, K. / Watanabe, M. / Mineta, T. / Makino, E. / Toh, S. / Shibata, T. et al. | 2005
- 733
-
2E4.70 Ti-Ni SMA Film Actuated Si Cantilever Beams for MEMS Probe CardNamazu, T. / Inoue, S. / Tashiro, Y. / Okamura, Y. / Koterazawa, K. et al. | 2005
- 733
-
Ti-Ni SMA film actuated Si cantilever beams for MEMS probe cardNamazu, T. / Inoue, S. / Tashiro, Y. / Okamura, Y. / Koterazawa, K. et al. | 2005
- 737
-
2E4.71 Design and Fabrication of Multi-Degrees-of-reedom Single Crystal Silicon Moveable Platforms on SOI WaferChu, H.-Y. / Lee, S.-W. / Fang, W. et al. | 2005
- 737
-
Design and fabrication of multi-degrees-of-freedom single crystal silicon moveable platforms on SOI waferHuai-Yuan Chu, / Shih-Wei Lee, / Weileun Fang, et al. | 2005
- 741
-
2E4.72 Fabrication and Testing of Three-Dimensional Stages Providing Displacement of up to 8 mumAndo, Y. et al. | 2005
- 741
-
Fabrication and testing of three-dimensional stages providing displacement of up to 8 /spl mu/mAndo, Y. et al. | 2005
- 745
-
2E4.73 Development of Intelligent Mckibben Actuator with Built-In Soft Conductive Rubber SensorWakimoto, S. / Suzumori, K. / Kanda, T. et al. | 2005
- 745
-
Development of intelligent McKibben actuator with built-in soft conductive rubber sensorWakimoto, S. / Suzumori, K. / Kanda, T. et al. | 2005
- 749
-
2E4.74 A Reversible Thermo-Sensitive Hydrogel Clamper of Locomotive Mechanism in Gastrointestinal TractKim, J. / Kim, B. / Kim, S. / Kim, H. C. / Chun, K. et al. | 2005
- 749
-
A reversible thermo-sensitive hydrogel clamper of locomotive mechanism in gastrointestinal tractJinseok Kim, / Byungkyu Kim, / Soohyun Kim, / Hyeon Cheol Kim, / Kukjin Chun, et al. | 2005
- 753
-
A membrane actuator based on piezo-polymer-composite technology [microvalve application example]Just, E. / Pustan, D. / Woias, P. et al. | 2005
- 753
-
A membrane actuator based on piezo-polymer-composite technologyJust, Elmar / Pustan, David / Woias, Peter et al. | 2005
- 753
-
2E4.75 A Membrane Actuator Based on Piezo-Polymer-Composite TechnologyJust, E. / Pustan, D. / Woias, P. et al. | 2005
- 757
-
Magnetic planar micro generatorRaisigel, H. / Cugat, O. / Delamare, M. / Wiss, O. / Rostaing, H. et al. | 2005
- 757
-
2E4.76 Magnetic Planar Micro GeneratorRaisigel, H. / Cugat, O. / Delamare, J. / Wiss, O. / Rostaing, H. et al. | 2005
- 762
-
A unique reliability data point: the start-stop operation of a polysilicon micromotor at the eight year markIzad, A. / Rajgopal, S. / Mehregany, M. et al. | 2005
- 762
-
2E4.77 A Unique Reliability Data Point: The Start-Stop Operation of a Polysilicon Micromotor at the Eight Year MarkIzad, A. / Rajgopal, S. / Mehregany, M. et al. | 2005
- 764
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Analysis and modeling of curvature in copper-based MEMS structures fabricated using CMOS interconnect technologyMarie-Ange Eyoum, / Hoivik, N. / Jahnes, C. / Cotte, J. / Xiao-Hu Liu, et al. | 2005
- 764
-
2E4.78 Analysis and Modeling of Curvature in Copper-Based MEMS Structures Fabricated using CMOS Interconnect TechnologyEyoum, M.-A. / Hoivik, N. / Jahnes, C. / Cotte, J. / Liu, X.-H. et al. | 2005
- 768
-
2E4.79 Nonlinear Dynamics of Micro Impact Oscillators in High Frequency MEMS Switch ApplicationZhang, W. / Turner, K. L. et al. | 2005
- 768
-
Nonlinear dynamics of micro impact oscillators in high frequency MEMS switch applicationWeibin Zhang, / Wenhua Zhang, / Turner, K.L. et al. | 2005
- 772
-
2E4.80 Air Damping of Microbeam Rsonators in a Low VacuumYe, W. / Hutcherson, S. et al. | 2005
- 772
-
Air damping of microbeam resonators in a low vacuumWenjing Ye, / Hutcherson, S. et al. | 2005
- 776
-
2E4.81 Parametric Model Extraction for MEMS Based on Variational Finite Element TechniquesMehner, J. E. / Schaporin, A. / Kolchuzhin, V. / Doetzel, W. / Gessner, T. et al. | 2005
- 776
-
Parametric model extraction for MEMS based on variational finite element techniquesMehner, J.E. / Schaporin, A. / Kolchuzhin, V. / Doetzel, W. / Gessner, T. et al. | 2005
- 780
-
Design and performance of a microelectromagnetic vibration powered generatorBeeby, S.P. / Tudor, M.J. / Koukharenko, E. / White, N.M. / O'Donnell, T. / Saha, C. / Kulkarni, S. / Roy, S. et al. | 2005
- 780
-
2E4.82 Design and Performance of a Microelectromagnetic Vibrationpowered GeneratorBeeby, S. P. / Tudor, M. J. / Koukharenko, E. / White, N. M. / O Donnell, T. / Saha, C. / Kulkarni, S. / Roy, S. et al. | 2005
- 784
-
Scavenging energy from human body: design of a piezoelectric transducerRenaud, M. / Sterken, T. / Fiorini, P. / Puers, R. / Baert, K. / van Hoof, C. et al. | 2005
- 784
-
2E4.83 Scavenging Energy from Human Body: Design of a Piezoelectric TransducerRenaud, M. / Sterken, T. / Fiorini, P. / Puers, R. / Baert, K. / van Hoof, C. et al. | 2005
- 788
-
Closed form analysis of piezoelectric multilayer bending actuators using constituent equationsBallas, R.G. / Schlaak, H.F. / Schmid, A.J. et al. | 2005
- 788
-
2E4.84 Closed form Analysis of Piezoelectric Multilayer Bending Actuators using Constituent EquationsBallas, R. G. / Schlaak, H. F. / Schmid, A. J. et al. | 2005
- 792
-
Directivity steering principle for biomimicry silicon microphoneOno, N. / Arita, T. / Senjo, Y. / Ando, S. et al. | 2005
- 792
-
2E4.85 Directivity Steering Principle for Biomimicry Silicon MicrophoneOno, N. / Arita, T. / Senjo, Y. / Ando, S. et al. | 2005
- 796
-
Analysis and design of differential electromagnetic transducer for implantable middle ear using finite element methodMin-Kyu Kim, / Young-Ho Yoon, / Hyung-Gyu Lim, / Byung-Seop Song, / Il-Yong Park, / Jin-Ho Cho, et al. | 2005
- 796
-
2E4.86 Analysis and Design of Differential Electromagnetic Transducer for Implantable Middle ear using Finite Element MethodKim, M.-K. / Yoon, Y.-H. / Lim, H.-G. / Song, B.-S. / Park, I.-Y. / Cho, J.-H. et al. | 2005
- 800
-
2E4.87 Improvement of Thermal Response in Temperature Controlled Precise Three-Axis Accelerometer with Stabilized Characteristics over a Wide Temperature RangeLee, K. I. / Takao, H. / Sawada, K. / Seo, H. D. / Ishida, M. et al. | 2005
- 800
-
Improvement of thermal response in temperature controlled precise three-axis accelerometer with stabilized characteristics over a wide temperature rangeKyung Il Lee, / Takao, H. / Sawada, K. / Hee Don Seo, / Ishida, M. et al. | 2005
- 804
-
2E4.88 MEMS Littman Tunable Laser using Curve-Shaped Blazed GratingZhang, X. M. / Cai, H. / Liu, A. Q. / Hao, J. Z. / Tang, D. Y. / Lu, C. et al. | 2005
- 804
-
MEMS Littman tunable laser using curve-shaped blazed gratingZhang, X.M. / Cai, H. / Liu, A.Q. / Hao, J.Z. / Tang, D.Y. / Lu, C. et al. | 2005
- 808
-
2E4.89 The Frequency Design Nozzles Layout of the Piezoelectrically Actuated Micro Droplet Generator Based on a Fluid-Solid Interaction Modal AnalysisFeng, Y. / Zhou, Z. / Du, G. / Zhu, J. et al. | 2005
- 808
-
The frequency design of nozzles layout of the piezoelectrically actuated micro droplet generator based on a fluid-solid interaction modal analysisYanying Feng, / Zhaoying Zhou, / Guibin Du, / Junhua Zhu, et al. | 2005
- 812
-
Evaporation evolution of volatile liquid droplets in nanoliter well arrayChin-Tai Chen, / Fan-Gang Tseng, / Ching-Chang Chieng, et al. | 2005
- 812
-
2E4.90 Evaporation Evolution of Volatile Liquid Droplets in Nanoliter Well ArrayChen, C.-T. / Tseng, F.-G. / Chieng, C.-C. et al. | 2005
- 816
-
Silicon anisotropic wet etching simulation using molecular dynamicsKakinaga, T. / Hatai, A. / Tabata, O. / Isono, Y. et al. | 2005
- 816
-
2E4.91 Silicon Anisotropic Wet Etching Simulation using Molecular DynamicsKakinaga, T. / Hatai, A. / Tabata, O. / Isono, Y. et al. | 2005
- 820
-
2E4.92 Elimination of Stress-Induced Curvature in Microbolometer Focal Plane ArraysHuang, S. / Li, B. / Zhang, X. et al. | 2005
- 820
-
Elimination of stress-induced curvature in microbolometer focal plane arraysShusen Huang, / Biao Li, / Xin Zhang, et al. | 2005
- 824
-
Modifying residual stress and stress gradient in LPCVD Si/sub 3/N/sub 4/ film with ion implantationWendian Shi, / Haixia Zhang, / Shasha Wang, / Guobing Zhang, / Zhihong Li, et al. | 2005
- 824
-
2E4.93 Modifying Residual Stress and Stress Gradient in LPCVD Si~3N~4 Film with Ion ImplantationShi, W. / Zhang, H. / Wang, S. / Zhang, G. / Li, Z. et al. | 2005
- 828
-
Tensile stress determination in silicon nitride membrane by AFM characterizationRollier, A.-S. / Legrand, B. / Deresmes, D. / Lagouge, M. / Collard, D. / Buchaillot, L. et al. | 2005
- 828
-
2E4.94 Tensile Stress Determination in Silicon Nitride Membrane by AFM CharacterizationRollier, A.-S. / Legrand, B. / Deresmes, D. / Lagouge, M. / Collardand, D. / Buchaillot, L. et al. | 2005
- 832
-
2E4.95 Temperature-Dependent Fracture Toughness of Single-crystal-silicon FilmNakao, S. / Ando, T. / Shikida, M. / Sato, K. et al. | 2005